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Piezoelectric Materials: Advances in Science, Technology and Applications NATO Science Series ASeriespresentingtheresultsofactivitiessponsoredbytheNATOScience Committee.TheSeriesispublishedbylOSPressandKluwerAcademic Publishers, inconjunctionwiththeNATOScientificAffairsDivision. A. LifeSciences lOSPress B. Physics KluwerAcademicPublishers C. MathematicalandPhysicalSciences KluwerAcademicPublishers D. BehaviouralandSocialSciences KluwerAcademicPublishers E. AppliedSciences KluwerAcademicPublishers F. ComputerandSystemsSciences lOSPress 1. DisarmamentTechnologies KluwerAcademicPublishers 2. EnvironmentalSecurity KluwerAcademicPublishers 3. HighTechnology KluwerAcademicPublishers 4. ScienceandTechnologyPolicy lOSPress 5. ComputerNetworking lOSPress NATO-PCO-DATABASE TheNATOScienceSeriescontinuestheseriesofbookspublishedformerlyintheNATOASI Series.AnelectronicindextotheNATOASISeriesprovidesfullbibliographicalreferences(with keywordsand/orabstracts)tomorethan50000contributionsfrominternationalscientists publishedinallsectionsoftheNATOASISeries. AccesstotheNATO-PCO-DATABASEispossibleviaCD-ROM"NATO-PCO-DATABASE"with user-friendlyretrievalsoftwareinEnglish,FrenchandGerman(WTVGmbHandDATAWARE TechnologiesInc.1989). TheCD-ROMoftheNATOASISeriescanbeorderedfrom:PC0,Overijse,Belgium Series3.HighTechnology- Vol.76 Piezoelectric Materials: Advances in Science, Technology and Applications edited by Carmen Galassi National Research Council, Research Institute for Ceramics Technology, Faenza, Italy Maria Dinescu Institute of Atomic Physics, Bucharest, Romania Kenji Uchino The Pennsylvania State University, Pennsylvania, U.SA and Michael Sayer Queen's University, Department of Physics, Kingston, Ontario, Canada Springer Science+Business Media, B.V. Proceedings of the NATO Advanced Research Workshop on Piezoelectric Materials: Advances in Science, Technology and Applications Predeal, Romania 24-27 May 1999 A C.I.P. Catalogue record for this book is available from the Library of Congress. ISBN 978-0-7923-6213-5 ISBN 978-94-011-4094-2 (eBook) DOI 10.1007/978-94-011-4094-2 Printed on acid-free paper AII Rights Reserved © 2000 Springer Science+Business Media Oordrecht Originally published by Kluwer Academic Publishers in 2000 Softcover reprint of the hardcover 1s t edition 2000 No part of the material protected by this copyright notice may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying, recording or by any information storage and retrieval system, without written permission from the copyright owner. CONTENTS Preface ix ListofParticipants xi I FUNDAMENTALSONFERROELECTRICSPIEZOELECTRICS ANDRELAXORS Piezo-,pyro-and ferroelectricityinbiologicalmaterials 1 LemanovV.V. Piezo-,pyro-and ferroelectric polymers 11 BauerS.,Bauer-GogoneaS.,LindnerM. andSchrattbauerK. Thekineticandscatteringofnonequilibriumphonons bydomain wallsand grainboundariesin monocrystalandceramicsofBaTiOJ 21 IvanovS.N.,TaranovAV.,KhazanovE.N. andSmirnovaE.P. Ferroelectricswith periodicaUylayereddomainstructure: computersimulationofacousticalproperties 27 PodlipenetsA.N., ZinchukL.P. Structureand propertiesofnovelPb(B'1/2Nb II2)OJ-PbTiOJbinary systemswith high piezoelectriccoupling 39 SternbergA., ShebanovsL., Antonova M., LivinshM. ShorubalkoI., YamashitaJ.Y. Nano-sizeferroelectricstructures 49 AlexeM.,HamageaC.,PignoletA,HesseD.,andGoseleU. InfluenceofBi and Yadditionson theelectromechanical anisotropyofleadtitanateceramics 59 