LightPath – Flexible Beam Expanders An ultracompact femtosecond Ti:Sapphire laser system

22 Pages·2005·1.86 MB·English

PRODUCTS

LightPath – Flexible Beam Expanders
Beam expanders are used in a variety of unique solution for laser beam diameter
optical applications in the industrial, medi- expansion or reduction. The fiber also acts
cal, defense and instrumentation markets as a spatial filter for the input beam, remov-
including metrology, laser delivery systems, ing unwanted high-frequency optical noise
LIDAR and beam conversion. and producing a clean gaussian intensity
Unlike conventional beam expanders, Light- distribution. This is perfect for application
Path’s flexible beam expanders incorporate in optics where size, angular flexibility and
a single-mode or polarization-maintaining improved beam quality are important.”
fiber between the input and output lenses.
By using the fiber, the input and output
FURTHER INFORMATION
beams can be positioned independently
from one another, allowing the freedom to
The new flexible beam expanders are cur-
mount the beam expander in tight spaces AMS Technologies AG
rently available in two standard models
that normally would require a series of free Dr. E. Overbeck
and custom designs are available for quo-
space optics. phone: [phone]
Because the fiber is used between the input is a change to the input beam, which can be e-mail: [email protected]
and output lenses, the output beam diam- undesirable for some applications. web: www.ams-technologies.com
eter will remain steady - even when there Dr. Bruce Bernacki, LightPath Chief Tech-
are fluctuations to the input beam diameter. nology Officer, said “These new flexible

With traditional beam expanders, the out- beam expanders are based on LightPath’s
put beam diameter changes whenever there patented fiber fusion technology. It is a BOOTH 301, HALL B1
An ultracompact femtosecond
conductor saturable absorber modelock-
ing (SESAM)
Ti:Sapphire laser system ● Higher stability compared to standard
KLM lasers
● More than 400 mW output power
High Q Laser in Hohenems/Bregenz, femtoTRAIN Ti:sapphire series displays high ● Down to 50 fs short pulses
Austria, has introduced a cost-effective ul- spatial and temporal stability at low purchas- ● Wavelengths between 780...900 nm
tracompact Ti:Sapphire laser system – fem- ing (savings up to 30%) and maintenance ● Repetition rates between 20...120 MHz
toTRAIN series – with an incredible size of cost. ● Sealed off technology
530 × 200 × 75 mm3 including all optics and The concentration on a wavelength range ● Single phase power supply
the green pump source. between 780...880nm, a repetition rate High Q Laser offers a complete range of
High Q Laser’s femtosecond Ti:Sapphire la- range between 20...120MHz with pulse all-diode-pumped, solid-state pico- and
ser is a perfect 800 nm-work-house for all ap- durations down to 50fs make the femto- femtosecond oscillators and regenerative
plications that require reliability and stable TRAINTM Ti:sapphire series to a perfect amplifiers. All lasers are based on the unique
mode-locking. Because of its easy operation NIR ultrafast laser work-horse for chemical, techniques of direct diode-pumping real-
the user gets the chance to concentrate on medical and biological applications. ized with User Replaceable Diode Modules
his application. Specifications of the femtoTRAINTM Ti:Sap- (URDM) and semiconductor saturable ab-
High Q Laser has combined a compact phire series are: sorber mirror (SESAM) modelocking. High
green pump source together with its ap- ● Incredible compactness: 530 × 200 × 75 Q Laser systems emit ultrashort laser pulses
proved semiconductor saturable absorber mm3 including all optics and green pump in the range of 266 nm to 1340 nm and are
mirror (SESAM) modelocking to create a source available up to 10 W with repetition rates
cost-effective ultracompact Ti:sapphire laser ● Hands-free, true turnkey operation from single shot to 1.5 GHz.
in a sealed-off set-up. As a consequence, the ● Reliable passive and self-starting semi-
FURTHER INFORMATION
High Q Laser
Dr. Heinz Huber
phone: [phone]
The Ti:Sapphire laser sys- e-mail: [email protected]
tem – femtoTRAIN series –
web: www.highQlaser.at
has got an incredible size
of 530 × 200 x 75 mm3

including all optics and
the green pump source. BOOTH 270, HALL B1
www.laser-journal.de LTJ 15
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

