Microwave Semiconductor Engineering Van Nostrand Reinhold Electrical/Computer Science and Engineering Series Sanjit Mitra, Series Editor HANDBOOK OF ELECTRONIC DESIGN AND ANALYSIS PROCEDURES USING PROGRAMMABLE CALCULATORS, by Bruce K. Murdock COMPI LER DESIGN AND CONSTRUCTION, by Arthur B. Pyster SINUSOIDAL ANALYSIS AND MODELING OF WEAKLY NONLINEAR CIRCUITS, by Donald D. Weiner and John F. Spina APPLIED MULTIDIMENSIONAL SYSTEMS THEORY, by N. K. Bose MICROWAVE SEMICONDUCTOR ENGINEERING, by Joseph F. White Microwave Semiconductor Engineering [ c Joseph F. White, Ph. D. Vice President Technical Director Semiconductor Devices MICROWAVE ASSOCIATES, INC. ~ Burlington, Massachusetts II A MIA-COM Company Van Nostrand Reinhold Electrical/Computer Science and Engineering Series InimI VAN NOSTRAND REINHOLD COMPANY ~ NEW YORK CINCINNATI TORONTO LONDON MELBOURNE Van Nostrand Reinhold Company Regional Offices: New York Cincinnati Van Nostrand Reinhold Company International Offices: London Toronto Melbourne Copyright e 1982 by Van Nostrand Reinhold Company Softcoyer reprinl of the hardcover 1st edition 1982 Library of Congress Catalog Card Number: 81·10498 ISBN 978·94-011·7067·3 ISBN 978·94-011·7065·9 (eBook) DOl 10.1007/978·94-011·7065·9 All rights reserved. Originally copyrighted CI 1977 by Artech House under the title, SEMICONDUCTOR CONTROL. No part of this work covered by the copyright hereon may be reproduced or used in any form or by any means - graphic, electronic, or mechanical, including photocopying, recording, taping, OJ information storage and retrieyal systems - without permission of the publisher. Manufactured in the United States of America Published by Van Noslrand Reinhold Company 135 West 50th Street, New York, N.Y. 10020 'Published simultaneously in Canada by Van Nostrand Reinhold Ltd. 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Library of Congress Cataloging in Publication Dala White, Joseph F., 1938- Microwave semiconductor engineering. (Van Nostrand Reinhold electrical/computer science and engineering series) Bibliography; p. Includes index. I. Microwaye devices - Design and construction. 2. SemicondUctors. I. Title. II. Series. TK7876.W49 621.381'33 81·10498 AACR2 To Christopher, Patricia Jeanne, Catherine, and Elizabeth Foreword Joseph F. White has studied, worked, and taught in all aspects of microwave semiconductor materials, control diodes, and circuit applications. He is thoroughly grounded in the physics and math ematics of the field, but has primarily the engineer's viewpoint, combining basic knowledge with experience and ingenuity to gen erate practical designs under constraints of required performance and costs of development and production. As a result of his teach ing experience and numerous technical papers and oral presenta tions, he has developed a clear, well-organized writing style that makes this book easy to use as a self-teaching text, a reference volume, and a design handbook. Dr. White believes that an engineer must have a good understand ing of semiconductor physics, a thorough knowledge of microwave circuit theory, at least an elementary acquaintance with transistor drivers, and the ability to check and refine a microwave circuit on a computer terminal to be qualified for modern, creative design of microwave semiconductor control components. These subjects are well covered in approximately the first half of the book; the second half treats the general and specific design of switches, at tenuators, limiters, duplexers, and phase shifters, with many ex amples drawn from his experience and that of others. Especially important is the chapter Mathematical Techniques and Computer Aided Design; it should appeal to all who are concerned with microwave circuits, whether or not these circuits include semiconductor elements. In particular, engineers seeking a good introduction to computer programming will find this book serves the function well; typical books and instruction manuals on FORTRAN are too general, too complex, and too confusing for those who wish to learn the programming skills needed for com puter aided design of microwave circuits. Dr. White provides the necessary information for time-shared FORTRAN IV work, start ing with the fundamentals and covering integer, real, and complex variables; operation symbols; real and complex functions; sub routines; simple READ, WRITE, and FORMAT statements; flow charts; and so on. He gives a number of program listings as exam ples, starting with simple ones, then moves on to subroutines for vii lossy line immittance transformation, complex ABeD matrix multiplication, response calculation, and a final flow chart and listing of a general network analysis program for the cascaded two-port building blocks commonly found in microwave circuits. Also, he reproduces a number of printouts from his terminal which illustrate the effect of the WRITE and FORMAT state ments, thereby making their meanings unambiguous. I believe that other microwave engineers will share my admiration for the broad value of this book, and will consult it frequently regarding various aspects of microwave circuits, either with or without semiconductors as elements. Seymour B. Cohn Tarzana, California viii Preface This book, initially entitled Semiconductor