AmarandeL.,TanasoiuC.,MicleaC. andMicleaC.F. B~ThOu-Basedpiezoelectricceramics for high temperature applications 67 VillegasM.,CaballeroAC., MoureC.,Fernandez1. F. andDuranP. II POWDERPREPARATIONAND PROCESSING Influenceofprocessingparametersonthe propertiesofPZTmaterials 75 GalassiC.,RoncariE.,CapianiC. andCostaA vi Smartstructuresbyintegratedpiezoelectricthinfibers 87 SpornD.,WatzkaW.,ScMnecker A andPannkokeK. Hydrothermalsynthesisand processingofundopedand dopedBaTi0 fine particles 99 3 YangJ.andFerreiraJ.M.F. Chemicalprocessingof PbTiO,lOrganichybridandPb(Zr,Ti)03 thickfilms 107 HiranoS.,YogoT.,SakamotoW. andYamaguchiH. Preparationandcharacterizationofthickpiezoelectric films onaluminasubstrates 115 GonnardP.,LeOrenS.,SimonL.,TroccazM. andLebrunL. III MICROSTRUCTURALANDPIEZOELECTRICCHARACTERISATION Nonlinearpiezoelectricresponseinferroelectric ceramics 123 DamjanovicD. Influenceofmicrostructureon microscopicand macroscopic strainbehaviorofsoftPZTceramics 137 HammerM.,EndrissA,LupascuD.C. andHoffmannM.J. Theeffectofstaticcompressivestressonthehighfield dielectric propertiesofhardPZTceramics 149 HallD.A,StevensonP. J. and MahonS.W. Stressdependenceofthepiezoelectric,dielectricandelastic propertiesofPZTceramics 159 MahonS.W.,MoloneyD.,LowrieF. andBowlesAR. Switchingofferroelectric nanostructures 169 HamageaC.,AlexeM.,PignoletA,SatyalaksluniK. M.,HesseD.,GoseleU. Measurementandsimulationoftheelectromechanical behaviourofpiezoelectricstacktransducers 179 JanochaH. andClephasB. 0.9PMN-o.IPTceramics: from electromechanicalproperties to applicationsvia nanostructuralcharacterization 191 LejeWleM.,KurutcharryS.,LattardE.,OudjediM. andAbelardP. Solid-state2SMg,4SScand93NbMASNMRstudies: localB-site chemicalenvironmentsandorderingin Pb(Mg1l3Nb2/3)03 (PMN) and related relaxorferroelectrics 203 FitzgeraldJ.J.,HuangJ.,Lock H. vii Piezoelectricpropertiesofproton-exchangedopticalwaveguides 219 CyplisD. andRimeikaR. Anoveltoolforexperimentalanalysisofsurfacephenomena 231 AnisimkinV.I.,PenzaM. andVeronaE. Theinfluenceofthe materialconstantsand mass-loading oncouplingcoefficientofmonolithic filters 239 MateescuI.andPopG. IV PROCESSINGANDCHARACTERISATIONOFFILMS Thickand compositepiezoelectriccoatingsfor biomedical and high temperatureultrasound 249 SayerM.,LukacsM., PangG.,ZouL.,ChenY. andJenC. K. Pulsed-laserdepositionandcharacterizationofthinfilms 261 BauerleD.,DinescuM., DinuR., PedarnigJ.,HeitzJ., SchwOdiauerR., BauerS. andBauer-GogoneaS. Correlatedcompositional,morphologicalandelectrical characterizationofPLD piezoelectricthinfilms 273 CraciunF.,VerardiP.,DinescuM.,Mirenghi L.,DinelliF. Piezoelectricthin films for highfrequency electroacousticdevices 285 VerardiP. Photoelectricand dielectricspectroscopystudyof PZT thinfilm electronicstructure 293 YannarkinV.K. Theinfluenceofinterfaceonthespontaneouspolarisationin PbTi0 thinfilms depositedona siliconsubstrate 301 3 BoerasuI.andPintilieL. V APPLICATIONSOFBULKDEVICESANDTHINFILMS Compactpiezoelectricultrasonic motors 309 UchinoK. andKocB. Piezoelectricactuators usingultrasonicwaves 321 BastienF. andManceauJ.F. MEMSapplicationofpiezoelectricmaterials 335 HaudenD. viii Fabricationand modeUngofminiaturized piezoelectric transducersforimagingappUcations 347 BallandrasS.,PirandaB.,SteichenW., MaitreP.,BourriotN.,GuineP. Flextensionalcompositetransducers: designing, fabrication andappUcation 357 DoganA., UchinoK. andNewnhamR.E. Adisktypepiezoelectrictransformerwithcrescent shapeinputelectrodes 375 KocB.andUchinoK. Designand performanceofalinearpiezoelectricwedgewormactuator 