Spectral Hyper Adapter ing the SHA-1 in series with the HR4000
spectrometer. It is as easy as that. The optical
input and output to the SHA-1 are 50-mi-
cron multi-mode fiber optic cables, making
The new SHA-1 Hyper Adapter is de- connection of the modular unit extremely
signed to interface with the Ocean Optics simple. Commands are transmitted via the
HR-4000 spectrometer. Making a conven- USB port and data acquisition is synchro-
tional grating spectrometer small usually nized with the HR4000.
means limiting the spectral resolution – not
any more! The Hyper Adapter (model SHA-1)
to extend the spectral resolution of the Ocean FURTHER INFORMATION
Optics HR4000 spectrometer by a factor of
up to ten. The new SHA-1 Hyper Adapter is the ideal
This exciting development allows the user solution for situations where high spectral Mikropack GmbH
resolution is required. phone: [phone]
to see features that would be otherwise
web: www.mikropack.de
unresolved while retaining the advantages
e-mail: [email protected]
of a small package. The HR4000 range-to- of 70 nm spectral range.
resolution ratio of 1,500:1 is extended to The SHA-1 is the ideal solution for situations
15,000:1. That means that a 5 pm resolution where high spectral resolution is required.
is achieved when used with a spectrometer Increased resolution is achieved by insert- BOOTH 647, HALL B2
SmartTable guarantees a stable surface
The ST Series SmartTable incorporates
Newport’s patent-pending iQ Technology to
monitor, report, and adjust table damping
performance over wide frequency bands.
This provides a dramatically quieter surface,
resulting in faster settling times, high-quality
imaging and long-term stability.
Over the years, many attempts have been
made to reduce table top resonance vibra-
tion by damping. So far, the best results have
been achieved with vibration absorbers, or
tuned dampers, such as the ones used in
Newport’s RS Series of tables. Each tuned
damper is optimized for a specific vibration
frequency and mode.
The new ST Series SmartTable uses electro-
mechanical vibration dampers that dampen
all natural vibration modes in a given range, system feedback for monitoring, trigger- The new ST Series SmartTable uses elec-
without creating additional resonance at ing or halting processes. This dramatically tro-mechanical vibration dampers that
dampen all natural vibration modes in a
lower frequencies. If the table conditions improves throughput and yield, and is
given range, without creating additional
change, the dampers can be quickly re- particularly effective for the manufacturing
resonance at lower frequencies.
tuned for optimum damping. of sensitive optics, precise laser micro-ma-
Q is the term used to describe the maximum chining, micro-electronics processing, or FURTHER INFORMATION
amplification of a structure at resonance. The device testing.
lower the Q, the more the structural rigidity is The new SmartTable enables tabletop vibra-
Newport GmbH
maintained. Newport’s SmartTable provides tion monitoring through built-in vibration
phone: [phone]
a stable work surface by using active sensing sensors, which provide real-time feedback
e-mail: [email protected]
and correction technology to update the on the vibration mode of the table. The ST
web: www.newport.com
structure’s damping properties at 10 kHz to Series tables are USB2 compatible. Software
eliminate or minimize disturbances. is also available to further fine-tune and cali-
In addition to iQ technology, the SmartTable brate the table, and can be used to gather
controller’s analog outputs can also provide vibration data. BOOTH 127, HALL B3
16 LTJ June 2005 No. 2
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

