Precision Linear Actuators, Motor Actuator, Piezo Motor, Ceramic Motor, Ceramic Actuators

58 Pages·2007·1.61 MB·English

Linear Actuators for
Precision Motion Control(cid:1)(cid:15)(cid:1)(cid:18)(cid:16)(cid:16)(cid:24)
Solutions featuring Novel Piezoelectric Motors and Classical Motors
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Latest PI Catalogs:
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Precision Linear Actuators Overview
Motion Control with Piezoelectric / Servo / Stepper Motors
PI is the leading manufacturer
of ultra-high-precision actua-
tors for nanopositioning and
micropositioning applications
in industries such as Semi-
conductors; Biotechnology and
Medicine; Lasers, Optics, Micros-
copy; Aerospace Engineering;
PrecisionMachining;Astronomy
and Microsystems Technology.
Section a Section b Section c
Motorized Screw Type Actuators PILine® Ceramic Ultrasonic Piezo NEXACT® Compact Piezo
(cid:2) Motor Actuators Stepping Motor Actuators
DC & Stepper Motors
(cid:2) Forces to 400 N (cid:2) High-Speed Piezomotors and (cid:2) PiezoWalk®Drive
(cid:2) Travel to 50 mm Drives (cid:2) Compact Dimensions
(cid:2) Resolution to 50 nm (cid:2) Velocity to 800 mm/s (cid:2) Forces to 10 N
(cid:2) Compact Dimensions (cid:2) <0.1 nm Resolution
(cid:2) Travel to 150 mm (Basically (cid:2) Self-Locking at Rest
Unlimited) (cid:2) Travel to 25 mm (Basically
(cid:2)
Forces to 7 N Unlimited)
(cid:2) Self-Locking at Rest (cid:2) Velocity to 10 mm/s
(cid:2) Resolution to 20 nm (cid:2) Non-Magnetic, Vacuum
(cid:2)
Non-Magnetic, Vacuum Compatible
Compatible
Section c Section d Section e Section f
NEXLINE® High-Force Piezo Flexure-Guided Piezo Piezo Stack Actuators Motion Controllers (Examples)
Stepping Motor Actuators Actuators (cid:2) PICMA®Multilayer and (cid:2) Controllers for Servo Motors
(cid:2) PiezoWalk®Drive (cid:2) PICMA®Piezoceramic PICA™ Stack Actuators and Stepper Motors
(cid:2) Non-Magnetic, Vacuum Multilayer Actuators (cid:2) Forces to 100 kN (cid:2) Controllers for Ultrasonic
(cid:2) (cid:2)
Compatible Sub-Nanometer Resolution Sub-Nanometer Resolution Linear Motors
(cid:2) Forces to 600 N (cid:2) Fast Response (Millisecond- (cid:2) Fast Response (to (cid:2) Controllers for NEXACT®
(cid:2) <0.1 nm Resolution Range) Microsecond-Range) Linear Motors
(cid:2) Self-Locking at Rest (cid:2) Excellent Guiding Precision (cid:2) High Reliability and Long (cid:2) Controllers for Piezo Actuators
(cid:2) Basically Unlimited Travel (cid:2) Travel to 1.8 mm Lifetime and Flexure Stages
(cid:2) High Reliability, Long Life (cid:2) Travel to 200 µm
(cid:2) High-Dynamics Mode Visit www.pi.ws for our
full selection of motion
controllers & software solutions.
1
Piezo • Nano • Positioning
M-228 Stepper Motor Actuator
Cost-Effective Stepper-Mike Linear Actuator with Limit Switches
the non-rotating-tip design of-
Ordering Information
fers several advantages:
M-228.10S
(cid:2)Elimination of torque-induc- Stepper-Mike Linear Actuator,
ed positioning errors 10 mm, Limit Switches
(cid:2)
Elimination of sinusoidal Ask about custom designs!
motion errors
(cid:2)
Elimination of wear at the
contact point
(cid:2)
Elimination of tip-angle-
dependent wobble
Limit and Reference Switches
For the protection of your equip-
ment, non-contact Hall-effect
M-228 linear actuator
limit and reference switches are
installed. The direction-sensing
(cid:2) reference switch supports ad-
Cost-Effective Design
vanced automation applications
(cid:2)
10 mm Travel Range
with high precision.
