Metallurgical Coatings and Thin Films 1990 PDF
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METALLURGICAL COATINGS AND THIN FILMS 1990 Proceedings of the 17th International Conference on Metallurgical Coatings and 8th International Conference on Thin Films, San Diego, CA, U.S.A., April 1990 2~, EDITORS: B. D. SARTWELL J. N. ZEMEL G. E. McGUIRE F.N.BRESNOCK Volume I Reprinted from the journal Surface and Coatings Technology Vol. 43/44, Nos. 1-3 ELSEVIER APPLIED SCIENCE LONDON and NEW YORK ELSEVIER APPLIED SCIENCE PUBLISHERS LTD Crown House, Linton Road, Barking, Essex 1G11BJU, England Sole Distributor in the USA and Canada ELSEVIER SCIENCE PUBLISHING CO.,INC. 655Avenue of the Americas, New York, NY 10010,USA British Library Cataloguing in Publication Data International Conference on Metallurgical Coatings and Thin Films (17th and 8th: 1990:San Diego, Calif.) Metallurgical Coatings and Thin Films 1990: proceedings of the 17th International Conference on Metallurgical Coatings and 8th International Conference on Thin Films, San Diego, CA, USA. April 2--6, 1990. 1. Metallic coatings I. Title II. Sartwell, B. D.;Zemel,J. N.; McGuire, G. E.; Bresnock, F. N. III. Surface and coatings technology IV. Thin solid films 667.9 ISBN 1-85166-813-6 (v.I) ISBN 1-85166-814-4 (v.2) ISBN 1-85166-815-2 (The set) Library ofCongress CIP Data Applied For © ELSEVIERSEQUOIA S.A. 1990 No responsibility is assumed by the Publisher for any injury and/or damage to persons or propertyas a matterofproductsliability, negligenceor otherwise, or from any use or operation of any methods, products, instructions or ideas contained in the material herein. Special regulations for readers in the USA This publication has been registered with the Copyright Clearance Center Inc. (CCC), Salem, Massachusetts. Information can be obtained from the CCC about conditions under which photocopiesofpartsofthispublicationmay bemade in theUSA.All othercopyrightquestions, including photocopying outside the USA, should be referred to the publisher. All rights reserved. No partofthispublication may be reproduced, storedin a retrievalsystem, or transmittedin any formor byany means, electronic,mechanical, photocopying,recording, or otherwise, without the prior written permission ofthe publisher. Printed in the Netherlands by Krips Repro B.V. v Preface The combined 17th International Conference on Metallurgical Coatings and 8th International Conference on Thin Films was held in San Diego, California, April 2-6, 1990. This meeting was sponsored by the Vacuum Metallurgy Division of the American Vacuum Society (AVS) and the Thin Film Division of the International Union for Vacuum Science, Techniques, and Applications. Dr. William Sproul and Dr. Stephen Rossnagel, the Gen- eral Chairman and Program Chairman, respectively, with the assistance of the advisory committees, organized an excellenttechnical program, withover 480 papers being presented at the conference. This proceedings contains the 219papers out of 252submitted that were peer reviewed and accepted on the basis of technical merit and timeliness of submission. As in recent years, the papers are being published in one of two Elsevier Sequoia journals, Surface and Coatings Technology and Thin Solid Films. For 1990,the papers were divided into topical areas thatdeterminedin which journal they were published. Papers in the areas of high temperature coatings, hard coatings, tribology, diamond, c-BN, and ion beam modification are being published in Surface and Coatings Technology. Papers in the areas ofmicroelectronics, optics, magnetism, solar cells, and thin film characteriza- tion, together with all papers from the poster session on aspects of thin films, are being published in Thin Solid Films. On a subsequent page are listed the winners of the Bunshah Awards, which were established by the Vacuum Metallurgy Division of AVS to recognize authors of outstanding papers in each topical area of the confer- ence. The coatings community was saddened by the loss this year of Dr. Randy Randhawa, who was one of the acknowledged world experts on cathodic arc deposition. The remarks made by Dr. William Sproul at the Plenary Session of the conference are included in the introductory pages to this proceedings. The organization of a conference and assembly of