1 TRANSLATION 251-259.qxd.P 7/5/07 7:18 PM Page 251 Motion Control Product Line Overview PRECISION MOTION CONTROL FOR BASIC RESEARCH, INDUSTRIAL R&D, AND HIGH PRECISION MANUFACTURING Motorized Single-Axis Stages A range of motorized linear translation stages covering travel lengths from 0.5" (12mm) up to 6" (150mm). Both low and high power DC servo and stepper driven models are available with varying footprints and load carrying capabilities. See Pages 261-276 Multi-Axis Positioning A wide variety of flexure stages provide the ultimate nanopositioning performance. These systems have satisfied the high-performance position Compact Positioning Stages requirements of our customers for years. A range of compact dovetail, bearing and flexure-based stages for a wide variety of See Pages 277-317 applications. Stages are available with simple leadscrews, differential micrometers, and piezo electric actuators. Travel ranges start at 0.06" (1.5mm) using high-performance flexure mechanisms. See Pages 253-260 Motion Control Electronics A wide range of motion control electronics solutions in a variety of architectures and footprints. Our new T-Cube motion controllers have a highly compact format, ideal for mounting directly to optical tables and allowing easy and convenient control of optomechanical devices right at the heart of the experiment. For higher speed motion control, we offer a range of stepper, DC servo, and piezo benchtop controllers with 1, 2, or 3 channels. For high axis count applications, our 12 channel apt™ 19" rack system is ideal. Fully automated high-precision optical alignment is possible using our highly successful NanoTrak™ control loop technology, available in T-Cube, benchtop, and 19" rack-based formats. See Pages 347-379 www.thorlabs.com 251 7/3/07 2:34 PM Page 252 Single-Axis Stages Selection Guide Pages 253-276 Flexure-Based Translation Stages ■ Compact, Steel Construction ■ 0.06" (1.5mm) to 0.20" (5mm) of Overall Travel ■ Optional Internal Piezo Drives ■ Stackable 2-Axis and 3-Axis Configurations See Pages 253-255 Compact Translation Stages ■ Compact, Aluminum Design ■ Entry-Level Translation Stages ■ Manual and Motorized Versions ■ Stackable 2-Axis and 3-Axis Configurations See Pages 256-266 2 Inch TravelMax ■ Crossed Roller Bearings for High Load Capacity ■ Large Selection of Drive Options ■ Manual and Motorized Versions ■ Designed for Industrial Applications See Pages 267-275 Long Travel Stages ■ Utilize Recirculating, Ball-Bearing Linear Rails ■ Shielded Enclosure ■ Ideal for Industrial or Research Applications See Page 276 252 www.thorlabs.com 7/3/07 2:35 PM Page 253 Motion Control 1.5mm Travel Flexure Stage, 25µm Piezo Actuator Single Axis Stages This NanoFlex™ flexure stage is versatile and Multi-Axis Stages NF15AP25 ctroamvepl aacnt,d o2f5feµrimng o 1f .p5imezmoe loefc torvice rmalol vmemaneunatl. It is COSNMNCEC PT0IEO-7ZR5OV (310.m18m”) C#36 OP-UL3A2NC(TMEES3R)B COARPES FCORREW FlAecxuceres sSotraigees designed to carry loads up to 1.1lbs (0.5kg). Motorized Optical components can be mounted to the 1.18” Mirror Mounts (30mm) moving platform and translated precisely and Rotation Stages smoothly along a single axis with minimal #8-32 UNC THRU arcuate motion. Themanual actuator offers 1 PLACE Drive Electronics #4-40 UNC THRU 0.39” (10mm) & Auto-Alignment 0.25mm of travel per revolution, and the 5 PLACES TYP piezoelectric actuator provides 25nm resolution. Actuators & SMC Piezo Connector The stage can be driven by the TPZ001 drive, (7.00.m28m”) (510.m96m”) Adjusters which is sold separately (see page 356) or Brief Tutorials 0.49” bundled with the stage (see below). (13mm) Specifications Features ■ Travel:1.5mm (0.06") ■ Flexure Design, No Static 0.39”(T1Y0Pm.m) ■ Load Capacity: 1.1lbs (0.5kg) or Kinetic Friction ■ Piezo Travel: 25µm ■ Thumbscrew and Piezo FINE0 A.1D0J”U (0S.T2M5mENmT) K/ NREOVB. ■ Piezo Resolution: 25nm Adjustment M2 THROUGH ■ Coarse Adjust: 0.25mm per ■ Steel Construction, Black 5 PLACES Paint Finish Revolution of Thumbscrew ■ Piezo Drive Voltage: 0-75V ■ All Cables Included NF15AP25 Accessories The NF15P2 angle bracket allows our NanoFlex™ compact stages to be NF15P2 integrated into XY, XZ, and XYZ systems. The NF15P1 base plate provides a NF15P1 convenient way to attach the stages to an optical system or table. NanoFlex™ Stage With Embedded 25µm Piezoelectric Movement ITEM# METRIC ITEM # $ £ € RMB DESCRIPTION NF15AP25 NF15AP25/M $ 690.00 £ 434.70 € 641,70 ¥ 6,589.50 Thumbscrew & 25µm Piezo Drive Single Axis Stage 1.5mm NF15P1 NF15P1/M $ 49.00 £ 30.90 € 45,60 ¥ 468.00 Mounting Plate for the 1.5mm NanoFlex™ Series NF15P2 NF15P2/M $ 49.00 £ 30.90 € 45,60 ¥ 468.00 Angle Bracket for the 1.5mm NanoFlex™ Series 1.5mm Flexure Stage and Driver Bundle S AVE 10 % Features The TPZ001 T-Cube Piezo ■ Piezo Positioning Kit (Power Driver(see page 356 for full Supply Not Included) details) is the ideal driver for the ■ Compact Footprint NF15AP25 stage. This bundle ■ Manual Operation via Front includes everything needed for a Panel complete piezo positioning ■ PC Control for Remote system and saves 10% on the Operation (USB) combined product price. ■ Software Control Suite Included NanoFlex™ Accessories ITEM# METRIC ITEM # $ £ € RMB DESCRIPTION TPZNF15 TPZNF15/M $1,239.00 £ 780.60 €1.152,30 ¥11,832.50 NanoFlex™ 1.5mm Travel Stage & TPZ001 Piezo Driver TPS002 TPS002 $ 110.50 £ 69.60 € 102,80 ¥ 1,055.30 Dual T-Cube ±15/V, 5V Power Supply www.thorlabs.com 253 1 TRANSLATION 251-259.qxd.P 7/5/07 7:19 PM Page 254 Motion Control Single Axis Stages 5mm Travel Single-Axis Flexure Stages NF5D Multi-Axis Stages When stability is of the utmost Flexure Stage importance, the NanoFlex™ 5mm Features Accessories travel, single-axis stages provide ■ Flexure Design, No Static or Kinetic Friction Motorized ultra-smooth translation for ■ Differential Micrometer Drive Mirror Mounts applications that are intolerant to ■ Open-and Closed-Loop Piezo Options Rotation Stages the errors inherent in linear ■ Compact Size bearings. The compound linear ■ XYZ Configurable Drive Electronics flexure design ensures true linear & Auto-Alignment motion over the full range of Actuators & Adjusters translation. This is achieved without the use of parts that require controlled contact to maintain their function; all the Counterbore for #8-32 UNC (M4) 1/4"-20 UNC (M6) Brief Tutorials motion results from the flexing of various structural through 8 places screw, 2 places components within the translator. 2.95" (75mm) Typ. NF5DP20 #6-32 UNC (M3) 1/4"-20 UNC (M6) through, 4 places through, 2 places 1.18" 0.65" (30mm) (17mm) SMC Piezo Connector 5.28" (134mm) Nom The stages are supplied with a differential micrometer drive. An optional piezo drive is Stage Specifications available, with or without strain gauge feedback. ■ Travel:5mm (0.20") The NF5 series stage is ideal for a variety of ■ Max Load:2.2lbs (1kg) applications, including interferometry, ■ Course Adjustment:0.5mm microscopy, and other precision nanopositioning What is a Strain Gauge? per Revolution applications. The extra stability offered by these A strain gauge is a thin piece