(cid:2)
46 nm Resolution with C-663 Controller
(cid:2)
Non-Rotating Tip
Technical Data
(cid:2)
Max. Velocity 1.5 mm/s
M-228.10S Units
(cid:2)
Non-contact Limit and Reference Switches
Active axes X
(cid:2)
Compact Design
Motion and positioning
Travel range 10 mm
Sensor resolution Cts./rev.
Design resolution 0.046* µm
Minimum incremental motion 0.15* µm
Backlash 5** µm
The linear actuators of the design offers many useful fea-
Unidirectional repeatability 1 µm
M-228 series provide a travel tures such as a non-rotating
Accuracy 10 µm
range of 10 mm and are tip, limit and reference switch-
w Max. velocity 1.5* mm/s
ne equipped with high-resolution es and a mechanical position
y Origin repeatability 1 µm
an stepper motors with gearbox. display.
y Mechanical properties
b Together with the C-663 con-
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a-1
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M-227 Servo Motor Actuators
High-Resolution DC-Mike Actuators
Ordering Information
M-227.10
DC-Mike Actuator, 10 mm
M-227.25
DC-Mike Actuator, 25 mm
M-227.50
DC-Mike Actuator, 50 mm
M-219.10
Ball Tip
M-250.20
Piezo Translator
Ask about custom designs!
M-227.10 (w/ piezo tip), M-227.25, M-227.50 (w/ ball tip),
high-resolution DC-Mike actuators and several tip options
(cid:2) 10, 25 & 50 mm Travel Ranges High-Resolution Piezo Option
(cid:2)
0.05 µm Minimum Incremental Motion All models come with standard
(cid:2) Non-Rotating Tip flat tips. A variety of other tips
(cid:2) Closed-Loop DC Motor are also available, such as a
(cid:2) piezoelectric tip featuring 20
Compatible with Leading Industrial Motion Controllers
(cid:2) µm travel with sub-nanometer
Sub-nm Resolution with Optional PZT Drive
resolution for dynamic scan-
(cid:2)
>5,000 Hours MTBF
ning and tracking (see page
7-85).
For mounting, the DC-Mikes
are clamped around the 19 mm
diameter section. High forces
M-227 are ultra-high-resolution M-227 actuators provide a cost-
around the 16 mm diameter
linear actuators providing lin- effective solution for industrial
section must be avoided, as
ear motion up to 50 mm with and OEM environments. Based
must be lateral forces on the
sub-micron resolution in a on the successful M-222/M-226
tip.
compact package. They consist series which they replace,
of a micrometer with non-rotat- M-227 DC Mikes offer both im-
Stepper-motor-driven versions
ing tip, driven by a closed-loop proved specs and reduced
of the M-227 are available on
DC-motor/gearhead combina- costs. The combination of an
request. For higher loads and
tion with motor-shaft-mounted extremely low stiction/friction
integrated limit switches refer
high-resolution encoder (2048 construction and high-resolu-
to the M-230 and M-235 (see
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a-2
Piezo • Nano • Positioning
M-219.10 ball tip option P-250.20 piezo tip option
M-227 DC-Mike, dimensions (in mm). C-815.38 motor cable included: 3 m, sub-D, 15/15 pin (m/f).
Technical Data
Models M-227.10 M-227.25 M-227.50 Units Notes see page 7-106
Travel range 10 25 50 mm
Design resolution 0.0035 0.0035 0.0035 µm A3
Min. incremental motion 0.05 0.05 0.05 µm A4
Unidirectional repeatability 0.1 0.1 0.1 µm
Backlash 2 2 2 µm
Max. velocity 1 1 1 mm/s
Max. push/pull force* 40 40 40 N
Max. lateral force 0.1 0.1 0.1 N (at tip)
Encoder resolution 2048 2048 2048 counts/rev.
Drivescrew pitch 0.5 0.5 0.5 mm/rev.
