Low-Power CMOS Digital Pixel Imagers for High-Speed Uncooled PbSe IR Applications PDF
Preview Low-Power CMOS Digital Pixel Imagers for High-Speed Uncooled PbSe IR Applications
Springer Theses Recognizing Outstanding Ph.D. Research Josep Maria Margarit Low-Power CMOS Digital Pixel Imagers for High-Speed Uncooled PbSe IR Applications Springer Theses Recognizing Outstanding Ph.D. Research Aims and Scope The series “Springer Theses” brings together a selection of the very best Ph.D. theses from around the world and across the physical sciences. Nominated and endorsed by two recognized specialists, each published volume has been selected foritsscientificexcellenceandthehighimpactofitscontentsforthepertinentfield of research. For greater accessibility to non-specialists, the published versions includeanextendedintroduction,aswellasaforewordbythestudent’ssupervisor explainingthespecialrelevanceoftheworkforthefield.Asawhole,theserieswill provide a valuable resource both for newcomers to the research fields described, and for other scientists seeking detailed background information on special questions. 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More information about this series at http://www.springer.com/series/8790 Josep Maria Margarit Low-Power CMOS Digital Pixel Imagers for High-Speed Uncooled PbSe IR Applications Doctoral Thesis accepted by è Universitat Polit cnica de Catalunya (UPC), Barcelona, Spain 123 Author Supervisors Dr. Josep Maria Margarit Dr. Francesc Serra-Graells Departament d’Enginyeria Electrònica DepartamentdeMicroelectrònicaiSistemes Universitat PolitècnicadeCatalunya (UPC) Electrònics,Escola d’Enginyeria Barcelona Universitat Autònoma deBarcelona(UAB) Spain Cerdanyola del Vallès,Barcelona Spain and Dr. Lluís Terés Institut deMicroelectrònica de Institut deMicroelectrònica de Barcelona- CentroNacional de Barcelona- CentroNacional de Microelectrónica (IMB-CNM) Microelectrónica,Consejo Superiorde ConsejoSuperior deInvestigaciones Investigaciones Científicas Científicas(CSIC) (IMB-CNM(CSIC)), CampusUAB Barcelona Cerdanyola del Vallès,Barcelona Spain Spain ISSN 2190-5053 ISSN 2190-5061 (electronic) SpringerTheses ISBN978-3-319-49961-1 ISBN978-3-319-49962-8 (eBook) DOI 10.1007/978-3-319-49962-8 LibraryofCongressControlNumber:2016957866 ©SpringerInternationalPublishingAG2017 Thisworkissubjecttocopyright.AllrightsarereservedbythePublisher,whetherthewholeorpart of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission orinformationstorageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilar methodologynowknownorhereafterdeveloped. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publicationdoesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexemptfrom therelevantprotectivelawsandregulationsandthereforefreeforgeneraluse. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authorsortheeditorsgiveawarranty,expressorimplied,withrespecttothematerialcontainedhereinor foranyerrorsoromissionsthatmayhavebeenmade. Printedonacid-freepaper ThisSpringerimprintispublishedbySpringerNature TheregisteredcompanyisSpringerInternationalPublishingAG Theregisteredcompanyaddressis:Gewerbestrasse11,6330Cham,Switzerland In the loving memory of my brother, Pere, and my grandparents Eulalia and Josep. ’ Supervisors Foreword ItisourpleasuretopresentDr.JosepMariaMargarit’sPh.D.thesiswork,accepted for publication within the Springer Theses series and awarded with a prize for outstandingoriginalwork.Dr.MargaritjoinedourresearchgroupattheInstitutde Microelectrònica de Barcelona—Centro Nacional de Microelectrónica of the Spanish National Research Council, IMB-CNM(CSIC), to complete the master program in