Micromanufacturing processes

421 Pages·2012·6.386 MB·English

by  V K Jain

Micromanufacturing
Processes
Edited by
V. K. Jain
Micromanufacturing
Processes

Micromanufacturing
Processes
Edited by
V. K. Jain
CRC Press
Taylor & Francis Group
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Dedicated
to
Kanti Jain (wife)
and
Aanya Jain (granddaughter)

Contents
Foreword .........................................................................................................................................ix
Preface ..............................................................................................................................................xi
Editor.............................................................................................................................................xiii
Contributors ...................................................................................................................................xv
Section I Introduction
1. Micromanufacturing: An Introduction ..............................................................................3
V.K. Jain, Ajay Sidpara, M. Ravisankar, and Manas Das
2. Challenges in Meso-, Micro-, and Nanomanufacturing ..............................................39
V. Radhakrishnan
Section II Micromachining
Traditional Micromachining
3. Microturning .........................................................................................................................55
R. Balasubramaniam and Vinod Kumar Suri
4. Microgrinding .......................................................................................................................75
P.V. Rao and S. Ghosh
Advanced Micromachining
5. Biomachining—Acidithiobacillus-Genus-Based Metal Removal .............................99
Hong Hocheng, Jei-Heui Chang, and Umesh U. Jadhav
6. Micro- and Nanomanufacturing by Focused Ion Beam .............................................113
Vishwas N. Kulkarni, Neeraj Shukla, and Nitul S. Rajput
Section III Nanofinishing
7. Magnetorheological and Allied Finishing Processes .................................................133
Ajay Sidpara and V.K. Jain
8. Magnetic Abrasive Finishing (MAF) .............................................................................155
D.K. Singh, S.C.Jayswal, and V.K. Jain
9. Abrasive Flow Finishing (AFF) for Micromanufacturing .........................................183
M. Ravisankar, J. Ramkumar, and V.K. Jain
vii
viii Contents
Section IV Microjoining
10. Laser Microwelding ...........................................................................................................203
N.J. Vasa
11. Electron Beams for Macro- and Microwelding Applications ....................................221
D.K. Pratihar, V. Dey, A.V. Bapat, and K. Easwaramoorthy
Section V Microforming
12. Micro- and Nanostructured Surface Development by Nano Plastic
Forming and Roller Imprinting .......................................................................................243
M. Yoshino, K. Willy, A. Yamanaka, T. Matsumura, S. Aravindan, and P.V. Rao
13. Microextrusion ....................................................................................................................263
U.S. Dixit and R. Das
14. Microbending with Laser .................................................................................................283
U.S. Dixit, S.N. Joshi, and V. Hemanth Kumar
Section VI Miscellaneous
15. Dimensional Metrology for Micro/Mesoscale Manufacturing ................................307
Shawn P. Moylan
16. Micromolding—A Soft Lithography Technique ..........................................................329
B. Radha and G.U. Kulkarni
17. Fabrication of Microelectronic Devices .........................................................................349
Monica Katiyar, Deepak, and Vikram Verma
18. An Integrated Wafer Surface Evolution Model for Chemical
Mechanical Planarization (CMP) ....................................................................................373
Abhijit Chandra, Ashraf F. Bastawros, Xiaoping Wang, Pavan Karra, and
Micayla Haugen
Index .............................................................................................................................................401
Foreword
It is with great pleasure that I read the draft copy of the book Micromanufacturing Processes
by Professor V.K. Jain of the Indian Institute of Technology, Kanpur, India. I am no stranger
to his publications and presentations at Indian and international conferences. He is an
erudite scholar and a voracious writer. This book contains 18 chapters written mostly by
Indian researchers, including himself, and a few international scientists, including one
from the National Institute of Standards and Technology, Gaithersburg, USA, on dimen-
sional metrology for meso-, micro-, and nanomanufacturing and another on biomachin-
ing from the famous National Tsing Hua University, Hsinchu, Republic of China. Quite
fittingly, the book opens with challenges faced not only in micromanufacturing but also
in meso- and nanomanufacturing. India has indeed made a modest start in these areas,
which is evident from the many chapters in this book. The impact that the Indian Institutes
of Technology have had on Indian graduate education is evident from the vast number of
IIT PhD scholars who are coauthors of the chapters.
The areas covered in this book are microturning and grinding, magnetorheological fin-
ishing (MRF), abrasive flow machining, laser macro- and microwelding, and electron beam
macro- and microwelding. This book will be a valuable companion to many advanced
books on manufacturing processes, including my book, Precision Engineering (published
by McGraw Hill in 2008). The book’s creative work includes new derivations for unconven-
tional machining techniques, and researchers will find it a good source of reference. The
book has many citations to The International Academy for Production Engineering (CIRP)
work, and CIRP’s focus group on microproduction engineering will find this new book a
valuable asset.
Professor V.C. Venkatesh, DSc, PhD
Department of Mechanical Engineering
University of Nevada, Las Vegas, Nevada
ix