Gear ratio 69.12:1 69.12:1 69.12:1
Nominal motor power 2 2 2 W
Motor voltage 12 12 12 V
Weight 0.16 0.22 0.26 kg
Recommended motor controllers C-842, C-844, C-860 C-842, C-844, C-860 C-842, C-844, C-860 D2 * Higher forces on request
a-3
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M-230 Servo & Stepper Motor Actuators
High-Resolution Closed-Loop DC-Mike & Stepper Actuators
Ordering Information
M-230.10
DC-Mike Actuator, 10 mm, Limit
Switches
M-230.25
DC-Mike Actuator, 25 mm, Limit
Switches
M-230.10S
Stepper-Mike Actuator, 10 mm,
Limit Switches
M-230.25S
Stepper-Actuator, 25 mm, Limit
Switches
M-230.10, M-230.25, high-resolution DC-Mike actuators, 10 and 25 mm travel range
Ask about custom designs!
(cid:2) 10 & 25 mm Travel Range Integrated Line Drivers features integrated line drivers
(cid:2) 0.05 µm Minimum Incremental Motion M-230 actuators include an for cable lengths up to 10
(cid:2) Non-Rotating Tip integral 0.5 m cable with 15-pin meters between actuator and
(cid:2) sub-D connector and a 3 m controller.
Velocity to 2 mm/sec.
(cid:2) extension cable. On the DC-
Closed-Loop DC Motors and Stepper Motors
servo versions, the connector A screw-in ball tip and a flat tip
(cid:2)
Compatible with Leading Industrial Motion Controllers are included.
(cid:2)
Integrated Hall-Effect Origin and Limit Switches
(cid:2) Front Mount or Clamp Mount For higher loads and travel
(cid:2) >5,000 Hours MTBF ranges refer to the M-235 on
page 7-82.
M-230 are ultra-high-resolution (cid:2) Elimination of torque-
linear actuators providing lin- induced positioning errors
ear motion up to 25 mm with (cid:2) Elimination of sinusoidal
sub-micron resolution in a motion errors
compact package. They consist (cid:2) Elimination of wear at the
of a micrometer with non-rotat- contact point
ing tip driven by a 2-phase (cid:2) Elimination of tip-angle-
stepper motor or a closed-loop dependent wobble
DC motor/gearhead combina-
tion with motor-shaft-mounted,
high-resolution encoder (2048 M-230 actuators provide a cost-
counts/rev.). effective solution for heavier-
duty industrial and OEM envi-
Non-Rotating Tip ronments. They feature ex
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a-4
Piezo • Nano • Positioning
Ball tip (included) Flat tip (included)
Technical Data
Models M-230.10 M-230.25 M-230.10S M-230.25S Units Notes
see page 7-106
Travel range 10 25 10 25 mm
Design resolution 0.0046 0.0046 0.0012 0.0012 µm A3
Min. incremental motion 0.05 0.05 0.05 0.05 µm A4
Unidirectional repeatability 0.1 0.1 0.1 0.1 µm
Backlash 2 2 2 2 µm
Max. velocity 1.5 1.5 2 2 mm/s
Max. push/pull force 70 70 45** 45** N
Max. lateral force 30 20 30 20 N (at tip)
Encoder resolution 2048 2048 - - counts/rev.
Motor resolution - - 1200* 1200* steps/rev.
Drivescrew pitch 0.4 0.4 0.4 0.4 mm/rev.
Gear ratio 42.92:1 42.92:1 28.44444:1 28.44444:1
C-815.38 motor cable
Nominal motor power 2 2 * * W included: 3 m, sub-D,
15/15 pin (m/f).
Motor voltage 12 12 24* 24* V
* 2-phase stepper, 24 V
Origin and limit switches Hall-Effect Hall-Effect Hall-Effect Hall-Effect chopper voltage, max.
Weight 0.30 0.35 0.30 0.35 kg 250 mA / phase, 1,200
microsteps with C-600,
Recommended motor C-843, C-848, C-862 C-843, C-848, C-862 C-600, C-630 C-600, C-630 D2 C-630 controllers
controllers ** at up to 1 mm/sec.
a-5
M-231 Servo Motor Actuator
High-Resolution Closed-Loop DC-Mike Actuators
Ordering Information
M-231.17
DC-Mike Actuator, 17mm,
Limit Switches
Ask about custom designs!