Bavarian Photonics expands its DPSSL product
family Aion Industrial-V
Bavarian Photonics GmbH – a member
of the TuiLaser Group – has rounded off its
product portfolio with a diode pumped
solid-state laser (DPSSL) Aion Industrial-V
with 24W at 1064nm – the Aion Industrial
1064-24-V.
The new developed Nd:YVO laser is based
4
on the industry proven basic components
of the other product family members. The
energy per pulse of the Aion Industrial
1064-24-V goes up to 800 µJ. The infrared
laser shows a pulse width between 20–50 ns
The new developed Nd:YVO laser is
4
(dependent from different repetition rates). based on the industry proven basic
The modular design and long life time of components of the other product family
the diode pumped DPSS-Laser series ensure members.
maximum reliability and make the lasers
extremely low in maintenance. systems, Bavarian Photonics is moving into
Typical applications are: ID-card marking for rapidly growing markets like ID-card mark-
GSM market and grey level market, surface ing for GSM market and grey level market.
micro machining of various types of metals,
different structurings for printing industry, FURTHER INFORMATION
deep engraving, solar cell structuring.
Bavarian Photonics
Bavarian Photonics has found its niche in the
Stephan Geiger
market with a special type of DPSSL. Short
phone: (++49) 89 – 89 407 – 0
pulses with very high repetition rates allow
e-mail: [email protected]
high work speeds, which in turn guarantee
web: www.bavarian-photonics.com
a higher machine capacity and cheaper pro-
duction costs. With the introduction of the

Aion Industrial 1064-24-V and the recent
development of other high-power laser BOOTH 435, HALL B3
Ing. Büro R. Tschaggelar – the company
Ing. Büro R. Tschaggelar was founded
in 1988 by Rene Tschaggelar and kept on
developing electronics, embedded mixed
signal hardware and software for indus-
trial applications ever since. After having
achieved a degree in physics in 96, spe-
The laser sync controller without its case.
cialized on applied laser physics, the focus
slightly shifted towards electronics for physi-
cal applications. Besides being independent time required to solve a specific problem.
developer of custom solutions, IBRT has a The product line of IBRT features the world’s
growing palette of products targeted at the leading laser synchronization controller, that
physics community. is able to synchronize a mode locked solid-
IBRT offers custom solutions for physical state laser to a low phase noise synthesizer
measurement and control problems. The with an amazingly low jitter below 1ps.
fields of electronics expertise covers preci- Another competitive product is a commu-
sion analog, high speed digital, RF, embed- nicating Peltier controller targeted at laser
ded mixed signal, communication to the PC, OEMs.
PC software to control and visualize external
FURTHER INFORMATION
devices and their data respectively. Part of
the physical expertise is various extensive
simulation programs plus the ability to write ibrt – Ing. Büro R. Tschaggelar
small-scale simulations in-house quickly. This web: http://www.ibrtses.com
rare combination of electronics and physics e-mail: [email protected]
expertise tends to significantly lower the
www.laser-journal.de LTJ 17
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

New RGB Wavelength Division Multiplexer
A common application today is the ble output characteristic. To complete this
combination of visible light of different product line we offer full line of already fiber
wavelength into a single fiber. By combining coupled diode lasers in various coulors.
red, green and blue light in varying intensi-
ties of the signal, one can produce practically FURTHER INFORMATION
any color desired. The Wavelength Division
AMS Technologies AG
Multiplexer from OZ Optics offers a cost-
Claudius Raith
effective solution to combine the light of
phone: [phone]
different input fibers to one singlemode or
e-mail: [email protected]
polarization maintaining fiber.
web: www.ams-technologies.com
For those who provide their own lasers AMS
RGB Wavelength Division Multiplexers
Technologies can offer fiber coupling with are used in display technology, confocal

