Science and Technology of Thin Film Superconductors PDF
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Science and Technology of Thin Film Superconductors Science and Technology of Thin Filtn Superconductors Edited by Robert D. McConnell Solar Energy Research Institute Golden, Colorado and Stuart A. Wolf Naval Research Laboratory Washington, D.C. Plenum Press • New York and London Library of Congress Cataloging in Publication Data Conference on the Science and Technology of Thin Film Superconductors (1988: Colorado Springs, Colo.) Science and Technology of Thin Film Superconductors / edited by Robert D. Mc- Conell and Stuart A. Wolf. p. cm. "Proceedings of the Conference on the Science and Technology of Thin Film Super- conductors, held November 14-18, 1988, in Colorado Springs, Colorado"- T.p. verso. Bibliography: p. Includes index. ISBN-13: 978-1-4684-5660-8 e-ISBN-13: 978-1-4684-5658-5 DOl: 10.1007/978-1-4684-5658-5 I. Superconductors - Congresses. 2. Thin Film devices - Congresses. I. McConnell, Robert D. II. Wolf, Stuart A. III. Title. TK7872.S8C67 1988 89-33432 62I.3-dc20 CIP Proceedings of the Conference on the Science and Technology of Thin Film Superconductors, held November 14-18, 1988, in Colorado Springs, Colorado 1989 Plenum Press, New York Softcover reprint of the hardcover 1st edition 1989 A Division of Plenum Publishing CorporatIOn 233 Spring Street, New York, N.Y. 10013 All rights reserved No part of this book may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, electronic, mechanical, photocopying, microfilming, recording, or otherwise, without written permission from the Publisher PROG~~ COMMITTEE R. McConnell, Solar Energy Research Institute R. Berdahl, Lawrence Berkeley Laboratory R. Blaugher, Intermagnetics General Corp. A. DasGupta, U.S. Department of Energy R. Hammond, Stanford University R. Harris, National Institute of Standards and Technology A. Hermann, University of Arkansas R. Simon, TRW, Inc. K. Wasa, Matsushita Electric Industrial Co., Ltd. S. Wolf, Naval Research Laboratory CONFERENCE ORGANIZERS U.S. Department of Energy Solar Energy Research Institute National Institute of Standards and Technology Naval Research Laboratory Lawrence Berkeley Laboratory CONFERENCE COORDINATOR D. Christodaro, Solar Energy Research Institute PROCEEDINGS R. D. McConnell, Solar Energy Research Institute S. A. Wolf, Naval Research Laboratory v PREFACE The Conference on the Science and Technology of Thin Film Superconductors was conceived in the early part of 1988 as a forum for the specialist in thin film superconductivity. The conference was held on November 14-18, 1988, in Co lorado Springs, Co lorado. Al though many excellent superconductivity conferences had been convened in the wake of the 1986-1987 discoveries in high temperature superconductivity, thin film topics were often dispersed among the sessions of a more general conference agenda. The response to the Conference on the Science and Technology of Thin Film Superconductors confirmed the need for an extended conference devoted to thin film superconductors. These proceedings are a major contribution to the technnology of thin film superconductivity because of the breadth and quality of the articles provided by leaders in the field. The proceedings are divided into articles on laser deposition, sputtering, evaporation, metal organic chemical vapor deposition, thick film, substrate studies, characterization, patterning and applications, and general properties. Most of the articles discuss scientific issues for high temperature thin film superconductors, although the conference was to be a forum for technology and scientific questions for both low and high temperature superconductivity. For the first day of the 5 day conference, Lawrence Berkeley Laboratory had organized an excellent set of short courses in superconduc t ing thin film devices. For the res t of the conference, the program