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Sujeet K. Sinha N. Satyanarayana Seh Chun Lim Editors Nano-tribology and Materials in MEMS Nano-tribology and Materials in MEMS Sujeet K. Sinha N. Satyanarayana • Seh Chun Lim Editors Nano-tribology and Materials in MEMS 123 Editors Sujeet K.Sinha N.Satyanarayana Department of Mechanical Engineering Seh ChunLim Indian Instituteof Technology Department of Mechanical Engineering Kanpur National Universityof Singapore India Singapore ISBN 978-3-642-36934-6 ISBN 978-3-642-36935-3 (eBook) DOI 10.1007/978-3-642-36935-3 SpringerHeidelbergNewYorkDordrechtLondon LibraryofCongressControlNumber:2013934533 (cid:2)Springer-VerlagBerlinHeidelberg2013 Thisworkissubjecttocopyright.AllrightsarereservedbythePublisher,whetherthewholeorpartof the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation,broadcasting,reproductiononmicrofilmsorinanyotherphysicalway,andtransmissionor informationstorageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purposeofbeingenteredandexecutedonacomputersystem,forexclusiveusebythepurchaserofthe work. Duplication of this publication or parts thereof is permitted only under the provisions of theCopyright Law of the Publisher’s location, in its current version, and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the CopyrightClearanceCenter.ViolationsareliabletoprosecutionundertherespectiveCopyrightLaw. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publicationdoesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexempt fromtherelevantprotectivelawsandregulationsandthereforefreeforgeneraluse. While the advice and information in this book are believed to be true and accurate at the date of publication,neithertheauthorsnortheeditorsnorthepublishercanacceptanylegalresponsibilityfor anyerrorsoromissionsthatmaybemade.Thepublishermakesnowarranty,expressorimplied,with respecttothematerialcontainedherein. Printedonacid-freepaper SpringerispartofSpringerScience?BusinessMedia(www.springer.com) Preface Thefieldofnanotribologyhasadvancedtoagreatextentthankstothephenomenal growth of information storage industry. The magnetic hard disks used for recording and retrieving digital data require extremely thin nanolubricant for the protectionofthediskfrommechanicaldamagesandwearbythesliderwhichflies just above the surface of the disk with flying height only a few nanometer. Even thoughthesliderisdesignednottotouchthedisk,contactsbetweenthesliderand the disk are inevitable and hence we require the protection of the disk by the nanolubricant. A similar requirement, at least in length scale, is experienced in microsystems such as micro-electro-mechanical systems (MEMS) where micron- sized components, usually made of Si, are made to move about just like their macro-machinecounterparts.Sliding,contactandimpactbetweenthecomponents lead to the problems of adhesion, friction and wear. Because of the small length scalesinvolved,theproblemsoftribologyfacedinmicrosystemsdifferdrastically from those of the traditional macro-scale machines. Therefore, it is important to address these issues taking into considerations the materials, micro-fabrication process, lubricants and the lubrication methods. A symposium titled ‘‘Nano-tribology and Related Materials Issues in MEMS’’ wasorganizedbytheDepartmentofMechanicalEngineering,NationalUniversity of Singapore from 13 to 14 May 2010. A number of invited talks were presented covering the fundamental nanotribology concepts, applications of new materials, surface modifications of Si and polymer substrates and simulations of the friction phenomenon under light load conditions. This book is a collection of the papers that were submitted by the presenters with some additional contributions by the experts in this field. Each chapter has been carefully selected and edited to bring out current practices in the MEMS tribology field with the explicit aim offinding appropriate solutions to the tribological problems faced in MEMS and nano-scale machines. Theeditorswouldliketoexpresstheirdeepestappreciationstotheinvitedand posterpresentersofthissymposiumwithoutwhosehelpthiseventwouldnothave been a reality. We thank the Dean, Faculty of Engineering and the Head of the Department of Mechanical Engineering, NUS, who provided all the supports needed for the organization of this event. We are also grateful to the Singapore v vi Preface NationalResearchFoundation(NRF)forthegenerous research grant(Awardno.: NRF-CRP 2-2007-04) to our team which helped to support much of the research works thatwere presentedinthis symposium. Finally,we would liketo thank the publisher and the authors of the chapters whose relentless effort through the manuscript preparation and editing has resulted in this compilation of very rele- vant works in the field of nanotribology and materials for MEMS. We earnestly hope that this edited book will positively add to the expanding literature in this field to help in current and future research. April 2013 Sujeet K. Sinha Nalam Satyanarayana Seh Chun Lim Contents 1 Nanotribological Phenomena, Principles and Mechanisms for MEMS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Biswajit Saha, Erjia Liu and Shu Beng Tor 2 Biomimetic Inspiration Regarding Nano-Tribology and Materials Issues in MEMS. . . . . . . . . . . . . . . . . . . . . . . . . . 53 Ille C. Gebeshuber 3 Nanotribology and Wettability of Molecularly Thin Film. . . . . . . 81 Yufei Mo and Liping Wang 4 Mechanical Properties and Deformation Behavior of Ni Nanodot-Patterned Surfaces. . . . . . . . . . . . . . . . . . . . . . . . 111 Min Zou and Hengyu Wang 5 Biomimetic Surfaces for Tribological Applications in Micro/Nano-Devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147 R. Arvind Singh, Eui-Sung Yoon, Kahp Yang Suh and Deok-Ho Kim 6 Molecular Simulation of Polymer Nanotribology. . . . . . . . . . . . . 163 Y. K. Yew, Z. C. Su, Sujeet K. Sinha and V. B. C. Tan 7 Atomistic Modeling of Polymeric Nanotribology . . . . . . . . . . . . . 183 L. Dai and V. B. C. Tan 8 Probing the Complexities of Friction in Submicron Contacts Between Two Pristine Surfaces. . . . . . . . . . . . . . . . . . . . . . . . . . 199 Wun Chet Davy Cheong and Anna Marie Yong 9 Nano/Micro-Tribological Properties of MEMS/NEMS Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215 R. Arvind Singh, N. Satyanarayana and Sujeet K. Sinha vii viii Contents 10 Friction and Wear Studies of Ultra-Thin Functionalized Polyethylene Film Chemisorbed on Si with an Intermediate Benzophenone Layer . . . . . . . . . . . . . . . . . . . . . . . 231 Myo Minn and Sujeet K. Sinha 11 Localized Lubrication of Micromachines: A Novel Method of Lubrication on Micromechanical Devices . . . . . . . . . . . . . . . . 