Table Of Content

SENSORS ACTUATORS Et - IER PHYSICAL Sensors and Actuators A 54 (1996) 799-801 Cumulative Author Index of Volumes A52, A53 and A54 Abro, E., 54, 493 Childress, J.R., 53, 256 Gerlach, G., 53, 330; 54, 632 Jansen, H., 54, 552 Ahn, Y., 52, 92 Cho, Y.-H., 54, 579 Giehler, E., 53, 304 Johansen, G.A., 54, 493 Alizadeh-Taheri, B., 54, 606 Chou, B.C.S., 53, 273 Go, J.S., 54, 579 Johansen, I.-R., 53, 349 Ancey, P., 53, 304 Chu, P.B., 52, 216 Gottert, J., 53, 416 Johansson, S., 53, 428 Andle, J.C., 53, 243 Chu, Z., 54, 505 Gottfried-Gottfried, R., 54, 443, Jones, B.E., 52, 99 Annaka, N., 54, 695 Chun, K., 52, 145 601 Josse, F., 53, 243 Anthamatten, O., 52, 46 Chung, S.-W., 54, 464 Greenwood, J., 52, 86 Judy, J.W., 53, 392 Ciarlo, D.R., 54, 755 Greitmann, G., 53, 410 Jun, Y.-S., 54, 468 Baert, K., 53, 325, 423 Cohen, S., 54, 765 Grétillat, M.A., 52, 46 Baettig, R., 52, 46 Comer, J., 54, 777 Grundke, W., 54, 536 Kadar, Z., 52, 151; 53, 299 Barbier, D., 54, 700 Cutkosky, M.R., 54, 511 Grunze, M., 53, 243 Kadota, M., 53, 223 Bart, S.F., 54, 472 Gschwind, M., 53, 304 Kahrizi, M., 53, 278 Bay, J., 53, 232 Dahint, R., 53, 243 Guber, A.E., 53, 361 Kaiser, W.J., 52, 193; 53, 227 Becker, H., 54, 618 Damjanovic, D., 53, 353 Guckel, H., 52, 92; 53, 249, 386 Kalvesten, E., 52, 51 Benecke, W., 54, 574 Daneman, M., 52, 76 Guérin, L., 52, 156 Kan, S.C., 54, 679 Benitez, M.A., 54, 718 Davidson, J.L., 54, 724 Gusmano, G., 52, 161 Kane, B.J., 54, 511 Benrakkad, M.S., 54, 718 de Bree, H.-E., 54, 552 Kang, J.-W., 52, 92 Berenschot, J.W., 54, 669 De Cicco, G., 52, 161 Halene, C., 53, 434 Kang, U.-S., 54, 641 Bergveld, P., 52, 18; 54, 499 De Cooman, M., 53, 261 Han, B.-S., 54, 464 Kang, W.P., 54, 724 Bernstein, R.W., 53, 349; 54, 728 Demartin, M., 53, 353 Han, J., 54, 594 Kasemo, B., 54, 448 Besse, P.-A., 52, 114 De Rooij, N.F., 52, 46; 53, 364; Han, M.-K., 54, 641 Kawahito, S., 54, 612 Bexell, M., 53, 428 54, 530 Hanneborg, A., 54, 728 Kemp, C.J., 54, 523 Bhansali, S., 52, 126 De Vries, P.H.S., 52, 203 Hansen, O., 53, 232 Kenny, T.W., 53, 227 Bianco, A., 52, 161 Dirac, H., 52, 121 Haronian, D., 53, 288 Kerns, D.V., 54, 724 Bienstman, J., 52, 179 Doleschal, W., 54, 536 Hatfield, J.V., 54, 777 Kersjes, R., 54, 563 Bier, W., 53, 361 Douguchi, Y., 53, 223 Hattori, T., 54, 760 Kholkin, A., 53, 398 Bildstein, P., 53, 304 Dutoit, M., 52, 156 He, G., 54, 741 Kiang, M.-H., 52, 76 Binder, J., 54, 574 Heckele, M., 53, 361 Killat, D., 52, 175 Blochwitz, T., 54, 632 Earles, T., 53, 386 Hein, S., 54, 547 Kim, C.-J., 52, 145 Bliickert, A., 52, 81 Edo, M., 54, 733 Herb, W.R., 52, 92; 53, 249 Kim, H., 53, 340 Bossche, A., 52, 151; 53, 299 Eichner, D., 52, 140 Hicks, P.J., 54, 777 Kim, I.-S., 54, 468 Bouwstra, S., 52, 25, 121; 53, Elwenspoek, M., 54, 552 Hierold, C., 54, 659 Kim, S.-T., 54, 468 232 Eng, T.T.H., 54, 679 Hirai, Y., 53, 223 Kim, T.-Y., 54, 468 Brody, J.P., 54, 704 Enoksson, P., 54, 558 Hok, B., 52, 81, 211 Kim, Y.-K., 54, 464 Brooks, K.G., 54, 530 Ensell, G., 53, 345 Holleck, H., 53, 434 Kimura, T., 53, 340 Brown, J., 52, 132 Ericson, F., 54, 674 Honer, K.A., 52, 12 Kindt, W., 53, 299 Bu, J.-U., 54, 468 Esashi, M., 54, 646 Horning, R.D., 53, 249 Kinser, D.L., 54, 724 Bucur, R.V., 53, 371 Esteve, J., 54, 718 Howe, R.T., 54, 472 Kirsten, M., 54, 674 Budde, W., 54, 443, 601 Hiibel, A., 54, 601 Kittilsland, G., 54, 728 Burger, G.J., 54, 669 Feit, K., 53, 434 Huber, B., 53, 284 Klaassen, E., 54, 709 Burns, D.W., 52, 92; 53, 249 Field, L.A., 53, 311 Huijsing, J.H., 52, 198 Klaassen, E.H., 52, 33, 132 Burriesci, D.L., 53, 311 Fischer, M., 52, 140 Hunklinger, S., 54, 618 Kleimann, P., 54, 700 Burstein, A., 52, 193 Fluitman, J.H.J., 54, 669 Buser, R.A., 53, 410 Folkmer, B., 54, 488 Ichikawa, N., 54, 714 Klein, J., 53, 386 Fonseca, L., 54, 718 Idogaki, T., 54, 760 Knight, R.T., 54, 606 Cabuz, C., 54, 646 Forster, F.K., 54, 704 Ikeda, M., 53, 223 Ko, P.K., 54, 636 Carlsson, J.O., 53, 371 Fricke, J., 54, 651 Imai, S., 54, 669 Kobayashi, A., 54, 457 Chan, P.C.H., 54, 482, 636 Fujita, T., 54, 568 Ishida, M., 53, 267, 340 Kobayashi, T., 54, 646 Chau, K.H.-L., 54, 472 Fung, S.K.H., 54, 482 Itoh, H., 54, 622 Kohashi, M., 54, 622 Chen, K., 54, 741 Itoh, T., 54, 477 Kohl, M., 53, 416, 434 Chen, Y.-M., 53, 273 Gabrielson, T.B., 53, 227 Iwakiri, M., 53, 267 Kohler, U., 53, 361 Cheshmehdoost, A., 52, 99 Gagnaire, H., 54, 589 Kohli, M., 53, 398 Cheung, P.W., 54, 482 Gardner, J.W., 52, 86 Jaecklin, V.P., 52, 46 Koide, A., 54, 714 Chévrier, J.B., 53, 325 Gehner, A., 54, 536 Jahne, R., 54, 443, 601 Konishi, Y., 54, 568 Elsevier Science S.A. 800 Cumulative Author Index of Volumes A52, A53 and A54 / Sensors and Actuators A 54 (1996) 799-801 Kornilov, V.M., 53, 319 Minami, K., 54, 646 Qiu, L., 54, 547 Sood, D.K., 52, 126 Korthorst, T., 54, 552 Mitchell, A.W., 53, 237 Quandt, E., 53, 434 Spangler, L.C., 54, 523 Kovacs, G.T.A., 52, 12, 33, 132, Mitsui, H., 54, 695 Spiegel, E., 54, 563 187; 54, 511 Mizuno, J., 54, 646 Spooren, R., 53, 349 Racine, G.