M-231.17 high-resolution DC-Mike actuator, 17mm travel range
(cid:2) 17 mm Travel Range sub-D connector and a 3 m
(cid:2) Non-Contact Limit and Origin extension cable. The connector
0.1 µm Minimum Incremental Motion
(cid:2) Switches features integrated line drivers
Velocity up to 2.5 mm/sec.
(cid:2) Integrated, non-contact, high- for cable lengths up to 10
Closed-Loop DC Motor
(cid:2) precision Hall-effect origin and meters between actuator and
Compatible with Leading Industrial Motion Controllers limit switches protect your controller.
(cid:2)
Integrated Hall-Effect Origin and Limit Switches
equipment and increase versa-
(cid:2) Fits M-105 & F-110 Fiber Aligners tility in automation applica- Stepper-motor-driven versions
(cid:2) >5,000 Hours MTBF tions. of the M-231 are available on
request.
Integrated Line Drivers
For higher loads and travel
The M-231 is an ultra-high-res- tion construction allowing for Each actuator includes an inte- ranges, refer to the M-230 and
olution linear actuator provid- minimum incremental motion gral 0.5 m cable with 15-pin M-235 on pages 7-78 and 7-82.
ing linear motion up to 17 mm of 100 nanometers at speeds
with sub-micron resolution in a up to 2.5 mm/sec.
compact package. It consists of
a leadscrew which is driven by
a closed-loop DC motor/gear-
head combination with motor-
shaft-mounted, high-resolution
encoder (2048 counts/rev.).
Upgrade for Manual Aligners
The M-231 was especially de-
signed to fit existing manual
M-231 mounted on
translation stages (e.g. M-105,
M-105 XYZ positioning
see page 7-30) and F-110 piezo- systems
electric fiber alignment sys-
tems (see page 8-24 in the
“Photonics” section) as a direct Technical Data
replacement for a manual Models M-231.17 Units Notes see p. 7-106
micrometer. Travel range 17 mm
Design resolution 0.007 µm A3
M-231 actuators provide a cost-
Min. incremental motion 0.1 µm A4
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w/
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a-6
Piezo • Nano • Positioning
M-232 Servo Motor Actuator
Compact, High-Resolution, Closed-Loop DC-Mike Actuator
Ordering Information
M-232.17
Compact DC-Mike Actuator,
17mm, Limit Switches
Ask about custom designs!
Integrated Line Drivers
Each actuator includes an inte-
M-232.17 high-resolution DC-Mike actuator
mounted on M-105 translation stage gral 0.5 m cable with 15-pin
sub-D connector and a 3 m
extension cable. The connector
(cid:2) 17 mm Travel Range features integrated line drivers
(cid:2) for cable lengths up to 10
0.1 µm Minimum Incremental Motion
(cid:2) meters between actuator and
Velocity up to 2.5 mm/sec.
controller.
(cid:2)
Closed-Loop DC Motor
(cid:2)
Compatible with Leading Industrial Motion Controllers
Stepper-motor-driven versions
(cid:2)
Integrated Hall-Effect Limit and Origin Switches of the M-232 are available on
(cid:2)
Fits M-105 & F-110 Fiber Aligners request. For higher loads and
(cid:2) >5,000 Hours MTBF travel ranges refer to the M-230
and M-235 datasheets on
pages 7-68 and 7-72.
The M-232 is an ultra-high-res- environments. They feature a Index
olution linear actuator provid- low-stiction, low-friction con-
ing linear motion up to 17 mm struction allowing for mini-
with sub-micron resolution in a mum incremental motion of
compact package. It features a 100 nanometers at speeds of
space-saving design with a up to 2.5 mm/sec.
leadscrew side-by-side to a
Non-Contact Limit and Origin
closed-loop DC motor / gear-
M-232,
Switches
head combination and a high- dimensions
resolution encoder (2048 Integrated, non-contact, high- (in mm).