of conductive ■ Fine Adjustment:50µm per stages means that they are suitable for stacking in metal that is attached directly to the body Revolution XY, XZ, and XYZ configurations when precise of the piezo stack. When the stack is ■ Fine Adjustment Range: planar movement is required. These stages can be extended (or contracted), the strain gauge is 300µm mounted in an XYZ configuration using the base stretched (or compressed), causing a change plate (NF5P1) and angle bracket (NF5P2) – see to the electrical impedance of the metal. Piezo Specifications next page. Using a high-precision bridge circuit and ■ Drive Voltage:0-75V NF5DP20S voltmeter, these changes can be correlated ■ Drive Connector:SMC to changes in mechanical displacement of ■ Feedback Connector:LEMO the piezo, thereby providing precise ■ Travel Range:20µm Range position feedback. ■ Resolution:20nm (Open Loop) 10nm (w/ Feedback) Position Feedback 5mm Travel NanoFlex™ Stages ITEM# METRIC ITEM # $ £ € RMB DESCRIPTION NF5D NF5D/M $ 814.00 £ 512.80 € 757,00 ¥ 7,773.70 Differential Adjuster Single-Axis Stage 5mm Travel NF5DP20 NF5DP20/M $ 995.00 £ 626.90 € 925,40 ¥ 9,502.30 Differential Adjuster and 20µm Piezo Single-Axis Stage 5mm Travel NF5DP20S NF5DP20S/M $1,335.00 £ 841.10 €1.241,60 ¥ 12,749.30 Differential Adjuster and 20µm Closed-Loop Piezo Single-Axis Stage 5mm Travel 254 www.thorlabs.com 1 TRANSLATION 251-259.qxd.P 7/10/07 7:34 PM Page 255 Motion Control 5mm NanoFlexTM Accessories Single Axis Stages Multi-Axis Stages These accessories allow our compact NanoFlex™ stages to be assembled into X-Y, X-Z, and X-Y-Z systems. The base plate Flexure Stage provides a convenient means for attaching a stage to an optical Accessories NF5P2 system or table. Motorized Mirror Mounts Rotation Stages NF5P1 Drive Electronics & Auto-Alignment Actuators & Adjusters 5mm NanoFlex™ Accessories Brief Tutorials ITEM# METRIC ITEM # $ £ € RMB DESCRIPTION NF5P1 NF5P1/M $ 49.00 £ 30.90 € 45,60 ¥ 468.00 Mounting Plate for the 5mm NanoFlex™ Series NF5P2 NF5P2/M $ 99.00 £ 62.40 € 92,10 ¥ 945.50 Angle Bracket for the 5mm NanoFlex™ Series 5mm Travel Stage, Open-Loop Piezo & Driver Bundle The TPZ001 T-Cube Piezo Driver (see page 356 for full details) is the ideal driver for Visit Features the NF5DP20 stage. This bundle includes everything needed for a complete open-loop www.thorlabs.com ■ Open-Loop Piezo Positioning Kit piezo positioning system and saves 10% on the combined product price. The power For Mechnical (Power Supply Not Included) supply is sold separately. % Drawings and ■ Compact Footprint S A V E 1 0 Our New ■ Manual Operation via Front Panel Solid Models ■ PC Control for Remote Operation (USB) ■ Software Control Suite Included DXF For higher bandwidth piezo control, see the BPC series of controllers starting on page 370. TPZNF5 Bundle ITEM# METRIC ITEM # $ £ € RMB DESCRIPTION TPZNF5 TPZNF5/M $1,513.35 £ 953.40 €1.407,40 ¥14,452.50 NF5DP20 5mm Travel Stage & TPZ001 Piezo Driver TPS002 TPS002* $ 110.50 £ 69.60 € 102,80 ¥ 1,055.30 Power Supply * Both Imperial and Metric parts are Equivalent. 