NANO- AND MICROELECTROMECHANICAL SYSTEMS PDF
344 Pages·2012·8.3692 MB·other
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Description:
The fundamental goal of this book is to develop the basic theoretical
foundations in order to design and develop, analyze and prototype highperformance
NEMS and MEMS. This book is focused on the development
of fundamental theory of NEMS and MEMS, as well as their components
and structures, using advanced multidisciplinary basic and applied
developments. In particular, it will be illustrated how to perform the
comprehensive studies with analysis of the processes, phenomena, and
relevant properties at nano- and micro-scales, development of NEMS and
MEMS architectures, physical representations, structural design and
optimization, etc.
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