NASA Technical Reports Server (NTRS) 20080004610: Micromachined peristaltic pump

20 Pages·1.2 MB·English

by  NASA Technical Reports Server (NTRS)

United States Patent [191 [ill Patent Number: 5,705, O 18
Hartley [451 Date of Patent: Jan. 6,1998
MICROMACHINED PERISTALTIC PUMP “Pexformance Simulation of Microminiaturized Membrane
Pumps,” by R. Zengerle. et al.. Fraunhofer Institute for Solid
Inventor: Frank T. Hartley. 529 E. Las Flores State Technology. Munich, Germany.
Ave.. Arcadia, Calif. 91006 “Peristaltic Pumpting,” by M.Y. JafFrin et al., 197 1, Depart-
ment of Mechanical Engineering, Institute of Technology,
Appl. No.: 572,186 Cambridge, Massachusetts.
“F’iezoelectric Micropump with Three Valves Working Peri-
Filed Dec 13,1995 staltically.” by Jan G. Smist, Sensors and Actuators (1990).
........................................................ pp. 203-206.
ht. CL6 B44c 1/22
U.S. C1. ................... 156M; 156/630.1; 15W657.1; “A Micro Membrane Pump with Electrostatic Actuation.” by
R. Zengerle et al., Micro Electro Mechanical Systems ’92,
216/2; 216/33
Field of Search ................................. 156B45, 630.1, Travemunde, Germany, Feb. 4-7, 1992.
“Electrohydrodynamic Pumping and Flow Measurement,”
156f657.1, 662.1; 21W2, 33.41; 417f474,
by A. Richter et al., pp. 271-276, Proceedings of the IFEE
477,480
Micro Elwtro Mechanical Systems, Application of Micro
Structure, Sensors. Actuators, Machines and Robots, Nara,
References Cited
Japan, Jan. 30-Feb. 2. 1992, New Yak, New York. U.S.A.,
U.S. PATENT DOCUMENTS IEEE 1991.
“Dialog Search Abstract,” date Oct. 12. 1995, pp. 1-8.
4,794,370 1211988 Simpson et al. ....... ................. “Dialog Search Abstract,” date Ob.,1 995.
5,380,3% 1/1995 Shikida et al. 15W630.1
...............................
5,585,011 12/1996 S& et al. 216/33 Primary Examiner-William Powell
Attorney, Agent, or Firn+F’rice, Gess & Ubell
OTHER PUBLICXITONS
P71 ABSTRACT
Preprint of “Design. Fabrication & Testing of a Miniature
Peristaltic Membrane Pump,” by James A. Folta et al., Apr. A micromachined pump including a channel formed in a
1992. prepared for Proceedings of the IEEE Solid State semiconductor substrate by conventional processes such as
Sensor and Actuator Workshop, Hilton Head Island, South chemical etching. A number of insulating barriers are estab-
Carolina, held Jun. 21-25, 1992. lished in the substrate parallel to one another and transverse
“Design. Fabrication & Testing of a Miniature Peristaltic to the channel. The barriers separate a series of electrically
Membrane Pump,” by James A. Folta et al.. pp. 186189. conductive strips. An overlying flexible conductive mem-
Apr. 1992, Lawrence Livermore National Laboratory, Cali- brane is applied over the channel and conductive strips with
fornia. an insulating layer separating the conductive strips from the
“A Piezo-Electric Pump Driven by a Flexural Progressive conductive membrane. Application of a sequential voltage to
Wave,” pp. 11&113, by Shun-ichi Miyazaki et al.. Seventh the series of strips pulls the membrane into the channel
International Conference on Solid State Sensors and Actua- portion of each successive strip to achieve a pumping action.
tors, held at Yokohama, Japan, on Juri. 7-10. 1993. A particularly desirable arrangement employs a microma-
“A Novel Piezoelectric Valve-Less Fluid Pump,” by Erik chined push-pull dual channel cavity employing two sub-
Stemme et al., 7th International Conference on Solid State strates with a single membrane sandwiched between them.
Sensors & Actuators. pp. 110-113. Yokohama, Japan, Jun.
7-10. 1993. 26 Claims, 13 Drawing Sheets
US. Patent 5,705,O 18
Jan. 6,1998 Sheet 1 of 13
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