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Porous silicon : from formation to application. Volume 2, Biomedical and sensor applications PDF

421 Pages·2016·36.868 MB·English
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Preview Porous silicon : from formation to application. Volume 2, Biomedical and sensor applications

Edited by Ghenadii Korotcenkov POROUS SI LICON From Formation to Application Biomedical and Sensor Applications, Volume Two © 2016 by Taylor & Francis Group, LLC CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742 © 2016 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group, an Informa business No claim to original U.S. Government works Version Date: 20151103 International Standard Book Number-13: 978-1-4822-6457-9 (eBook - PDF) This book contains information obtained from authentic and highly regarded sources. Reasonable efforts have been made to publish reliable data and information, but the author and publisher cannot assume responsibility for the validity of all materials or the consequences of their use. The authors and publishers have attempted to trace the copyright holders of all material reproduced in this publication and apologize to copyright holders if permission to publish in this form has not been obtained. If any copyright material has not been acknowledged please write and let us know so we may rectify in any future reprint. Except as permitted under U.S. Copyright Law, no part of this book may be reprinted, reproduced, transmitted, or utilized in any form by any electronic, mechanical, or other means, now known or hereafter invented, including photocopying, microfilming, and recording, or in any information storage or retrieval system, without written permission from the publishers. For permission to photocopy or use material electronically from this work, please access www.copyright.com (http://www.copyright.com/) or contact the Copyright Clearance Center, Inc. (CCC), 222 Rosewood Drive, Danvers, MA 01923, 978-750-8400. CCC is a not-for-profit organization that provides licenses and registration for a variety of users. For organizations that have been granted a photocopy license by the CCC, a separate system of payment has been arranged. Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation without intent to infringe. Visit the Taylor & Francis Web site at http://www.taylorandfrancis.com and the CRC Press Web site at http://www.crcpress.com © 2016 by Taylor & Francis Group, LLC Contents Preface .............................................................................................................................................................................................................................................................................xi Editor .............................................................................................................................................................................................................................................................................xiii Contributors ...............................................................................................................................................................................................................................................................xv Section i—Sensors chapter 1 Solid State Gas and Vapor Sensors Based on Porous Silicon ...........................................................................................................................3 Ghenadii Korotcenkov chapter 2 Optimization of PSi-Based Sensors Using IHSAB Principles ...........................................................................................................................45 James L. Gole and Caitlin Baker chapter 3 Porous Silicon-Based Optical Chemical Sensors...................................................................................................................................................69 Luca De Stefano, Ilaria Rea, Alessandro Caliò, Jane Politi, Monica Terracciano, and Ghenadii Korotcenkov chapter 4 PSi-Based Electrochemical Sensors ..............................................................................................................................................................................95 Yang Zhou, Shaoyuan Li, Xiuhua Chen, and Wenhui Ma chapter 5 Porous Silicon-Based Biosensors: Some Features of Design, Functional Activity, and Practical Application ...............107 Nicolai F. Starodub chapter 6 MEMS-Based Pressure Sensors .....................................................................................................................................................................................135 Ghenadii Korotcenkov and Beongki Cho chapter 7 Micromachined Mechanical Sensors .......................................................................................................................................................................147 Ghenadii Korotcenkov and Beongki Cho chapter 8 Porous Silicon as a Material for Thermal Insulation in MEMS .....................................................................................................................167 Pascal J. Newby chapter 9 PSi-Based Microwave Detection .................................................................................................................................................................................185 Jonas Gradauskas and Jolanta Stupakova Section ii—Auxiliary Devices chapter 10 PSi-Based Ultrasound Emitters (Acoustic Emission) ........................................................................................................................................197 Ghenadii Korotcenkov and Vladimir Brinzari chapter 11 Porous Silicon in Micromachining Hotplates Aimed for Sensor Applications .................................................................................207 Ghenadii Korotcenkov and Beongki Cho v © 2016 by Taylor & Francis Group, LLC vi Contents chapter 12 PSi-Based Preconcentrators, Filters, and Gas Sources ....................................................................................................................................223 