Table Of Content

Sensors and Actuators A 50 (1996) 238 Author Index of Volume A 50 Ahmed, H., 31 Higuchi, T., 69, 75 Moriya, K., 111 Shibaike, N., 209 Atsuchi, K., 111 Hoyle, P.C., 31 Murawski, E., 183 Sugimoto, M., 111 Hsieh, A.S., 55 Murphy, V., 45 Bakush, M.M., 147 Muszyriski, M., 183 Tanaka, K., 111 Bausells, J., 99 Jenkins, D.F.L., 147 Trujillo, H., 177 Beebe, D.J., 55 Jiao, J., 117 Nagy, A., 177 Benitez, A., 99 Jin, W., 1 Nakamoto, T., 191 Ulrich, J., 81 Berlicki, T.M., 183 Negoro, Y., 93 Burrer, C., 7 Kim, K.H., 121 Neikirk, D.P., 141 Venuvinod, P.K., 1 Kim, S.Y., 151 Vidic, M., 23 Chitaree, R., 45 Kim, Y., 141 Oguchi, T., 93 Vuilleumier, R., 87 Cho, Y.-H., 121 Kloos, G., 159 Ohwada, K., 93, 111 Cleaver, J.R.A., 31 Kluge, S., 81 Okazaki, N., 191 Wang, W., 117 Clegg, W.W., 147 Ko, J.S., 121 Osadnik, S.J., 183 Wang, Z.P., 169 Cunningham, M.J., 147 Konaka, Y., 93 Watanabe, T., 69 Kraiczek, K., 87 Padmini, P., 39 Wei, Y., 13 Denton, D.D., 55 Kurosawa, M., 69, 75 Palmer, A.W., 45 Weir, K., 45 Kutty, T.R.N., 39 Park, K., 121 Wu, M.C., 127 Elgamel, H.E., 17 Kwak, B.M., 121 Pister, K.S.J., 127 Wurmus, H., 135 Esteve, J., 7, 99 Prociéw, E.L., 183 Lee, J.S., 209 Flynn, D., 187 Lee, K., 121 Quandt, E., 105 Xiong, B., 117 Futami, A., 69 Lee, S.-S., 127 Lin, L.-Y., 127 Radwin, R.G., 55 Yagawa, G., 209 Gerlach, T., 135 Lu, D., 117 Richter, A., 81 Yang, E.H., 151 Grattan, K.T.V., 45 Richter, M., 81 Yang, S.S., 151 MacCraith, B.D., 45 Rodriguez, F., 177 Yoshimura, S., 209 Han, S.W., 151 MacDonald, N.C., 199 Rodriguez, P., 177 Harb, S.M., 23 Matsushita, H., 191 Zengerle, R., 81 Hari, N.S., 39 Mihailovich, R.E., 199 Schmitt, H.J., 13 Zhang, L.B., 169 Haronian, D., 223 Mochida, Y., 111 Scholl, B., 13 Zhang, S.Q., 169 Hasegawa, T., 111 Morita, T., 75 Seemann, K., 105 Zhu, R., 13 Elsevier Science S.A. Sensors and Actuators A 50 (1996) 239-241 Subject Index of Volume A 50 Accelerometers Computer-aided engineering uniform groove-depths in (110) Si anisotropic etching by ultrasonic a CAE system for micromachines: its application to electrostatic micro waves and application to accelerometer fabrication, 93 wobble actuator, 209 a skew-symmetric cantilever accelerometer for automotive airbag Corrugated diaphragms applications, 121 fabrication and dynamic testing of electrostatic actuators with p* sili- Active sensing con diaphragms, 151 improvement of optimization algorithm in active gas/odor sensing sys- Crash detection tem, 191 a skew-symmetric cantilever accelerometer for automotive airbag Actuation applications, 121 active vibration control and actuation of a small cantilever for applica- Cryogenic sensors tions in scanning probe instruments, 147 cryogenic sensors from semiconducting barium titanate ceramics with Actuators strong negative temperature coefficient of resistance, 39 a bidirectional silicon micropump, 81 fabrication and simulation of magnetostrictive thin-film actuators, 105 Demodulation techniques Air damping demodulation of a magnetoresistive sensor signal to achieve a low- a skew-symmetric cantilever accelerometer for automotive airbag cost, stable and high-resolution vector magnetometer, 187 applications, 121 Design windows Anisotropic etching a CAE system for micromachines: its application to electrostatic micro uniform groove-depths in (110) Si anisotropic etching by ultrasonic wobble actuator, 209 waves and application to accelerometer fabrication, 93 p* Diaphragms Automotive airbags fabrication and dynamic testing of electrostatic actuators with p* sili- a skew-symmetric cantilever accelerometer for automotive airbag con diaphragms, 151 applications, 121 Dissipation measurements dissipation measurements of vacuum-operated single-crystal silicon microresonators, 199 Barium titanate Dynamic passive valves cryogenic sensors from semiconducting barium titanate ceramics with working principle and performance of the dynamic micropump, 135 strong negative temperature coefficient of resistance, 39 Dynamic testing BESOI substrates fabrication and dynamic testing of electrostatic actuators with p* sili- bulk silicon microelectromechanical devices fabricated from commer- con diaphragms, 151 cial bonded and etched-back silicon-on-insulator substrates, 99 Dynamometers BESOI wafers interaction elimination for multicomponent strain-gauge dynamo- high-precision BESOI-based resonant accelerometer, 7 meters, 1 Bipolar magnetotransistors merged lateral bipolar