Table Of Content

Sensors and Actuators A, 40 (1994) 244 Author Index of Volume 40 Abboud, B., 173 Huang, Q., 167 Nakamura, T., 141 Shibata, K., 103, 125, 195 Ahmed, H., 227 Huijsing, J.H., 237 Nakano, S., 103 Shimizu, H., 121 Arney, S.C., 77 Nakazawa, M., 97 Shin, B.-C., 191 Azuma, Y., 121 Ishida, M., 141 Niiyama, H., 97 Smith, T., 237 Niles, L., 49 Soga, T., 121 Bergveld, P., 179, 203 Jiang, B.-Y., 151 Nishimura, M., 217 Sohn, J., 49 Jimbo, T., 121 Noda, S., 125 Stark, W., 57 Sugiyama, Y., 135 Nozaki, S., 89 Cai, H.Y., 93 Kamimura, K., 93 Sun, L., 159 Chen, B., 167 Kawahito, S., 141 Ohara, Y., 187 Chen, C., 167 Takahashi, K., 89 Kimata, M., 111 Ohshita, M., 131 Cho, Y.-H., 31 Takeuchi, K., 103, 195 Koumoto, K., 187 Okuma, S., 71 Choi, S.O., 141 Takeuchi, M., 97 Kuchi, T., 117 Okuyama, M., 111 Tanaka, T., 103 Kunioka, A., 117 Olthuis, W., 179, 203 Togami, Y., 111 Delaite, R., 173 Kuroki, K., 103, 195 Onuma, Y., 93 Torii, A., 71 Denda, M., 111 Kuwano, H., 41 Tuller, H.L., 49 Kuwano, Y., 103 Pisano, A.P., 31 Egawa, T., 121 Kwak, B.M., 31 Putnis, A., 227 Umeno, M., 121 Liu, J.-Z., 151 Valentin, J.-P., 173 Gajda, M.A., 227 Rapp, R., 57 Long, L., 167 van der Donk, A.G.H., 203 Greiff, P., 49 Riedijk, F.R., 237 Van der Spiegel, J., 217 Maas, D., 57 Hamada, Y., 195 MacDonald, N.C., 63, 77 Sakata, M., 195 Wang, S., 147 Hamakawa, Y., 111 Matsuzaka, H., 97 Sasaki, A., 125 Xin, Y., 147 Hane, K., 71 Mecea, V.M., 1 Sasaki, M., 71 He, M., 167 Miyayama, M., 187 Scheeper, P.R., 179, 203 Yanagida, H., 187 Higuchi, Y., 155 Micak, R., 49 Schomburg, W.K., 57 Yanagisawa, K., 41 Hirata, M., 159 Moriizumi, T., 97, 155 Schulz, J., 57 Yang, M., 121 Homma, T., 93 Shgw, J.E.A., 227 Yao, J.J., 77 Hosaka, H., 41 Nakada, T., 117 Shaw, K.A., 63 Howe, R.T., 31 Nakamoto, T., 155 She, Y.-E., 151 Zhang, Z.L., 63 Elsevier Sequoia Sensors and Actuators A, 40 (1994) 245-247 Subject Index of Volume 40 Adhesion Hall device adhesion of microstructures investigated by atomic force temperature dependence of an InGaAs—-2DEG Hall device microscopy, 71 with large magnetic sensitivity, 135 AlGaAs/Si tandem photodiode Hall elements integrated wavelength-division photosensor using GaAs on micromachined Hall elements for two-dimensional Si, 121 magnetic-field sensing, 141 Ammonia sensor HF electrolytes characteristics of an organic semiconductor polyaniline film photoassisted electrochemical micromachining of silicon in as a sensor for NH; gas, 159 HF electrolytes, 49 Anisotropic etching Humidity-sensitive materials anisotropic etching of silicon in hydrazine, 227 an investigation of sulfonated polysulfone humidity- Arsenic sensitive materials, 147 temperature dependence of an InGaAs-2DEG Hall device Humidity sensors with large magnetic sensitivity, 135 Si-Mg-Al-O system ceramic-film humidity sensor, 151 Atomic force microscope Hydrazine adhesion of microstructures investigated by atomic force anisotropic etching of silicon in hydrazine, 227 microscopy, 71 Indium CCD array InSb films for magnetic sensors, 131 pyroelectric infrared image sensors using Si CCD and FET temperature dependence of an InGaAs—-2DEG Hall device arrays, 111 with large magnetic sensitivity, 135 Ceramic films Infrared image sensors Si-Mg-—Al-—O system ceramic-film humidity sensor, 151 pyroelectric infrared image sensors using Si CCD and FET Color-recognition system arrays, 111 integrated selenium color sensor and its application to a Intelligent sensors color-recognition system, 117 from intelligent sensors to fuzzy sensors, 89 Color sensor IR chopper integrated selenium color sensor and its application to a characteristics of a liquid crystal IR chopper for pyro- color-recognition system, 117 electric IR sensors, 195 . Edge orientation sensor Laser cutter a compact line and edge orientation detection sensor, 217 PZT-polymer composites fabricated with YAG laser cutter, Elastic modulus 187 PZT-polymer composites fabricated with YAG laser cutter, LIGA technique 187 LIGA micropump for gases and liquids, 57 Elastomer Light-to-light transducer PZT-polymer composites fabricated with YAG laser cutter, light-to-light transducers integrated with heterojunction 187 phototransistors and a laser diode, 125 Electromagnetic microrelays Line orientation sensor electromagnetic microrelays: concepts and fundamental a compact line and edge orientation detection sensor, 217 characteristics, 41 Liquid crystals characteristics of a liquid crystal IR chopper for pyro- FET array electric IR sensors, 195 pyroelectric infrared image sensors using Si CCD and FET arrays, 111 Magnetic-field sensing Finite-element method micromachined Hall elements for two-dimensional computation of hydrostatic piezoelectric coefficients for 1-3 magnetic-field sensing, 141 composites by the finite-element method, 191 Magnetic sensors Fire-alarm system InSb films for magnetic sensors, 131 study of fire-alarm system using plural semiconductor and