OPTO-MECHATRONIC SYSTEMS HANDBOOK Techniques and Applications © 2003 by CRC Press LLC The Mechanical Engineering Handbook Series Series Editor Frank Kreith Consulting Engineer Published Titles Air Pollution Control Technology Handbook Karl B. Schnelle, Jr. and Charles A. Brown Computational Intelligence in Manufacturing Handbook Jun Wang and Andrew Kusiak Fuel Cell Technology Handbook Gregor Hoogers Handbook of Heating, Ventilation, and Air Conditioning Jan F. Kreider Hazardous and Radioactive Waste Treatment Technologies Handbook Chang Ho Oh Inverse Engineering Handbook Keith A. Woodbury Opto-Mechatronic Systems Handbook: Techniques and Applications Hyungsuck Cho The CRC Handbook of Mechanical Engineering Frank Kreith The CRC Handbook of Thermal Engineering Frank Kreith The Handbook of Fluid Dynamics Richard W. 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Trademark Notice: Product or corporate names may be trademarks or registered trademarks, and are used only for identification and explanation, without intent to infringe. Visit the CRC Press Web site at www.crcpress.com © 2003 by CRC Press LLC No claim to original U.S. Government works International Standard Book Number 0-8493-1162-4 Library of Congress Card Number 2002073354 Printed in the United States of America 1 2 3 4 5 6 7 8 9 0 Printed on acid-free paper Preface The past two decades have witnessed an unrelenting technological evolution that has produced advance- ments in devices, machines, processes, and systems by enhancing their performance and creating new value and function. Mechatronic technology, integrated by mechanical, electronic, and computer tech- nologies, has certainly played an important role in this evolution. In recent years optical technology has been increasingly incorporated, and at an accelerated rate, into mechatronic systems, and vice versa. This may be attributable to the fact that optically integrated tech- nology provides solutions to complex problems by achieving a desirable function or performance that mechatronic technology alone cannot solve. As a result, mechatronic or optical products, machines, and systems have further evolved toward a state of precision, reduced size, and greater intelligence and autonomy. In the future this trend will continue to map out the direction of next-generation technologies associated with most mechatronic- and optical-engineering-related fields. We now refer to the technology fusion in this new paradigm as “opto-mechatronic technology,” which is an integration of optical and mechatronic technologies. This handbook terms the devices, products, machines, processes, and systems developed by this technology “opto-mechatronic systems.” This defi- nition has never before appeared in the literature, although such systems have long been commercially available. As the above discussion makes clear, this optically and mechatronically integrated technology is certainly multifaceted in nature. However, to date, despite the nature of opto-mechatronic systems technology, little effort has been made to bring together researchers from optical engineering and mecha- tronics to collaborate on entire projects, from concept generation to design fabrication. As a result, few attempts have been made at a concurrent design approach that would produce desired functionalities and performance. It is sincerely hoped that this handbook will serve as a building block that might eliminate the formidable barriers that exist between the two technological communities. The handbook, therefore, has three major objectives. The first is to present the definition, fundamentals, and application aspects of the technology. The second is to provide readers with an integrated view of opto-mechatronic systems, thereby enabling them to begin to understand how optical systems and devices can be fused or integrated with mechatronic systems starting at the design and manufacturing stages. The third goal is to help readers learn about the roles of optical systems in overall system performance and to understand their synergistic effect. The Opto-Mechatronic Systems Handbook: Techniques and Applications is a collection of 23 chapters organized in five parts covering the fundamental elements and applications of opto-mechatronic systems technology. The chapters are written by an international group of leading experts from academia and industry and representing North America, Asia, and Europe. Part I: Understanding Opto-Mechatronic Technology and Its Applications Part I is composed of two chapters that provide the reader with the definition, fundamental function s, and classification of opto-mechatronic systems technology by illustrating and classifying practic al © 2003 by CRC Press LLC IInnffoorrmmaattiioonn ffeeeeddbbaacckk ccoonnttrrooll PPrreecciissiioonn MMeecchhaanniissmm aaccttuuaattoorrss ddeessiiggnn OOppttiiccaall // VViissuuaall SSiiggnnaall eelleemmeennttss, sseennssoorrss , pprroocceessssiinngg MMoottiioonn aaccttuuaattoorrss ccoonnttrrooll mmeettrroollooggyy PPaatttteerrnn iinnffoorrmmaattiioonn pprroocceessssiinngg rreeccooggnniittiioonn rreeccooggnniittiioonn ttrraannssmmiissssiioonn//sswwiittcchhiinngg AArrttiiffiicciiaall iinntteelllliiggeennccee mmiiccrroo -eelleemmeennttss MMoonniittoorriinngg / / FFaauulltt ddiiaaggnnoossiiss MMiiccrroo- pprroocceessssoorr SSeennssoorrss &an d SSeennssoorr mmeeaassuurreemmeennttss ffuussiioonn y g O o pto-Mechatronic Techno l examples of such systems, and providing fundamental considerations needed for the design of opto- mechatronic products and systems. Part II: Optical Elements, Sensors, and Measurements Part II comprises Chapters 3 through 7, which focus on basic principles, theory, and applications of lasers, optical sensors, and distributed optical fiber sensing. Chapter 6 describes h ow biological-based optical sensors and transducers can be used to perform simple signal-detection and s ignal-conversion operations. Optical metrology essential for opto-mechatronic applications is presented in brief; the focus here will be on displacement sensing, which serves as the basis for the construction of three-dimensional geometry and shapes. Chapter 7 discusses the fundamentals of visual sensing and imag e-processing techniques and their importance for real mechatronic applications. Part III: Optical Information Processing and Recognition The technology associated with optical information processing and recognitio n is an essential