a proceedings ofthis size and magnitude obviously require the efforts of a considerable number of people. The Executive, Executive Program, International, and National Advi- sory Committees, and the Session Chairmen for ICTF/ICMC90 are recognized in the following pages, and their efforts are hereby gratefully acknowledged. In addition, the generous support of the firms exhibiting at the conference, also listed separately, is acknowledged. Specifically related to the proceedings, the editors would like to thank the members of the Executive Program Committee for providing the names of a large number of the referees of the papers. They would also like to vi acknowledge gratefully the efforts of the referees themselves, who are princi- pally responsible for the quality of this proceedings. Finally, the editors would like to thank Mary Gray for her excellent work in creating the manuscript database and distributing papers to referees. PROCEEDINGS EDITORS BRUCE D. SARTWELL JAY N. ZEMEL GARY E. McGUIRE FRANK N. BRESNOCK August 1990 vii In memorium Harbhajan Singh Randhawa To close this plenary session, I want to take the last few minutes in remembrance of Dr. Harbhajan Singh Randhawa. Dr. Randhawa, orRandy to those of us who knew him, died a tragic death in the crash of the Air India flight in Bangalore, India on February 14th of this year, just a little over 6 weeks ago. Randy was on a business trip that was to have taken him to India, China, and Japan. I had justbeen with Randy four days before his death, and when I learned of what had happened, I could not believe it. I was stunned, shocked, saddened, and angered by his loss, for Randy was not only a friend but he was one of the respected leaders in the field of cathodic arc hard coatings. I still find it hard to believe that we have lost a person of his caliber. Randy, who was born and raised in India, came to this country as a post-doc to study under Professor Ron Bunshah at UCLA. After com- pleting his work with Ron, he joined the TRW Cutting Tool Division in Augusta, Georgia, and stayed with them until 1986when he went to work for Vac-Tec Systems in Boulder, Colorado. Randy was one of the pioneers in this country in the cathodic arc deposition of hard coatings on cutting tools. At TRW, he had one of the first cathodic arc systems, and he made it work. At Vac-Tec he broadened his horizons beyond just cutting tools, and he ex- panded the use of cathodic arc coatings for decorative and non-tool wear applications. I personally came to know Randy through this Metallurgical Coatings conference. Randy often presented papers here on his work, and it was here that we would compare the advantages and disadvantages of the cathodic arc and sputtering processes for hard coatings. For the past several years, Randy was a session chairman at the ICMC and was to have been one this year as well. His place will be taken by Dr. Phil Johnson ofVac-Tec, who will also present Randy's paper for us on Wednesday morning. Randy was also active in the Vacuum Metallurgy Division of the AVS and served on the Executive Committee of the VMD. That's the professional side of Randy. On the personal side, he was one of those rare individuals-a genuinely nice guy. His nature was very pleas- ant, and he often had a twinkle in his eye. Somehow he made you feel good after talking with him. Randy definitely is and will be missed. In his memory, this afternoon we will dedicate the session on Hard Coatings Made by Arc Methods to him. ix Publication schedule Volume I Preparation ofdiamond films Properties of diamond films Diamond-like carbon Cubic BN films Plasma, laser and conventional CVD Hard coatings and related properties Characterization and properties ofTiN Hard coatings made by sputtering Hard coatings made by arc methods High temperature corrosion resistant coatings High temperature wear and clearance control coatings Thermal barrier coatings Corrosion resistant coatings Reduction of friction through coatings/surface modifications Wear resistance of ceramic, alloy, and composite coatings Coating resistance to erosion, corrosion and severe environments Analysis and micromechanical testing of tribological coatings Surface modification using directed ion beams Surface modification using high energy ion bombardment Industrial equipment