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NATL INST. OF STAND & TECH AlllDb 174132 TRONICS AND ELECTRICAL neering Laboratory National Instituteof Standards and Tech TechnologyAdministration ran U.S. Departmentof “Sift Commerce NISTIR 6933 January2003 Programs, Activities, and Accomplishments 00 lot) 33 Zoo-} The Electronics and Electrical Engineering Laboratory (EEEL) One ofNIST’s seven measurement and standards laboratories, EEEL conducts research, provides measurement services, and helps set standards in support ofthe fundamental electronic technologies ofsemiconductors, magnetics, and superconduc- tors; informationandcommunicationstechnologies, suchas fiberoptics,photonics,microwaves,electronicdisplays, electronicsmanufacturingsupplychaincollaboration; forensics and security measurement instrumentation; fundamental and practical physical standards and measurement services for electricalquantities;maintainingthequalityand integrityof electrical power systems; and the development ofnanoscale and microelectromechanical devices. EEEL provides support to law enforcement, corrections, and criminaljustice agencies, includinghomelandsecurity. EEEL consists ofsix programmatic divisions and two matrix- managed offices: ElectricityDivision SemiconductorElectronicsDivision Radio-FrequencyTechnologyDivision ElectromagneticTechnologyDivision OptoelectronicsDivision MagneticTechnologyDivision Office ofMicroelectronic Programs Office of Law Enforcement Standards This publication describes the technical programs ofthe SemiconductorElectronics Division. Similardocuments describing the other Divisions and Offices are available. Contact NIST/EEEL, 100 Bureau Drive, MS 8100, MD Gaithersburg, 20899-8100,telephone301-975-2220, http://www.eeel.nist.gov. These publications are updated biennially. Cover caption: (fi-ont to back) a thermal image ofa MEMS-basedhotplate during a transient eventandan IBM200mm EDRAMWafer (photo by Tom Way, courtesyofInternationalBusiness Machines Corporation. Unauthorized use notpermitted.). Electronics and Electrical Engineering Laboratory Semiconductor Electronics Division Programs, Activities, and Accomplishments NISTIR 6933 January 2003 U.S.DEPARTMENTOFCOMMERCE Donald L. Evans, Secretary TechnologyAdministration Phillip J. Bond, Under Secretary of Commerce for Technology National InstituteofStandardsandTechnology Arden L. Bement, Jr., Director Any mention ofcommercial products is for information only; itdoesnot imply recommenda- tion orendorsement by the National Institute ofStandards and Technology nordoes it imply that the products mentioned are necessarily the best available for the purpose. Contents Welcome iv Mission vi Vision vi Values vi Goals vi Semiconductors: BackboneoftheElectronic/DigitalRevolution vii SemiconductorElectronicsDivisionOrganization ix Scanning-ProbeMicroscope Metrology 1 MOS Advanced Device Reliability and Characterization 5 Nanoelectronic Device Metrology 9 Thin-FilmProcessMetrology 13 Power Semiconductor Device and Thermal Metrology 18 MicroElectroMechanical Systems 22 Electrical Test Structure Metrology 25 MajorFacilities/Laboratories 30 MicrofabricationProcessFacility 31 National Research Council (NRC) Post-Doctoral Opportunities 34 2003 International Conference on Characterization andMetrology forULSI Technology, Mar. 24-28, 2003,Austin,TX 38 Gaitan Receives DoC Silver Medal Award 39 Division Teamwork Team Receives DoC Bronze Medal Award 40 IntegratedCircuit Gas Sensing SystemTechnologyValuable forHomeland Security 41 SPS Intern Contributes to Division Research 42 Transfer ofEquipment to the University ofPuerto Rico at Mayaguez Strengthens Power Electronics Research 43 Educational Outreach by Division Staff 44 FutureNISTCleanroomFacilityonTrackforSpring2003 Completion 45 NIST’s Gaithersburg, Maryland Campus and SurroundingArea 46 SemiconductorElectronics Division Welcome The SemiconductorElectronics Division(SED)providesleadership in developingthesemicon- ductor measurement infrastructure essential to improving U.S. economic competitiveness. It provides necessary measurements, physical standards, and supporting data and technology; associated generic technology; and fundamental research results to industry, government, and academia. Theprimary mission ofthe Division is toprovide the measurement infrastructureto CMOS U.S. industryformainstreamsilicon (complementarymetal-oxidesemiconductor)technology. The Division’s programs also respond to industry measurement needs related to MicroElectroMechanical Systems (MEMS), power electronics, and compound semiconductors. David G. Seiler, DivisionChief The Divisionhasextensive interactionswith individual companies, industryorganizations, and professional societies; these activities enable the developmentofaresearch agendaresponsive totheneedsofindustry.Activeparticipation inindustryroadmapping, suchasthe Semiconduc- tor Industry Association’s International Technology Roadmap for Semiconductors, and