part of opto-mechatronic systems technology. In fact, the systems that perform optical information and pattern recognition belong, by definition, to opto-mechatronic systems since most suc h systems are composed not only of optical but also mechatronic elements. Part III, which consists of Chapters 8 through 12, treats © 2003 by CRC Press LLC processing and recognition of the raw optical signals/data/information obtaine d by sensors. It presents basic concepts and principles, theories, and applications in volume holography in optical imaging, real- time image feature extraction, real-time image recognition, and optical pattern recognition. To aid under- standing of the recognition aspect of opto-mechatronic systems technology gen eric pattern-recognition methods are surveyed, with an emphasis on utilization of artificial intelligence. Part IV: Opto-Mechatronic Systems Control Control of either optical systems or optical-based mechatronic systems permeates every area of opto- mechatronic systems, which makes them adaptive or recon figurable in accordance with changes in operating conditions. Part IV, which consists of Chapters 13 through 16, addresses control issues associated with opto-mechatronic systems and presents basic control me thodologies applicable to various systems. In addition, visual feedback control, which is widely used in a number of tasks, is extensively treated with respect to feature extraction and selection and servoing th eory. Principles and concepts of in-process monitoring and control associated with optical-based processes are treated in some detail. Part V: Opto-Mechatronic Processes and Systems After a presentation of the basic technologies in Parts I through IV, Pa rt V illustrates underlying practical applications to various processes and systems. Part V contains Cha pters 17 through 23 and includes discussions of semiconductor fabrication processes, inspection and c ontrol of surface-mount processes for electronic part assembly, optical-based manufacturing processes, and systems such as optical data- storage systems and opto-skill-capturing systems for service robots. T he final chapters, Chapters 22 and 23, discuss issues related to optical MEMs, particularly optical array s ources, and the design and control of vision-based microassembly systems. © 2003 by CRC Press LLC Acknowledgments I would like to express my heartfelt thanks to all the contributors of this handbook for their time and effort in preparing their chapters. Their excellent work is very much appreciated. I also wish to express a special thanks to Cindy Renee Carelli, CRC Press Acquisitions Editor, for her assistance, advice, and patience during the editing phase of this handbook. Her enthusiasm and encouragement provided me with the stimulus and motivation to launch and continue moving this project ahead. In addition, many thanks to Helena Redshaw, CRC Supervisor, Editorial Project Development, for ensuring that all manu- scripts were ready for production, and Won Sik Park, my Ph.D. student, for managing the incoming draft manuscripts. Finally, many thanks to Young Jun Roh, my Ph.D. student, and Hwa Yong Lim, my secretary, for their tremendous help in preparing the manuscripts and art work. © 2003 by CRC Press LLC © 2003 by CRC Press LLC About the Editor Hyungsuck Cho, Ph.D., received his B.S. in 1971 from Seoul National Uni- versity, Korea, his M.S. in 1973 from Northwestern University, Evanston, Illinois, U.S.A., and his Ph.D. in 1977 from the University of California at Berkeley, U.S.A. From 1977 to 1978 he was a postdoctoral fellow in the Department of Mechanical Engineeering, University of California at Berkeley. Since 1978 Dr. Cho has been a professor in the Department of Production Engineering, Department of Automation and Design, Seoul Campus. He is also currently a member of the Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Taejeon, Korea. From 1984 to 1985 he was a visiting scholar at the Institut für Producktionstechnik and Automatisierung (IPA), Germany, where he conducted research on robot-based assembly. He has been invited as a short-term visiting scholar to several universities, including Ritsumei- kan University, Japan (1987); the University of Paderborn, Germany (1992); and the New Jersey Institute of Technology, U.S.A. (1998). From 1995 to 1996 he was a visiting professor in graduate school education for the Advanced Manufacturing Program (AMP) of the University of California at San Diego, U.S.A. Dr. Cho’s research interests focus on the areas of environmental perception and recognition for mobile robots, machine vision and pattern classification, and application of artificial intelligence/machine intel- ligence. He has published seven book chapers and more than 377 research papers (307 papers published in international journals or presented at conferences and 70 papers published in Korean-language journals). He serves on the editorial boards of five international journals: Journal of Robotic Systems, Robotica, Control Engineering Practice (IFAC), Journal of Advanced Robotics, and Journal of Engineering Manufacture (PIME). In 1998 he served as a guest editor for a special issue on “Intelligent Robotic Assembly” for the journal Robotica. In addition to his academic activities, Dr. Cho has served on technical committees on robotics, advanced manufacturing, and measurements on robotics for IFAC and IMEKO. He has organized and participated in international symposia and conferences, and has served on the program committees of several inter- national conferences, including IEEE R&A, and IEEE/RSJ IROS, IFAC, ASME, and SPIE. He founded the conference Opto-Mechatronic Systems of SPIE (ISAM). He has chaired or co-chaired several conferences and symposia, including two symposia of the ASME Winter Annual Meeting (1991, 1993); IFAC Workshop on Intelligent Manufacturing (1997); IEEE/RSJ IROS (1999); International Workshop on Mechatronics Technology (1999); and SPIE-Opto-Mechatronic Systems (2000, 2001). Dr. Cho received the fellowship of the Alexander von Humboldt Award of Germany in 1984. He received the Best Paper Award at an ISAM conference in 1994. In 1998 he was awarded the Thatcher Bros Prize from the Institution of Mechanical Engineers, U.K. for his achievements in research in the fields of robotics and automation. He served as President of the Institute of Control, Automation, and Systems Engineers in Korea for 2001. © 2003 by CRC Press LLC