-A., 54, 530 Kozlowski, F., 53, 284; 54, 659 Mohr, J., 53, 416 Steiner, P., 53, 284; 54, 488 Rangsten, P., 52, 211 Krause, P., 53, 405 Mokwa, W., 54, 563 Reay, R.J., 52, 33, 187 Steinsland, E., 54, 728 Kreutzer, M., 54, 746 Mollinger, J., 52, 151; 53, 299 Stemme, E., 54, 558 Regtien, P.P.L., 52, 103 Krulevitch, P.A., 54, 755 Montesperelli, G., 52, 161 Stemme, G., 52, 51; 54, 558 Renaud, Ph., 53, 364; 54, 530 Kruusing, A., 52, 59 Morante, J.R., 54, 674, 718 Steyaert, M., 52, 179 Reynolds, J.K., 53, 227 Kiick, H., 54, 443, 536, 601 Morten, B., 52, 161 Riethmiiller, W., 54, 674 Storgaard-Larsen, T., 52, 25 Kwak, B.M., 54, 579 Miillenborn, M., 52, 121 Robrish, P.R., 53, 311 Storment, C., 52, 132 Miiller, M., 54, 601 Strobel, R., 52, 140 Rockstad, H.K., 53, 227 Lachinov, A.N., 53, 319 Muller, R.S., 52, 76; 53, 392 Rodahl, M., 54, 448 Suga, T., 54, 477 Lal, A., 54, 542 Muntz, E.P., 54, 765 Sussiau, M., 53, 256 Romanowicz, B., 54, 530 Lammerink, T.S.J., 54, 552, 669 Muralt, P., 53, 398 Ronot-Trioli, C., 54, 589 Sutoh, M., 54, 612 Lander, R., 54, 594 Rosengren, L., 52, 211 Suzuki, M., 54, 714 Landsberger, L.M., 53, 278 Rossberg, D., 54, 793 Suzuki, S., 54, 714 Lang, W., 53, 284; 54, 488, 659 Nagasawa, H., 54, 695 Rothe, M., 54, 663 Lange, P., 54, 674 Nagele, M., 52, 140 Roumenin, Ch.S., 54, 584 Tabata, O., 53, 335 Lapadatu, D., 53, 261 Nakagomi, S., 52, 110 Ruby, R.C., 53, 311 Tachiki, M.L., 52, 216 Lau, J., 54, 636 Nakamura, K., 54, 626 Tadokoro, Y., 54, 612 Lau, K.Y., 52, 76 Nakamura, T., 53, 267, 340 Le Berre, M., 54, 700 Nakazawa, H., 54, 733 Sachot, R., 52, 156 Tait, R.N., 53, 237 Lee, A.P., 54, 755 Nakazawa, T., 54, 714 Sager, K., 53, 330 Takumi, T., 54, 626 Lee, J.D., 52, 145 Nakladal, A., 53, 330 Saif, M.T.A., 52, 65 Tan, S., 54, 741 Lee, S.-K., 54, 641 Nanto, H., 53, 223 Samitier, J., 54, 718 Tanaka, H., 53, 267 Sandberg, G., 52, 81 Tang, T.K., 53, 227 Lee, S.S., 52, 41 Nasu, S., 53, 223 Sandmo, H., 54, 728 Tang, Z., 54, 482 Lehew, S., 54, 755 Neda, T., 54, 626 Leistiko, O., 52, 25 Nelson, P.R., 52, 216 Sarro, P.M., 52, 103; 54, 505 Testorf, M., 53, 353 Sasayama, T., 54, 714 Thornell, G., 53, 428 Lerch, Ph., 54, 530 Nese, M., 53, 349; 54, 728 Leussink, P., 54, 552 Nguyen, C.T., 54, 636 Satoh, H., 54, 612 Tien, N.C., 52, 76 Lewis, S.R., 54, 472 Nguyen Van Dau, F., 53, 256 Sauer, B., 54, 443 Tilmans, H.A.C., 52, 179 Schaer, M.A., 52, 156 Tohyama, O., 54, 622 Li, Q., 54, 724 Ning, Y.B., 53, 237 Liebscher, F., 54, 563 Nishishita, J., 53, 223 Scheiter, Th., 54, 659 Tombesi, P., 52, 161 SchloBmacher, P., 53, 434 Tominaga, T., 54, 760 Lindmair, N., 54, 659 Noetzel, J., 54, 574 Lisec, T., 54, 746 Northrup, M.A., 54, 755 Schmitz, R., 52, 175 Tgnnesen, T., 54, 574 Loéchel, B., 54, 663 Nottmeyer, K., 54, 646 Schéllhorn, C., 52, 140 Trevino, J., 54, 755 Lofdahl, L., 52, 51 Noworolski, J.M., 52, 132; 54, Schroth, A., 53, 330; 54, 632 Trouillet, A., 54, 589 Logan, J., 52, 132; 54, 709 709 Schubert, A., 54, 547 Tsuchitani, S., 54, 714 Lomas, D.G., 54, 777 Schuhl, A., 53, 256 Lorenz, H., 53, 364 Schumacher, J., 53, 243 Ueda, K., 54, 517 Luginbuhl, Ph., 54, 530 Obermeier, E., 53, 405; 54, 547, Schuylenbergh, K.V., 52, | Ulbricht, S., 54, 443 Luthier, R., 53, 364 651 Schweitz, J.-A., 53, 428; 54, 674, Ulrich, J., 53, 379 Ohnstein, T., 53, 386 718 Umeda, A., 54, 517 MacDonald, N.C., 52, 65; 53, Ohya, N., 54, 760 Seltmann, R., 54, 536 288 Ohyama, S., 54, 457 Semmache, B., 54, 700 Vancauwenberghe, O., 53, 304 Maciossek, A., 54, 663 Olthuis, W., 52, 18; 54, 499 Senda, K., 54, 760 Van Gerwen, P., 53, 325, 423 Mader, G., 54, 574 Osborn, T.D., 54, 704 Setiadi, D., §2, 103 Veillas, C., 54, 589 Maeda, M., 54, 568 Ou-Yang, M., 53, 273 Setter, N., 53, 353; 54, 530 Verhoeven, H.-J., 52, 198 Maeder, T., 53, 398 Shie, J.-S., 53, 273 Vetelino, J.F., 53, 243 Maenaka, K., 54, 568 Shim, Y.-C., 54, 468 Paranjape, M., 53, 278 Vieider, C., 52, 51 Maluf, N.I., 52, 12, 132, 187; 54, Shimizu, S., 52, 110 709 Paratte, L., 53, 364 Shin, J.-W., 54, 464 Vogel, P., 52, 46 Volanschi, A., 52, 18 Manoli, Y., 54, 563 Park, K., 54, 579 Shoki, T., 54, 695 Von Schickfus, M., 54, 618 Marcheselli, R.G., 54, 472 Passeraub, P.A., 52, 114 Short, J., 53, 304 Martinez, E., 52, 12 Paufler, J., 54, 536 Shulman, H.S., 53, 353 Marxer, C., 52, 46 Pedersen, M., 54, 499 Simon, P.L.C., 52, 203 Wagner, B., 54, 746 Masoero, A., 52, 161 Peeters, E.J.E.A., 52, 179 Sin, J.K.O., 54, 482 Wang, W., 54, 741 Masure, E., 53, 423 Petersen, J.W., 52, 121 Sin, S.S.Y., 54, 679 Watanabe, Y., 54, 733 Matsumoto, Y., 53, 267 Petersen, K., 52, 132; 54, 709 Skokan, A., 53, 434 Wehl, W., 53, 405 McCulley, W., 52, 132 Pinard, P., 54, 700 Skrobanek, K.D., 53, 434 Welham, C.J., 52, 86 Mecea, V.M., 53, 371 Pister, K.S.J., 52, 216 Slater, T., 53, 325, 423 Wende, U., 54, 443 Melcher, R., 54, 536 Popovic, R.S., 52, 114 Smith, L., 52, 211 Wenk, B., 54, 674 Menz, W., 54, 785 Preud’homme, F., 53, 423 Smith, R.L., 54, 594, 606 White, R.M., 52, 41; 54, 542 Mertens, R., 53, 325 Prudenziati, M., 52, 161 Smulders, E.J.T., 54, 669 Williams, C.B., 52, 8 Middelhoek, S., 52, 203; 54, 505 Puers, R., 52, 1, 169, 179; 53, Sdderkvist, J., 54, 690 Windbracke, W., 54, 663 Mikli, V., 52, 59 261 Solgaard, O., 52, 76 Wong, G.K.L., 54, 679 Cumulative Author Index of Volumes A52, A53 and A54 / Sensors and Actuators A 54 (1996) 799-801 Xu, J.F., 54, 724 Yamamoto, T., 52, 110 Ye, X.Y., 54, 750 Zhao, Y., 54, 472 Yang, E.H., 54, 