5mm Travel Stage, Strain Gauge Feedback & Driver Bundle % Tcuhsitso mbuenrsd lwe hhoa sr ebqeuenir ed pesriegcniseed, cfolorsed-loop S A V E 1 0 Features control. The NF5DP20S stage, together ■ Open-Loop Piezo with the T-Cube Piezo Controller Positioning Kit (Power (TPZ001 – see page 356) and Strain Supply Not Included) Gauge Reader (TSG001 – see page 358), ■ Compact Footprint provides an immediate, “out of the box” ■ Manual Operation via Front Panel high-precision, closed-loop positioning solution. Furthermore, this bundle saves ■ PC Control for Remote Operation (USB) 10% on the combined product price. ■ Software Control Suite The power supply is sold separately. Included TSGNF5 Bundle ITEM# METRIC ITEM # $ £ € RMB DESCRIPTION TSGNF5 TSGNF5/M $2,041.20 £1,286.00 €1.898,30 ¥ 19,493.50 NF5DP20S 5mm Travel Stage, TPZ001 Piezo Driver, TSG001 Stain Gauge Reader TPS002 TPS002* $ 110.50 £ 69.60 € 102,80 ¥ 1,055.30 Dual T-Cube ±15V/5V Power Supply * Both Imperial and Metric parts are equivalent. www.thorlabs.com 255 7/3/07 2:36 PM Page 256 Motion Control 1/4" Travel Translation Stage Single Axis Stages Multi-Axis Stages The MS1 series translation stage features a ball-bearing design for precise motion and long life. Its compact size makes this stage ideal where space is limited. The modular Flexure Stage Accessories design allows the user to reconfigure the stages quickly if an application Motorized changes. This quick-change design is achieved by utilizing precision-aligned Mirror Mounts dowel pins to ensure orthogonality between stages. MS1 Rotation Stages MS3 Drive Electronics & Auto-Alignment Actuators & Adjusters Brief Tutorials Specifications ■ Maximum Stage Travel:1/4" (6.4mm) Features ■ Angular Deviation:150µrad ■ Compact and Lightweight ■ Horizontal Load:7lbs (3.2kg) Max ■ Lockable Design ■ Vertical Load:2.5lbs (1.1kg) Max ■ Modular Construction ■ Orthogonality:<2mrad (With Alignment Pins) ■ Good Performance at a ■ Bearing Type:Ball Bearing Moderate Price ■ Material:Aluminum Body With Hardened Steel Linear Guides ■ Adjuster:M3-0.25 Fine Adjustment Screw; Provides 250µm/rev ■ Mounting Holes: #8-32 (M4) Mounting Options The photograph below shows the MS3 with a rotation mount 0.50" for Ø1/2" optics, which provides continuous rotation; in (12.7mm) 0.45" addition to this accessory, there are a number of other mounts (11mm) that can be attached to the MS series translator using the MS103 adapter plate. MS101 MS103 See Page 241 for Additional Accessories MS102 ITEM# METRIC ITEM# $ £ € RMB DESCRIPTION MS1 MS1/M $ 172.40 £ 108.60 € 160,30 ¥ 1,646.40 1/4"(6.4mm) Travel Mini Translation Stage MS3 MS3/M $ 509.00 £ 320.70 € 473,40 ¥ 4,861.00 1/4"(6.4mm) XYZ Mini Translation Stage MS101 MS101* $ 19.40 £ 12.20 € 18,00 ¥ 185.30 Base Plate MS102* MS102* $ 29.60 £ 18.60 € 27,50 ¥ 282.70 Angle Bracket MS103 MS103/M $ 26.50 £ 16.70 € 24,60 ¥ 253.10 MS Series Adapter Plate * Both Imperial and Metric parts are equivalent. 256 www.thorlabs.com 7/3/07 2:36 PM Page 257 Motion Control 1/2" Travel Dovetail Stage Single Axis Stages The DT12 dovetail translation stage is a miniature, entry-level positioner, ideal Multi-Axis Stages for use in applications where space is limited. It is 1.0" square yet provides a Flexure Stage travel length of 0.5". The design uses a precision-rolled M3 x 0.35mm pitch Accessories leadscrew for smooth linear positioning along the entire range of travel. The Motorized moving platform is lockable to guard against accidental movement. The Mirror Mounts modular design allows them to be assembled into 2 or 3-axis configurations. Rotation Stages The 3-axis versions are supplied preconfigured with a right angled bracket. Slotted base plates are available for mounting on an optical table. Alternatively, Drive Electronics & Auto-Alignment the stage can be mounted to an #8-32 (M4) threaded post. Actuators & DT12 Adjusters Brief Tutorials Features ■ Modular and Compact Design #8-32 (M4) ■ Dovetail Mechanism MOUNTING HOLE LOCK ■ Lockable Moving Platform ■ Rapid and Smooth Positioning 1.8" (45mm) 