high coupling efficiency and long term sta- microscopy and laser spectroscopy.
BOOTH 301, HALL B1
Single-frequency solid-state laser
with high repetition rate
Xiton Photonics GmbH develops and ers, amplifier modules are also available.
produces q-switched solid-state lasers. Consequently, for the first time a narrow
Xiton Photonics GmbH introduces the bandwidth, ns-laser source in the multiwatt-
SLM-series of lasers, with single-frequency regime is available. Applications for this
radiation provided by a seeded actively q- product include spectroscopy, holography,
switched Nd:YV0 oscillator with a pulse LIDAR and nonlinear frequency conversion.
4
repetition rate of 10 kHz. The oscillator is The distribution of these innovative laser
located inside a hermetically sealed housing products is internationally coordinated by
providing an extremely high pulse stability Xiton’s sales partner GWU-Lasertechnik.
(standard deviation < 2%). The pulse dura-
FURTHER INFORMATION
tion is 12 ns with the spectral line-width
limited to 50 MHz. The combination of The pulse duration is 12 ns with the spec-
excellent beam quality (M2 < 1.2), high tral line-width limited to 50 MHz. GWU-Lasertechnik Vertriebsges. mbH
pulse energy (E > 0.5 mJ), Fourier-limited phone [phone]
bandwidth and high average power ensures Photonics OPG-series non-linear module e-mail: [email protected]
that this laser is an ideal pump source for enables the generation of tuneable narrow web: www.gwu-group.de/laser
nonlinear processes including parametric bandwidth laser radiation in the wavelength
light generation. range of 400 nm to 5 µm.
Combining the SLM laser system with Xiton For the generation of higher output pow- BOOTH 161, HALL B1
New product
Laser welding and laser cutting have be- FURTHER INFORMATION
come indispensable for many production
activities. This is why B&M Optik has started
B&M Optik GmbH
a further focal product range of laser pro-
phone: [phone]
tection glasses offering an attractive price-
e-mail: [email protected]
/quality ratio.
web: www.bm-optik.de
The lenses are made optionally either of
quartz or BK7; antireflection coating accord-
ing to customer requirements. Standard is,
for example, quartz window with diameter BOOTH 245, HALL B2
of 55.0 mm and a thickness of 1.5 mm;
other sizes, round or square, are of course
possible.
18 LTJ June 2005 No. 2
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

Pulsed Laser Diodes with 210 W
A world premier was presented at the
Photonics West Exhibition in the USA. For
their 905D3J08 series, Laser Components
Canada manufactures pulsed laser diodes
with a peak power of more than 210 W at
905 nm. The basis is the already proven
nanostack laser technology, which includes
multiple epitaxial integrated emitters with
a total aperture of 200 µm x 10 µm. A
peak output power of at least 75 W can be These new 905 nm pulsed laser diodes
obtained with “single emitters” at a pulse are supplied in a TO-18, 5.6 mm, 9 mm
and 8 – 32 coax package or as a chip on a
length of 100 ns.
ceramic carrier.
More than 140 W respectively, 210 W is
achievable with stacked devices. The emit-
FURTHER INFORMATION
ting area for the double stack thereby merely
amounts to 200 µm x 125 µm. fFor the triple
stack it is 200 µm x 250 µm. The high peak Laser Components GmbH
power coupled with the small emitting area phone: [phone]
results in optimal power intensity. As a result, e-mail: [email protected]
these pulsed laser diodes open completely web: www.lasercomponents.com
new perspectives for applications such as
ceilometers, altimeters, LIDAR, or telemetry
at great distances. BOOTH 459, HALL B1
A new signal axis amplifier module
The new single axis piezo amplifier NV makes your system independent from an
40/1CLE is designed for closed loop control extensive recalibration procedure.
for low voltage piezo electrical actuators The amplifier can be controlled by analog
equipped with strain gauge or capacitive signal on the modulation input, by com-
feed back sensors. These elements are puter interface (RS 232 line) or by manual
marked with additional “E” at the end of operation – through a potentiometer. The
the part number. The NV 40/1CLE is able to 6-digit display on the front panels reads the
read all actuator information stored on the value of signal in V or the range of motion
ID chip inside the cable box of the actuator. in microns.
All calibration data is now stored in the ID An integrated memory function gives the
chip of the actuating system. This enables customer the opportunity to adjust a memo-
our customers to exchange actuators with- rized position without any delay. The small
out having to re-calibrate their systems. This size of the amplifier unit is recommended
for labs and industrial applications. The NV
40/1CLE should be your first choice for all
single axis nano-positioning stages when
you need high speed, accuracy, repeatability
and reliability.
FURTHER INFORMATION
piezosystem jena GmbH
phone: 03641 / 66 88 – 0
e-mail: [email protected]
web: www.piezojena.com
The amplifier can be controlled by analog

signal on the modulation input, by com-
puter interface or by manual operation. BOOTH 312, HALL B1
www.laser-journal.de LTJ 19
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

