Precision Motion Control: Design and Implementation PDF
Preview Precision Motion Control: Design and Implementation
Advances in Industrial Control Other titles published in this series: Digital Controller Implementation Modelling and Control of Mini-Flying and Fragility Machines Robert S.H. Istepanian and James F. Pedro Castillo, Rogelio Lozano and Whidborne (Eds.) Alejandro Dzul Optimisation of Industrial Processes Ship Motion Control at Supervisory Level Tristan Perez Doris Sáez, Aldo Cipriano and Andrzej W. Ordys Hard Disk Drive Servo Systems (2nd Ed.) Ben M. Chen, Tong H. Lee, Kemao Peng Robust Control of Diesel Ship Propulsion and Venkatakrishnan Venkataramanan Nikolaos Xiros Measurement, Control, and Hydraulic Servo-systems Communication Using IEEE 1588 Mohieddine Jelali and Andreas Kroll John C. Eidson Model-based Fault Diagnosis in Dynamic Systems Using Identification Techniques Piezoelectric Transducers for Vibration Silvio Simani, Cesare Fantuzzi and Ron J. Control and Damping Patton S.O. Reza Moheimani and Andrew J. Fleming Strategies for Feedback Linearisation Freddy Garces, Victor M. Becerra, Manufacturing Systems Control Design Chandrasekhar Kambhampati and Stjepan Bogdan, Frank L. Lewis, Zdenko Kevin Warwick Kovačić and José Mireles Jr. Robust Autonomous Guidance Windup in Control Alberto Isidori, Lorenzo Marconi and Peter Hippe Andrea Serrani Nonlinear H /H Constrained Feedback Dynamic Modelling of Gas Turbines 2 ∞ Control Gennady G. Kulikov and Haydn A. Thompson (Eds.) Murad Abu-Khalaf, Jie Huang and Frank L. Lewis Control of Fuel Cell Power Systems Jay T. Pukrushpan, Anna G. Stefanopoulou Practical Grey-box Process Identification and Huei Peng Torsten Bohlin Fuzzy Logic, Identification and Predictive Control of Traffic Systems in Buildings Control Sandor Markon, Hajime Kita, Hiroshi Kise Jairo Espinosa, Joos Vandewalle and and Thomas Bartz-Beielstein Vincent Wertz Wind Turbine Control Systems Optimal Real-time Control of Sewer Fernando D. Bianchi, Hernán De Battista Networks and Ricardo J. Mantz Magdalene Marinaki and Markos Papageorgiou Advanced Fuzzy Logic Technologies in Industrial Applications Process Modelling for Control Ying Bai, Hanqi Zhuang and Dali Wang Benoît Codrons (Eds.) Computational Intelligence in Time Series Forecasting Practical PID Control Ajoy K. Palit and Dobrivoje Popovic Antonio Visioli Tan Kok Kiong • Lee Tong Heng • Huang Sunan Precision Motion Control Design and Implementation Second Edition 123 Tan Kok Kiong, PhD Lee Tong Heng, PhD Huang Sunan, PhD Department of Electrical and Computer Engineering National University of Singapore 4 Engineering Drive 3 Singapore 117576 Singapore ISBN 978-1-84800-020-9 e-ISBN 978-1-84800-021-6 DOI 10.1007/978-1-84800-021-6 Advances in Industrial Control series ISSN 1430-9491 British Library Cataloguing in Publication Data Tan, Kok Kiong, 1967- Precision motion control : design and implementation. - 2nd ed. - (Advances in industrial control) 1. Motion control devices 2. Automatic control I. Title II. Lee, Tong Heng, 1958- III. Huang, Sunan, 1962- 629.8 ISBN-13: 9781848000209 Library of Congress Control Number: 2007939805 © 2008, 2001 Springer-Verlag London Limited MATLAB® and Simulink® are registered trademarks of The MathWorks, Inc., 3 Apple Hill Drive, Natick, MA 01760-2098, USA. http://www.mathworks.com Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms of licences issued by the Copyright Licensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. The use of registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant laws and regulations and therefore free for general use. The publisher makes no representation, express or implied, with regard to the accuracy of the information contained in this book and cannot accept any legal responsibility or liability for any errors or omissions that may be made. Cover design: eStudio Calamar S.L., Girona, Spain Printed on acid-free paper 9 8 7 6 5 4 3 2 1 springer.com Advances in Industrial Control Series Editors Professor Michael J. Grimble, Professor of Industrial Systems and Director Professor Michael A. Johnson, Professor (Emeritus) of Control Systems and Deputy Director Industrial Control Centre Department of Electronic and Electrical Engineering University of Strathclyde Graham Hills Building 50 George Street Glasgow G1 1QE United Kingdom Series Advisory Board Professor E.F. Camacho Escuela Superior de Ingenieros Universidad de Sevilla Camino de los Descubrimientos s/n 41092 Sevilla Spain Professor S. Engell Lehrstuhl für Anlagensteuerungstechnik Fachbereich Chemietechnik Universität Dortmund 44221 Dortmund Germany Professor G. Goodwin Department of Electrical and Computer Engineering The University of Newcastle Callaghan NSW 2308 Australia Professor T.J. Harris Department of Chemical Engineering Queen’s University Kingston, Ontario K7L 3N6 Canada Professor T.H. Lee Department of Electrical Engineering National University of Singapore 4 Engineering Drive 3 Singapore 117576 Professor Emeritus O.P. Malik Department of Electrical and Computer Engineering University of Calgary 2500, University Drive, NW Calgary Alberta T2N 1N4 Canada Professor K.