stan- “TheSemiconductor dards activities, such as committeeworkfortheAmerican Society forTestingand Materials, is Electronics Division has practicedbythe Divisiontoprioritizeandestablishprogramswiththehighestpotential impact. The Divisionwidelydisseminatestheresults ofitsresearch, especially in theareasofstandard- playeda keyrole in the ized test methods and Standard Reference Materials (SRMs), through a variety ofchannels: phenomenalgrowth of publications, software,conferencesandworkshops,andparticipation in standardsorganizations the semiconductor and consortia. NIST also actively seeks industrial, academic, and non-profit research partners industryandinhelping toworkcollaborativelyonprojectsofmutualbenefit. U.S. companies maintain The Division, with a staffofabout 70 including full-time and part-time employees as well as leadershipin the devel- guest researchers, is based in Gaithersburg, Maryland. The Division is one ofsix divisions withinthe Electronics andElectricalEngineeringLaboratoryatNIST. The Division’stechnical opmentandmanufacture activitiesareorganized intofourgroups: theMaterialsTechnologyGroup,theAdvancedMicro- ofsiliconandcompound electronics Technology Group, the Device Technology Group, and the IC Technology Group. semiconductors. NIST The Division assists industry by providing tools such as SRMs, test chips, standard reference continues toprovidethe data, and software that support the needed measurement infrastructure. Division personnel visit industrial sites, host a variety ofvisitors, and make available tutorial material on an as- state-of-the-art measure- needed basis. We also are active in conference andworkshop activities that directlybenefit the mentcapabilities and industry. The Division receives and isresponsive tohundreds ofspecial requests forassistance standards necessary to from industry each year. supportindustry’s A broad array ofactivities that serve the semiconductor industry is currently underway in the ongoingeffortstopush Division. The staffofthe SED addresses projects ranging from materials qualification to test physicalandchemical structures for integrated circuits. Some ofthese projects are supported by the NIST National SemiconductorMetrology Program (NSMP), which ismanagedbytheElectronics and Electri- limitsintheproductionof cal Engineering Laboratory’s Office ofMicroelectronic Programs. For more information on newdevices andpro- the NSMP, go to www.eeel.nist.gov/omp. cesses.” The Division, in cooperation with the National Research Council (NRC), offers awards for ANsRsCesPsamneenltReofpotrhte, ANantional post-doctoral research for U.S. citizens in avariety offields related to the semiconductor elec- Institute ofStandards and tronics industry. Foradditional details, includingfielddescriptionsandqualificationguidelines, Technology Measurement and Standards Laboratories: please see page 34. Fiscal Year2001 Thetechnicalprograms,activities,andaccomplishmentsdescribedhereforeachDivisionproject clearly demonstrate the impact ofthe SED’s leadership and effective service as it continues to respondtotheneedsofindustryandtocontributetothescientificandengineeringcommunities. iv Electronics and Electrical Engineering Laboratory PleasetakeanopportunitytovisitourDivisionWeb siteatwww.eeel.nist.gov/812/. Inaddition toprovidingfurtherdetailsonourDivisionandup-to-dateprojectinformation,ourWebsitehas MEMS interactive tutorials on the Hall effect (www.eeel.nist.gov/812/hall.html) and standard test structures based on e-standards (www.eeel.nist.gov/812/test-structures/). Thankyou foryour interest in ourDivision! I welcome yourcomments and suggestions. Feel free to e-mail me at [email protected]. Jzf DavidG. Seiler DivisionChief SemiconductorElectronicsDivisionStaff Foradditionalinformation,contact: Division/OfficeTelephone: 301-975-2054 Division/OfficeFacsimile: 301-975-6021 On the Web: www.eeel.nist.gov/812/ SemiconductorElectronics Division “The nature ofthe Mission vision’spurposeisnot The Semiconductor Electronics Division provides leadership in developing the semicon- onlyto achieve a mean- ductor measurement infrastructure essential to improving U.S. economic competitiveness by ingfulstrategicor providing necessary measurements, physical standards, and supporting data and technology; companygoal, butalso associated generic technology; and fundamental research results to industry, government, and tobuildadedicated academia. The primary focus is on mainstream silicon CMOS (complementary metal-oxide semiconductor) technology. The Division’s programs also respond to industry measurement community” needs relatedto MicroElectroMechanical systems (MEMS), powerelectronics, andcompound JayA Conger, The Brave semiconductors. New WorldofLeadership Training, IEEE Eng. Mgmt. Review (1996) Vision The Semiconductor Electronics Division is recognized as a dynamic world-class resource forsemiconductormeasurements, data, models, andstandards focusedon enhancingU.S. technological