1" (25.4mm) Specifications ■ Travel Range: 0.5" (12.7mm) 1" 0.57" ■ Maximum Load: 1.2kg (2.5lbs) (25.4mm) (14.5mm) ■ Actuator Travel: 0.35mm per Revolution ■ Construction: Aluminum With Precision-Steel Leadscrew DT12XYZ 2.6" (66mm) BACK VIEW DT12XYZ MOVING DECK 1/2" (12.7 mm) TRAVEL ALL THREE AXIS 2.4" (61mm) #8-32 (M4) MOUNTING HOLE DT12B 2.0" (51mm) DT12A ITEM# METRIC ITEM# $ £ € RMB DESCRIPTION DT12 DT12/M $ 65.00 £ 41.00 € 60,50 ¥ 620.80 0.5" (12.7mm) Dovetail Translation Stage DT12XY DT12XY/M $ 130.00 £ 81.90 € 120,90 ¥ 1,241.50 0.5" (12.7mm) XY Dovetail Translation Stage DT12XZ DT12XZ/M $ 150.00 £ 94.50 € 139,50 ¥ 1,432.50 0.5" (12.7mm) XZ Dovetail Translation Stage DT12XYZ DT12XYZ/M $ 220.00 £ 138.60 € 204,60 ¥ 2,101.00 0.5" (12.7mm) XYZ Dovetail Translation Stage DT12A DT12A* $ 20.00 £ 12.60 € 18,60 ¥ 191.00 Angle Bracket for DT12 Stages DT12B DT12B* $ 20.00 £ 12.60 € 18,60 ¥ 191.00 Base Plate for DT12 Stages * Both Imperial and Metric parts are equivalent. www.thorlabs.com 257 7/3/07 2:36 PM Page 258 Motion Control 1/2" Travel Miniature Translation Stage Single Axis Stages Multi-Axis Stages The T12 Series Translation Stage features a hardened steel linear rail and recirculating ball- bearing carriage for precise linear motion and high load capacity. The compact form factor Flexure Stage Accessories of this design has been achieved without sacrificing the precision of the translator. Motorized In an effort to realize the most compact form, we have chosen to introduce four models in Mirror Mounts this series. The first model is a simple one-axis translator. The second is a two-axis Rotation Stages translator with the perpendicularity between the two axes of motion set by machining the movable carriage of the first axis and the body of the second axis out of one part. Drive Electronics & Auto-Alignment This design approach minimizes the overall size of the translator and ensures the long-term Actuators & stability and perpendicularity of the two axes of motion. The same design approach has Adjusters been utilized in the XY as well as the XZ Translator. Brief Tutorials The XYZ translation stage design has been implemented so as to minimize the number of Features parts; this approach provides the best long-term stability as well as ensures the ■ Miniature Design perpendicularity of each axis. ■ Unibody Construction ■ Low Drift ■ Hardened Steel Linear Guide Rail The T12 Series features a miniature M3-0.25mm ■ High Load Capacity stainless steel adjuster and phosphorous bronze mating ■ Smooth Motion Over Entire Range nut. This combination provides 250µm of displacement per revolution of the adjuster screw. Incremental movements on the order of 0.4µm are readily achievable with this design. Precision T12XYZ Linear rail provides Right-Handed smooth,low Configuration friction motion T12B T12X over the entire range. Stability Compact XY stage T12B is built from just Adapter Base three main components. T12XY Rigidity One piece construction of vertical support maximizes T12XZ rigidity while minimizing drift. T12XYZ Perpendicularity The complete XYZ stage is assembled from just four Specifications ■ Parallelism:3µm Over 12mm (0.5") main components; this ■ Travel Range:0.5" (12.7mm) ■ Straightness:4µm Over 12mm (0.5") ensures perpendicularity ■ Dynamic Load:100N ■ Static Moment Ratings: between the three axes. ■ Static Load:8lbs (3.6kg) • Roll: 3Nm • Pitch: 12Nm ■ Adjustment:25µm per Revolution • Yaw: 11Nm 258 www.thorlabs.com 1 TRANSLATION 251-259.qxd.P 7/10/07 7:47 PM Page 259 Motion Control 1/2" Travel Miniature