-F. Man Electronic Engineering Department City University of Hong Kong Tat Chee Avenue Kowloon Hong Kong Professor G. Olsson Department of Industrial Electrical Engineering and Automation Lund Institute of Technology Box 118 S-221 00 Lund Sweden Professor A. Ray Pennsylvania State University Department of Mechanical Engineering 0329 Reber Building University Park PA 16802 USA Professor D.E. Seborg Chemical Engineering 3335 Engineering II University of California Santa Barbara Santa Barbara CA 93106 USA Doctor K.K. Tan Department of Electrical Engineering National University of Singapore 4 Engineering Drive 3 Singapore 117576 Professor Ikuo Yamamoto The University of Kitakyushu Department of Mechanical Systems and Environmental Engineering Faculty of Environmental Engineering 1-1, Hibikino,Wakamatsu-ku, Kitakyushu, Fukuoka, 808-0135 Japan Series Editors’ Foreword The series Advances in Industrial Control aims to report and encourage technology transfer in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. New theory, new controllers, actuators, sensors, new industrial processes, computer methods, new applications, new philosophies…, new challenges. Much of this development work resides in industrial reports, feasibility study papers and the reports of advanced collaborative projects. The series offers an opportunity for researchers to present an extended exposition of such new work in all aspects of industrial control for wider and rapid dissemination. A striking development in the Advances in Industrial Control series that has occurred over the last few years have been the appearance in the series of highly authoritative volumes that are more comprehensive than the usual monograph for a particular technical area in industrial control. The Editors believe these volumes have set new standards for the presentation of knowledge and industrial control research in their specific fields. Typical examples are: Hydraulic Servo-systems by Mohieddine Jelali and Andreas Kroll, Control of Fuel Cell Power Systems by Jay Pukrushpan, Anna Stephanopoulou and Huei Peng, Hard Disk Drive Servo Systems (now in its second edition) by Ben Chen, Tong Heng Lee, Kemao Peng and Venkatakrishnan Venkataramanan, Piezoelectric Transducers for Vibration Control and Damping by Reza Moheimani and Andrew Fleming, and finally Wind Turbine Control Systems by Fernando Bianchi, Hernán De Battista and Ricardo Mantz. These and other volumes like them in the series all seemed to capture the “spirit of the age” in the field of individual control in the new millennium. To these volumes, the Editors are very pleased to add a second edition of Precision Motion Control by Kok Kiong Tan, Tong Heng Lee and Sunan Huang; this is a revision of a volume that was first published in the Advances in Industrial Control series in 2001. The new volume presents a revised and systematic coverage of many of the theoretical and practical aspects of precision motion control. A strong feature of the volume is its presentation and integration of industrial control methods with new advanced control solutions in this field. This is often illustrated by presenting experimental results that span the full range of hardware implementations, from viii Series Editors’ Foreword classical control through to new control solutions advanced by the authors. The authors often approach the control engineering problems by starting with standard industrial control solutions (usually PID) and go on to show how system performance can be enhanced by the addition of advanced control features. In some cases completely new advanced control approaches are proposed. Models, too, are sufficiently complex to capture important nonlinear system effects like friction and ripple. An example of the authors’ approach can be found in their treatment of the control for permanent magnet linear motors. The system model is basically linear in structure with additional nonlinear loops to represent the debilitating physical effects of friction and force ripple. The control system design begins from classical PID control which is then augmented by feed-forward control and adaptive radial- basis-function (RBF) compensation to achieve enhanced system performance in the presence of nonlinear disturbances. As well as being a compendium of the technology used in state-of-the-art precision motion control – and indeed there are many excellent descriptions of equipment, hardware, software and techniques used in this field – the volume has interesting reports of new approaches to real problems in precision motion control. Three examples illustrate the types of approach taken. In Chapter 3, new applications are described for the relay experiment; in this particular case, it is used to identify a friction model to enhance the control design. In Chapter 4, the co- ordinated control of a gantry system is investigated, and the performance of PID compared with that of an adaptive controller; however, real performance enhancements are shown to accrue to those control strategies that overcome the multivariable interactions that are present in the system. Finally, Chapter 7 reports on a mechatronics approach to control design where the structural design of the machine is seamlessly integrated with the control system design. This second edition of Precision Motion Control is likely to become a source book for a very wide range of readers. It has industrial perspectives, current state- of-the-art hardware descriptions, academic perspectives and advanced control system solutions often explained from initial conception right through to results from laboratory rigs and prototype tests. Thus, the volume makes a very welcome and appropriate contribution to the Advances in Industrial