Physics and Technology of Submicron Structures: Proceedings of the Fifth International Winter School, Mauterndorf, Austria, February 22–26, 1988

295 Pages·1988·74.103 MB·English

by  Helmut Heinrich, Günther Neubauer, Friedemar Kuchar

83 Springer Series in Solid-State Sciences
Edited by K. von Klitzing and H.-J. Queisser
Springer Series in Solid-State Sciences
Editors: M. Cardona P. Fulde K. von Klitzing H.-J. Queisser
Managing Editor: H. K. V. Lotsch Volumes 1-49 are listed on the back inside cover
50 Multiple Diffraction of X-Rays in Crystals 68 Phonon Scattering in Condensed Matter V
By Shih-Lin Chang Editors: A.C. Anderson and J.P. Wolfe
51 Phonon Scattering in Condensed Matter 69 NouliDearity in Condensed Matter
Editors: W. Eisenmenger, K. LaBmann, Editors: A.R. Bishop, D.K. Campbell,
and S. Dottinger P. Kumar, and S.E. Trullinger
52 Superconductivity in Magnetic and Exotic
70 From Hamiltonians to Phase DiDgmms
Materials
The Electronic and Statistical-Mechanical
Editors: T. Matsubara and A. Kotani
Theory of sp-Bonded Metals and Alloys
53 Two-Dimensional Systems, Heterostructures,
By J. Hatner
and Superlattices
Editors: G. Bauer, F. Kuchar, and H. Heinrich 71 High Magnetic Fields in Semiconductor Physics
54 Magnetic Excitations and Fluctuations Editor: G. Landwehr
Editors: S. Lovesey, U. Balucani, F. Borsa, 72 One-Dimensional Conductors
and V. Tognetti By S. Kagoshima, H. Nagasawa,
55 The Theory of Magnetism n and T. Sambongi
Thermodynamics and Statistical Mechanics
73 Quantum SoHd-State Physics
By D. C. Mattis
Editors: S. V. Vonsovsky and M. I. Katsnelson
56 Spin Fluctuations in Itinerant Electron
Magnetism By T. Moriya 74 Qnantum Monte Carlo Methods in Equilibrium
and Nonequilibrium Systems
57 Polycrysta1liDe Semiconductors,
Editor: M. Suzuki
Physical PropeIties and Applications
Editor: G. Harbeke 75 Electronic Structure and Opticul Properties of
58 The Recursion Method and Its Applications Semiconductors
Editors: D. Pettifor and D. Weaire By M. L. Cohen and J. R. Chelikowsky
59 Dynamicul Pro.~esses and 76 Electronic Properties of Conjugated Polymers
Ordering on SoHd Surfaces Editors: H. Kuzmany, M. Mehring, and S. Roth
Editors: A. Yoshimori and M. Tsukada
77 Fermi Surface Effects
60 Excitonic Processes in SoHds
Editors: J. Kondo and A. Yoshimori
By M. Ueta, H. Kanzaki, K. Kobayashi,
Y. Toyozawa, and E. Hanamura 78 Group Theory and Its AppHcations in Physics
61 Localization, Interaction, and By T. Inui, Y. Tanabe, and Y. Onodera
Tmnsport Phenomena 79 Elementary Excitations in Qnantum Fluids
Editors: B. Kramer, G. Bergmann, Editors: K. Ohbayashi and M. Watabe
and Y. Bruynseraede
80 Monte Carlo Simulation in Statisticul Physics
62 Theory of Heavy Fermions
An Introduction
and Valence FluCtuations
By K. Binder and D. W. Heermann
Editors: T. Kasuya and T. Saso
63 Electronic Properties of 81 Core-Level Spectroscopy in Condensed Systems
Polymers and Related Compounds Editors: J. Kanamori and A. Kotani
Editors: H. Kuzmany, M. Mehring, and S. Roth 82 Introdnction to Pbotoemission Spectroscopy
64 Synunetries in Pbysics Group Theory By S. Hiifner
Applied to Physical Problems
83 Physics and Technology of Snbmicron
By W. Ludwig and C. Falter
Structures
65 Phonons: Theory and Experiments n
Editors: H. Heinrich, G. Bauer, and F. Kuchar
Experiments and Interpretation of
Experimental Results By P. Briiesch 84 Beyond the CrystaiUne State
66 Phonons: Theory and Experiments In An Emerging Perspective
Phenomena Related to Phonons By G. Venkataraman, D. Sahoo, and
By P. Briiesch V. Balakrishnan
67 Two-Dimensional Systems: Physics 85 The Fractional Qnantum Hall Effect
and New Devices Properties of an Incompressible Quantum Fluid
Editors: G. Bauer, F. Kuchar, and H. Heinrich By T. Chakraborty and P. Pietiliiinen