684 Yee, Y., 52, 145 Zherebov, A.Yu., 53, 319 Yang, S.S., 54, 684 Yonezawa, E., 54, 733 Zhou, Z.Y., 54, 750 Yager, P., 54, 704 Yang, Y., 54, 750 Zimmer, G., 54, 536 Yamaguchi, Y., 54, 695 Yao, J., 54, 750 Zengerle, R., 53, 379 Zook, J.D., 52, 92; 53, 249, 386 Yamamoto, K., 54, 622 Yates, R.B., 52, 8 Zhang, J.H., 54, 750 Zwicker, G., 54, 674 SENSORS ACTUATORS AF IER PHYSICAL Sensors and Actuators A 54 (1996) 803-814 Cumulative Subject Index of Volumes A52, A53 and A54 Acceleration switches Anisotropic etching snapping microswitches with adjustable acceleration threshold, 54, 579 diode-based thermal r.m.s. converter with on-chip circuitry fabricated Accelerometers using CMOS technology, 52, 33 opto-mechanical accelerometer based on strain sensing by a Bragg pH-controlled TMAH etchants for silicon micromachining, 53, 335 grating in a planar waveguide, 52, 25 alignment of mask patterns to crystal orientation, 53, 345 a miniature, high-sensitivity, electron tunneling accelerometer, 53, 227 tactile microgripper for automated handling of microparts, 53, 410 sealed-cavity resonant microbeam accelerometer, 53, 249 Anodic bonding an integrated force-balanced capacitive accelerometer for low-g aluminium press-on contacts for glass-to-silicon anodic bonding, 52, applications, 54, 472 151 improvement of novel NRLM method for accelerometer characteriza- a fiber-optic silicon pressure sensor for ultra-thin catheters, 54, 622 tion to the range 10? ms” ?, 54, 517 ANSYS/FLOTRAN ISAAC: integrated silicon automotive accelerometer, 54, 523 micro gas-flow sensor with integrated heat sink and flow guide, 54, 547 quasianalog accelerometer using microswitch array, 54, 574 Arrays fabrication and characterization of a silicon capacitive structure for quasianalog accelerometer using microswitch array, 54, 574 simultaneous detection of acceleration and angular rate, 54, 646 Autocalibration an accelerometer made in a two-layer surface-micromachining autocalibration of silicon Hall devices, 52, 203 technology, 54, 651 Automotive sensors highly reliable silicon micromachined physical sensors in mass ISAAC: integrated silicon automotive accelerometer, 54, 523 production, 54, 714 Acoustic flow the y-flown: a novel device for measuring acoustic flows, 54, 552 Batteries Acoustic plate modes analysis of a micro-electric generator for microsystems, 52, 8 on the mass sensitivity of acoustic-plate-mode sensors, 53, 243 Bimorphs Acoustic sensors snapping microswitches with adjustable acceleration threshold, 54, 579 a miniature, high-sensitivity, electron tunneling accelerometer, 53, Biotelemetry 227 self-tuning inductive powering for implantable telemetric monitoring Active-matrix addressing systems, 52, | deformable micromirror devices as phase-modulating high-resolution Blood flow light valves, 54, 536 an invasive catheter flow sensor with on-chip CMOS readout Active measurement electronics for the on-line determination of blood flow, 54, 563 local positioning system by means of enclosing signal field, 54, 457 Boron Actuated micromirrors electrical and piezoresistive characterization of boron-doped LPCVD surface-micromachined mirrors for laser-beam positioning, 52, 76 polycrystalline silicon under rapid thermal annealing, 54, 700 Actuators Bragg gratings opto-mechanical accelerometer based on strain sensing by a Bragg autocalibration of silicon Hall devices, 52, 203 grating in a planar waveguide, 52, 25 electromagnetic linear actuators with inductive position sensing, 53, Buckling 386 a millinewton microloading device, 52, 65 Aliasing Bulk micromachining a reflected-light receiver with 2 nA sensitivity using CDS and separate silicon fusion bonding and deep reactive ion etching: a new technology low-pass filtering of the input signal at each clock-phase, 52, 175 for microstructures, 52, 132 Alumina silicon three-axial tactile sensor, 54, 505 a new etching method for single-crystal Al,O, film on Si using Si ion analysis of a highly sensitive silicon gyroscope with cantilever beam as implantation, 53, 340 vibrating mass, 54, 568 Aluminium fabrication and characterization of a silicon capacitive structure for aluminium press-on contacts for glass-to-silicon anodic bonding, 52, simultaneous detection of acceleration and angular rate, 54, 646 15] pH-controlled TMAH etchants for silicon micromachining, 53, 335 Angular rate sensors Calibration analysis of a highly sensitive silicon gyroscope with cantilever beam as autocalibration of silicon Hall devices, 52, 203 vibrating mass, 54, 568 Cantilevers fabrication and characterization of a silicon capacitive structure for the quantitative determination of the residual stress profile in oxidized simultaneous detection of acceleration and angular rate, 54, 646 p~ silicon films, 54, 684 Elsevier Science S.A. 804 Cumulative Subject Index of Volumes A52, A5S3 and A54 / Sensors and Actuators A 54 (1996) 803-814 Capacitance—voltage converters Coupling a capacitive accelerometer using SDB-—SOI structure, 53, 267 simulation of a complex sensor system using coupled simulation Capacitive programs, 54, 632 design of a silicon microphone with differential read-out of a sealed 3C silicon carbide films double