electronic engineering offered at the Universitat Politècnica de Catalunya (UPC). After finishing his masters’ thesis in 2008, he was granted with two predoctoral research fellowships from the Catalan Agency for Management of University and Research Grants: a 3-year Industrial Research Fellowship Grant Award (ref. 2009-TEM-00020) in cooperation with the companies New Infrared Technologies(NIT)S.L.andD+TMicroelectrónicaA.I.E.,Spain,andanOutgoing Research Fellowship Grant Award (ref. 2011-BE-DGR-00908) at the Institute of NeuroinformaticsinZurich,Switzerland.Thesefellowshipsallowedhimtofurther develop his basic and applied research activities under our supervision toward the doctoral degree. Dr. Margarit defended his thesis with the highest marks and International Mention in November 3, 2015. The dissertation of Dr. Margarit includes significant original scientific contri- butionsandrepresentsaconsiderableadvanceinthefieldofsolid-stateIRimaging. SuchcontributionshavebeendistinguishedwithaBestPaperAwardfromtheIEEE Circuits and Systems Society (CAS)—Sensory Systems Technical Committee (SSTC) and have been published in top peer-reviewed journals and international well-recognized conferences. Industrial achievements have been covered in two world patents and commercialized as a new line of uncooled IR cameras for real-time mainstream applications. We would like to emphasize the comprehensiveness of the work accomplished by Dr. Margarit, set within multidisciplinary research to bring, for the first time, kHz-range uncooled MWIR photonic imaging into standard, monolithic, low-cost submicron CMOS technologies. The work required to conceive, design, and inte- grate imager architectures that overcome the specific challenges posed by the PbSe IR detector—such as high dark-to-signal current ratios, large input parasitic vii viii Supervisors’Foreword capacitance values, and remarkable mismatching in its deposition—while minimizing power consumption and delivering high-speed video. In order to achieve these demands and potentiate the proliferation of photoconductive PbSe technology to different vision scenarios and at different stages of PbSe–CMOS integration maturity, Dr. Margarit investigated a comprehensive set of truly digital pixel sensors for both frame-based and frame-free imaging. The research was extended as well to the development of affordable sensor emulation strategies and integratedtestplatforms.Bothapproacheswerespecificallyorientedtoperformthe electricalvalidationoffirstprototypesindependentlyofexpensivePbSedeposition processesatwaferlevel.Digitalpixelsensorcells,completeimagers,andtestchips were fabricated and characterized instandard0.15lm1P6M, 0.35 lm 2P4M, and 2.5 lm 2P1M CMOS technologies, all as part of research projects with industrial partnership. Somepartsoftheresearchwerecarriedoutincollaborationwithotherscientists, inparticular,withthegroupofProf.TobiasDelbruckattheSwissFederalInstitute of Technology (ETH) inZurich, Switzerland, inthe fieldof bioinspired frame-free vision sensors, with the group of Prof. Alejandro Linares-Barranco at the Universidad de Sevilla (US), Spain, on the topic of event-driven computer inter- faces, and with CEO Dr. Germán Vergara and the technical team of NIT S.L. to address PbSe–CMOS integration, electro-optical characterization, and technology transferattheendofthethesis.Theaforementionedcollaborationshaveopenedthe door to new scientific ventures within our group, giving birth to future doctoral pursuits and new European industrial research proposals. Bellaterra Dr. Francesc Serra-Graells September 2016 Dr. Lluís Terés Parts of this thesis have been published in