H. Heinrich
G. Bauer F. Kuchar (Eds.)
Physics and Technology
of Submicron Structures
Proceedings of the
Fifth International Winter School,
Mauterndorf, Austria, February 22-26, 1988
With 190 Figures
Springer-Verlag Berlin Heidelberg New York
London Paris Tokyo
Professor Dr. Helmut Heinrich
Institut fUr Experimentalphysik, Universitat Linz,
A-4040 Linz, Austria
Professor Dr. Gunther Bauer
Institut fUr Physik, Montanuniversitat Leoben,
A-S700 Leoben, Austria
Professor Dr. Friedemar Kuchar
Institut fUr Festkorperphysik, Universitiit Wien,
A-1090 Wien, Austria
Series Editors:
Professor Dr., Ores. h. c. Manuel Cardona
Professor Dr., Dr. h. c. Peter Fulde
Professor Dr. Klaus von Klitzing
Professor Dr. Hans-Joachim Queisser
Max-Planck-Institut fUr Festkorperforschung, Heisenbergstrasse 1
D-7000 Stuttgart SO, Fed. Rep. of Germany
Managing Editor: Dr. Helmut K. V. Latsch
Springer-Verlag, Tiergartenstrasse 17,
D-6900 Heidelberg, Fed. Rep. of Germany
ISBN-13 :978-3-642-83433-2 e-ISBN-13:978-3-642-83431-8
001: 10.1007/978-3-642-83431-8
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Preface
The winter school on the Physics and Technology of Submicron Struc
tures was the fifth in the series of international winter schools on new
developments in solid-state physics organized by the Austrian Physical
Society. The school was held in the castle of Mauterndorf, near Salzburg
in Austria, February 22-26, 1988, and was attended by more than 200
registered participants from Europe, the United States, Japan, and the
People's Republic of China.
This is the third winter school in this series to have the proceedings
published in the Springer Series in Solid-State Sciences. (The earlier pro
ceedings appeared as Vols.53 and 67.) Only the contributions of the in
vited speakers are included in this volume. They are arranged, according
to subject, in five parts: the fabrication of microstructures; vertical trans
port and tunneling phenomena; quantum interference effects in submicron
structures, and universal conductance fluctuations in mesoscopic systems;
phenomena related to the transition from two- to one-dimensional con
duction in semiconductors; and finally the physical background of future
submicron devices.
Major breakthroughs in low-dimensional physics were reported at the
school and we hope that this volume will preserve some of the spirit of
excitement of the participants and lecturers.
The organizers are grateful to all the speakers for the trouble they
took in preparing their manuscripts. It is a pleasure to acknowledge the
generous financial support received from:
Bundesministerium fur Wissenschaft und Forschung, Austria
Osterreichische Physikalische Gesellschaft
Salzburger Landesregierung
Osterreichische Forschungsgemeinschaft
US Air Force, EOARD, London
Office of Naval Research, Washington
Fonds zur Forderung der wissenschaftlichen Forschung, Wien
Gesellschaft fur'Mikroelektronik, Wien
BOMEM, Canada,
Bruker, FRG,
v
Instruments SA-Riber, France and FRG,
Oxford Instruments, Great Britain and FRG,
Karl Suss KG, FRG,
VTS-Joachim Schwarz, FRG
Mauterndorf, H. Heinricb G. Bauer F. Kucbar
March 1988
VI
Contents
Part I Fabrication of Microstructures
Fabrication of Ultra-Small Structures: Quantum Wires
By H.G. Craighead, A. Scherer, and M.L. Roukes
(With 7 Figures) .................................... 2
Electron Beam Lithography and Dry Etching Techniques for the
Fabrication of Quantum Wires in GaAs and AIGaAs Epilayer
Systems
By S.P. Beaumont, C.D.W. Wilkinson, S. Thoms, R. Cheung,
1. McIntyre, R.P. Taylor, M.L. Leadbeater, P.C. Main,
and L. Eaves (With 16 Figures) ......................... 14
Fabrication and Optical Characterization of Semiconductor
Quantum Wires
By A. Forchel, B.E. Maile, H. Leier, and R. Germann
(With 9 Figures) .............................. . . . . . . 26
Electron-Beam Lithography of Ultra-Submicron Devices
By D.K. Ferry, G. Bernstein, and Wen-Ping Liu (With 5 Figures) 37
GaAs Quantum Well Wire Structures: Their Fabrication by
Focused Ga Ion Beam Implantation and Their Optical Properties