Translation Stage (cont.) Single Axis Stages Multi-Axis Stages Flexure Stage T12X Accessories Motorized Mirror Mounts Rotation Stages Drive Electronics & Auto-Alignment Actuators & ITEM# METRIC ITEM# $ £ € RMB DESCRIPTION Adjusters T12X T12X/M $260.00 £163.80 €241,80 ¥2,483.00 Miniature 1/2"Linear Translator Brief Tutorials T12B* T12B* $ 24.00 £ 15.10 € 22,30 ¥ 229.20 T12 Base Plate * Both Imperial and Metric parts are equivalent. T12XY ITEM# METRIC ITEM# $ £ € RMB DESCRIPTION T12B T12XY T12XY/M $ 520.00 £327.60 €483,60¥4,966.00 Miniature 1/2"XY Translator T12B* T12B* $ 24.00 £ 15.10 € 22,30¥ 229.20 T12 Base Plate Visit www.thorlabs.com * Both Imperial and Metric parts are equivalent. For Mechnical Drawings and Our New Solid Models DXF T12XZ ITEM# METRIC ITEM# $ £ € RMB DESCRIPTION T12XZ T12XZ/M $536.00 £ 337.70 €498,50 ¥5,118.80 Miniature 1/2"XZ Translator T12B* T12B* $ 24.00 £ 15.10 € 22,30 ¥ 229.20 T12 Base Plate * Both Imperial and Metric parts are equivalent. T12XYZ ITEM# METRIC ITEM# $ £ € RMB DESCRIPTION T12XYZ T12XYZ/M $ 786.00 £495.20 €731,00¥7,506.30 Miniature 1/2"XYZ Translator T12B* T12B* $ 24.00 £ 15.10 € 22,30¥ 229.20 T12 Base Plate * Both Imperial and Metric parts are equivalent. www.thorlabs.com 259 2 TRANSLATION 260-268.qxd.P 7/10/07 7:56 PM Page 260 Motion Control 1/2" (12.7mm) Travel Translation Stage Single Axis Stages Multi-Axis Stages MT3 Right-Handed Features This modular, easily Flexure Stage Configuration reconfigurable design is aided by Accessories ■ Hardened Steel, Linear Bearings precision alignment pins that Motorized ■ Modular Design for XYZ Configuration Mirror Mounts ■ Field Configurable, Right or Left make the building process simple. Handedness Rotation Stages Drive Electronics MT402 & Auto-Alignment The MT1 Series Translation Stage features Actuators & hardened steel linear bearings for precision Adjusters motion and long life. We have taken a modular approach to allow the user to Brief Tutorials quickly reconfigure these stages as MT1 applications change. Our quick change modular design is achieved MT1 by utilizing precision aligned dowel pins to ensure orthogonality between stages. The stages can be purchased individually or as preconfigured multidimensional translator; MT1 Micrometer Drive: see price box below for details. 0.025"/rev (0.001" per Graduation) Specifications MT401 ■ Travel Range: 0.5" (12.7mm) ■ Angular Deviation:<150µrad ■ Orthogonality:<2mrad ■ Horizontal Load Capacity:90lbs (41kg) (With Alignment Pins) ■ Vertical Load Capacity:20lbs (9kg) ■ Precision Hardened Steel V-Groove Design MT406 Fiber Coupling Applications: The MBT series adapter allows our extensive line of fiber launch accessories (see page 319) to be used with the MT series stages. MT405 Side Actuator Clamp Set MT405 Allows for Left- Two Piece Side ClampSet and Right-Handed Compact Configurations RB13M METRIC ITEM# ITEM# $ £ € RMB DESCRIPTION MT1 MT1/M $272.00 £171.40 €253,00 ¥2,597.60 1/2" Translator Stage With Micrometers For greater stability, see our MT3 MT3/M $816.90 £514.60 €759,70 ¥7,801.40 1/2" XYZ Translator Stage With Micrometers unibody 3-axis stages in the Roller MT401 MT401* $ 18.90 £ 11.90 € 17,60 ¥ 180.50 MT Series Base Plate Block™ section. MT402* MT402* $ 35.70 £ 22.50 € 33,20 ¥ 340.90 MTSeries Right Angle Bracket Page 296 MT405 MT405* $ 52.00 £ 32.80 € 48,40 ¥ 496.60 MT Series Side Clamp MT406 MT406* $ 31.50 £ 19.80 € 29,30 ¥ 300.80 MBT Series Adapter Plate *Both Imperial and Metric parts are equivalent 260 www.thorlabs.com
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