Cable length:
counts/rev.). precision Hall-effect origin and 500mm,
limit switches, protect your 15-pin sub-D
Upgrade for Manual Stages equipment and increase versa- connector with
integrated line
The M-232 was especially de- tility in automation applications. drivers.
signed to fit existing manual
translation stages (e.g. M-105) Technical Data
and F-110 piezoelectric fiber
Models M-232.17 Units Notes see p. 7-106
alignment systems as a direct
Travel range 17 mm
replacement for a manual
Design resolution 0.007 µm A3
micrometer. M-232 actuators
Min. incremental motion 0.1 µm A4
provide a cost-effective solu-
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Su Motor voltage 12 V
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a-7
M-235 Servo & Stepper Motor Actuators
Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
high-speed positioning appli-
Ordering Information
cations.
M-235.2DG
Heavy-Duty, High-Resolution DC-
Non-Contact Limit and Origin
Mike Actuator, 20 mm, Ballscrew,
Switches
Limit Switches
Integrated, non-contact, high-
M-235.2VG
precision Hall-effect origin and Vacuum Version of M-235.2DG
limit switches, protect your
M-235.2DD
equipment and increase versa-
Heavy-Duty, High-Resolution DC-
tility in automation applica- Mike Actuator, Direct Drive, 20 mm,
tions. Ballscrew, Limit Switches
M-235.2VD
Integrated Line Drivers
M-235.2DG (top) and Vacuum Version of M-235.2DD
M-235.5DG (bottom) high- M-235 actuators with DC
resolution DC-Mike, ballscrew. M-235.22S
motors include an integral
Heavy-Duty, High-Resolution
0.5 m cable with 15-pin sub-D Stepper-Mike Actuator, 20 mm,
(cid:2) connector and a 3 m extension Ballscrew, Limit Switches
20 mm or 50 mm Travel Range
cable. The connector features
(cid:2) M-235.5DG
0.1 µm Minimum Incremental Motion
integrated line drivers for cable Heavy-Duty, High-Resolution DC-
(cid:2)
High-Speed Direct Drive Option lengths up to 10 meters Mike Actuator, 50 mm, Ballscrew,
(cid:2) 120 N Push/Pull Load between actuator and con- Limit Switches
(cid:2)
100 N Lateral Load Limit troller. M-235.5VG
(cid:2) Preloaded Ultra-Low-Friction Ball Screw with Vacuum Version of M-235.5DG
A screw-on ball tip and a flat tip
Non-Rotating Tip M-235.5DD
are included.
(cid:2) Heavy-Duty, High-Resolution
Closed-Loop DC Motors and Stepper Motors
DC-Mike Actuator, Direct Drive,
(cid:2) For smaller sizes and lower-
Compatible with Leading Industrial Motion Controllers 50 mm, Ballscrew, Limit Switches
(cid:2) duty applications, refer to the
Integrated Hall-Effect Limit & Origin Switches
M-230, M-231, M-232 and M-235.5VD
(cid:2)
>20,000 Hours MTBF Vacuum Version of M-235.5DD
M-227 and M-168 see p. 7-76,
(cid:2)
Vacuum Versions p. 7-78, p. 7-80, p. 7-81, and M-235.52S
p. 7-84. Heavy-Duty, High-Resolution
Stepper-Mike Actuator, 50 mm,
The M-235 is an ultra-high-res- Non-Rotating Tip Ballscrew, Limit Switches
olution linear actuator provid- Compared to conventional ro- Higher speed M-235 versions on
ing linear motion of up to 50 tating-tip micrometer drives, request
mm with sub-micron resolu- the non-rotating-tip design Ask about custom designs!
tion in a compact package. It offers several advantages:
consists of a preloaded ultra-
low-friction, heavy-duty ball- (cid:2) Elimination of torque-
screw which is driven by a induced positioning errors
2-phase stepper motor or a (cid:2) Elimination of sinusoidal
closed-loop DC motor with mo- motion errors
tor-shaft-mounted, high-reso- (cid:2) Elimination of wear at the
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a-8