the following articles: Peer-reviewed Journals • J. M. Margarit, G. Vergara, V. Villamayor, R. Gutiérrez-Álvarez, C. Fernández-Montojo, L. Terés and F. Serra-Graells, “A 2 kfps Sub-lW/pix Uncooled-PbseDigitalImager with 10 bitDR AdjustmentandFPNCorrection for High-Speed and Low-Cost MWIR Applications,” in IEEE Journal of Solid-StateCircuits,vol.50,no.10,pp.2081–2084,October2015.DOI:http:// dx.doi.org/10.1109/JSSC.2015.2464672.1,2 (See Footnote) • J.M.Margarit,L.TerésandF.Serra-Graells,“ASub-lWFullyTunableCMOS DPS for Uncooled Infrared Fast Imaging,” in IEEE Transactions on Circuits and Systems-I, vol. 56, no. 5, pp. 987–996, May 2009. DOI: http://dx.doi.org/ 10.1109/TCSI.2008.2006644. Invited paper.3 (See Footnote 1) International Conferences • J. M. Margarit, L. Terés, E. Cabruja and F. Serra-Graells, “A 10kfps 32(cid:1)32 Integrated Test Platform for Electrical Characterization of Imagers,” in Proceedings of the IEEE International Symposium on Circuits and Systems, pp. 53–56, Melbourne, Australia, June 2014. DOI: http://dx.doi.org/10.1109/ ISCAS.2014.6865063.4 (See Footnote 1) • J. M. Margarit, M. Dei, L. Terés and F. Serra-Graells, “A Self-Biased PLL-TunedAERPixelforHigh-SpeedInfraredImagers,”inProceedingsofthe IEEEInternationalSymposiumonCircuitsandSystems,pp.1812–1815,Riode Janeiro, Brazil, May 2011. DOI: http://dx.doi.org/10.1109/ISCAS.2011. 5937937.5 (See Footnote 1) • G. Vergara, R. Gutiérrez, L. J. Gómez, V. Villamayor, M. Álvarez, M. C. Torquemada, M. T. Rodrigo, M. Verdú, F. J. Sánchez, R. M. Almazán, J. Plaza del Olmo, P. Rodríguez, I. Catalán, D. Fernández, A. Heras, F. Serra-Graells, J. M. Margarit, L. Terés, G. de Arcas, M. Ruiz, J. M. López, “FastUncooledLowDensityFPAofVPDPbSe,”inProceedingsofSPIE,vol. 7298, Bellingham, USA, 2009. DOI: http://dx.doi.org/10.1117/12.819092. • J. M. Margarit, L. Terés and F. Serra-Graells, “A Sub-1lW Fully Programmable CMOS DPS for Uncooled Infrared Fast Imaging,” in Proceedings of the XXIII Conference on Design of Circuits and Integrated Systems, Grenoble, France, November 2008. 1ExcerptsfromthesepapersappearwithpermissionfromIEEE. 2(cid:2)2015IEEE. 3(cid:2)2009IEEE. 4(cid:2)2014IEEE. 5(cid:2)2011IEEE. ix x Partsofthisthesishavebeenpublishedinthefollowingarticles: • J. M. Margarit, L. Terés and F. Serra-Graells, “A Sub-lW Fully Programmable CMOS DPS for Uncooled Infrared Fast Imaging,” in Proceedings of the IEEE International Symposium on Circuits and Systems, pp. 1424–1427, Seattle, USA, May 2008. DOI: http://dx.doi.org/10.1109/ ISCAS.2008.4541695. 2008 Best Paper Award by the Sensory Systems Technical Committee of the IEEE Circuits and Systems Society. • J. M. Margarit, J. Sabadell, L. Terés and F. Serra-Graells, “A Novel DPS Integrator for Fast CMOS Imagers,” in Proceedings of the IEEE International Symposium on Circuits and Systems, pp. 1632–1635, Seattle, USA, May 2008. DOI: http://dx.doi.org/10.1109/ISCAS.2008.4541747. • F. Serra-Graells, J. M. Margarit and L. Terés, “A Self-Biased and FPN-Compensated Digital APS for Hybrid CMOS Imagers,” in Proceedings oftheIEEEInternationalSymposium onCircuitsandSystems,pp.2850–2853, New Orleans, USA, May 2007. DOI: http://dx.doi.org/10.1109/ISCAS.2007. 378766. • G. Vergara, L. J. Gómez, V. Villamayor, M. Álvarez, M. C. Torquemada, M.T.Rodrigo,M.Verdú,F.J.Sánchez,R.M.Almazán,J.Plaza,P.Rodriguez, I. Catalán, R. Gutiérrez, M. T. Montojo, F. Serra-Graells, J. M. Margarit and L. Terés, ‘Monolithic Uncooled IR Detectors of Polycrystalline PbSe: a Real Alternative,” in Proceedings of SPIE, vol. 6542, Orlando, USA, April 2007. DOI: http://dx.doi.org/10.1117/12.719189.
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