Ghenadii Korotcenkov, Vladimir Brinzari, and Beongki Cho chapter 13 Silicon Nanostructures for Laser Desorption/Ionization Mass Spectrometry .................................................................................239 Sergei Alekseev chapter 14 PSi Substrates for Raman, Terahertz, and Atomic Absorption Spectroscopy ..................................................................................265 Ghenadii Korotcenkov and Songhee Han chapter 15 PSi-Based Diffusion Membranes .................................................................................................................................................................................279 Andras Kovacs and Ulrich Mescheder chapter 16 Liquid Microfluidic Devices.............................................................................................................................................................................................299 Ghenadii Korotcenkov and Beongki Cho Section iii—Biomedical Applications chapter 17 Biocompatibility and Bioactivity of Porous Silicon ............................................................................................................................................319 Adel Dalilottojari, Wing Yin Tong, Steven J.P. McInnes, and Nicolas H. Voelcker chapter 18 Applications of Porous Silicon Materials in Drug Delivery ...........................................................................................................................337 Haisheng Peng, Guangtian Wang, Naidan Chang, and Qun Wang chapter 19 Tissue Engineering ...............................................................................................................................................................................................................363 Pierre-Yves Collart Dutilleul, Csilla Gergely, Frédérique Cunin, and Frédéric Cuisinier chapter 20 Use of Porous Silicon for In Vivo Imaging Techniques ....................................................................................................................................381 Igor Komarov and Sergei Alekseev index ..........................................................................................................................................................................................................................................................................401 © 2016 by Taylor & Francis Group, LLC Contents for Porous Silicon: Formation and Properties, Volume One Section i—introduction chapter 1 Porous Silicon Characterization and Application: General View Ghenadii Korotcenkov Section ii—Silicon Porosification chapter 2 Fundamentals of Silicon Porosification via Electrochemical Etching Enrique Quiroga-González and Helmut Föll chapter 3 Technology of Si Porous Layer Fabrication Using Anodic Etching: General Scientific and Technical Issues Ghenadii Korotcenkov and Beongki Cho chapter 4 Silicon Porosification: Approaches to PSi Parameters Control Ghenadii Korotcenkov Section iii—Properties and Processing chapter 5 Methods of Porous Silicon Parameters Control Mykola Isaiev, Kateryna Voitenko, Dmitriy Andrusenko, and Roman Burbelo chapter 6 Structural and Electrophysical Properties of Porous Silicon Giampiero Amato chapter 7 Luminescent Properties of Porous Silicon Bernard Jacques Gelloz chapter 8 Optical Properties of Porous Silicon Gilles Lérondel chapter 9 Thermal Properties of Porous Silicon Pascal J. Newby chapter 10 Alternative Methods of Silicon Porosification and Properties of These PSi Layers Ghenadii Korotcenkov and Vladimir Brinzari chapter 11 The Mechanism of Metal-Assisted Etching of Silicon Kurt W. Kolasinski © 2016 by Taylor & Francis Group, LLC viii Contents chapter 12 Porous Silicon Processing Ghenadii Korotcenkov and Beongki Cho chapter 13 Surface Chemistry of Porous Silicon Yannick Coffinier and Rabah Boukherroub chapter 14 Contacts to Porous Silicon and PSi-Based p-n Homo- and Heterojunctions Jayita Kanungo and Sukumar Basu index © 2016 by Taylor & Francis Group, LLC Contents for Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three Section i—optoelectronics and Photoelectronics chapter 1 Electroluminescence Devices (LED) Bernard Jacques Gelloz chapter 2 Photodetectors Based on Porous Silicon Ghenadii Korotcenkov and Nima Naderi chapter 3 PSi-Based Photonic Crystals Gonzalo Recio-Sánchez chapter 4 Passive and Active Optical Components for Optoelectronics Based on Porous Silicon Raghvendra S. Dubey Section ii—electronics chapter 5 Electrical Isolation Applications of PSi in Microelectronics Gael Gautier, Jérôme Billoué, and Samuel Menard chapter 6 Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices Alexey Ivanov and Ulrich Mescheder chapter 7 Porous Silicon as Substrate for Epitaxial Films Growth Eugene Chubenko, Sergey Redko, Alexey Dolgiy, Hanna Bandarenka, and Vitaly Bondarenko chapter 8 Porous Silicon and Cold Cathodes Ghenadii Korotcenkov and Beongki Cho chapter 9 Porous Silicon as Host and Template Material for Fabricating Composites and Hybrid Materials Eugene Chubenko, Sergey Redko, Alexey Dolgiy, Hanna Bandarenka, Sergey Prischepa, and Vitaly Bondarenko Section iii—energy technologies chapter 10 Porous Si and Si Nanostructures in Photovoltaics Valeriy A. Skryshevsky and Tetyana Nychyporuk © 2016 by Taylor & Francis Group, LLC x Contents chapter 11 PSi-Based Betavoltaics Ghenadii Korotcenkov and Vladimir Brinzari chapter 12 Porous Silicon in Micro-Fuel Cells Gael Gautier and Ghenadii Korotcenkov chapter 13 Hydrogen Generation and Storage in Porous Silicon Valeriy A. Skryshevsky, Vladimir Lysenko, and Sergii Litvinenko chapter 14 PSi-Based Microreactors Caitlin Baker and James L. Gole chapter 15 Li Batteries with PSi-Based Electrodes Gael Gautier, François Tran-Van, and Thomas Defforge chapter 16 PSi-Based Supercapacitors Diana Golodnitsky, Ela Strauss, and Tania Ripenbein chapter 17 Porous Silicon as a Material for Thermoelectric Devices Androula G. Nassiopoulou chapter 18 Porous Silicon Based Explosive Devices Monuko du Plessis index © 2016 by Taylor & Francis Group, LLC

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