Precision Motion Control: Design and Implementation PDF
Preview Precision Motion Control: Design and Implementation
Advances in Industrial Control Springer-Verlag London Ltd. Other titZes published in this Series: Robust Estimation and Failure Detection Rami Mangoubi Adaptive Internal Model Control Aniruddha Datta Price-Based Commitment Decisions in the Electricity Market Eric Allen and Marija Hit Compressor Surge and Rotating Stall: Modeling and Control Jan Tommy Gravdahl and Olav Egeland Radiotherapy Treatment Planning: New System Approaches Oliver Haas Feedback Control Theory for Dynamic Traffic Assignment Pushkin Kachroo and Kaan Özbay Control and Instrumentation for Wastewater Treatment Plants Reza Katebi, Michael A. Johnson & Jacqueline Wilkie Autotuning of PID Controllers Cheng-Ching Yu Robust Aeroservoelastic Stability Analysis Rick Lind & Marty Brenner Performance Assessment of Control Loops: Theory and Applications Biao Huang & Sirish L. Shah Data Mining and Knowledge Discovery for Process Monitoring and Control Xue Z.Wang Advances in PID Control Tan Kok Kiong, Wang Quing-Guo & Hang Chang Chieh with Tore J. Hägglund Advanced Control with Recurrent High-order Neural Networks: Theory and Industrial Applications George A. Rovithakis & Manolis A. Christodoulou Structure and Synthesis of PID Controllers Aniruddha Datta, Ming-Tzu Ho and Shankar P. Bhattacharyya Data-driven Techniques for Fault Detection and Diagnosis in Chemical Processes Evan L. Russell, Leo H. Chiang and Richard D. Braatz Bounded Dynamic Stochastic Systems: Modelling and Control HongWang Non-linear Model-based Process Control Rashid M. Ansari and Moses O. Tade Identijication and Control of Sheet and Film Processes Andrew P. Featherstone, Jeremy G. VanAntwerp and Richard D. Braatz Tan Kok Kiong, Lee Tong Heng, Dou Huifang and Huang Sunan Precision Motion Control Design and Implementation With 175 Figures t Springer Tan Kok Kiong, PhD Lee Tong Heng, PhD Dou Huifang, PhD Huang Sunan, PhD Department of Electrical Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576 ISBN 978-1-4471-3693-4 ISBN 978-1-4471-3691-0 (eBook) DOI 10.1007/978-1-4471-3691-0 British Library Cataloguing in Publication Data Precision motion contro!. -(Advances in industrial control) 1.Motion control deviees 2. Automatie control I.Tan, Kok Kiong, 1967- 629.8 Library of Congress Cataloging-in-Publication Data Precision motion control / Tan Kok Kiong ... [et al.]. p. cm. - (Advances in industrial control) Includes bibliographieal references and index. 1. Motion control devices. 1. Tan, Kok Kiong, 1967-11. Series. TJ214.5. P74 2001 670.42'7-21 00-039473 Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographie reproduction in accordance with the terms oflieences issued by the Copyright Lieensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. © Springer-Verlag London 2001 Originally published by Springer-Verlag London Limited in 2001. Softcover reprint of the hardcover 1s t edition 2001 MATLAB® and SIMULINK® are the registered trademarks of The Math Works Inc., 3 Apple HilI Drive Natiek, MA 01760-2098, U.S.A. http://www.mathworks.com The use of registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant laws and regulations and therefore free for general use. The publisher makes no representation, express or implied, with regard to the accuracy of the information contained in this book and cannot accept any legal responsibility or liability for any errors or omissions that may be made. Typesetting: Electronie text files prepared by authors 69/3830-543210 Printed on acid-free paper SPIN 10768820 Advances in Industrial Control Series Editors Professor Michael J. Grimble, Professor of Industrial Systems and Director Professor Michael A. Johnson, Professor of Control Systems and Deputy Director Industrial Control Centre Department of Electronic and Electrical Engineering University of Strathclyde Graham Hills Building 50 George Street Glasgow GI lQE United Kingdom Series Advisory Board Professor Dr-Ing J. Ackermann DLR Institut für Robotik und Systemdynamik Postfach 1116 D82230 Weßling Germany Professor I.D. Landau Laboratoire d'A utomatique de Grenoble ENSIEG, BP 46 38402 Saint Martin d'Heres France Dr D.C. McFarlane Department of Engineering University of Cambridge Cambridge CB2 1Q J Uni ted Kingdom Professor B. Wittenmark Department of Automatic Control Lund Institute of Technology PO Box 118 S-221 00 Lund Sweden Professor D.W. Clarke Department of Engineering Science University of Oxford Parks Road Oxford OX1 3PJ United Kingdom Professor Dr -Ing M. Thoma Institut für Regelungstechnik Universität Hannover Appelstr. 