Secondary ion mass spectrometry : applications for depth profiling and surface characterization

290 Pages·2016·43.78 MB·English

by  Fred Stevie

EBOOKS Secondary Ion Mass Spectrometry S
T MATERIALS CHARACTERIZATION
FOR THE E
Applications for Depth Profiling and V
I AND ANALYSIS COLLECTION
ENGINEERING E
Surface Characterization
LIBRARY C. Richard Brundle, Editor
Fred A. Stevie
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Secondary ion mass spectrometry (SIMS) is a mass spectrometric
THE CONTENT S Secondary
technique for solid materials that can provide elemental analysis e
• Manufacturing at parts per million sensitivity and lateral resolution of 50 nm. c
o
Engineering When those capabilities are combined with the ability to n Ion Mass
• Mechanical provide that analysis as a function of depth, SIMS has proved to d
a
& Chemical be a valued technique for a wide range of applications.
r
Engineering y Spectrometry
• Materials Science This book was written to explain a technique that requires an I
o
understanding of many details in order to properly obtain and
& Engineering n
interpret the data obtained. It also will serve as a reference for
• Civil & M Applications for
those who need to provide SIMS data. The book has over 200
Environmental
a
Engineering figures and the references allow one to trace development of s
s Depth Profiling
SIMS and understand the many details of the technique.
• Electrical
S
Engineering p
Fred A. Stevie is a senior researcher at the Analytical Instru­ and Surface
e
mentation Facility in North Carolina State University (NCSU). c
THE TERMS t
His experience with SIMS exceeds 30 years and covers a wide r Characterization
• Perpetual access for o
range of applications. He has been an analyst in major analytical
m
a one time fee
facilities in Bell Laboratories and NCSU and is familiar with the
e
• No subscriptions or
capabilities of multiple techniques. Fred has authored or co­ t
access fees r
authored books on SIMS and focused ion beams and more than y
• Unlimited
200 technical publications. He also holds 20 patents related to
concurrent usage
surface analysis.
• Downloadable PDFs
• Free MARC records
Fred A. Stevie
For further information,
a free trial, or to order,
contact: 
[email protected]
ISBN: 978-1-60650-588-5
SECONDARY
ION MASS
SPECTROMETRY

SECONDARY
ION MASS
SPECTROMETRY
A D p
pplicAtions for epth rofiling AnD
s c
urfAce hArActerizAtion
FRED A. STEVIE
Analytical Instrumentation Facility,
North Carolina State University
MOMENTUM PRESS, LLC, NEW YORK
Secondary Ion Mass Spectrometry: Applications for Depth Profiling and
Surface Characterization
Copyright © Momentum Press®, LLC, 2016.
All rights reserved. No part of this publication may be reproduced, stored
in a retrieval system, or transmitted in any form or by any means—
electronic, mechanical, photocopy, recording, or any other—except for
brief quotations, not to exceed 400 words, without the prior permission
of the publisher.
First published by Momentum Press®, LLC
222 East 46th Street, New York, NY 10017
www.momentumpress.net
ISBN-13: 978-1-60650-588-5 (print)
ISBN-13: 978-1-60650-589-2 (e-book)
Momentum Press Materials Characterization and Analysis Collection
Collection ISSN: 2377-4347 (print)
Collection ISSN: 2377-4355 (electronic)
Cover and interior design by Exeter Premedia Services Private Ltd.,
Chennai, India
10 9 8 7 6 5 4 3 2 1
Printed in the United States of America
This book is dedicated to my wife, Eileen, whose encouragement
and support throughout my career helped make possible
my contribution to science.

A
bstrAct
Secondary ion mass spectrometry (SIMS) is a mass spectrometric tech-
nique for solid materials that can provide elemental analysis at parts per
million sensitivity and lateral resolution of 50 nm. When those capabili-
ties are combined with the ability to provide that analysis as a function
of depth, SIMS has proved to be a valued technique for a wide range of
applications. This book was written to explain a technique that requires an
understanding of many details in order to properly obtain and interpret the
data. It also will serve as a reference for those who need to provide SIMS
data. The book has over 200 figures and the references allow one to trace
the development of SIMS and help understand the technique.
KEYWORDS
depth profiling, magnetic sector mass analyzer, mass spectrometry,
secondary ion mass spectrometry, time-of-flight mass analyzer, quadrupole
mass analyzer

c
ontents
List of figures xiii
List of tabLes xxi
Preface xxiii
1 comParison of surface anaLyticaL techniques 1
1.1 Common Elemental Surface Analysis Techniques 1
1.2 Introduction to Mass Spectrometry 3
1.3 Brief History of Mass Spectrometry and SIMS 5
1.4 Types of Mass Spectrometry 7
1.5 Rationale for SIMS 8
1.6 Types of SIMS Data 11
References 12
2 sims technique 19
2.1 Interaction of Ions with Matter 19
2.2 Sputtering Process 19
2.3 Sputtering Yield 23
2.4 Preferential Sputtering 28
2.5 Secondary Ion Yield 28
2.6 Oxygen Flood (Oxygen Leak, Oxygen Backfill) 30
2.7 Matrix Effects 32
References 34
3 anaLysis Parameters 39
3.1 Parameters of Interest for Depth Profiling 39
3.2 Primary Beam Polarity and Species 39