committee had invited speakers for about 25 of the 80 presentations; the remaining contributions appeared either as poster presentations or as additional oral presentations. The program committee was pleased with the quality of the contributed and invited presentations. Ultimately the conference hosted 210 researchers from 13 countries. This conferences was more than a set of technical presentations. It provided an important opportunity for private communications, for the purpose of understanding the latest research and identifying new research topics. Both the ambiance of the Red Lion Inn and other conference activities enhanced this opportunity. The poster session, on the second night of the conference, included a wine and cheese reception. Allen Hermann, whose trombone is as well known in jazz clubs throughout the U.S. as is his work on the thallium compounds, organized the superb Wednesday night entertainment entitled "Dixieland Music Scene." Thursday night's banquet provided an opportunity to reflect on what had been learned and to hear an industry perspective, presented by Donald Hicks, Group Vice President for Ball Aerospace Systems Group, on what needs to be done to realize the commercial potential. of high temperature superconductivity. Friday morning was devoted to the Colorado Superconductivity Shoot Out, an opportunity to compare the thallium vii compounds, bi smuth compounds, and 123 compounds. Randy Simon's presentation was a highlight during the Shoot Out because of his succinct comparison of these compounds using a Consumer Report's format. The conference included visits to the extensive thin film facilities at the Solar Energy Research Institute and the well known superconductivity facilities at Boulder's National Institute of Standards and Technology. There are many people and organizations responsible for the success of ~ conference and we thank the Solar Energy Research Institute and the Office of Energy Storage and Distribution within the U.S. Department of Energy for supporting us in organlzlng the conference. The Naval Research Laboratory, the National Institute of Standards and Technology in Boulder, and Lawrence Berkeley Laboratory provided important contributions. We thank the program committee who enticed so many excellent researchers into making presentations. Diane Christodaro, from the Solar Energy Research Institute, skillfully coordinated the preparations for the conference. Her help was appreciated by all attendees as she and her group resolved individual problems while ensuring the smooth flow of scheduled activities. We thank the many contributors who took the time and effort out of busy schedules to prepare thoughtful, quality, descriptions of their research activities. Finally, we thank Kristine Weber-McConnell and Iris Wolf for their understanding and support while we have pursued this exciting and important new area of research. Robert D. McConnell and Stuart A. Wolf viii CONTENTS LASER DEPOSITION Superconducting Properties of Ultra-Thin Films of YIBa2Cu307_x T. Venkatesan, X.D. Wu, B. Dutta, A. Inam, M.S. Hegde, D.M. Hwang, C.C. Chang, L. Nazar and B. Wilkens.............. 1 Plasma-Assisted Laser Deposition of Superconducting Thin Films - A Basic Study H.S. Kwok, J.P. Zheng, Z.Q. Huang, Q.Y. Ying, S. Witanachchi and D. T. Shaw.................................................... 11 Formation of Bi(Pb)-Sr-Ca-Cu-O Thin Films at 500°C by a Successive Deposition Method Using Excimer Laser T. Kawai, M. Kanai, H. Tabata and S. Kawai...................... 21 The Effect of Annealing Conditions on Laser Deposited Superconducting Bi-Sr-Ca-Cu-O Thin Films B.F. Kim, J. Bohandy, E. Agostinelli, T.E. Phillips, W.J. Green, F.J. Adrian and K. Moorjani. ••••. ••.. .••..••. .•. .•••. .•.• .••. 27 Pulsed Laser Evaporation of TI-Ba-Ca-Cu-O Films S.H. Liou, N.J. Ianno, B. Johs, D. Thompson, D. Meyer and J. A. Woollam................................................ 