NASA Technical Reports Server (NTRS) 20100015722: Near-field nano-imager

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12 United States Patent (10) Patent No.: US 7,649,166 B2
( )
Liu et al. (45) Date of Patent: Jan. 19, 2010
(54) NEAR-FIELD NANO-IMAGER (56) References Cited
U.S. PATENT DOCUMENTS
(75) Inventors: Boyang Liu, Evanston, IL (US);
2009/0174022 Al * 7/2009 Coe-Sullivan et al........ 257/448
Seng-Tiong Ho, Wheeling, IL (US)
* cited by examiner
(73) Assignee: Northwestern University, Evanston, IL Primary Examiner Kevin Pyo
(US) (74) Attorney, Agent, or Firm Morris, Manning & Martin
LLP; Tim Tingkang Xia
(*) Notice: Subject to any disclaimer, the term of this
patent is extended or adjusted under 35 (57) ABSTRACT
U.S.C. 154(b) by 0 days.
An imaging device. In one embodiment, the imaging device
includes a plurality of first electrode strips in parallel to each
(21) Appl. No.: 12/233,273
other along a first direction x, wherein each first electrode
strip has an elongated body with a first surface and an oppo-
(22) Filed: Sep.18, 2008
site, second surface and a thickness n The imaging device
i.
also includes a plurality of second electrode strips in parallel
(65) Prior Publication Data
to each other along a second direction y that is substantially
US 2009/0095882 Al Apr. 16, 2009 perpendicular to the first direction x, wherein each second
electrode strip has an elongated body with a first surface and
Related U.S. Application Data an opposite, second surface and a thickness n, The plurality
of second electrode strips are positioned apart from the plu-
(60) Provisional application No. 60/973,182, filed on Sep.
rality of first electrode strips along a third direction z that is
18, 2007.
substantially perpendicular to the first direction x and the
second direction y such that the plurality of first electrode
(51) Int. Cl.
strips and the plurality of second electrode strips are crossing
HOIL 27/00 (2006.01)
each other accordingly to form a corresponding number of
(52) U.S. Cl . ................. 250/208.1; 250/214.1; 250/306; crossing points. And at each crossing point, a semiconductor
73/105;977/810 component is filled between the second surface of a corre-
(58) Field of Classification Search .............. 250/208.1, sponding first electrode strip and the first surface of a corre-
250/214.1, 306, 307; 73/105; 977/810, 811, sponding second electrode strip to form an addressable pixel.
977/813,862
See application file for complete search history. 18 Claims, 11 Drawing Sheets
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