11 30167 Hannover Germany Professor H. Kimura Department of Mathematical Engineering and Information Physics Faculty of Engineering The University of Tokyo 7-3-1 Hongo Bunkyo Ku Tokyo 113 Japan Professor A.J. Laub College of Engineering -Dean's Office University of California One Shields Avenue Davis California 95616-5294 United States of America Professor J.B. Moore Department of Systems Engineering The Australian National University Research School of Physical Sciences GPO Box 4 Canberra ACT 2601 Australia Dr M.K. Masten Texas Instruments 2309 Northcrest Plano TX 75075 United States of America Professor Ton Backx AspenTech Europe B.Y. De Waal32 NL-5684 PH Best The Netherlands SERIES EDITORS' FOREWORD The series Advances in Industrial Control aims to report and encourage technol ogy transfer in control engineering. The rapid development of control technolo gy has an impact on all areas of the control discipline. New theory, new controllers, actuators, sensors, new industrial processes, computer methods, new applications, new philosophieso, new challenges. Much of this development work resides in industrial reports, feasibility study papers and the reports of advanced collabo rative projects. The series offers an opportunity for researchers to present an extended exposition of such new work in all aspects of industrial control for wider and rapid dissemination. The controllaboratories of the National University of Singapore (NUS) must be amongst the best equipped in the world. There is a strong emphasis on prac tical control engineering at the University. The control group at NUS is also explor ing the emerging control technologies of intelligent control, fuzzy logic, neural networks and genetic algorithms with commendable vigour. The emphasis is on making control work. This new monograph on Precision Motion Control by Dr. Kok Kiong Tan, Professor Tong Heng Lee and their research colleagues Huifang Dou and Sunan Huang clearly reflects the desire to pursue cutting-edge technologies and simul taneously to investigate new emerging technology control methods. The mono graph contains a valuable introduction to the engineering and applications aspects of nanotechnology before progressing onto the control aspects of the problems involved. Later chapters introduce co-ordinated control system applications and present an in-depth study of the control, measurement and implementation prob lems of these high precision systems. The final chapter surveys related engineer ing issues involved in precision motion system applications. The monograph is a very welcome addition to the Advances in Industrial Control and will interest electrical, mechanical and control engineers both in industry and academia. M.J. Grimble and M.A. Johnson Industrial Control Centre Glasgow, Scotland, UK PREFACE Precision manufacturing has been steadily gathering momentum and atten tion over the last century in terms of research, development, and application to product innovation. The driving force in this development appears to arise from requirements for much higher performance of products, higher relia bility, longer life, lower cost, and miniaturisation. This development is also widely known as precision engineering and, today, it can be generaHy defined as manufacturing to tolerances which are better than one part in 105. The historical roots of precision engineering are arguably in the field of horol ogy, the development of chronometers, watches and optics, e.g., the manu fact ure of mirrors and lenses for telescopes and microscopes. Major contri butions were made to the development of high-precision machine tools and instruments in the late 1800s and early 1900s by ruling engines for the man ufacture of scales, reticules and spectrographic diffraction gratings. Today, ultra-precision machine tools under computer control can position the tool relative to the workpiece to aresolution and positioning accuracy in the order better than micrometers. It must be noted that achievable "machining" accu racy includes the use of not only machine tools and abrasive techniques, but also energy beam processes such as ion beam and electron beam machining, as weH as scanning probe systems for surface measurement and pick-and-place type of manipulation. In the new millenium, ultra-precision manufacture is poised to progress fur ther and to enter the nanometer scale regime (nanotechnology). Increasing packing density on integrated circuits and sustained breakthrough in min imum feature dimensions on semiconductor set the pace in the electronics industry. Emerging technologies such as Micro-electro-mechanical Systems (MEMS), otherwise known as Micro-systems Technology (MST) in Europe expand furt her the scope of miniaturisation and integration of electrical and mechanical components. This book is focused on the enabling technologies in the realisation of preci sion motion positioning systems. It is a compilation of the major results and publications from a project set out to develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of x Preface the subject matter is provided in a manner which is amenable to a broad base of readers, ranging from the academics to the practitioners, by provid ing detailed experimental verifications of the developed materials. The book begins with an introduction to precision engineering and nan otechnology, and provides abrief survey of its development, nanotechnology processes and applications. Chapter 2 addresses the control system technol ogy to achieve high-precision motion control in motion systems. Intelligent control schemes are presented which can yield high performance in terms of tracking accuracy. These control schemes use different combinations of ad vanced control theory and artificial intelligence according to the information available and the nature of operations. These include an adaptive