35 Preparation of High Temperature Superconductor Thin Films on Si Based Substrates by Excimer Laser Ablation, Film-Substrate Interactions, and Plasma Processing Effects on Crystallinity R.A. Neifeld, A. Hansen, R. Pfeffer, E. Potenziani, W. Wilbur, D. Basarab, R. Lareau, J. Shappirio, C. Wrenn, L. Calderon, W. Savin, A. Tauber, G. Liang, S. Gunapala, M. Croft, J. Price, D. Simons, W. T. Hill III, B. Turner, A. Pinkas, J. Zhu and D. Ginley......................................... 45 Laser Ablation Analysis of 1-2-3 Material R. Sega, R. Lawconnell, R. Motes, T. Grycewicz, T. McNeil and J. McNally................................................... 53 Microstructural Investigation of YBa2C~307-6 Films Deposited by Laser Ablation from BaF2/Y203/CuO Targets R.L. Burton, C.U. Segre, H.O. Marcy and C.R. Kannewurf.......... 61 ix EVAPORATION Preparation of Thin and Thick Film Superconductors in the Tl-Ca-Ba-Cu-O System D.S. Ginley, J.F. Kwak, E.L. Venturini, M.A. Mitchell, R.P. Hellmer, B. Morosin, and R.J. Baughman.................. 71 In-Situ Growth of High Tc Thin Films D.K. Lathrop, S.E. Russek, K. Tanabe and R.A. Buhrman........... 81 High Tc Thin Film Research at NRL P.R. Broussard.................................................. 91 Properties of In-Situ S~percon~ucting Yl~a2Cu307-x Films by Molecular Beam Epitaxy with an Actlvated Oxygen Source J. Kwo, M. Hong, D.J. Trevor, R.M. Fleming, A.E. White, R.C. Farrow, A.R. Kortan and K.T. Short...................... 101 Properties of Y-Ba-Cu-O Thin Films Grown In-Situ at Low Temperatures by Co-Evaporation and Plasma Oxidation A.L. de Lozanne, A.B. Berezin, S. Pan, R.M. Silver and E. Ogawa III YBa2Cu307 Thin Films Prepared by Evaporation from Yttrium, Copper and BaF 2 I.D. Raistrick, F.H. Garzon, J.G. Beery, D.K. Wilde, K.N. Springer, R.J. Sherman, R.A. Lemons and A.D. Rollett.... 121 A Simple Technique to Prepare High Quality Superconducting Bi-Sr-Ca-Cu-Oxide Thin Films H.-U. Habermeier, W. Sommer and G. Mertens...................... 131 Preparation of Thin Films YBaCu(F)O with High T and J X.K. Wang, S.J. Lee, K.C. Sheng, Y.H. Shen, §.N. Sogg, R.P.H. Chang and J.B. Ketterson.............................. 141 SPUTTERING Superconducting Phase Control for Rare-Earth-Free High-Tc Superconducting Thin Films K. Wasa, H. Adachi, Y. Ichikawa, K. Hirochi and K. Setsune...... 147 As-Deposited Superconducting Y-Ba-Cu-O Thin Films on Si, Si0 , GaAs 2 and Ni/Cu Substrates by High Pressure DC Sputtering Process R . J. Lin and P. T. Wu............................................ 157 Superconducting Properties of Magnetron Sputtered Bi-Sr-Ca-Cu-O and Tl-Ba-Ca-Cu-O Thin Films R.T. Kampwirth, J.H. Kang and K.E. Gray......................... 165 Film Fabrication of Artificial (BiO)/(SrCaCuO) Layered Structure J. Fujita, T. Tatsumi, T. Yoshitake and H. Igarashi............. 175 Magnetron Sputtering of Thin Films of TI-Ca-Ba-Cu-O P. Arendt, W. Bongianni, N. Elliott and R. Muenchausen.......... 185 Interaction of High Temperature Superconductors with Conductive Oxides A.C. Greenwald, E.A. Johnson, J.S. Wollam, A.J. Gale and N• K. J agg i • • . • • • . • • • • • . . • • . . • • . • . . . . . . . • . . . . • . . • • . • • . . • . . . • • • 193 x Preparation and Characterizations of Bi-Pb-Sr-Ca-Cu-O Superconducting Thin Films G.C. Xiong, H. Gu, T.X. Lin, S.Z. Wang and D.L. yin............. 199 Bi-Sr-Ca-Cu-O Compositional Modulation and Multilayered Film Synthesis by Plasma Controlled Sputtering H. Koinuma, H. Nagata, A. Takano, M. Kawasaki and M. Yoshimoto.. 205 High T Y-Ba-Cu-O Films Prepared bv Multilayer, Reactive Sputtering rrom Separate Y, Cu, and BaO.SCuO•S !argets S.J. Lee, K.C. Sheng, Y.H. Shen, E.D. Rlppert, X.K. Wang, R.P. VanDuyne, R.P.H. Chang and J.B. Ketterson............... 