Pulsed and CW Wavelength Measurement
into the mid-IR
The WS-series of wavelength me- different physical characteristics (length) the linewidth for (quasi-)cw or the spectral
ters from HighFinesse/Angstrom had and resulting in different composite fringe shape for pulsed laser light. Additionally, one
already set new standards in terms of re- patterns. These fringe patterns are projected can instantly recognize side modes on the
solution, precision and acquisition speed onto the sensitive, high density CCD-arrays, laser intensity (Fig. 2).
for tunable lasers. Now, PbSe CCD-arrays and allow an unambiguous, “single shot” As the etalons are shaped from materials
and a new design extends the range for determination of the wavelength. whose optical and thermal properties have
cw or pulsed measurements out to 5 µm. The fringe patterns also contain information been thoroughly characterized, and are
(Fig. 1) on the coherence of the laser beam, and contained within a thermally stabilized envi-
interpolation routines are used to determine ronment, a single known wavelength suffices
for calibration. The exclusion of any moving
parts in the instrument translates into very
low maintenance, and typical instruments
have even been proven even under extreme
conditions, such as free-fall conditions [2].
Once calibrated, these WLMs remain true
for extended periods of time (months) and
achieve wavelength resolution down to the 1
FIGURE 1: Range of MHz level (Fig. 3). Given sufficient measure-
IR, IR-II and upcom- ment intensity, data acquisition rates of up to
ing IR-III.
500 Hz are possible and the system can then
be used for real-time wavelength stabilization
(e.g. to counteract acoustic frequency noise).
This acquisition speed can alternatively be
used to determine and control the difference
between two laser wavelengths.
When available laser power is limited, increas-
ing the exposure time for the measurement
reduces intensity requirements down to only
10 nW. (Fig. 4) The accessible wavelength
range of solid-state WLMs is limited by the
spectral sensitivity of the detectors used. The
FIGURE 2: Surface of analyzing software substitution of the silicon-based CCDs with
showing a sidemode of a Diode-Laser. materials with a higher efficiency in the UV
extends the range down to 220 nm. Until
recently, the range in the IR was limited to
A range of wavelength measurement instru- 2250 nm, but new PbSe CCD-arrays extend
FIGURE 3: 5 MHz Laser-Scan showing
ments based on a solid-state etalon design this out to 5000 nm (or 5 µm), with no limita-
1 MHz Resolution of a WS-Ultimate.
has long set the mark in terms of overall tions to the use for pulsed laser systems (see
stability, spectral resolution as well as read above).
out speed.
Whereas previous designs for wavelength References
meters (WLMs) relied upon a scanning-arm [1] J. L. Hall and S. A. Leee, Patent US
Michelson interferometer [1], todays state- 4,165,183 (1979).
of-the-art-technologie is based on wedged- [2] www.zarm.uni-bremen.de
shaped etalons (a.k.a. Fizeau interferom-
eters) to essentially translate the traditional FURTHER INFORMATION
longitudinal length scan into a transverse
Thomas Fischer
composite fringe pattern. The acquisition
CEO at HighFinesse-Ångstrom GmbH
rate is only limited by the sensitivity and
e-mail: [email protected]
read out speed of the CCD. Even pulse laser
Gregory Flinn, Technical writer for the
systems can be measured, given that the
photonics industry
linewidth does not exceed 60 GHz (the limit
e-mail: [email protected]
for which fringes can still be identified). FIGURE 4: Sensitivity of a WS-6 (blue)
Actual high precision WLMs consist of mul- and a WS-6-IR (red) with 1 sec. exposure
tiple etalon-CCD pairs, each etalon having time. BOOTH 278, HALL B1
20 LTJ June 2005 No. 2
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

