more than 30 years - and the development of silicon micromachining — for MEMS . they are usually based on deflecting structures such as cantilevers or membranes used in time and frequency control devices (resonators, surface acoustic
PIEZOELECTRIC ACOUSTIC SENSORS AND - Infoscience PDF
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more than 30 years - and the development of silicon micromachining — for MEMS . they are usually based on deflecting structures such as cantilevers or membranes used in time and frequency control devices (resonators, surface acoustic
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