parallel-plate capacitor, 53, 232 properties of heteroepitaxial 3C-SiC films grown by LPCVD, 54, 695 Capacitive accelerometers 3C silicon carbide membranes a double-sided capacitive miniaturized accelerometer based on properties of heteroepitaxial 3C-SiC films grown by LPCVD, 54, 695 photovoltaic etch-stop technique, 53, 261 a capacitive accelerometer using SDB-—SOI structure, 53, 267 Damping control Capacitive microphones a capacitive accelerometer using SDB-—SOI structure, 53, 267 fabrication of a silicon micromachined capacitive microphone using a Deep reactive ion etching dry-etch process, 53, 237 silicon fusion bonding and deep reactive ion etching: a new technology Capacitive principle for microstructures, 52, 132 silicon three-axial tactile sensor, 54, 505 Deflection Capacitive sensors characterizing deflectable microstructures via a high-resolution laser- an integrated force-balanced capacitive accelerometer for low-g based measurement system, 52, 12 applications, 54, 472 Deformable viscoelastic layers Capacitors deformable micromirror devices as phase-modulating high-resolution a millinewton microloading device, 52, 65 light valves, 54, 536 Capillarity a millinewton microloading device, 52, 65 Delta—sigma modulation Carrier confinement ISAAC: integrated silicon automotive accelerometer, 54, 523 a CMOS-compatible 2-D vertical Hall magnetic-field sensor using Density active carrier confinement and post-process micromachining, 53, silicon tube structures for a fluid-density sensor, 54, 558 278 Devices Catheters a millinewton microloading device, 52, 65 an invasive catheter flow sensor with on-chip CMOS readout Diaphragms electronics for the on-line determination of blood flow, 54, 563 electrostatically excited diaphragm driven as a loudspeaker, 52, 211 a fiber-optic silicon pressure sensor for ultra-thin catheters, 54, 622 Differential SOS structures CdZnTe detectors 2D magnetodiode sensors based on SOS technology, 54, 584 a new CdZnTe detector system for low-energy gamma-ray Domains measurement, 54, 493 instabilities in the piezoelectric properties of ferroelectric ceramics, 53, Ceramics 353 instabilities in the piezoelectric properties of ferroelectric ceramics, 53, Dry etching 353 fabrication of a silicon micromachined capacitive microphone using a Charge injection dry-etch process, 53, 237 mixed analog—digital highly sensitive sensor interface circuit for low- Dynamic operation mode cost microsensors, 52, 193 self-excited force-sensing microcantilevers with piezoelectric thin CMOS films for dynamic scanning force microscopy, 54, 477 a CMOS-compatible 2-D vertical Hall magnetic-field sensor using Dynamic range active carrier confinement and post-process micromachining, 53, a polysilicon flow sensor for gas flow meters, 54, 626 278 Dynamic surface tension a miniaturized magnetic-field sensor system consisting of a planar gas bubbles electrolytically generated at microcavity electrodes used fluxgate sensor and a CMOS readout circuitry, 54, 443 for the measurement of the dynamic surface tension in liquids, 52, CMOS-compatible traction stress sensor for use in high-resolution 18 tactile imaging, 54, 511 CMOS technology a thermoelectric infrared radiation sensor with monolithically Elastic magnets integrated amplifier stage and temperature sensor, 54, 601 flow sensing and pumping using flexible permanent magnet beams, 52, Comb-drive microactuators 59 surface-micromachined mirrors for laser-beam positioning, 52, 76 Elastic waves Compressional waves improvement of novel NRLM method for accelerometer characteriza- extensions of the quartz-crystal-microbalance technique, 53, 371 tion to the range 10? ms~?, 54, 517 Condensation Electrical levitation microsensor for the preventive detection of water condensation: electrical levitation for micromotors, microgyroscopes and micro- operating principle and interface electronics, 53, 304 accelerometers, 54, 741 Conductivity Electrical properties new effects in electroactive polymers: new basics for sensors, 53, 319 properties of heteroepitaxial 3C-SiC films grown by LPCVD, 54, 695 Constant-temperature circuits electrical and piezoresistive characterization of boron-doped LPCVD a sensitive Pirani vacuum sensor and the electrothermal SPICE polycrystalline silicon under rapid thermal annealing, 54, 700 modelling, 53, 273 Electric field Contacting new effects in electroactive polymers: new basics for sensors, 53, 319 high-resolution shadow-mask patterning in deep holes and its Electrochemical etch stop application to an electrical wafer feed-through, 54, 669 diode-based thermal r.m.s. converter with on-chip circuitry fabricated Control using CMOS technology, 52, 33 characterizing deflectable microstructures via a high-resolution laser- fabrication of SOI wafers with buried cavities using silicon fusion based measurement system, 52, 12 bonding and electrochemical etchback, 54, 709 Cumulative Subject Index of Volumes A52, A53 and A54 / Sensors and Actuators A 54 (1996) 803-814 Electrode arrays Fatigue property an active, microfabricated, scalp electrode array for EEG recording, determination of the mechanical properties of microstructures, 54, 750 54, 606 Feedback an