247 L. Y. Jonathan, V. Harikumar, N. Satyanarayana and Sujeet K. Sinha Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273 Chapter 1 Nanotribological Phenomena, Principles and Mechanisms for MEMS Biswajit Saha, Erjia Liu and Shu Beng Tor Abstract Nanotribologyisreferredtoasabranchoftribology,whichinvolvesthe interactionsbetween tworelativelymovingmaterialsincontactatananometeror anatomicscale.Nanotribologywasstimulatedbythefabricationofmicro-electro- mechanical systems (MEMS). With the advent of scanning force microscopy (SPM), experimental approach to nanotribological regimes has been substantially advanced.Mostcommonexamplesofnanotribologicalphenomenaareinharddisk drives, MEMS, and nano-electro-mechanical systems (NEMS). Tribology is a surface phenomenon, which can be significantly affected by a very high surface- to-volume ratio in a micro or nanostructure. Small mass, light load, elastic deformation,andslightwearorabsenceofweararetypicalofnanotribology.Ithas been widely perceived that various tribological test conditions, such as load, velocity, temperature, surface free energy, surface topography, environment, etc. play major roles in nanotribology. The experimental study of nanotribology is made possible by using surface force apparatus (SFA), atomic force microscope (AFM), friction force microscope (FFM), and ball-on-disk nanotribometer. Tri- bologyresearchexceedinglyneedsbroadenedknowledgeinvariousfieldssuchas physics, chemistry, mechanics, materials science, etc. This chapter discusses the various aspects of nanotribology including nanofriction, nanowear and nanolu- brication for MEMS. The nanotribological measurement methodologies and mathematical relationships between friction, bending and torsion forces based on AFM/LFM (lateral force microscopy) are comprehensively reviewed. The influ- ences of various experimental conditions on nanotribology are described with various examples. Simulation techniques for nanotribology are also highlighted. B.Saha(cid:2)E.Liu(&)(cid:2)S.B.Tor SchoolofMechanicalandAerospaceEngineering, NanyangTechnologicalUniversity,50NanyangAvenue, Singapore639798,Singapore e-mail:[email protected] S.K.Sinhaetal.(eds.),Nano-tribologyandMaterialsinMEMS, 1 DOI:10.1007/978-3-642-36935-3_1,(cid:2)Springer-VerlagBerlinHeidelberg2013 2 B.Sahaetal. Contents Introduction................................................................................................................................ 2 MeasurementTechniques.......................................................................................................... 4 ImportanceofAFMCantilever........................................................................................... 5 LateralForceMicroscope......................................................................................................... 7 BendingofRectangularCantilever..................................................................................... 8 BendingofV-ShapedCantilever........................................................................................ 10 TorsionofRectangularCantilever...................................................................................... 12 TorsionofV-ShapedCantilever......................................................................................... 13 ChemicalMappingandTopographyUsingNanofriction........................................................ 14 Nanotribometer.......................................................................................................................... 17 ControllingParametersforFrictionCoefficient...................................................................... 18 EffectofVelocity................................................................................................................ 18 EffectofSurfaceForce....................................................................................................... 20 EffectofTemperature.......................................................................................................... 23 EffectofLoad...................................................................................................................... 24 EffectofContactArea........................................................................................................ 26 EffectofEnvironment......................................................................................................... 28 ApplicationsofNanotribology.................................................................................................. 28 Micro-Electro-MechanicalSystem...................................................................................... 28 MicrofluidicDeviceandMicromold.................................................................................. 31 MagneticRecordingSystem................................................................................................ 33 Nanowear................................................................................................................................... 35 LubricantsforNanotechnology................................................................................................. 39 MetallicandCeramicLubricants........................................................................................ 39 FluoropolymerLubricants................................................................................................... 40 SelfAssembledMonolayer................................................................................................. 41 SimulationofTribologicalPhenomena.................................................................................... 43 Summary.................................................................................................................................... 48 References.................................................................................................................................. 48 Introduction Thescientificterm‘‘tribology’’isrelatedtotheinterfaceofmovingsurfaces,which mainly deals with friction, wear and lubrication. Friction is resistance to relative motionsofanystateofmaterialsincontact,wearislossofmaterialsfromonesolid bodyoranotherorbothduringtheirrelativemotionsincontact,andlubricationisto reduce friction and wear between two moving materials by means of a lubricant presentattheinterface.Thoughtribologicalphenomenahaveexistedsincethevery beginning of the world, the term ‘‘tribology’’ was only introduced by Jost in the modern age, i.e. 1966 [1]. This term has been more on technological use in industrialoperationforeconomy,durability,lifetimeandmaintenancecalculation.