magnetotransistors, 177 Electron-beam-induced oxidation Bonding mechanism fabrication of free-standing microtransducers in GaAs with an elec- low-temperature silicon direct bonding and interface behaviours, 117 tron-beam-induced oxide mask and Cl, etching, 31 Bulk micromachining Electrostatic actuators a skew-symmetric cantilever accelerometer for automotive airbag fabrication and dynamic testing of electrostatic actuators with p* sili- applications, 121 con diaphragms, 151 Electrostatic drive a bidirectional silicon micropump, 81 Cantilevers a skew-symmetric cantilever accelerometer for automotive airbag applications, 121 Fabry—Pérot cavities active vibration control and actuation of a small cantilever for applica- design for manufacture of micromachined Fabry—Pérot cavity-based tions in scanning probe instruments, 147 sensors, 141 Closed-form expressions Finite-element analysis closed-form expressions for the relationships between stress, dia- a CAE system for micromachines: its application to electrostatic micro phragm deflection, and resistance change with pressure in silicon wobble actuator, 209 piezoresistive pressure sensors, 17 Force sensors Computational geometry a silicon force sensor for robotics and medicine, 55 a CAE system for micromachines: its application to electrostatic micro Free-space integrated optics wobble actuator, 209 micromachined free-space integrated micro-optics, 127 Elsevier Science S.A. 240 Subject Index of Volume A 50 / Sensors and Actuators A 50 (1996) 239-241 Fuzzy knowledge processing Micropumps a CAE system for micromachines: its application to electrostatic micro a bidirectional silicon micropump, 81 wobble actuator, 209 working principle and performance of the dynamic micropump, 135 Microresonators Gallium arsenide dissipation measurements of vacuum-operated single-crystal silicon fabrication of free-standing microtransducers in GaAs with an elec- microresonators, 199 tron-beam-induced oxide mask and Cl, etching, 31 Microtransducers Gas sensing fabrication of free-standing microtransducers in GaAs with an elec- improvement of optimization algorithm in active gas/odor sensing sys- tron-beam-induced oxide mask and Cl, etching, 31 tem, 191 Micro wobble actuators Geometry optimization a CAE system for micromachines: its application to electrostatic micro maximizing microelectromechanical sensor and actuator sensitivity by wobble actuator, 209 optimizing geometry, 223 Gyroscopes Neural networks a micromachined vibrating gyroscope, 111 a CAE system for micromachines: its application to electrostatic micro wobble actuator, 209 Hydrothermal method an ultrasonic micromotor using a bending cylindrical transducer based Odor sensing on PZT thin film, 75 improvement of optimization algorithm in active gas/odor sensing system, 191 Interaction elimination Optical-fibre ellipsometers interaction elimination for multicomponent strain-gauge dynamo- an optical-fibre ellipsometer for applications in thin-film sensor sys- meters, | tems, 45 Interface behaviours Optical-fibre sensors low-temperature silicon direct bonding and interface behaviours, 117 a new optical-fiber sensor for measuring surface pressure of Langmuir monolayers, 13 Langmuir monolayers recent advances in optical current-sensing techniques, 169 a new optical-fiber sensor for measuring surface pressure of Langmuir Optimization algorithm monolayers, 13 improvement of optimization algorithm in active gas/odor sensing sys- Lead zirconate titanate tem, 191 an ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film, 75 Piezoelectricity Low temperature working principle and performance of the dynamic micropump, 135 low-temperature silicon direct bonding and interface behaviours, 117 Piezoresistive sensors closed-form expressions for the relationships between stress, dia- Magnetic sensors phragm deflection, and resistance change with pressure in silicon merged lateral bipolar magnetotransistors, 177 piezoresistive pressure sensors, 17 Magnetoresistive sensors Power distribution demodulation of a magnetoresistive sensor signal to achieve a low- recent advances in optical current-sensing techniques, 169 cost, stable and high-resolution vector magnetometer, 187 Precision spectrophotometers Magnetostrictive films variable-entrance-slit system for precision spectrophotometers, 87 fabrication and simulation of magnetostrictive thin-film actuators, 105 Pressure sensors Materials science