integrated multichannel charged-particle sensing system, 54, 777 design of a silicon microphone with differential read-out of a sealed Electrodeposition double parallel-plate capacitor, 53, 232 microcoils fabricated by UV depth lithography and galvanoplating, 54, Feedback method 663 mixed analog—digital highly sensitive sensor interface circuit for low- Electroencephalograms cost microsensors, 52, 193 an active, microfabricated, scalp electrode array for EEG recording, Feed-throughs 54, 606 high-resolution shadow-mask patterning in deep holes and its Electroless Cu plating application to an electrical wafer feed-through, 54, 669 selective seeding of copper films on polyimide-patterned silicon FEM-modelling substrate, using ion implantation, 52, 126 design of a silicon microphone with differential read-out of a sealed Electrolysis double parallel-plate capacitor, 53, 232 gas bubbles electrolytically generated at microcavity electrodes used FEM simulations for the measurement of the dynamic surface tension in liquids, 52, static and dynamic flow simulation of a KOH-etched microvalve using 18 the finite-element method, 53, 379 Electromagnetic microsystems micro gas-flow sensor with integrated heat sink and flow guide, 54, scaling down an inductive proximity sensor, 52, 114 547 Electromechanical simulation Ferroelectric on the mechanical behaviour of thin perforated plates and their instabilities in the piezoelectric properties of ferroelectric ceramics, 53, application in silicon condenser microphones, 54, 499 353 Electron emission Ferromagnetic materials a novel low-field electron-emission polycrystalline diamond microtip array for sensor applications, 54, 724 magnetic sensors for nanotesla detection using planar Hall effect, 53, Electronic calibration 256 ISAAC: integrated silicon automotive accelerometer, 54, 523 Ferromagnetic thick films Electron spectrometers preparation and properties of new thick-film magnetoresistive an integrated multichannel charged-particle sensing system, 54, 777 materials, 52, 161 Electron tunneling Fiber-optic sensors a miniature, high-sensitivity, electron tunneling accelerometer, 53, 227 optically excited self-resonant microbeams, 52, 92 Electroplating a fiber-optic silicon pressure sensor for ultra-thin catheters, 54, 622 a new fabrication process of a planar coil using photosensitive Figure of merit polyimide and electroplating, 54, 733 thin-film boron-doped polycrystalline silicon794—germaniuomq for Electrostatic thermopiles, 53, 325 thermomechanical characteristics of a thermal switch, 53, 423 Filters Electrostatic actuation a reflected-light receiver with 2 nA sensitivity using CDS and separate electrostatically excited diaphragm driven as a loudspeaker, 52, 211 low-pass filtering of the input signal at each clock-phase, 52, 175 Electrostatic actuators Finite differences high-voltage devices and circuits fabricated using foundry CMOS for on the mechanical behaviour of thin perforated plates and their use with electrostatic MEM actuators, 52, 187 application in silicon condenser microphones, 54, 499 Electrostatic excitation and detection Finite element an oscillator circuit for electrostatically driven silicon-based one-port a millinewton microloading device, 52, 65 resonators, 52, 179 Finite-element analysis Electrostatic microactuators thermal analysis and design of a micro-hotplate for integrated verification of the micromechanical characteristics of electrostatic gas-sensor applications, 54, 482 linear actuators, 53, 416 Finite-element method Electrostatic microgyroscopes silicon three-axial tactile sensor, 54, 505 electrical levitation for micromotors, microgyroscopes and micro- simulation of a complex sensor system using coupled simulation accelerometers, 54, 741 programs, 54, 632 Electrothermal SPICE Flow guides a sensitive Pirani vacuum sensor and the electrothermal SPICE micro gas-flow sensor with integrated heat sink and flow guide, 54, modelling, 53, 273 547 Emitter injection modulation Flow sensors highly sensitive magnetotransistor with combined phenomena of Hall an integrated pressure—flow sensor for correlation measurements in effect and emitter injection modulation operated in the saturation turbulent gas flows, 52, 51 mode, 54, 641 flow sensing and pumping using flexible permanent magnet beams, 52, Equivalent circuits 59 an oscillator circuit for electrostatically driven silicon-based one-port a non-contacting sensor system for respiratory air flow detection, 52, resonators, 52, 179 Etching 81 a new etching method for single-crystal Al,O, film on Si using Si ion design of integrated thermal flow sensors using thermal sigma-delta implantation, 53, 340 modulation, 52, 198 boron etch-stop in TMAH solutions, 54, 728 a polysilicon flow sensor for gas flow meters, 54, 626 Etch-stop Fluid filters boron etch-stop in TMAH solutions, 54, 728 a planar microfabricated fluid filter, 54, 704 806 Cumulative Subject Index of Volumes A52, AS3 and A54 / Sensors and Actuators A 54 (1996) 803-814 Fluid flow simulation Hall devices static and dynamic flow simulation of a KOH-etched microvalve using autocalibration of silicon Hall devices, 52, 203 the finite-element method, 53, 