Control, was written to be a text and engineering reference for engineers who develop control devices at Microwave Associates, a purpose it continues to serve. Yet, whether one wishes to design a microwave control device, such as a switch or a phase shifter, or some other microwave solid-state device, such as a Gunn diode oscillator or an FET amplifier, the principles requisite for an understanding of the physics of semiconductors, the techniques used for microwave circuit design and analysis, and the computer-aided evaluative methods to be employed are the same. Several colleagues have suggested that, while this book's techniques are illustrated with semiconductor control devices, its utility extends throughout the semiconductor microwave engineering area - hence, the new title. A consideration was to revise the book to include other semi conductor devices such as Gunn and avalanche diodes, bipolar and field-effect transistors, and so forth. But these are better treated in their own separate texts. To include these devices here with the same detail presently afforded to control components would result in too long a book. Alternatively, to reduce the control device treatment to allow for other devices would compromise the thorough control device coverage that is unique to this text. This book is useful for students and practicing engineers interested in semiconductor device use at microwave frequencies and who therefore must understand both semiconductor and circuit principles sufficiently to design, measure, and analyze their per formance. The book represents a compendium of techniques, derivations, practical applications, formulas, and constants that I have collected over a 20-year period in my practice of semi conductor microwave engineering. Included also are several detailed mathematical and theoretical treatments that the practicing engineer is likely to encounter and be curious about - such as how to define waveguide impedance absolutely and why backward wave couplers have match, isolation, and 90° phase split at all frequencies, how the Smith Chart is derived and why matrix theory is useful. The introduction to FORTRAN IV programming is especially designed for microwave circuit engineers. ix The book need not be read through, cover to cover. Each chapter, and within the chapters most of the sections, can be read on a stand-alone basis. In the Introduction that follows, I have high lighted those elements of each chapter that are special. To derive most of the benefits from the book, one need but scan this intro duction in sufficient detail that when an occasion for treating one of these topics arises, a ready reference can be made to the appro priate sections. It is the reader who decides how effectively subjects have been chosen and covered. Accordingly, comments, suggestions for future revision and related text, and the noting of errors that are directed to me will be especially appreciated. Joseph F. White Lexington, Massachusetts x Introduction Microwave Semiconductor Engineering treats principles of semi conductors emphasizing 1) the properties which predominate at microwave frequencies, 2) the mathematical and circuit design techniques required to utilize them at microwave frequencies, and 3) practical engineering applications for controlling microwave signals in amplitude and phase using semiconductors. The book is a useful addition to the personal library of the engineering student or practicing professional, whether specializing in microwave semiconductor applications or merely needing to make reference to these topics occasionally. A conversational format has been used to permit the reader to gain a qualitative perspective of the material on each subject, a perspec tive that may itself suffice in many situations. The reader may be interested, for example, in determining just what it is that defines a semiconductor, how lifetime is specified and why it is important, and how it would affect circuit performance. From a circuit view point, the reader may need to know how a simple filter can be designed to include the diode capacitance in a switch, or how a directional coupler works and what methods can be used to analyze it. At this general insight level, the reader may skim the book, obtaining only the introduction to and physical insight into a subject that the reader's interest may require. At the specific design level, the reader seeks more detailed and quantitative infor mation regarding semiconductors and the design of the circuits utilized. For this reader, the most fundamental exposition of the subject is never too much, and for this purpose an in-depth coverage is provided. The book assumes only an introduction to electrical engineering, specifically to microwaves; it can be used in conjunction with or following a first course in microwaves, since most microwave analysis methods, even use of the Smith Chart, are derived directly in the text and the appendices. Chapters I-III introduce the semiconductors themselves, evolving the physical principles behind semiconductors, the PN junction, rectification, the PIN diode, and the characteristics that affect microwave performance. The concepts of doping, hole and elec- xi
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