competitivenessintheworldmarket. Values The Semiconductor Electronics Division values its commitment to identify and to meet crucialmeasurementtechnologyneeds. The Divisionvalues itscollaborationwithall segments TheDivisionmission, ofthesemiconductorcommunity. Itstrivesforintegrity,excellence,objectivity,responsiveness, vision, values, andgoals andcreativity,whilemaximizingandutilizingthepotentialofitsemployees. were developedbya Goals strategicplanning process facilitatedbya TheDivisionwill: professionalconsultant. Aggressively pursue and achieve select metrology needs as identified in the International Thisprocess involved Technology Roadmap for Semiconductors formainstream silicon. extensive workforce Developnewandimprovedprocess-monitoringtools,methodologies,anddataforthemore involvement, theDivision efficient manufacture ofsilicon and compound-semiconductordevices. leadership, andnumer- Developcooperative,multidisciplinaryprojectswithintheDivisionandsynergisticexternal ous meetings and collaborative efforts to better meet the critical needs ofthe semiconductor industry. informaldiscussions. Support novel research that has high potential for providing breakthroughs in materials, process, devices, and measurement technologies forthe semiconductor industry. Semiconductors: Backbone of the Electronic/Digital Revolution “This year the semiconductor industry will manufacture about 60 million transistors for every “Nootherhuman man, woman and child on earth. By 2008, chipmakers will be—producing 1 billion transistors or inventionis theequalof more per year. Transistors improve our lives in countless ways they make cars safer and more fuel-efficient, they enable personal communication devices, they promote medical breakthroughs the semiconductor and they improve the quality ofeducation.” device - ifonlybecause - Building Blocksfor Innovation, Semiconductor Industry nootherinventionhas Association (SIA) Annual Report 2002, p. 17 beenadoptedso quickly For the past 20 years, the personal computer reigned supreme as the driver of semiconductor andpervasivelyas the industry growth. But new leadership is emerging. The communications revolution, perhaps the integratedcircuit. Since defining social and economic transition ofour time, is fueled by the ever smaller, ever cheaper, theinventionofthe ever faster invention of the chip industry. The explosive demands of the wireless, broadband Internetand opticalnetworking industrieshave crowned the communications chip asthe dominant planarprocess forty end market for semiconductors. yearsago, billionsof Information technology (IT) continues to be the primary driveroftheU.S. economy, and U.S. transistors are nowin semiconductor companies are leading the charge. American chipmakers now supply nearly usebeneath, aroundand halfofthe world’s chips. above the earth. The U.S. chipmakers add more value to the national economy than any other industry. microprocessoris the For 50 years, the semiconductor industry has provided the bricks and mortar that built the defininginventionofthe modemworld. The exciting expansion in semiconductor applications means ourjob has only electronic age, the just begun and that our industry’s greatest growth lies ahead. inventorofinventions Personal communications devices will become so functional as to be indispensable, cars will from thepersonal be safer and more fuel-efficient, the quality ofeducation will improve, chips implanted in our computerto the bodies will tell our doctor we’re sick before we register symptoms. Eventually silicon and biology will converge, and the biocomputerwill seem no more novel than today’s laptop. As internet.” ForbesASAPEditorMichael Malone has noted, “the microprocessor isthe defining invention The Silicon Century, ofthe electronic age, the inventor ofinventions.” SemiconductorIndustry Association (SIA) Annual ReportandDirectory 2000 - adaptedfrom the Semiconductor IndustryAssociation (SIA) 2001 Annual Report, pp. 2-5. Semiconductors, transistors, and their applications represent one of the greatest scientific and technological breakthroughs ofthe twentieth century. Considertheir farreaching influence on our society in general and our daily lives. Can you imagine life without them? Semiconductors are pervasive in the microelectronic components used in computers, entertainment equipment, auto- motive electronics, medical instrumentation, telecommunications, space technology, television, radio, cell phones, and many other information technologies. Every hospital, school, factory, car, airplane, office, bank, and household contains transistors, microprocessors, and other semiconductor devices. These breakthroughs are possible because of the miniaturization of the transistor dimensions, whichallowstheconstructionofcompactsystemswithtremendouscomputingpowerandmemory. Miniaturization, in turn, is possible because ofthe perfection offabrication techniques that allow the “integration” ofcircuits and thus the production