379 a CMOS-compatible 2-D vertical Hall magnetic-field sensor using Fluidic components active carrier confinement and post-process micromachining, 53, a bistable pneumatic microswitch for driving fluidic components, 54, 278 746 Hall effect Fluid pumps highly sensitive magnetotransistor with combined phenomena of Hall flow sensing and pumping using flexible permanent magnet beams, 52, effect and emitter injection modulation operated in the saturation 59 mode, 54, 641 Fluids Hard-spring effect silicon tube structures for a fluid-density sensor, 54, 558 an oscillator circuit for electrostatically driven silicon-based one-port Fluxgates resonators, 52, 179 a miniaturized magnetic-field sensor system consisting of a planar Heat sinks fluxgate sensor and a CMOS readout circuitry, 54, 443 micro gas-flow sensor with integrated heat sink and flow guide, 54, Fluxgate sensors 547 high-resolution micro-fluxgate sensing elements using closely coupled Hermeticity coil structures, 54, 612 new method for testing hermeticity of silicon sensor structures, 53, 349 Force High-aspect-ratio microstructures design and performance characteristics of an integrated high-capacity silicon fusion bonding and deep reactive ion etching: a new technology DETF-based force sensor, 52, 99 for microstructures, 52, 132 Force-balanced sensors High-energy particle detectors an integrated force-balanced capacitive accelerometer for low-g microfabricated high-energy particle detector, 54, 594 applications, 54, 472 High resolution Force-balancing CMOS-compatible traction stress sensor for use in high-resolution design of a silicon microphone with differential read-out of a sealed tactile imaging, 54, 511 double parallel-plate capacitor, 53, 232 High temperature Force measurements extensions of the quartz-crystal-microbalance technique, 53, 371 verification of the micromechanical characteristics of electrostatic High-voltage devices linear actuators, 53, 416 high-voltage devices and circuits fabricated using foundry CMOS for Frequency response use with electrostatic MEM actuators, 52, 187 improvement of novel NRLM method for accelerometer characteriza- Horns tion to the range 10? ms~, 54, 517 silicon microfabricated horns for power ultrasonics, 54, 542 Frequency-signature sensors Humidity a microelectromechanics-based frequency-signature sensor, 53, microsensor for the preventive detection of water condensation: 288 operating principle and interface electronics, 53, 304 Friction humidity-dependent mechanical properties of polyimide films and their on the measurement of thin liquid overlayers with the quartz-crystal use for IC-compatible humidity sensors, 53, 330 microbalance, 54, 448 Hybrids and interconnection linking sensors with telemetry: impact on the system design, 52, 169 Hydrogen detection Gallium arsenide extensions of the quartz-crystal-microbalance technique, 53, 371 photodetection and light emission of GaAs negative-resistance Hydrophones switching device, 52, 110 a miniature, high-sensitivity, electron tunneling accelerometer, 53, 227 Gamma-ray densitometry a new CdZnTe detector system for low-energy gamma-ray measurement, 54, 493 Imaging sensors Gamma-ray measurement a novel image storage sensor using photostimulated luminescence in a new CdZnTe detector system for low-energy gamma-ray SrS:Eu,Sm phosphor for electromagnetic waves such as X-rays, measurement, 54, 493 UV-rays and visible light, 53, 223 Gas bubbles Impact gas bubbles electrolytically generated at microcavity electrodes used improvement of novel NRLM method for accelerometer characteriza- for the measurement of the dynamic surface tension in liquids, 52, tion to the range 107 ms~?, 54, 517 18 Implantation Gas sensors selective seeding of copper films on polyimide-patterned silicon a new sensor principle based on the reflection of surface acoustic substrate, using ion implantation, 52, 126 waves, 54, 618 Inductive powering Generators self-tuning inductive powering for implantable telemetric monitoring analysis of a micro-electric generator for microsystems, 52, 8 systems, 52, | Grain holes Inductive proximity sensors polysilicon surface-modification technique to reduce sticking of scaling down an inductive proximity sensor, 52, 114 microstructures, 52, 145 Industrial applications Gripping tool LIGA and related technologies for industrial application, 54, 785 design and fabrication of a gripping tool for micromanipulation, 53, Infrared 428 thermomechanical characteristics of a thermal switch, 53, 423 Gyroscopes Infrared sensors analysis of a highly sensitive silicon gyroscope with cantilever beam as a 3X | integrated pyroelectric sensor based on VDF/TrFE copolymer, vibrating mass, 54, 568 52, 103 Cumulative Subject Index of Volumes A52, A53 and A54 / Sensors and Actuators A 54 (1996) 803-814 a thermoelectric infrared radiation sensor with monolithically Low power consumption integrated amplifier stage and temperature sensor, 54, 601 linking sensors with telemetry: impact on the system design, 52, 169 Inkjet printheads Low-temperature bonding a micromachined single-chip inkjet printhead, 53, 405 new multichip-on-silicon packaging scheme for microsystems, 52, 156 Integrated