and processes Author and subject indexes for Volume I Volume II Basic properties of thin films Fundamental studies of thin film growth Deposition technology Deposition and etching technology Sputtering effects related to thin film growth Diffusion and interdiffusion effects Epitaxy and heterostructure films VLSI-ULSI metallization Surface and thin films analysis techniques Non-destructive characterization techniques Microstructure and mechanical properties Microelectric devices Metal-oxide, metal-semiconductor interfaces Characterization and properties of mixed films Amorphous materials and devices Oxides for device applications Oxides and oxy-nitride thin films Applications ofoxides and optoelectric films Transparent, conducting oxides and optical coatings Optical coatings and optoelectric devices x Solar cells and materials Multilayer thin films, including mirrors High temperature superconductors and applications Magnetic films, applications and measurements Thin and thick film sensors Poster session on aspects of thin films Author and subject indexes for Volume II xi AWARD WINNING PAPERS As an incentive for the submission and presentation of papers of the highest quality, the R. F. Bunshah Award (named in honor of the founder of the International Conference on Metallurgical Coatings) is given each year to the authors of the most outstanding papers at the conference. The selec- tion is based on the quality of both the oral presentation and the proceedings manuscript. The author(s) of each winning paper receive a medallion and a monetary award. The following are the winning papers from ICTF/ICMC90: 1 Calculation of residual thermal stress in plasma-sprayed coatings, R. Elsing, O. Knotek and U. BaIting, Institut fur Werkstoffkunde, Techni- cal University of Aachen. Paper appears in Volume I, pages 416-425. 2 The synthesis of cubic BN using a hot cathode plasma discharge in a parallel magnetic field, M. Murakawa and S. Watanabe, Nippon Institute of Technology. Paper appears in Volume I, pages 128-136. 3 Real time spectroscopic ellipsometry study of the electrochemical deposi- tion of polypyrrole thin films, Y.-T. Kim, D. L. Allara, R. W. Collins and K. Vedam, Pennsylvania State University. Paper appears in Volume II, pages 350-360. 4 Characterization and production monitoring of thin films using soft X-ray techniques, J. Nordgren, G. Bray, Y. Claesson, M. Georgson, C.-G.Ribbing and N. Wassdahl, Uppsala University. Paper appears in Volume I, pages 1015-1023. xxi COMMITTEES EXECUTIVE COMMITTEE General Chairman Past Chairman William D. Sproul Bruce D. Sartwell BIRL Industrial Research Laboratory Naval Research Laboratory Program Chairman ICMC Founder & Past Chairman Stephen 'M. Rossnagel Roitan F. Bunshah IBM Research Division University of California Treasurer Proceedings Editors Donald C. Carmichael Bruce D. Sartwell Battelle Columbus Laboratory Naval Research Laboratory Assistant Treasurer Jay N. Zemel Michael E. Graham University of Pennsylvania BIRL Industrial Research Laboratory Gary E. McGuire Publicity Chairman Microelectronics Center of Gary L. Parr North Carolina R&D Magazine Frank N. Bresnock Exhibits Chairman United Technologies Research Paul F. Woerner Center GTE Valenite Corporation EXECUTIVE PROGRAM COMMITTEE Gregory Exarhos David Rickerby Battelle Northwest Harwell Manfred Kaminski Angus Rockett Surface Treatment Science, University of Illinois International Michael Russak Sundarajan Mutialu IBM Yorktown Irvine, California Andrew Nicoll Tali Spalvins Plasma-Technik AG NASA Lewis Anthony J. Perry Robert Tucker GTE Valenite Corporation Union Carbide Corporation xxii INTERNATIONAL ADVISORY COMMITTEE F. Abelas L. J. Hanekamp France The Netherlands R. P. Agarwala C. Hayashi India Japan J. M. Albella H. Hintermann Spain Switzerland H. Bangert S. Hofmann Austria F.R.G. P. B. Barna R. Jacobsson Hungary Sweden S. Berg H. A. Jehn Sweden F.R.G. Dr. Bethge E. Kay F.R.G. U.S.A. R. F. Bunshah A. Kinbara U.S.A. Japan V. Chernyshev M. Krohn U.S.S.R. F.R.G. K. L. Chopra O. Knotek India F.R.G. G. Clark A. Korhonen Australia Finland M. Croset J. P. Langeron France France J. Decosterd P. Martin Liechtenstein Australia S. Dzioba G. Leonhardt Canada F.R.G. A. Flodstrom J. Martinez-Duart Sweden Spain
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