Control series. Industrial Control Centre M.J. Grimble Glasgow M.A. Johnson Scotland, UK 2007 Preface Precisionmanufacturinghasbeensteadilygatheringmomentumandattention over the last century in terms of research, development, and application to product innovation. The driving force in this development appears to arise fromrequirementsformuchhigherperformanceofproducts,higherreliability, longer life, lower cost, and miniaturisation. This development is also widely known as precision engineering and, today, it can be generally defined as manufacturing to tolerances which are better than one part in 105. The historical roots of precision engineering are arguably in the field of horology,thedevelopmentofchronometers,watchesandoptics,e.g.,theman- ufacture of mirrors and lenses for telescopes and microscopes. Major contri- butions were made to the development of high-precision machine tools and instruments in the late 1800s and early 1900s by ruling engines for the man- ufacture of scales, reticules and spectrographic diffraction gratings. Today, ultra-precision machine tools under computer control can position the tool relative to the workpiece to a resolutionand positioning accuracyin anorder better thanmicrometers.Itmustbenotedthatachievable“machining”accu- racy includes the use of not only machine tools and abrasive techniques, but alsoenergybeamprocessessuchasionbeamandelectronbeammachining,as well as scanning probe systems for surface measurement and pick-and-place types of manipulation. In the new millenium, ultra-precision manufacture is poised to progress furtherandtoenterthe nanometerscaleregime(nanotechnology).Increasing packing density on integrated circuits and sustained breakthrough in min- imum feature dimensions of semiconductors set the pace in the electronics industry. Emerging technologies such as Micro-electro-mechanical Systems (MEMS), otherwise known as Micro-systems Technology (MST) in Europe further expands the scope of miniaturisationandintegrationof electricaland mechanical components. Thisbookisfocusedontheenablingtechnologiesintherealisationofpre- cision motion positioning systems. It is a compilation of the major results and publications from projects set out to developstate-of-the-arthigh-speed, x Preface ultra-precision robotic systems. A comprehensive and thorough treatment of the subject matter is provided in a manner amenable to a broad base of readers, ranging from academics to practitioners, by providing detailed ex- perimental verifications of the developed materials. The book begins with an introduction to precision engineering, and pro- vides a brief survey of its development and applications. Chapter 2 addresses thecontrolsystemtechnologytoachievehigh-precisionmotioncontrolinmo- tion systems. Intelligent control schemes are presented which can yield high performanceintermsoftrackingaccuracy.Thesecontrolschemesusedifferent combinations of advanced control theory and artificial intelligence according to the information available and the nature of operations. These include an adaptive control scheme, a composite control scheme comprising linear and non-linear control components, an adaptive ripple compensation scheme, a disturbance observer and compensation scheme, and a learning control strat- egy.Experimentalresultsaredulyprovidedforcomparisonandverificationof the performance and improvement achievable over standard controllers. The use of a high grade accelerometer in providing direct acceleration measure- mentsandanillustrationofthepossibleenhancementintrackingperformance achievable with additional state feedback are clearly elaborated. While the materials are applied to the subject matter, they are sufficiently generic to interest general control specialists and practitioners. Chapter 3 presents relay feedback configurations and techniques which are suitable to produce nominal models for the motion systems, based on sustainedsmallamplitude oscillationsinducedintheclosed-loop.Inthis way, thecontrolsystemsaspresentedinChapter2canbeautomaticallytunedand commissioned,and yet satisfactory performance can be achieved.A variation ofthebasicconfigurationtofacilitatetheautomaticmodellingofthefrictional effectsisalsogiven.Thesemodelscanbeusedtocommissionfeedforwardand feedback controllers,andthey arealso useful for the initialisationof adaptive control. A scheme is provided for optimal features extraction from possibly noisy relay oscillations. Chapter4addressesapopularconfigurationofprecisionCartesianrobotic systems,themovinggantrystage,whichisfrequentlyemployedinwaferstep- persandfineresolutionassemblymachines.Apartfromindividualservotrack- ing requirements, it is also necessary that the parallel servo systems move in tandem to minimise the inter-axisoffsets.Different controlconfigurationsare presentedandcomparedin terms of their performance.These include control schemes used in existing industrial control systems, as well as more recent developments. Chapter 5 presents a comprehensive treatment of the topic of geometrical error calibration and compensation. The sources of geometrical errors, the calibration equipment used in their measurement, treatment and modelling from the raw data set to the final compensation via the control system are amongthetopicswhichwillbedeliveredsystematicallyinthischapter.Recent andrefreshingadvances in geometricalcalibrationand compensationare also
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