closed-form expressions for the relationships between stress, dia- a transfer-function approach to the interpretation of relaxation spectra phragm deflection, and resistance change with pressure in silicon of second-order cross-effects in materials science, 159 piezoresistive pressure sensors, 17 Medicine Pumps a silicon force sensor for robotics and medicine, 55 a bidirectional silicon micropump, 81 Microactuators a bidirectional silicon micropump, 81 Q-factors Microelectromechanical devices a micromachined vibrating gyroscope, 111 bulk silicon microelectromechanical devices fabricated from commer- cial bonded and etched-back silicon-on-insulator substrates, 99 Relaxation spectra Microelectromechanical systems a transfer-function approach to the interpretation of relaxation spectra maximizing microelectromechanical sensor and actuator sensitivity by of second-order cross-effects in materials science, 159 optimizing geometry, 223 Residual stress Micromachines fabrication and dynamic testing of electrostatic actuators with p* sili- a CAE system for micromachines: its application to electrostatic micro con diaphragms, 151 wobble actuator, 209 Resonant accelerometers Micromachining high-precision BESOI-based resonant accelerometer, 7 a bidirectional silicon micropump, 81 Resonator-based sensors a micromachined vibrating gyroscope, 111 resonator-based touch-sensitive probe, 23 design for manufacture of micromachined Fabry—Pérot cavity-based Robotics sensors, 141 a silicon force sensor for robotics and medicine, 55 Micromotors an ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film, 75 Scanning probe instruments Micro-optical elements active vibration control and actuation of a small cantilever for applica- micromachined free-space integrated micro-optics, 127 tions in scanning probe instruments, 147 Subject Index of Volume A 50 / Sensors and Actuators A 50 (1996) 239-241 Second-order cross-effects Thermal sensors a transfer-function approach to the interpretation of relaxation spectra thin-film thermocouples of Ge doped with Au and B, 183 of second-order cross-effects in materials science, 159 Thin films Self-diagnosis fabrication and simulation of magnetostrictive thin-film actuators, 105 a skew-symmetric cantilever accelerometer for automotive airbag Thin-film sensors applications, 121 an optical-fibre ellipsometer for applications in thin-film sensor sys- Semiconducting ceramics tems, 45 cryogenic sensors from semiconducting barium titanate ceramics with thin-film thermocouples of Ge doped with Au and B, 183 strong negative temperature coefficient of resistance, 39 Thin Ge films Sensors thin-film thermocouples of Ge doped with Au and B, 183 recent advances in optical current-sensing techniques, 169 Touch-sensitive probes Silicon resonator-based touch-sensitive probe, 23 closed-form expressions for the relationships between stress, dia- Transfer functions phragm deflection, and resistance change with pressure in silicon a transfer-function approach to the interpretation of relaxation spectra piezoresistive pressure sensors, 17 of second-order cross-effects in materials science, 159 a silicon force sensor for robotics and medicine, 55 uniform groove-depths in (110) Si anisotropic etching by ultrasonic Ultrasonic atomizers waves and application to accelerometer fabrication, 93 surface acoustic wave atomizer, 69 Single-crystal silicon Ultrasonic motors dissipation measurements of vacuum-operated single-crystal silicon an ultrasonic micromotor using a bending cylindrical transducer based microresonators, 199 on PZT thin film, 75 Strain gauges Ultrasonic waves interaction elimination for multicomponent strain-gauge dynamome- uniform groove-depths in (110) Si anisotropic etching by ultrasonic ters, | waves and application to accelerometer fabrication, 93 Surface acoustic waves surface acoustic wave atomizer, 69 Variable slit systems Surface pressure measurements variable-entrance-slit system for precision spectrophotometers, 87 a new optical-fiber sensor for measuring surface pressure of Langmuir Vector magnetometer monolayers, 13 demodulation of a magnetoresistive sensor signal to achieve a low- cost, stable and high-resolution vector magnetometer, 187 Vibration control Tactile sensors active vibration control and actuation of a small cantilever for applica- a silicon force sensor for robotics and medicine, 55 tions in scanning probe instruments, 147