infrared sensors optical properties of the integrated infrared sensor, 54, 793 Integrated optics Magnetic drive verification of the micromechanical characteristics of electrostatic electromagnetic linear actuators with inductive position sensing, 53, linear actuators, 53, 416 386 Integrated sensors Magnetic-field sensors an integrated force-balanced capacitive accelerometer for low-g a CMOS-compatible 2-D vertical Hall magnetic-field sensor using applications, 54, 472 active carrier confinement and post-process micromachining, 53, Intelligent systems 278 linking sensors with telemetry: impact on the system design, 52, 169 a miniaturized magnetic-field sensor system consisting of a planar Interface circuits fluxgate sensor and a CMOS readout circuitry, 54, 443 mixed analog-digital highly sensitive sensor interface circuit for low- Magnetic microsensors cost microsensors, 52, 193 high-resolution micro-fluxgate sensing elements using closely coupled Interface electronics coil structures, 54, 612 design of integrated thermal flow sensors using thermal sigma—delta Magnetic sensors modulation, 52, 198 magnetic sensors for nanotesla detection using planar Hall effect, 53, microsensor for the preventive detection of water condensation: 256 operating principle and interface electronics, 53, 304 minimum detectable signals of integrated magnetic sensors in bulk Interferometry CMOS and SOI technologies for magnetic read heads, 54, 636 improvement of novel NRLM method for accelerometer characteriza- Magnetoresistance tion to the range 10? m s~?, 54, 517 magnetic sensors for nanotesla detection using planar Hall effect, 53, Invasive measurement 256 an invasive catheter flow sensor with on-chip CMOS readout Magnetoresistors electronics for the on-line determination of blood flow, 54, 563 preparation and properties of new thick-film magnetoresistive Ion implantation materials, 52, 161 a new etching method for single-crystal Al,O, film on Si using Si ion Magnetotransistors implantation, 53, 340 highly sensitive magnetotransistor with combined phenomena of Hall effect and emitter injection modulation operated in the saturation mode, 54, 641 Laminated dry film resist Mask alignment low-cost technology for multilayer electroplated parts using laminated alignment of mask patterns to crystal orientation, 53, 345 dry film resist, 53, 364 Mass sensitivity Laser direct etching on the mass sensitivity of acoustic-plate-mode sensors, 53, 243 fast three-dimensional laser micromachining of silicon for Mechanical properties microsystems, 52, 121 properties of heteroepitaxial 3C-SiC films grown by LPCVD, 54, 695 Lead zirconium titanate determination of the mechanical properties of microstructures, 54, 750 piezoelectric cantilever beams actuated by PZT sol-gel thin film, 54, Metal-—insulator—-semiconductor 530 photodetection and light emission of GaAs negative-resistance Lifetime switching device, 52, 110 characterizing deflectable microstructures via a high-resolution laser- Microaccelerometers based measurement system, 52, 12 electrical levitation for micromotors, microgyroscopes and micro- LIGA accelerometers, 54, 741 verification of the micromechanical characteristics of electrostatic Microactuators linear actuators, 53, 416 magnetic microactuation of torsional polysilicon structures, 53, 392 LIGA and related technologies for industrial application, 54, 785 Microchannel plates Light emission an integrated multichannel charged-particle sensing system, 54, 777 photodetection and light emission of GaAs negative-resistance Microcoils switching device, 52, 110 high-resolution micro-fluxgate sensing elements using closely coupled Light valves coil structures, 54, 612 deformable micromirror devices as phase-modulating high-resolution microcoils fabricated by UV depth lithography and galvanoplating, 54, light valves, 54, 536 Liquid pressure seals 663 an experimental study of rotating micromechanical liquid O-ring Microelectromechanical instruments pressure seals, 54, 765 a millinewton microloading device, 52, 65 Load Microelectromechanical systems a millinewton microloading device, 52, 65 analysis of a micro-electric generator for microsystems, 52, 8 Local positioning system silicon fusion bonding and deep reactive ion etching: a new technology local positioning system by means of enclosing signal field, 54, 457 for microstructures, 52, 132 Loudspeakers high-voltage devices and circuits fabricated using foundry CMOS for electrostatically excited diaphragm driven as a loudspeaker, 52, 211 use with electrostatic MEM actuators, 52, 187 Low-noise electronics sealed-cavity resonant microbeam accelerometer, 53, 249 mixed analog—digital highly sensitive sensor interface circuit for low- Microelectromechanics cost microsensors, 52, 193 a microelectromechanics-based frequency-signature sensor, 53, 288 808 Cumulative Subject Index of Volumes A52, A53 and A54 / Sensors and Actuators A 54 (1996) 803-814 Microfabrication design and fabrication of micromirror supported by electroplated low-cost technology for multilayer electroplated parts using laminated nickel posts, 54, 464 dry film resist, 53, 364 Micromotors silicon microfabricated horns for