ofchips containing millions ofelements per square centimeter. The foundation stone ofthis complex technology is silicon. Meeting the demands for these large-scale, complex, integrated circuits (ICs) continues to require technological advances in materials, processing, circuit design, characterization, testing, and standards. SemiconductorElectronics Division VII “Private sectorand The semiconductor electronics industry is outstripping the measurement capability needed for maintaining and improving U.S. international competitiveness. Important factors affected include governmentcollabora- product performance, price, quality, compatibility, and time to market. The Division provides the tionisessentialtoour measurement capability needed to support the efforts ofU.S. industry to improve its competitive- continuedprogress. For ness. In order to support this effort, the Division also engages in technology development and fundamental research, and makes the findings available to industry. example, theNational InstituteofStandards The Division focuses the largestpart ofits resources on the development and delivery ofmeasure- ment capability fortwo principal reasons: measurement capability has a very high impact on U.S. andTechnologyis industry because it helps manufacturers address many of the challenges they face in realizing developingstandards for competitive products in the marketplace, and NIST is the official lead U.S. Government agency measuring the ever- for measurements. shrinkinglinewidths that The Division focuses on developing measurement capability that is beyond the reach ofthe broad characterize semicon- range ofindividual companies. Companies seekNIST’s help for several reasons: ductorproducts. Industry The companies need NIST’s special technical capability for measurement development. alonecannotdevelop The companies need NIST’s acknowledged impartiality for diagnosing a measurement prob- — these new standards lem affecting the industry broadly or for achieving adoption ofa solution across the industry. government must The companies cannot develop the measurement capability needed by the industry broadly oversee the process.” because they cannot individually capture the returns ofthe cost ofdevelopment. Building Blocks for Industry’s quality standards require that key measurements be traceable to the national mea- Innovation, Semiconductor Industry Association (SIA) surement reference standards that NIST maintains. This is a requirement ofgrowing impor- AnnualReport 2002, p. 20 tance in export markets. The Division continues to interact and collaborate with a wide variety of companies, consortia [such as International Semiconductor Manufacturing Technology (ISMT), Semiconductor Equip- ment and Materials International (SEMI), and the Semiconductor Research Corporation (SRC)], academia, and other government labs to accomplish its mission. Specific details are given in the project sheets that follow. Work in the Division results in extensive outputs or deliverables that cover knowledge and improvements in physical understanding, test methods and measurements, Standard Reference Materials (SRMs), Standard Reference Data (SRD) sets, standards, test structures and test chips, software, measurement accuracy and traceability, publications and reports, patents and Cooperative Research and Development Agreements (CRADAs), round robins, data and models, talks and short courses, company visits, conferences and workshops, consortia par- ticipation, and various activities and leadership roles on committees and working groups. Division staff serve the semiconductor community in leadership roles on standards committees such as American Society for Testing and Materials (ASTM) and Electronic Industries Alliance (EIA) / Joint Electron Device Engineering Council (JEDEC), societies such as IEEE, ECS, and APS, and on numerous semiconductor conferences/workshops. Many test methods and standards have been developed and written over the years by NIST stafffor ASTM and EIA/JEDEC, including ones forresistivity, oxygen in silicon, thin dielectrics, electromigration, and device characterization. Staff serve on various Technical Working Groups to help put together the Interna- tional Technology Roadmap for Semiconductors (ITRS). These groups are Process Integration, Devices, and Structures; Assembly and Packaging; Lithography; Interconnect; and Front End Processes. The ITRS provides targets for equipment, material, and software suppliers; provides targets for researchers; and serves as a common reference for the semiconductor industry. The Division also has impacted the semiconductor community by producing a number ofSRMs. To date, over 2,500 SRMs have been sold and distributed for resistivity, oxygen in silicon, and optical thickness by ellipsometry. Hundreds ofcompanies throughout the world have purchased these SRMs to maintain and improve theirmeasurement capability. Electronics and Electrical Engineering Laboratory