control scheme, a composite control scheme comprising linear and non-linear control components, an adaptive ripple compensation scheme, a disturbance observer and compensation scheme, and a learning control strategy. Experiment re sults are duly provided for comparison and verification of the performance and improvement achievable over standard controllers. The use of a high grade accelerometer in providing direct acceleration measurements and an illustration of the possible enhancement in tracking performance achievable with additional state feedback are clearly elaborated. While the materials are applied to the subject matter, they are sufficiently generic to interest general control specialists and practitioners. Chapter 3 presents relay feedback configurations and techniques which are suitable to produce nominal models for the motion systems, based on sus tained small amplitude oscillations induced in the closed-loop. In this way, the control systems as presented in Chapter 2 can be automatically tuned and commissioned, and yet satisfactory performance can be achieved. A vari ation of the basic configuration to facilitate the automatic modelling of the frictional effects is also given. These models can be used to commission feed forward and feedback controllers, and they are also useful for the initialisation of adaptive control. A scheme is provided for optimal features extraction from possibly noisy relay oscillations. Chapter 4 addresses a popular configuration of precision cartesian robotic systems, the moving gantry stage, which is frequently employed in wafer steppers and fine resolution assembly machines. Apart from individual servo tracking requirements, it is also necessary that the parallel servo systems move in tandem to minimise the inter-axis offsets. Different control config urations are presented and compared in terms of their performance. These include control schemes used in existing industrial control systems, as weIl as more re cent developments. Chapter 5 presents a comprehensive treatment of the topic of geometrical error calibration and compensation. The sources of geometrical errors, the calibration equipment used in their measurement, treatment and modelling Preface xi from the raw data set to the final compensation via the control system are among the topics which will be delivered systematically in this chapter. Re cent and refreshing advances in geometrical calibration and compensation are also presented in the chapter, which include the use of Artificial Intelligence (AI) approaches in geometrical error modelling. Possible probabilistic ap proaches, formulated to reduce the influence of random errors from affecting the systematic error compensation, are also presented in the chapter. Chapter 6 addresses explicitly the measurement system. Precision motion control can only be possible with precision motion measurements. Encoder interpolation is a cost effective way to derive fine resolution position mea surements using only devices and instruments at moderate costs. Techniques are presented to correct for imperfections in encoder signals and to derive fractional resolution from the corrected signals to fulfill high-resolution re quirements in the input signals for the control system. Chapter 7 will touch on the topic of vibration monitoring and control. Two approaches are presented. The first is based on the notch filter and its ap plication as part of the control system to suppress frequencies which may excite undesirable mechanical resonance. An adaptive technique based on Fast Fourier Trans/arm (FFT) tracks the resonant frequency and adapts the filter accordingly. The second approach uses a technique based on sensor fusion to monitor and analyse the vibration of precision machines. A DSP device is used to learn and capture the vibration signature of the machine under normal operational circumstances. When the machine deviates from its normal operational condition, the device can detect the abnormality and activates appropriate fault diagnostic and maintenance measures. Finally, in Chapter 8, other important engineering aspects behind the con struction of a high-precision motion control system are discussed. These in clude the considerations behind selection of components, hardware architec ture, software development platform, user interface design, and also evalua tion tests which are crucial in determining the final success of the system. This book will not be possible without the generous assistance of the following colleagues and friends: Dr Lim Ser Yong, Dr Fang Zhong Ping, Dr Fong Aik Meng, Dr Zhou Huixing, Mr Jiang Xi, Mr Tang Kok Zuea, Miss Chin Shok Jun and Mr Seet Hoe Luen. The authors would like to express their sincere appreciation of their kind assistance provided in the writing of the book. They would also like to thank the National University of Singapore (NUS) and GINTIC Institute of Manufacturing Technology for co-funding the pro ject R-263-000-138-593 from which most of the information and results reported in the book have originated. The authors also acknowledge the kind permission from Hewlett Packard for the reproduction of figur es relating to laser measurement systems.
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