power ultrasonics, 54, 542 a new fabrication process of a planar coil using photosensitive microfabricated high-energy particle detector, 54, 594 polyimide and electroplating, 54, 733 an active, microfabricated, scalp electrode array for EEG recording, electrical levitation for micromotors, microgyroscopes and micro- 54, 606 accelerometers, 54, 741 Microfabrication techniques Microphones thermal analysis and design of a micro-hotplate for integrated design of a silicon microphone with differential read-out of a sealed gas-sensor applications, 54, 482 double parallel-plate capacitor, 53, 232 Microflown Microphotonics the u-flown: a novel device for measuring acoustic flows, 54, 552 surface-micromachined mirrors for laser-beam positioning, 52, 76 Microfluidic magnetic microactuation of torsional polysilicon structures, 53, 392 a planar microfabricated fluid filter, 54, 704 Microplasmas Micro gas-flow sensors generating a microplasma with porous silicon, 53, 284 micro gas-flow sensor with integrated heat sink and flow guide, 54, Micropumps 547 static and dynamic flow simulation of a KOH-etched microvalve using Microgrippers the finite-element method, 53, 379 tactile microgripper for automated handling of microparts, 53, 410 Microsensors for magnetic fields a practical microgripper by fine alignment, eutectic bonding and SMA 2D magnetodiode sensors based on SOS technology, 54, 584 actuation, 54, 755 Microspeakers Micro-hotplates self-excited piezoelectric cantilever oscillators, 52, 41 thermal analysis and design of a micro-hotplate for integrated Microstructures gas-sensor applications, 54, 482 characterizing deflectable microstructures via a high-resolution laser- Microlenses based measurement system, 52, 12 fabrication of microlenses by plasmaless isotropic etching combined determination of the mechanical properties of microstructures, 54, 750 with plastic moulding, 53, 361 Microswitches Micromachining quasianalog accelerometer using microswitch array, 54, 574 diode-based thermal r.m.s. converter with on-chip circuitry fabricated snapping microswitches with adjustable acceleration threshold, 54, using CMOS technology, 52, 33 579 megahertz opto-mechanical modulator, 52, 46 a bistable pneumatic microswitch for driving fluidic components, 54, 746 a laterally driven micromachined resonant pressure sensor, 52, 86 Microsystems a miniature, high-sensitivity, electron tunneling accelerometer, 53, 227 linking sensors with telemetry: impact on the system design, 52, 169 fabrication of a silicon micromachined capacitive microphone using a a miniaturized magnetic-field sensor system consisting of a planar dry-etch process, 53, 237 fluxgate sensor and a CMOS readout circuitry, 54, 443 sealed-cavity resonant microbeam accelerometer, 53, 249 simulation of a complex sensor system using coupled simulation a CMOS-compatible 2-D vertical Hall magnetic-field sensor using programs, 54, 632 active carrier confinement and post-process micromachining, 53, Microtip arrays 278 a novel low-field electron-emission polycrystalline diamond microtip thin-film boron-doped polycrystalline siliconz9,—germaniu4M, for array for sensor applications, 54, 724 thermopiles, 53, 325 Microvalves alignment of mask patterns to crystal orientation, 53, 345 static and dynamic flow simulation of a KOH-etched microvalve using a micromachined single-chip inkjet printhead, 53, 405 the finite-element method, 53, 379 high-resolution shadow-mask patterning in deep holes and its Miniaturized flat coils application to an electrical wafer feed-through, 54, 669 scaling down an inductive proximity sensor, 52, 114 highly reliable silicon micromachined physical sensors in mass Minimum detectable signals production, 54, 714 minimum detectable signals of integrated magnetic sensors in bulk optical properties of the integrated infrared sensor, 54, 793 CMOS and SOI technologies for magnetic read heads, 54, 636 Micromagnetodiodes Modulators 2D magnetodiode sensors based on SOS technology, 54, 584 megahertz opto-mechanical modulator, 52, 46 Micromanipulation Multichip-on-silicon design and fabrication of a gripping tool for micromanipulation, 53, new multichip-on-silicon packaging scheme for microsystems, 52, 156 428 Multi-detector Micromechanics an integrated multichannel charged-particle sensing system, 54, 777 flow sensing and pumping using flexible permanent magnet beams, 52, Multilayer electroplating 59 low-cost technology for multilayer electroplated parts using laminated micromachined | X 2 optical-fiber switch, 53, 311 dry film resist, 53, 364 an experimental study of rotating micromechanical liquid O-ring Multilayer structures pressure seals, 54, 765 bending and expanding motion actuators, 54, 760 Micromirror devices deformable micromirror devices as phase-modulating high-resolution light valves, 54, 536 Nanotesla detection Micromirrors magnetic sensors for nanotesla detection using planar Hall effect, 53, integration of surface-micromachined polysilicon mirrors and a 256 standard CMOS process, 52, 140 high-resolution micro-fluxgate sensing elements using closely coupled magnetic microactuation of torsional polysilicon structures, 53, 392 coil structures, 54, 612