383 KoopmannG.H.,LesieutreG.A,Frank1.andChenW. Piezoelectriccomponentsfor technicalapplications 391 SchuhCo, LubitzKo, SteinkopffTho andWolffAo AuthorIndex 401 Subjectindex 403 PREFACE In this couple of decades, applications of piezoelectrics to sensors and actuators have been dramatically accelerated, in addition to the discovery of new materials and devices. Some of the highlights include electrostrictive materials for positioners, relaxor-normal ferroelectric single crystals with very high electromechanical couplings for medical transducers, thin/thick PZT films for Micro Electro-Mechanical Systems starting from a sophisticated chemical technology, and multilayer type actuators fabricated by cofiring technique. All will provide a remarkableindustrialimpactinthe21stcentury. This volume contains the Proceedings of the NATO Advanced Research Workshop PIEZOELECTRIC MATERIALS: ADVANCES IN SCIENCE, TECHNOLOGYAND APPLICATIONS held in Predeal, Romania, May 24-27, 1999. This meeting was supported by NATO, Italian National Research Council, Romanian National Agency for Science, Technology and Innovation and UNESCO. The Workshop had 45 participants intotal, 37 oral and 8poster presentations. The meeting was successfully organised by Drs. Carmen Galassi (IRTEC-CNR, Italy) and Maria Dinescu(InstituteofAtomicPhysics,NILPRP, Romania) All the papers were refereed, mostly during the Workshop, by the Key Speakersandfewotherparticipantsandthisstrongspiritofcollaborationgaveafurther improvementtothequalityoftheProceedingsand ishereespeciallyacknowledged. TheProceedingsarecategorisedinaccordancewith: • Fundamentalsonferroelectricspiezoelectricsandrelaxors • Powderpreparationand processing • Microstructuralandpiezoelectriccharacterisation • Processingand characterisationoffilms • Applicationsofbulkdevicesandthinfilms. We believe that this volume will provide the better understanding on the recent scienceandtechnologyinthepiezoelectricarea. Last, but not least, the Editors would like to appreciate all the scientists and engineerswhoattendedtheworkshopandmadeitfruitful andenjoyable CarmenGalassi(IRTEC-CNR,Italy) PrincipalEditor MariaDinescu(NILPRP,Romania) Michael Sayer (Queen'sUniversity,KingstonCanada) KenjiUchino(PennStateUniversityUSA) Co-Editors ix LISTOFPARTICIPANTS Co-Directors GALASSI Dr.Carmen LEJEUNEDr.Martine CNR-IRTEC ENSCI, L.M.C.T.S. ResearchInstituteforCeramics LimogesFRANCE Technology Faenza (RA)ITALY JANOCHA Prof.Hartmut DienstleistungzentrumneueAktoren DINESCUDr.Maria mitMikroSystem-und Inst. forAtomicPhysics,NILPRP. Signalverarbeitungskonzepten BucharestROMANIA (D*ASS) Universityofthe SaarlandSaarbrucken GERMANY KeySpeakers STERNBERGDr.Andris Inst. for SolidStatePhysics BAUERDr. Sigfrid RigaLATVIA AngewandtePhysik Johannes-Kepler-Universitat LEMANOV Prof.Vladislav A. F. LinzAUSTRIA IOFFEPhysico-TechnicalInstitute St. PetersburgRUSSIA BAUERLE Prof.Dieter AngewandtePhysik KOSECProf.Maria Johannes-KeplerUniversitaetLinz JozefStefanInstitute,Univ. Ljubliana, LinzAUSTRIA Ljubljana,3000SLOVENIA SAYER Prof.Michael DAMJANOVICDr.Dragan Dept. ofPhysics,Queen'sUniversity LaboratoryofCeramics Kingston, OntarioCANADA EPFL-DMX-LC Lausanne SWITZERLAND BASTIEN Dr. Francis LPMO-CNRS DOGANProf.Aydin BesanconCedexFRANCE CeramicsEng. Dept. AnadoluUniversity GONNARDDr.Paul EskisehirTURKEY LGEFINSA LyonFRANCE UCHINO Prof.Kenji ThePennsylania StateUniversity HAUDENProf.Daniel 134Mat. Res. Lab. L.P.M.O.-CNRS PAUSA Besan~on FRANCE xi

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