Microelectromechanical structures quartz-resonator gas sensors, 155 SCREAM I: a single mask, single-crystal silicon, reactive Fuzzy sensors ion etching process for microelectromechanical struc- from intelligent sensors to fuzzy sensors, 89 tures, 63 Microelectromechanical systems Gallium a fully suspended, movable, single-crystal silicon, deep temperature dependence of an InGaAs—2DEG Hall device submicron MOSFET for nanoelectromechanical applica- with large magnetic sensitivity, 135 tions, 77 Elsevier Sequoia 246 Micromachining Quartz photoassisted electrochemical micromachining of silicon in loaded vibrating quartz sensors, 1 HF electrolytes, 49 Quartz-crystal resonators micromachined Hall elements for two-dimensional reliable frequency—temperature characteristics of the new magnetic-field sensing, 141 quartz-crystal resonators vibrating in thickness-shear Microphones improvement of the performance of microphones with a modes, 97 silicon nitride diaphragm and backplate, 179 Quartz-resonator gas sensor modelling of silicon condenser microphones, 203 study of fire-alarm system using plural semiconductor and Micropump quartz-resonator gas sensors, 155 LIGA micropump for gases and liquids, 57 Microstructures Radiative transfer slide film damping in laterally driven microstructures, 31 characteristics of heated sensors emitting by radiation only, adhesion of microstructures investigated by atomic force 173 microscopy, 71 Reactive ion etching MOSFET SCREAM I: a single mask, single-crystal silicon, reactive a fully suspended, movable, single-crystal silicon, deep ion etching process for microelectromechanical struc- submicron MOSFET for nanoelectromechanical applica- tures, 63 tions, 77 Relative intensity noise light-to-light transducers integrated with heterojunction phototransistors and a laser diode, 125 Optical amplification Resonance light-to-light transducers integrated with heterojunction PZT-polymer composites fabricated with YAG laser cutter, phototransistors and a laser diode, 125 187 Optical sensor an integrated optical position-sensitive detector with digital output and error correction, 237 Selenium Optoelectronic integrated device integrated selenium color sensor and its application to a light-to-light transducers integrated with heterojunction color-recognition system, 117 phototransistors and a laser diode, 125 Semiconductor gas sensor Organic semiconductors characteristics of an organic semiconductor polyaniline film study of fire-alarm system using plural semiconductor and as a sensor for NH; gas, 159 quartz-resonator gas sensors, 155 Sensors loaded vibrating quartz sensors, 1 Phototransistors characteristics of heated sensors emitting by radiation only, injection phototransistors, 167 173 Piezoelectric coefficients Silicon computation of hydrostatic piezoelectric coefficients for 1-3 photoassisted electrochemical micromachining of silicon in composites by the finite-element method, 191 HF electrolytes, 49 Piezoelectric composite SCREAM I: a single mask, single-crystal silicon, reactive PZT-polymer composites fabricated with YAG laser cutter, ion etching process for microelectromechanical struc- 187 Polyaniline tures, 63 characteristics of an organic semiconductor polyaniline film a fully suspended, movable, single-crystal silicon, deep as a sensor for NH; gas, 159 submicron MOSFET for nanoelectromechanical applica- Position-sensitive detector tions, 77 an integrated optical position-sensitive detector with digital pyroelectric infrared image sensors using Si CCD and FET output and error correction, 237 arrays, 111 Position-sensitive devices modelling of silicon condenser microphones, 203 a compact line and edge orientation detection sensor, anisotropic etching of silicon in hydrazine, 227 217 Pressure sensors Silicon carbide preparation of polycrystalline SiC films for sensors used at preparation of polycrystalline SiC films for sensors used at high temperature, 93 high temperature, 93 Pyroelectric infrared detector Silicon nitride modulation-type pyroelectric infrared detector and its improvement of the performance of microphones with a application, 103 silicon nitride diaphragm and backplate, 179 Pyroelectric sensors Slide film damping characteristics of a liquid crystal IR chopper for pyro- slide film damping in laterally driven microstructures, 31 electric IR sensors, 195 PZT/polymer composites Spectral response computation of hydrostatic piezoelectric coefficients for 1-3 integrated wavelength-division photosensor using GaAs on composites by the finite-element method, 191 Si, 121 Sulfonated polysulfone Two-dimensional electron gas an investigation of sulfonated polysulfone humidity- temperature dependence of an InGaAs—-2DEG Hall device sensitive materials, 147 with large magnetic sensitivity, 135 Wavelength sensor Tin integrated wavelength-division photosensor using GaAs on InSb films for magnetic sensors, 131 Si, 121