By Y. Hirayama and H. Okamoto (With 10 Figures) .......... 45
Progress in Ion Projection Lithography
By G. Stengl, H. Loschner, and E. Hammel (With 3 Figures) ... 56
Part II Vertical Transport and Tunneling Phenomena
Vertical Electronic Transport in Semiconductor Nanostructures
By M.A. Reed (With 9 Figures) ........................ 64
VII
Magnetic Field Studies of Resonant and Non-resonant Tunnelling
in n-(AIGa)As/GaAs Double Barrier Structures
By L. Eaves, E.S. Alves, T.J. Foster, M. Henini, O.H. Hughes,
M.L. Leadbeater, F.W. Sheard, G.A. Toombs, K. Chan, A. Celeste,
J.C. Portal, G. Hill, and M.A. Pate (With 7 Figures) ......... 74
Perpendicular Transport in GaAs-GaAIAs High Electron Mobility
Transistors
By J. Smoliner, E. Gornik, G. Weimann, and K. Ploog
(With 9 Figures) ... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Part III Quantum Interference Effects, Mesoscopic Systems
Quantum Interference Effects in Disordered Submicron Wires and
Rings
By R.A. Webb, S. Washburn, H.J. Haucke, A.D. Benoit,
C.P. Umbach, and F.P. Milliken (With 5 Figures) .. . . . . . . . . . . 98
Universal Conductance Fluctuations and Quantum Interference
Effects in >Microstructures
By A.D. Stone (With 3 Figures) ........................ 108
Four Terminal Resistance of a Multichannel Electron Waveguide
By G. Timp, H.U. Baranger, P. deVegvar, R Behringer,
J .E. Cunningham, P.M. Mankiewich, and RE. Howard
(With 5 Figures) ... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 128
Localisation and Transport in One-Dimensional Disordered
Systems
By B. Kramer (With 2 Figures) ......................... 138
Universal Fluctuations and Conductance Asymmetry in Mesoscopic
Silicon MOSFETs
By S.B. Kaplan (With 6 Figures) ... . . . . . . . . . . . . . . . . . . . .. 151
Part IV From Two Dimensions to One: Conductance
Phenomena and Optical Properties
Groundstate Properties of an Electron Gas in a Magnetic Field at
the Cross-over from Two- to One-Dimensional Behaviour
By U. Wulf and RR Gerhardts (With 9 Figures) ........... 162
VIII
Visualization and Theoretical Modelling of the Atomistic Structure
of Semiconductor Quantum Well Interfaces
By J. Christen, D. Bimberg, T. Fukunaga, H. Nakashima,
D.E. Mars, and J.N. Miller (With 8 Figures) ............... 176
Quasi-One-Dimensional Electron Channels in AIGaAs/GaAs
Heterojunctions
By W. Hansen and J.P. Kotthaus (With 7 Figures) .......... 187
Quantum and Classical Ballistic Transport in Constricted Two
Dimensional Electron Gases
By H. van Houten, B.J. van Wees, and C.W.J. Beenakker
(With 8 Figures) .................................... 198
Transport Properties of Narrow, Variable Width Channels in the
2DEG of a GaAs:AIGaAs Heterojunction
By T.J. Thornton, C.J.B. Ford, D.A. Wharam, R. Newbury,
M. Pepper, H. Ahmed, J.E.F. Frost, D.C. Peacock, D.A. Ritchie,
and G.A.C. Jones (With 10 Figures) ..................... 208
Hopping Transport in One-Dimensional Semiconductor Systems
By P.N. Butcher and J.A. McInnes (With 4 Figures) ......... 218
Part V Submicron Devices: Physics and Applications
Transport Physics in Ultra-Submicron Devices
By D.K. Ferry (With 7 Figures) ........................ 226
Physics of One-Dimensional MOSFETs
By A. Hartstein (With 8 Figures) ....................... 243
MOSFETs Under Electrical Stress - Degradation, Subthreshold
Conduction, and Noise in a Submicron Structure
By F. Koch, M. Bollu, and A. Asenov (With 9 Figures) ....... 253
Physics and Fabrication of Metal-Semiconductor Microstructures
By E. Rosencher and P.A. Badoz (With 13 Figures) .......... 263
Resonant Tunneling Barrier Structures and Their Applications to
the Resonant Tunneling Hot Electron Transistor
By S. Hiyamizu, S. Muto, T. Inata, S. Sasa, T. Fujii, K. Imamura,
H. Ohnishi, and N. Yokoyama (With 11 Figures) ............ 278
Index of Contributors . . . . . . . . . . . . . . . . . . . . . . . . . .. 287
IX
Scanning electron micrograpb of anisotropically etched columns
containing quantum dots.
(Courtesy of M.A. Reed, Central Research Laboratories,
Texas Instruments Inc., Dallas, TX 75265, USA)