Precise, fast and profitable – SUPERSCAN family of
RAYLASE AG
RAYLASE AG proudly presents a new
generation of XY deflection heads, which
offer highest speed and maximum preci-
sion. The SUPERSCAN family completes and
strengthens the well known RAYLASE AG
product range. RAYLASE AG offers dedicated
deflection heads for different applications
with apertures of 7, 10, 15 and 20 mm. The
SUPERSCAN-7 deflection head, for instance,
is best suited for applications requiring the
highest speed. He achieves a possible writ-
ing speed of >1,000 cps and a possible
positioning speed of >12 m/s. On the other
hand, to achieve a very fine spot, the SUPER-
The new SUPERSCAN family is able to achieve excellent profitability and opens the
SCAN-20 is ideal yet it is nevertheless very door to new laser applications.
fast and produces excellent results in those
applications requiring increased power den- proximately 40 % higher compared to other FURTHER INFORMATION
sity at the target. The SUPERSCAN-20 is thus deflection heads with the same aperture.
ideal for processing on the fly, cutting appli- The new SUPERSCAN family is able to
RAYLASE AG
cations, rapid tooling, stereolithography as achieve excellent profitability and opens the
phone: [phone]
well for 3D-applications and deep engraving door to laser applications which have never
e-mail: [email protected]
in mould-making. been possible before. So they can be used in
web: www.raylase.com
Each deflection head from the family op- existing applications to achieve an impres-
timizes the relationship between aperture sive increase in throughput. Trust in the

and speed in its specific application area. As quality you expect from RAYLASE: efficient,
a rule of thumb, the working speed is ap- compact and robust. BOOTH 501, HALL B3
Enter a new world of accuracy!
Wavelength meters cw & pulsed
measurement ranges:
220 - 5000 nm
measurement speed
up to 500 Hz
sensitivy <10nJ @ 500 nm
measurement resolution
down to 1 MHz
relative accuracy absolute accuracy*
WS/5 Precision 5*10-6 3000 MHz Windows & Linux
WS/6 High Precision 10-6 600 MHz USB & PCI
WS/7 Super Precision 10-7 60 MHz spectral profile monitoring
WS/Ultimate customized high end solutions, on request linewidth measurement
*measured at 1064, 780, 532 and 390 nm
a ijk HighFinesse GmbH/Ångstrom Ltd.
Auf der Morgenstelle 14 72076 Tübingen/Germany Å
Tel ++49(0)7071-968515 Fax ++49(0)7071-968517 NGSTROM
[email protected] www.highfinesse.com www.laser-journal.de LTJ 21
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