215 Superconducting Tl-Ca-Ba-Cu-O Thin Films R.J. Lin and P. T. Wu............................................ 221 TL-Based Superconducting Films by Sputtering Using a Single Target S.H. Liou, M. Hong, A.R. Kortan, J. Kwo, D.D. Bacon, C.H. Chen, R.C. Farrow and G.S. Grader.................................. 229 Structure and Properties of Magnetron Sputtered Superconducting Y-Ba-Cu-O Films M.E. Golovchanskii, S.N. Ermolov, N.A. Kislov, O.P. Kostyleva, L.S. Kokhanchik, V.A. Marchenko, A.V. Nikulov and V.Zh. Rosenflants............................................ 237 Effect of Annealing Conditions on the Structural and Superconducting Properties of Y-Ba-Cu-O Films J. Ryu, Y. Huang, C. Vittoria, D.F. Ryder, Jr., J. Marzik, R. Benfer and W. Spurgeon.................................... 245 Synthesis of Bi2Sr2CanCun+10x Films by Multilayer Deposition Technique J. Sato, M. Kaise, K. Nakamura and K. Ogawa..................... 253 Study of High Quality YBa2Cu307_y Thin Films B.R. Zhao, C.W. Yuan, J. Gao, Y.Z. Zhang, P. Out, Y.Y. Zhao, Y.M. Yang, P. Xu and L. Li................................... 259 Deposition of TIBaCaCuO Thin Films C.X. Qiu, I. Shih, C. Moreau, B. Champagne and S. Dallaire...... 265 METAL ORGANIC CHEMICAL VAPOR DEPOSITION Metalorganic Chemical Vapor Deposition of Highly Textured Superconducting YBa2Cu307_ Films K. Zhang, B.S. Kwak, E.P. Boy~, A.C. Wright and A. Erbil........ 271 Metal-Organics for CVD of HTcS C.I.M.A. Spee and A. Mackor..................................... 281 Organometallic Chemical Vapor Deposition of Superconducting YBaCuO Films and Post-Deposition Processing J. Zhao, H.O. Marcy, L.M. Tonge, B.W. Wessels, T.J. Marks and C.R. Kannewurf............................................... 295 xi THICK FILM Melt Growth of Bi-Sr-Ca-Cu-O Superconducting Sheets and Filaments T.F. Ciszek and C.D. Evans...................................... 301 Structural and Electrical Properties of Screen Printed and Spray Pyrolized High T Superconducting Films c . K.L. Chopra, P. Pramanlk, B. Roul, S. Chakraborty, T.K. Dey, S. Srinivasan, S.K. Ghatak, and D. Bhattacharya.............. 309 Spray-Deposited Superconducting Bi-Sr-Ca-Cu-O Thin Films R. Sobolewski and W. Kula....................................... 317 SUBSTRATE STUDIES Microstructure and Critical Currents of YBa2Cu307_x Thin Films on SrTi0 and a New Substrate: KTa03 3 R. Feenstra, J.D. Budai, D.K. Christen, M.F. Chisholm, L.A. Boatner, M.D. Galloway, and D.B. Poker.................. 327 Growth of High-Temperature Superconductor Thin Films on Lanthanum Aluminate Substrates R.W. Simon, A.E. Lee, C.E. Platt, K.P. Daly, J.A. Luine, C.B. Eom, P.A. Rosenthal, X.D. Wu and T. Venkatesan.......... 337 Superconducting Films of YBCO on Bare Silicon J. Tate, P. Berberich, W. Dietsche and H. Kinder................ 347 Perovskite Related Substrates for Superconductor Films - Rare Earth Orthogallates R.F. Belt and R. Uhrin.......................................... 353 Preparation of Superconducting Y-Ba-Cu-O Thin Films on Metallic Substrates M. Ozaki, N. Harada, S. Akashita, and J.-C. Chang............... 363 Substrate-HTcS Thin Film Interaction Studies by (S)TEM P.P.J. Ramaekers, D. Klepper and A. Mackor...................... 371 Characterization of Zr0 Buffer Layers for Sequentially Evaporated 2 Y-Ba-Cu-O on Si and Al 0 Substrates 2 3 G.J. Valco, N.J. Rohrer, J.J. Pouch, J.D. Warner and K.B. Bhasin 377 CHARACTERIZATION The Transport Behavior of the YBaCuO Superconducting Thin Films in the Magnetic Fields G.-G. Zheng, D.-Q. Li, W. Wang, J.-Q. Zheng, W.-Y. Guan and P.F. Chen. ••• ••••.•.•••••••••••••••••••••• •••••••.••••.•••... 387 Magnetization, Flux Creep and Transport in Tl-Ca-Ba-Cu-O Thin Films E.L. Venturini, J.F. Kwak, D.S. Ginley, B. Morosin and R.J. Baughman................................................ 395 Composition Analysis of High Tc Bi-Sr-Ca-Cu-O Thin Films by RBS and EPMA N.G. Dhere, J.P. Coral, A.R. Mason, N.R. Parikh and B.K. Patnaik................................................. 407 xii
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