UV light sources in semiconductor manufacturing
The trend toward smaller feature si- high repetition rate (up to 1000 Hz) excimer
zes in microlithography requires not only laser can sufficient averaging be carried out
a shift to shorter wavelength, but also the to obtain acceptable signal-to-noise ratios
use of special techniques, so called Reso- in the phase measurements. Wind currents
lution Enhancement Techniques. and temperature fluctuations in the labora-
A very successful technique is the application tory preclude the use of low repetition rate
of Phase Shift Masks (PSM) in addition to the excimer lasers, which, in any event, would
common Amplitude Mask. The PSM intro- unnecessarily increase the sampling time.
duces a complex amplitude information A final technical requirement of the system
and a phase shift in parts of the wavelength is the need for reliable synchronization be-
in use. In this way the critical dimension of tween the CCD and the laser through the
the lithographic process can be improved software driving the device. Precisely the
because the complex amplitude has also same number of laser pulses must be aver-
negative values which provides a much FIGURE 1: Mask Qualification with aged for each CCD frame to optimize the
better definition for the intensity value zero. TuiLaser’s ExciStar S-Industrial (Courtesy data. A suitable trigger input to the laser
by Carl ZEISS SMT)
However, one difficult issue is the reliable (typically TTL) must be available.
measurement of phase shifts created by the A diffractive shearing interferometer based
PSM in the deep UV. This is due to the lack of on a TuiLaser ExciStar S-Industrial excimer
suitable and simple interferometric devices laser implements a stable common-path
in the deep UV. In this application report design, using only a minimum number of
a deep UV interferometer based on phase additional optical components compared to
gratings is presented. a more traditional mask qualification system.
Thus the difficulties associated with stability
Principles of PSM measurement requirements and material properties in the
By combining two Ronchi-phase gratings, deep UV, such as absorption and scattering
placed in the imaging light path of a mi- losses, are overcome.
croscope working in transmission mode, it TuiLaser has carefully optimized its ExciStar
is possible to generate two laterally sheared S-Industrial argon fluoride excimer laser to
wave fronts which carry the phase informa- meet the demanding requirements of PSM
tion of the object of interest. The introduced applications. Sophisticated design technolo-
FIGURE 2: High Repetition Rate Excimer
shear depends on the distance between the gies including Solid State Switching and Co-
Laser from TuiLaser
two Ronchi-phase gratings. A five-phase rona Preionization of the discharge ensure
algorithm can be used to analyze the fringe long-term stability, excellent pulse-to-pulse
pattern generated as a function of the lateral der to map features with sub-nanometer di- stability, and a homogeneous beam profile.
shift between the two gratings. Information mensions, changes in intensity on the order TuiLasers engineers have implemented an
about the phase shift of the object is thus of 1% must be accurately measurable. easy-to-use triggering protocol to allow ap-
obtained. The stability of the laser source is the overrid- propriate synchronization of all components
To introduce large shears, a complex coher- ing design feature of a sufficiently accurate of the device.
ence has to be prepared. This is done by the interferometer. When measuring the phase
use of a structured light source, a technique steps of the mask, sub-nanometer accuracy
FURTHER INFORMATION
which reduces unwanted interferences and is necessary in a state-of-the-art lithographic
allows for a high contrast ratio (>0.8) com- process. Without an extremely stable light
bined with minimum light loss. Under these source this is not possible. Low shot-to-shot TuiLaser AG
conditions, the phase step introduced by a noise and high long-term stability (over a pe- phone: ++49 (0) 89- 89 407-0
PSM structure can be measured with a high riod of hours) in both continuous and burst e-mail: [email protected]
degree of accuracy. modes are required for high performance web: www.tuilaser.com
interferometry at 193 nm. Another param-
Design Considerations of the Interferom- eter which must be optimized is the beam
eter and Light Source profile. An asymmetric beam profile results BOOTH 435, HALL B3
The stability of the interferometer is critical in poorly defined coherence in the object
for measurement accuracy, especially if short plane of the interference microscope.
wavelengths are to be used. For instance a A homogeneous beam profile is a key to data
phase shift between the interfering waves re- that can be interpreted meaningfully. Fur-
sulting from a 1 nm feature leads to a change thermore, the stochastic noise in the CCD
in intensity of only 1.65% at 193 nm. In or- detector can be quite significant. Only with a
22 LTJ June 2005 No. 2
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

Where do They Glow...?
Laser Components’ conversion cards
for the visualization of laser light have
proven reliable throughout years in devel-
opment, service and production. Cards for
the wave lengths from 250 nm to 600 nm
and from 700 nm to 1700 nm are available.
Optimized cards for various laser powers can
be supplied. Additionally, small versions are
available which are preferable in applica-
tions with limited space.
Conversion cards for the wave lengths
All stated performance values refer to appli- from 250 nm to 600 nm and from 700 nm
cation during daylight. For darkened rooms to 1700 nm are available.
significantly lower minimum power ratings
FURTHER INFORMATION
apply. Several stated maximum power rat-
ings can be exceeded 2 to 3-fold when the
exposure is only for split seconds or the card
Laser Components GmbH
is moved forcefully. Due to their limited ther-
phone: [phone]
mal capacity, none of the conversion screens
e-mail: [email protected]
are designed for continuous load in a direct
web: www.lasercomponents.com
beam. They should be moved slightly, which
additionally also results in an improved pic-

ture quality.
BOOTH 459, HALL B1
Matrox Solios framegrabber strikes perfect
balance between functionality and cost
Featuring support for PCI-X and and can also perform complete image re-
powerful FPGA technology, Matrox Solios construction from multi-tap cameras.
framegrabbers deliver exceptional perfor-
Matrox Solios XA
mance and functionality for cost-sensitive
applications. The Matrox Solios XA has up to four com-
pletely independent inputs, each capable
of high fidelity video capture at a maximum
rate of 65 MHz per input. In addition to sup-
porting simultaneous acquisition from up to
four single-tap video sources, the inputs can
be combined to acquire from two dual-tap
video sources or one RGB video source.
Optionales FPGA
Both the Solios XCL and Solios XA offer
an optional, customizable processing core
based on the Altera Stratix FPGA family to
accelerate specific routines in an application.
The Altera Stratix devices are available with
Matrox Solios framegrabbers deliver
or without memory (SDRAM and/or SRAM)
exceptional performance and functional-
to offer users maximum flexibility for their
ity for cost-sensitive applications.
application’s needs.
Matrox Solios XCL
FURTHER INFORMATION
The Matrox Solios XCL supports either two
independent Camera Link Base ports or a RAUSCHER GmbH
single Camera Link Medium port. The board Phone: [phone]
captures from base or medium Camera Link e-mail: [email protected]
area or line scan cameras at up to 66 MHz, web: www.rauscher.de
www.laser-journal.de LTJ 23
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
PRODUCTS

Low cost 915 nm pump for fiber lasers
Lumics a manufacturer of pump laser
modules and laser chips introduces the specified with max. 3.2 V. The numeri-
uncooled LU0915T040 laser module with cal aperture multi mode fiber is specified
up to 4 W output power at 915 nm pump with NA= 0.22 or optional NA = 0.15 The
wavelength. threshold current is typically 550 mA. The la-
Lumics introduces this laser in an uncooled ser diode is isolated to the ground. The per-
TO220 package coupled with a 100/125 µm formance of the device is based on Lumics
multi mode fiber. The fiber is terminated with propriety chip technology which ensure
a standard 2.5 mm diameter ceramic ferrule. very high reliability with a breakthrough in
FC/PC or SMA connectors are optional. laser facet passivation. Products samples are
The new package design is used as a plat- available in Q2 / 2005.
The complete module assembly is based
form for the a new series of high power
on fully automated active fiber alignment
single emitter laser diodes at 808 nm; 915
technology.
nm and 975 nm pump wavelength with an
excellent cost/performance ratio. The mod-
ules can be air cooled with standard heat
FURTHER INFORMATION
sink components for the popular TO220 The complete module assembly is based
footprint. Lifetime is specified with 40.000 on fully automated active fiber alignment
Lumics GmbH
h MTTF. technology.
phone: [phone] - 0
The target applications include industrial The production is ISO 9001 approved with
e-mail : [email protected]
Erbium Ytterbium fiber lasers and Erbium several screening steps throughout the
web: www.lumics.com
doped fiber amplifiers. The new generation chip manufacturing and module assembly
of high power modules allows a cost effec- process.
tive laser system design with an enhanced The operating current is specified with typi-
performance. cally 6.5 A. The very low forward voltage is BOOTH 231, HALL B1
Shack-Hartmann sensors
for measuring demanding objects
Manufacturer: Optocraft. Product of optics. It speeds up the workflow, en-
range: Wave-front sensors for the measure- sures product quality by means of reliable
ment of optical surfaces and laser beams, measurements and enables optimization
available in three product lines: As stand- of final product based on the optical
alone module, manual stationary tool and components under test. SHSAutolab
as fully automated and integrable platform. fulfills the demand for easy handling by
Characteristics: A Shack-Hartmann-prin- full automation and allows for complete
ciple based technology. The wave-front is mapping of the measured results. Every
focussed to a multitude of spots by means SHSLab based product comes with a soft-
of a microlenslet array. The shape of the ware that offers individual measurement
complete wave-front is reconstructed by adaption and sophisticated evaluation.
detection of the spot field and a subsequent
analysis using special algorithms with high
wave-front dynamics. The sensor SHSLab
shows its performance right from the basic FURTHER INFORMATION
module BR (e.g. for collimation). The UHR
module sets high benchmarks with a resolu-
Optocraft GmbH
tion of 116 x 116 spots; thus, it is suitable for
Optocraft SHSAutolab is the platform for
phone: [phone]
measurement of surfaces or characterization serial testing of optics.
e-mail: [email protected]
of lasers. Optocraft offers additionally cus-
web: www.optocraft.de
tomized SHSLab versions for special wave- stationary tool, convinces users by easy han-
lengths or extremely high resolutions. These dling and optimal applicability for spot- and
options are also available for products based serial-testing of optical elements or systems.
on SHSLab: SHSInspect, the all-purposed SHSAutolab is the platform for serial testing BOOTH 644, HALL B2
24 LTJ June 2005 No. 2
© Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim