Journal of the Institute of Environmental Sciences 1996: Vol 39 Index

9 Pages·1996·3.1 MB·English

1996 Index of Articles
Volume XX XIX
Journal of the Institute of Environmental Sciences
SUBJECT INDEX Fluid Handling Components by Dynamic Extraction,
Donald C. Grant, Travis Lemke, Greg Duepner, Donna
Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996.
CONTAMINATION CONTROL (CC) Sterility Assurance for Cleanroom Wipers, Douglas W. Coo-
per, V. 39, No. 3, p. 31, 1996.
Cleanroom Design/Materials
What Is the Shelf Life of Electronic Specialty Gases?, Stephen
Cleanroom Mats: An Investigation of Particle Removal, W. M. Fine and Philip B. Henderson, V.39, No.5, p.23, 1996.
Whyte, T. Shields, and T. Prvan, V. 39, No. 4, p. 19, 1996.
Sterility Assurance for Cleanroom Wipers, Douglas W. Coo- Modeling and Simulation
per, V. 39, No. 3, p. 31, 1996. Laboratory Simulation of Low Earth Orbit (LEO) Atomic
Oxygen Effects, George E. Caledonia, Robert H. Krech,
Cleanroom Operation/Procedures and David B. Oakes, V. 39, No. 2, p. 23, 1996.
Cleanroom Mats: An Investigation of Particle Removal, W. Measurement of Inorganic Contaminant Extraction from
Whyte, T. Shields, and T. Prvan, V.39, No. 4, p. 19, 1996. Fluid Handling Components by Dynamic Extraction,
Energy Savings in Cleanrooms from Demand-Controlled Donald C. Grant, Travis Lemke, Greg Duepner, Donna
Filtration, David Faulkner, William J. Fisk, and John T. Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996.
Walton, V. 39, No. 6, p. 21, 1996. Particle Behavior in Vacuum Systems: Implications for In-
Situ Particle Monitoring in Semiconductor Processing
Criteria and Standards Equipment, Patrick D. Kinney, Gwi-Nam Bae, David Y.H.
Sterility Assurance for Cleanroom Wipers, Douglas W. Coo- Pui, and Benjamin Y.H. Liu, V. 39, No. 6, p. 40, 1996.
per, V. 39, No. 3, p. 31, 1996. Particle Formation of Materials Outgassed from Silicone
Sealants by Corona-Discharge Ionizers, Norikazu Namiki,
Filters and Filtration Yoshio Otani, Hitoshi Emi, and Shuji Fujii, V. 39, No. 1,
Characteristics of an Ultrafiltered Deionized Water System p. 26, 1996.
Used in the Manufacture of Implantable Biomedical De- Prediction of Particulate Contamination on an Aperture Win-
vices, Mark A. Hjelle and MichaelA . Bauer, V.39. No. 4, dow, Aleck L. Lee and Michael C. Fong, V. 39, No. 2, p.
p. 40, 1996. 42, 1996.
Energy Savings in Cleanrooms from Demand-Controlled Semiconductor Processing
Filtration, David Faulkner, William J. Fisk, and John T. Characteristics of an Ultrafiltered Deionized Water System
Walton, V. 39, No. 6, p. 21, 1996. Used in the Manufacture of Implantable Biomedical De-
Measurement of Inorganic Contaminant Extraction from vices, Mark A. Hjelle and Michael A. Bauer, V.39. No. 4,
Fluid Handling Components by Dynamic Extraction, p. 40, 1996.
Donald C. Grant, Travis Lemke, Greg Duepner, Donna Development and Evaluation of On-Line Detection Tech-
Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996. niques for Polar Organics in Ultrapure Water, Gregory C.
Frye, Dianna S. Blair, Thomas W. Schneider, Curtis D.
Identification, Measurement, and Monitoring Mowry, Chris W. Colburn, and Robert P. Donovan, V.39,
Development and Evaluation of On-Line Detection Tech- No. 5, p. 30, 1996.
niques for Polar Organics in Ultrapure Water, Gregory C. Feasibility of an In-Situ Particle Monitor on a Tungsten
Frye, Dianna S. Blair, Thomas W. Schneider, Curtis D. LPCVD Reactor, B. Fardi, B.S. MacGibbon, S. Tripathi,
Mowry, Chris W. Colburn, and Robert P. Donovan, V. 39, and F. Moghadam, V. 39, No. 3, p. 25, 1996.
No.’5, p. 30, 1996.
Measurement of Inorganic Contaminant Extraction from
Feasibility of an In-Situ Particle Monitor on a Tungsten Fluid Handling Components by Dynamic Extraction,
LPCVD Reactor, B. Fardi, B.S. MacGibbon, S. Tripathi, Donald C. Grant, Travis Lemke, Greg Duepner, Donna
and F. Moghadam, V. 39, No. 3, p. 25, 1996. Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996.
Measurements of Impurities in Liquids with a Nonvolatile Particle Behavior in Vacuum Systems: Implications for In-
Residue Monitor, Mindi Xu, Su-Yen Chang-Chien, Hwa- Situ Particle Monitoring in Semiconductor Processing
Chi Wang, and David Blackford, V.39, No. 1, p.21, 1996. Equipment, Patrick D. Kinney, Gwi-Nam Bae, David Y.H.
Measurement of Inorganic Contaminant Extraction from Pui, and Benjamin Y.H. Liu, V. 39, No. 6, p. 40, 1996.
54 JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES
1996 Index of Articles
Volume XX XIX
Journal of the Institute of Environmental Sciences
SUBJECT INDEX Fluid Handling Components by Dynamic Extraction,
Donald C. Grant, Travis Lemke, Greg Duepner, Donna
Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996.
CONTAMINATION CONTROL (CC) Sterility Assurance for Cleanroom Wipers, Douglas W. Coo-
per, V. 39, No. 3, p. 31, 1996.
Cleanroom Design/Materials
What Is the Shelf Life of Electronic Specialty Gases?, Stephen
Cleanroom Mats: An Investigation of Particle Removal, W. M. Fine and Philip B. Henderson, V.39, No.5, p.23, 1996.
Whyte, T. Shields, and T. Prvan, V. 39, No. 4, p. 19, 1996.
Sterility Assurance for Cleanroom Wipers, Douglas W. Coo- Modeling and Simulation
per, V. 39, No. 3, p. 31, 1996. Laboratory Simulation of Low Earth Orbit (LEO) Atomic
Oxygen Effects, George E. Caledonia, Robert H. Krech,
Cleanroom Operation/Procedures and David B. Oakes, V. 39, No. 2, p. 23, 1996.
Cleanroom Mats: An Investigation of Particle Removal, W. Measurement of Inorganic Contaminant Extraction from
Whyte, T. Shields, and T. Prvan, V.39, No. 4, p. 19, 1996. Fluid Handling Components by Dynamic Extraction,
Energy Savings in Cleanrooms from Demand-Controlled Donald C. Grant, Travis Lemke, Greg Duepner, Donna
Filtration, David Faulkner, William J. Fisk, and John T. Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996.
Walton, V. 39, No. 6, p. 21, 1996. Particle Behavior in Vacuum Systems: Implications for In-
Situ Particle Monitoring in Semiconductor Processing
Criteria and Standards Equipment, Patrick D. Kinney, Gwi-Nam Bae, David Y.H.
Sterility Assurance for Cleanroom Wipers, Douglas W. Coo- Pui, and Benjamin Y.H. Liu, V. 39, No. 6, p. 40, 1996.
per, V. 39, No. 3, p. 31, 1996. Particle Formation of Materials Outgassed from Silicone
Sealants by Corona-Discharge Ionizers, Norikazu Namiki,
Filters and Filtration Yoshio Otani, Hitoshi Emi, and Shuji Fujii, V. 39, No. 1,
Characteristics of an Ultrafiltered Deionized Water System p. 26, 1996.
Used in the Manufacture of Implantable Biomedical De- Prediction of Particulate Contamination on an Aperture Win-
vices, Mark A. Hjelle and MichaelA . Bauer, V.39. No. 4, dow, Aleck L. Lee and Michael C. Fong, V. 39, No. 2, p.
p. 40, 1996. 42, 1996.
Energy Savings in Cleanrooms from Demand-Controlled Semiconductor Processing
Filtration, David Faulkner, William J. Fisk, and John T. Characteristics of an Ultrafiltered Deionized Water System
Walton, V. 39, No. 6, p. 21, 1996. Used in the Manufacture of Implantable Biomedical De-
Measurement of Inorganic Contaminant Extraction from vices, Mark A. Hjelle and Michael A. Bauer, V.39. No. 4,
Fluid Handling Components by Dynamic Extraction, p. 40, 1996.
Donald C. Grant, Travis Lemke, Greg Duepner, Donna Development and Evaluation of On-Line Detection Tech-
Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996. niques for Polar Organics in Ultrapure Water, Gregory C.
Frye, Dianna S. Blair, Thomas W. Schneider, Curtis D.
Identification, Measurement, and Monitoring Mowry, Chris W. Colburn, and Robert P. Donovan, V.39,
Development and Evaluation of On-Line Detection Tech- No. 5, p. 30, 1996.
niques for Polar Organics in Ultrapure Water, Gregory C. Feasibility of an In-Situ Particle Monitor on a Tungsten
Frye, Dianna S. Blair, Thomas W. Schneider, Curtis D. LPCVD Reactor, B. Fardi, B.S. MacGibbon, S. Tripathi,
Mowry, Chris W. Colburn, and Robert P. Donovan, V. 39, and F. Moghadam, V. 39, No. 3, p. 25, 1996.
No.’5, p. 30, 1996.
Measurement of Inorganic Contaminant Extraction from
Feasibility of an In-Situ Particle Monitor on a Tungsten Fluid Handling Components by Dynamic Extraction,
LPCVD Reactor, B. Fardi, B.S. MacGibbon, S. Tripathi, Donald C. Grant, Travis Lemke, Greg Duepner, Donna
and F. Moghadam, V. 39, No. 3, p. 25, 1996. Wilkes, and Norm Powell, V. 39, No. 2, p. 29, 1996.
Measurements of Impurities in Liquids with a Nonvolatile Particle Behavior in Vacuum Systems: Implications for In-
Residue Monitor, Mindi Xu, Su-Yen Chang-Chien, Hwa- Situ Particle Monitoring in Semiconductor Processing
Chi Wang, and David Blackford, V.39, No. 1, p.21, 1996. Equipment, Patrick D. Kinney, Gwi-Nam Bae, David Y.H.
Measurement of Inorganic Contaminant Extraction from Pui, and Benjamin Y.H. Liu, V. 39, No. 6, p. 40, 1996.
54 JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES
Sources and Effects Use of a Beryllium Hopkinson Bar to Characterize a
Laboratory Simulation of Low Earth Orbit (LEO) Atomic Piezoresistive Accelerometer in Shock Environments,
Oxygen Effects, George E. Caledonia, Robert H. Krech, Vesta I. Bateman, FredA . Brown, and Neil T. Davie, V.39,
No. 6, p. 33, 1996.
and David B. Oakes, V. 39, No. 2, p. 23, 1996.
Vibration Design Criteria for COTS-Based C‘I Systems, R.
Particle Formation of Materials Outgassed from Silicone
Paul Normandy and Lindsay Yowell, V. 39, No. 6, p. 28,
Sealants by Corona-Discharge Ionizers, Norikazu Namiki,
1996.
Yoshio Otani, Hitoshi Emi, and Shuji Fujii, V.39, No. 1,
p. 26, 1996.
Solar and Space Simulation
Prediction of Particulate Contamination on an Aperture Win-
dow, Aleck L. Lee and Michael C. Fong, V. 39, No. 2, p. Laboratory Simulation of Low Earth Orbit (LEO) Atomic
42, 1996. Oxygen Effects, George E. Caledonia, Robert H. Krech,
and David B. Oakes, V. 39, No. 2, p. 23, 1996.
DESIGN, TEST, AND EVALUATION (DTE)
Test Tailoring
Acoustics A Maturity Metric for Accelerated Testing of Complex
Prediction of Dynamic Environments for Airborne External Subsystems and Assemblies, Paul M. Ellner and John
Stores During Aircraft Straight and Level Flight, Paul Woodworth, V. 39, No. 1, p. 41, 1996.
Heaton and Jeffrey Czuchna, V. 39, No. 4, p. 28, 1996. A Systematic Approach to Hardware Qualification, Phillip
Prediction of Particulate Contamination on an Aperture Win- R. Barela and Steven L. Cornford, V. 39, No. 4, p. 33,
1996.
dow, Aleck L. Lee and Michael C. Fong, V. 39, No. 2, p.
42, 1996. Optimizing Environmental Stress Screening Using Math-
ematical Programming, Y.L. Mok, and M. Xie, V. 39, No.
Automotive/Transportation 3, p. 37, 1996.
Vibration Design Criteria for COTS-Based C‘I Systems, R. Prediction of Dynamic Environments for Airborne External
Paul Normandy and Lindsay Yowell, V. 39, No. 6, p. 28, Stores During Aircraft Straight and Level Flight, Paul
1996. Heaton and Jeffrey Czuchna, V. 39, No. 4, p. 28, 1996.
Rationale for Durability Temperature Test Compression,
Climatics and Thermal Hank Caruso, V. 39, No. 1, p. 33, 1996.
Environmental Stress Screening for a Massively Parallel Transient Synthesis Using a Fourier Transform Envelope,
Vision Computer, Andrew D. Kostic and Robert Wallace, M.J. Hine, V.39, Nc_ 5, p. 17, 1996.
V. 39, No. 2, p. 38, 1996. Vibration Design Criteria for COTS-Based C*I Systems, R.
Optimizing Environmental Stress Screening Using Math- Paul Normandy and Lindsay Yowell, V. 39, No. 6, p. 28,
ematical Programming, Y.L. Mok, and M. Xie, V. 39, No. 1996.
3, p. 37, 1996.
Rationale for Durability Temperature Test Compression, Test Time Compression
Hank Caruso, V. 39, No. 1, p. 33, 1996. Rationale for Durability Temperature Test Compression,
Hank Caruso, V. 39, No. 1, p. 33, 1996.
Criteria and Standards
A Proposed Method to Standardize Shock Response Spec- PRODUCT RELIABILITY (PR)
trum (SRS) Analysis, Strether Smith and Bill Hollowell,
Acquisition Policies
V. 39, No. 3, p. 19, 1996.
Use of a Beryllium Hopkinson Bar to Characterize a Vibration Design Criteria for COTS-Based C‘I Systems, R.
Paul Normandy and Lindsay Yowell, V. 39, No. 6, p. 28,
Piezoresistive Accelerometer in Shock Environments,
1996.
Vestal. Bateman, Fred A. Brown, and Neil T. Davie, V.39,
No. 6, p. 33, 1996.
Durability/Fatigue
Shock and Vibration Rationale for Durability Temperature Test Compression,
A Proposed Method to Standardize Shock Response Spec- Hank Caruso, V. 39, No. 1, p. 33, 1996.
trum (SRS) Analysis, Strether Smith and Bill Hollowell, What Is the Shelf Life of Electronic Specialty Gases?, Stephen
V. 39, No. 3, p. 19, 1996. M. Fine and Philip B. Henderson, V.39, No.5, p.23, 1996.
Prediction of Dynamic Environments for Airborne External
Reliability Achievement
Stores During Aircraft Straight and Level Flight, Paul
Heaton and Jeffrey Czuchna, V. 39, No. 4, p. 28, 1996. A Maturity Metric for Accelerated Testing of Complex
Statistical Energy Modeling Techniques for Space Station Subsystems and Assemblies, Paul M. Eliner and John
Truss Segments, Leland G. Smith and Paul G. Bremner, Woodworth, V. 39, No. 1, p. 41, 1996.
V. 39, No. 5, p. 38, 1996. A Systematic Approach to Hardware Qualification, Phillip
Transient Synthesis Using a Fourier Transform Envelope, R. Barela and Steven L. Cornford, V. 39, No. 4, p. 33,
M.J. Hine, V. 39, No. 5, p. 17, 1996. 1996.
NOVEMBER/DECEMBER 1996 55
Environmental Stress Screening for a Massively Parallel Water System Used in the Manufacture of Implantable
Vision Computer, Andrew D. Kostic and Robert Wallace, Biomedical Devices, V. 39. No. 4, p. 40, 1996. (Ab-
V. 39, No. 2, p. 38, 1996. stract—see Hjelle, M.A.)
Blackford, D., Measurements of Impurities in Liquids
Stress Screening
with a Nonvolatile Residue Monitor, V. 39, No. 1, p.
Environmental Stress Screening for a Massively Parallel 21, 1996. (Abstract—see Xu, M.)
Vision Computer, Andrew D. Kostic and Robert Wallace, Blair, D.S., Development and Evaluation of On-Line
V. 39, No. 2, p. 38, 1996. Detection Techniques for Polar Organics in Ultrapure
Optimizing Environmental Stress Screening Using Math- Water, V. 39, No. 5, p. 30, 1996. (Abstract—see Frye,
ematical Programming, Y.L. Mok, and M. Xie, V. 39, No. G.C.)
3, p. 37, 1996. Bremner, P.G., Statistical Energy Modeling Techniques
for Space Station Truss Segments, V. 39, No. 5, p. 38,
1996. (Abstract—see Smith, L.G.,)
AUTHOR INDEX Brown, F.A., Use of a Beryllium Hopkinson Bar to Charac-
terize a Piezoresistive Accelerometer in Shock Environ-
B ments, V. 39, No. 6, p. 33, 1996. (Abstract—see Bateman,
V.L)
Bae, G.-N., Particle Behavior in Vacuum Systems: Implica-
tions for In-Situ Particle Monitoring in Semiconductor
Processing Equipment, V. 39, No. 6, p. 40, 1996. (Ab- C
stract—see Kinney, P.D.) Caledonia, G.E., Laboratory Simulation of Low Earth Orbit
Barela, P.R., A Systematic Approach to Hardware Qualifi- (LEO) Atomic Oxygen Effects, V. 39, No. 2, p. 23, 1996.
cation, V. 39, No. 4, p. 33, 1996. A systematic approach Our pulsed, fast-action oxygen source has been used over
for the development of a hardware qualification approach the last 9 years to investigate the effects of ambient oxygen
is described. This approach stems from the need to ad- atoms that impact materials placed in LEO. During this
dress the “Catch-22” of not flying new technology be- period, we have irradiated over 2000 material samples
cause it has not flown. A physics of failure approach is with 8 k/s oxygen atoms generated in our source. Typical
used to identify failure modes, and the impact and likeli- irradiance level is 3 x 10° O atoms/cm? although some
hood of these failures on the mission requirements is materials have been irradiated to fluence levels as high as
plotted in a Requirements Matrix. These same failure 6x 10?! O atoms/cm’. We review the operating principles
modes are plotted against the effectiveness of the avail- and characteristics of our source along with the diagnos-
able preventions, analyses, control, and tests (PACTs) at tic and handling procedures appropriate to material test-
screening for, or eliminating, these failure modes ina test ing. Representative data are presented on the velocity
effectiveness matrix. Matrix multiplication results in a dependence of oxygen atom erosion rates as well as the
ranked set of PACTs that can be sorted according to cost dependence on material temperature. Specific examples
and redundancy with other PACTs. This and other infor- of nonlinear oxidative effects related to surface contami-
mation resulting from the process allows project manag- nation and test duration are provided. (CC: Modeling and
ers to make more informed decisions regarding the cost Simulation, Sources and Effects; DTE: Solar and Space
and risk tradeoffs inherent in any qualification program. Simulation)
(DTE: Test Tailoring; PR: Reliability Achievement) Caruso, H., Rationale for Durability Temperature Test Com-
pression, V. 39, No. 1, p. 33, 1996. This paper describes
Bateman, V.I., Use of a Beryllium Hopkinson Bar to Char-
a temperature test compression strategy suitable for use
acterize a Piezoresistive Accelerometer in Shock Envi-
with either commercial or military electronic products.
ronments, V. 39, No. 6, p. 33, 1996. This paper discusses
An example, with calculations and supporting rationale,
studies relating to the characteristics of a piezoresistive
is presented for developing an accelerated temperature
accelerometer in shock environments. A Hopkinson bar
test profile for a representative electronics product based
capability has been developed to extend the understand-
on actual conditions in its service environment. Both
ing of the piezoresistive accelerometer, in two mechanical
operating and nonoperating periods are considered over
configurations, in high-frequency, high-shock environ-
a full range of hot, cold, sunny, and cloudy days. Test
ments. In this paper, the beryllium Hopkinson bar con-
compression is based on equivalent amounts of fatigue
figuration with a laser Doppler vibrometer as the refer-
accumulation in the test laboratory and in actual service.
ence measurement is described. The in-axis performance
Significant assumptions and variables that can affect
of the piezoresistive accelerometer for frequencies of dc-
50 kHz and shock magnitudes of up to 70,000 g as estimates of fatigue accumulation and test validity are
determined from measurements with a beryllium also discussed. (DTE: Climatics and Thermal, Test Tai-
loring, Test Time Compression; PR: Durability/Fatigue)
Hopkinson bar are presented. Preliminary results of char-
acterizations of the accelerometers subjected to cross- Chang-Chien, S.-Y., Measurements of Impurities in Liquids
axis shocks in a split beryllium Hopkinson bar configura- with a Nonvolatile Residue Monitor, V. 39, No. 1, p. 21,
tion are presented. (DTE: Criteria and Standards, Shock 1996. (Abstract—see Xu, M.)
and Vibration) Colburn, C.W., Development and Evaluation of On-Line
Bauer, M.A., Characteristics of an Ultrafiltered Deionized Detection Techniques for Polar Organics in Ultrapure
56 JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES
Water, V. 39, No. 5, p. 30, 1996. (Abstract—see Frye, proposed metric utilizes the first occurrence times of the
G.C.) observed problem failure modes. A related metric for the
Cooper, D.W., Sterility Assurance for Cleanroom Wipers, discrete case where test duration is measured in terms of
V. 39, No. 3, p. 31, 1996. Procedures specified by the trials or duty cycies is proposed. (DTE: Test Tailoring;
Association for the Advancement of Medical Instrumenta- PR: Reliability Achievement)
tion (AAMI) are used by Texwipe and other wiper manu- Emi, H., Particle Formation of Materials Outgassed from
facturers to certify the sterility of sterile wipers . The tests Silicone Sealants by Corona-Discharge Ionizers, V. 39,
ensure that there is less than one chance in a million of No. 1, p. 26, 1996. (Abstract—see Namiki, N.)
having a viable particle on one of these sterile wipers
when the package is first opened. In six of seven sets of
F
wipers tested, the count distribution data supported the
Fardi, B., Feasibility of an In-Situ Particle Monitor on a
hypothesis that the bioburden (colony-forming units, cfu,
Tungsten LPCVD Reactor, V. 39, No. 3, p. 25, 1996.
per wiper) had a Poisson count distribution, which would
Reduction or elimination of particles generated within the
come from having a uniform probability off inding a viable
semiconductor process equipment is vital to achieving
particle on each of the 30 wipers tested in the set. No
high yields in the semiconductor industry. In-situ laser
evidence was found for wipers in any set having a highly
particle sensors that detect contaminants within the pro-
unusual level of bioburden. (CC: Cleanroom Design/
cess equipment are gaining increasing acceptance be-
Materials, Criteria and Standards, Identification,
cause of their ability to detect problems in real-time.
Meaurement, and Monitoring)
Prompt detection ofp article problems followed by correc-
Cornford, S.L., A Systematic Approach to Hardware Quali-
tive actions minimizes impact to parts (wafers) sensitive to
fication, V. 39, No. 4, p. 33, 1996. (Abstract—see Barela,
particle contamination. It is hypothesized that a relation-
P.R.)
ship exists between the quantities of particles depositing
Czuchna, J., Prediction of Dynamic Environments for Air- on a wafer and particles detected by an in-situ particle
borne External Stores During Aircraft Straight and Level sensor in the exhaust line. A study was conducted to
Flight, V. 39, No. 4, p. 28, 1996. (Abstract—see Heaton, evaluate this hypothesis. An in-situ laser particle sensor
P.) was installed on the exhaust line of a Tungsten Low
Pressure Chemical Vapor Deposition (W-LPCVD) cham-
D ber. The exhaust line particle counts were collected dur-
ing the processing of device wafers and during particle
Davie, N.T., Use of a Beryllium Hopkinson Bar to Charac-
tests using monitor wafers. Correlations between the
terize a Piezoresistive Accelerometer in Shock Environ-
ISPM counts, particles deposited on the wafer, and yields
ments, V. 39, No. 6, p. 33, 1996. (Abstract—see Bateman,
are examined. The response of the particle sensor to the
V.1L)
periodic chamber cleans is discussed. (CC: Idenfification,
Donovan, R.P., Development and Evaluation of On-Line
Measurement, and Monitoring, Semiconductor Process-
Detection Techniques for Polar Organics in Ultrapure
ing)
Water, V. 39, No. 5, p. 30, 1996. (Abstract—see Frye,
Faulkner, D., Energy Savings from Demand-Controlled
G.C.)
Filtration, V. 39, No. 6, p. 21, 1996. In cleanrooms, very
Duepner, G., Measurement of Inorganic Contaminant Ex-
low particle concentrations are maintained by recircula-
traction from Fluid Handling Components by Dynamic
tion of air at a high rate (e.g., 600 room air volumes/hr)
Extraction, V. 39, No. 2, p. 29, 1996. (Abstract—see
through highly efficient air filters. Results are reported in
Grant, D.C.)
a Class M3.5 (Class 100) cleanroom with 28 m? (300 ft’)
floor area, where significant energy savings were realized
E by controlling the rate of air recirculation through the
Eliner, P.M., A Maturity Metric for Accelerated Testing of filters in response to real-time measurements of particle
Complex Subsystems and Assemblies, V. 39, No. 1, p. 41, concentrations. An inexpensive, $2500 optical particle
1996. Prior to system integration testing, assemblies and counter was used to measure particle concentrations. The
subsystems are frequenily subjected to tests that seek to effect of varying the recirculation airflow rate on particle
surface failure nodes associated with a specified set of concentrations was investigated. Changes in recircula-
environmental conditions. The induced environmental tion fan speeds of 10 percent or greater did not cause a
stresses are often elevated above normal usage levels to noticeable particle reizase from filters or resuspension
shorten the test duration necessary to surface the failure from indoor surfaces. With new automatic control systems
modes. A question that arises is how long should the unit in operation, there were occasional, nonconsecutive 1-
under test be subjected to the environmental conditions. min episodes in which the particle concentration ex-
Once a sufficient set of failure modes has surfaced, re- ceeded Class M3.5 (Class 100) status. Depending upon
sources Should be redirected toward eliminating the sur- the choice for baseline energy use, the energy consump-
faced modes and toward testing additional assembly (or tion of the recirculating fans was reduced by 60 to 80
subsystem)/environment combinations of interest. In this percent, and the estimated payback period for a 90 m?
paper, a metric is proposed for use in deciding when (1,000 ft?) Class M3.5 (Class 100) cleanroom is from I to
sufficient testing has been accomplished for a complex 4 yr. (CC: Cleanroom Operation/Procedures, Filters and
assembly or subsystem in a specified environment. The Filtration)
NOVEMBER/DECEMBER 1996 57
Fine, S.M., What Is the Shelf Life of Electronic Specialty tion added to chemical in a process tool with time. Ex-
Gases?, V. 39, No. 5, p. 23, 1996. This paper reviews shelf- amples of its use to measure extraction from all-Teflon
life studies on several ESGs and discusses the fundamen- 0.05-~m microporous membrane filters in 49 percent HF
tal issues of chemistry and physics related to the purity of are included. (CC: Filters and Filtration, Identification,
ESGs as a function of both time and usage of the cylinder. Measurement, and Monitoring, Modeling and Simulation,
It is shown that, in most cases, the shelf life of an ultrahigh Semiconductor Processing)
purity ESG packaged in a well-prepared and passivated
cylinder is at least 2 to 3 yr. The performance of cylinder H
valves is also discussed. The results of lifetime testing of
Heaton, P., Prediction of Dynamic Environments for Air-
the functionality and particle cleanliness of the valves are
borne External Stores During Aircraft Straight and Level
included. The tests show that the purity and functionality
Flight, V. 39, No. 4, p. 28, 1996. The MERIT program,
of the cylinder valves in corrosive gas service can be
funded by the USAF Wright Laboratory, addresses the
maintained for at least 2 to 3 yr if proper gas-handling
need for improved early definition of equipment environ-
procedures are used. These procedures are the single
mental life cycle profiles. A computer system has been
most important factor in determining the lifetime of a
developed as a tool to aid engineers in defining all
cylinder valve in corrosive gas service. (CC: Identifica-
activities during an equipment item’s life and the environ-
tion, Measurement, and Monitoring; PR: Durability/Fa-
ments which the equipment will experience during those
tigue)
activities. The system will predict environments using
Fisk, W.M., Energy Savings from Demand-Controlled Fil-
embedded engineering algorithms (i.e., models). The cur-
tration, V. 39, No.6, p. 21, 1996. (Abstract—see Faulkner, rent focus of MERIT is external stores (missiles, pods,
D.) bombs) carried by fighter/attack aircraft. This paper
Fong, M.C., Prediction of Particulate Contamination on an describes predictive models for captive flight acoustic
Aperture Window, V. 39, No. 2, p. 42, 1996. (Abstract— noise and vibration environments during aircraft straight
see Lee, A.L.) and level flight. Results of predictions provide a more
Frye, G.C., Development and Evaluation of On-Line Detec- detailed representation of measured flight data than that
tion Techniques for Polar Organics in Ultrapure Water, V. possible in MIL-STD-810E. (DTE: Acoustics, Shock and
39, No.5, p. 30, 1996. An on-line monitor that can perform Vibration, Test Tailoring)
rapid trace detection of polar organics such as acetone Henderson, P.G., What Is the Shelf Life of Electronic
and isopropanol in ultrapure water (UPW) is necessary to Specialty Gases?, V. 39, No. 5, p. 23, 1996. (Abstract—
efficiently recycle water in semiconductor manufacturing see Fine S.M.)
facilities. The detection of these analytes is problematic Hine, M.J., Transient Synthesis Using a Fourier Transform
due to their high solubility in water, resulting in low
Envelope, V. 39, No. 5, p. 17, 1996. Transient vibration
partitioning into sensor coatings for direct water analysis tests offer an alternative to the conventional swept-sine
or into the vapor phase for detection by vapor phase
vibration test, with controllable conservatism. A method
analyzers. After considering various options, two conven-
of deriving a single vibration test transient from several
tional laboratory techniques have been evaluated: gas
spacecraft flight transients is described. These transients
chromatography and ion mobility spectroscopy. In addi-
were from different physical locations on the spacecraft.
tion, optimizations of sensor coating materials and sample
The test transient was derived by taking the inverse
preconditioning systems were performed with the goal of
Fourier transform of an envelope of the Fourier trans-
a low-cost, chemical sensor system for this application.
forms of the flight transients. The inverse transformation
Results from these evaluations, including recommenda-
was performed using the real and imaginary parts of that
tions for meeting the needs of this application, are re- Fourier transform forming the envelope amplitude at
ported. (CC: Identification, Measurement, and Monitor-
each frequency. The test transient therefore has the same
ing, Semiconductor Processing) frequency content and maximum amplitudes as the flight
Fujii, S., Particle Formation of Materials Outgassed from transients. A generic test transient was produced that
Silicone Sealants by Corona-Discharge Ionizers, V. 39, duplicates many operating conditions at separate physi-
No. |, p. 26, 1996. (Abstract—see Namiki, N.) cal locations. It could be applied to many different struc-
tural components of a spacecraft, simplifying a vibration
test program. The transient vibration test produces sig-
G
nificantly less overtest than a conventional swept-sine
Grant, D.C., Measurement of Inorganic Contaminant Ex- vibration test. (DTE: Shock and Vibration, Test Tailor-
traction from Fluid Handling Components by Dynamic ing)
Extraction, V.39, No. 2, p. 29, 1996. This paper addresses
Hjelle, M.A., Characteristics of an Ultrafiltered Deionized
the extraction of inorganic contamination from fluid han-
Water System Used in the Manufacture of Implantable
dling components into semiconductor process chemicals.
Biomedical Devices, V. 39. No. 4, p. 40, 1996. This paper
It presents a method of dynamic extraction that measures
demonstrates the characteristics of an ultrafiltered deion-
the rate at which inorganic contaminants are extracted
ized water system used in the manufacture of biomedical
from components as a function of time. The method over-
devices. The water system was designed to reduce product
comes many of the shortcomings of conventional tech-
concerns with respect to ionic contamination, organic
niques. It allows prediction of the amount of contamina-
contamination, and microbial contamination. The goal of
JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES
the system was to produce high-purity deionized water
that exceeded the requirements of USP pure water and L
meet the manufacturing requirements of electronic device Lee, A.L., Prediction of Particulate Contamination on an
assembly. This goal was achieved by using a compact Aperture Window, V. 39, No. 2, p. 42, 1996. This paper
design, select materials of construction, and robust pre- presents an analysis of light scattering by surface par-
treatment to reduce the burden to the ultrafiltration sys- ticles on the sensor window of a missile during ascent
tem. Continuous supply is delivered to all points of use flight. The particulate contaminant distribution on the
through balanced pressures within the system and without window is calculated by tallying the number of particles in
a bulk storage tank. System maintenance is reduced to a Set of size ranges. The particulate contamination at the
routine daily monitoring and sanitization once per month. end of the mission is predicted by adding the contributions
Detailed descriptions of the system design, system operat- from the events of ground and flight operations. The
ing conditions, and variable data are included to demon- surface particle redistribution caused by vibroacoustic-
strate system performance. (CC: Filters and Filtration, induced surface acceleration was found to contribute the
most to particulate surface contamination. The analytical
Semiconductor Processing)
surface obscuration calculation with a set of particle
Hollowell, B., A Proposed Method to Standardize Shock
counts was compared with the results of the image ana-
Response Spectrum (SRS) Analysis, V. 39, No. 3, p. 19,
lyzer measurement. (CC: Modeling and Simulation,
1996. (Abstract—see Smith, S.)
Sources and Effects; DTE: Acoustics)
Lemke, T., Measurement of Inorganic Contaminant Extrac-
K tion from Fluid Handling Components by Dynamic Ex-
Kinney, P.D., Particle Behavior in Vacuum Systems: Impli- traction, V. 39, No. 2, p. 29, 1996. (Abstract—see Grant,
D.C.)
cations for In-Situ Particle Monitoring in Semiconductor
Processing Equipment, V. 39, No. 6, p. 40, 1996. The flow Liu, B.Y.H., Particle Behavior in Vacuum Systems: Implica-
of aerosol in vacuum conditions representative of many tions for In-Situ Particle Monitoring in Semiconductor
semiconductor processes (100 sccm, I Torr). was studied. Processing Equipment, V. 39, No. 6, p. 40, 1996. (Ab-
It was performed using aerosols with highly nonuniform stract—see Kinney, P.D.)
spatial distributions. An ideally nonuniform aerosol was
produced by generating an aerosol beam using an aero- M
dynamic lens. The flow containing the aerosol beam was
MacGibbon, B.S., Feasibility of an In-Situ Particle Monitor
drawn through vacuum system components. The size of the
on a Tungsten LPCVD Reactor, V. 39, No. 3, p. 25, 1996.
beam was measured upstream and downstream of these
(Abstract—see Fardi, B.)
components by collecting the aerosol on a filter and
Moghadan,, F., Feasibility of an In-Situ Particle Monitor on
observing the deposition pattern. Very little mixing phe-
a Tungsten LPCVD Reactor, V. 39, No. 3, p. 25, 1996.
nomenon was observed. These results point to a potential
(Abstract—see Fardi, B.)
limitation in the methods employed by the semiconductor
Mok, Y.L., Optimizing Environmental Stress Screening
industry for in-situ particle monitoring in vacuum sys-
tems. A simple solution to this flaw is suggested. (CC: Using Mathematical Programming, V. 39, No. 3, p. 37,
Modeling and Simulation, Semiconductor Processing) 1996. Environmental stress screening (ESS) is widely
used in the electronics industry as a means of removing
Kostic, A.D., Environmental Stress Screening for a Mas-
early failures. Itis a process that calls for proper planning
sively Parallel Vision Computer, V. 39, No. 2, p. 38, 1996.
because inadequate duration is ineffective and prolonged
A massively parallel vision computer system was having
screening can incur unnecessary costs. This paper de-
field reliability problems associated with CMOS Pro-
scribes an approach that uses mathematical program-
grammable Logic Array. The manufacturer’s existing
ming to ensure that the right amount of screening is in
ESS program was ineffective for removing the product
place at each assembly level. Factors considered are
defects. The supplier of the devices was unable to identify
screening cost and desired operational reliability. (DTE:
the failure mechanism. The root cause of the problem was
Climatics and Thermal, Test Tailoring; PR: Stress Screen-
assumed based on information from parts of similar
ing)
technology. An ESS program was developed using avail-
able equipment and resources. The ESS process reduced Mowry, C.D., Development and Evaluation of On-Line
field returns from a high of 45 percent to less than 1 Detection Techniques for Polar Organics in Ultrapure
percent. Quiescent current screening was developed and Water, V. 39, No. 5, p. 30, 1996. (Abstract—see Frye,
implemented as part of a part-level screening process. G.C.)
Long-term corrective actions were identified, and the
system level screening process was further improved to N
reduce cost and increase effectiveness. (DTE: Climatics
Namiki, N., Particle Formation of Materials Outgassed from
and Thermal; PR: Reliability Achievement, Stress Screen- Silicone Sealants by Corona-Discharge lonizers, V. 39,
ing) No. 1, p. 26, 1996. Particle formation of LMCS (low-
Krech, R.H., Laboratory Simulation of Low Earth Orbit molecular-weight poly-cyclo-dimethyl-siloxane) out-
(LEO) Atomic Oxygen Effects, V. 39, No. 2, p. 23, 1996. gassed from silicone sealants by a corona-discharge
(Abstract—see Caledonia, G.E.) ionizer was studied by measuring the number concentra-
NOVEMBER/DECEMBER 1996 59
tion and size distribution off ormed particles as well as by Space Station Truss Segments, V. 39, No. 5, p. 38, 1996.
qualitative analyses off ormed particles with FT-IR (Fou- Statistical energy analysis (SEA) was performed on mod-
rier transformation infrared spectroscopy). The influence els of International Space Station (ISS) truss segments.
of humidity and oxygen was investigated to find the These segments are large truss structures built up from I-
reaction mechanisms. It was found that the LMCS is beam members. The purpose of this analytical program is
polymerized to form particles with two different reaction to determine the random vibration environment for equip-
paths and that the LMCS is one of the major species that ment mounted on these segments. The equipment is mounted
contribute to the formation of silicone-containing par- to secondary structural built-up plates in most instances.
ticles in cleanroom environments. (CC: Modeling and In general, the secondary structure is more rigid than
Simulation, Sources and Effects) typical aerospace structures because of the large spans
between the primary truss members. This presents a
Normandy, R.P., Vibration Design Criteria for COTS-Based
C*I Systems, V. 39, No. 6, p. 28, 1996. This paper challenge to the SEA methodology because of the low
describes results of a planned comprehensive test pro- modal density of both the primary and the secondary
gram to identify the realistic dynamic environment com- structure, and novel approaches to the problem were
mercial off-the-shelf (COTS) equipment will experience identified. The need to test verify these modeling ap-
when utilized in Military Ground Mobile Command Con- proaches was apparent. On the previous Space Station
Freedom program, a developmental vibroacoustic test of
trol, Communication, Computer, and Intelligence (C*1)
systems housed in DoD Standard Family Tactical Shel- a space station-like truss segment was conducted. The
ters. COTS equipment are generally designed for office development test specimen was modeled in a similar
use and lack robustness for military use in a ground manner to the ISS segments and predicted responses were
mobile tactical environment. A realistic dynamic design compared with test data. This paper discusses the model-
criteria must be utilized for an appropriate mounting and/ ing methods determined to be effective for these struc-
or isolation system design in the integration of a shelter. tures. (DTE: Shock and Vibration)
Acceleration spectral density functions are described to Smith, S., A Proposed Method to Standardize Shock Re-
assist the designer in providing a COTS-based, surviv- sponse Spectrum (SRS) Analysis, V. 39, No. 3, p. 19,
able, cost-effective ground mobile tactical shelter-based 1996. Discussions among practitioners of the shock-test-
C/I System. (DTE: Automotive/Transportation, Shock ing art and a series of round robins have shown that the
and Vibration, Test Tailoring; PR: Acquisition Policies) results obtained from mechanical shock experiments per-
formed in different laboratories vary widely. To empha-
O size the problem, it has been found that different genera-
Oakes, D.B., Laboratory Simulation of Low Earth Orbit tions of hardware/software systems from one of the major
(LEO) Atomic Oxygen Effects, V. 39, No. 2, p. 23, 1996. system vendors produce results that disagree by up to 30
(Abstract—see Caledonia, G.E.) percent. A 1995 paper described a study that examined
some of the critical parameters that affect shock response
Otani, Y., Particle Formation of Materials Outgassed from
Silicone Sealants by Corona-Discharge Ionizers, V. 39, spectrum (SRS) results and reported on their use by some
of the practitioners in the field. The paper showed that
No. 1, p. 26, 1996. (Abstract—see Namiki, N.)
parameters such as anti-alias filter characteristics, ac-
coupling strategies, and analysis algorithm/strategy can
P
strongly affect the results and that they are not uniformly
Powell, N., Measurement of Inorganic Contaminant Extrac-
applied by system suppliers or users. This paper discusses
tion from Fluid Handling Components by Dynamic Ex-
the problem further and presents an analytical procedure
traction, V. 39, No. 2, p. 29, 1996. (Abstract—see Grant,
that may be applied to achieve agreement between the
D.C.)
data sets acquired and analyzed by different laboratories.
Prvan, T., Cleanroom Mats: An Investigation of Particle (DTE: Criteria and Standards, Shock and Vibration)
Removal,V .39, No. 4, p. 19, 1996. (Abstract—see White,
W.) T
Pui, D.Y.H., Particle Behavior in Vacuum Systems: Implica- Tripathi, S., Feasibility of an In-Situ Particle Monitor on a
tions for In-Situ Particle Monitoring in Semiconductor Tungsten LPCVD Reactor, V. 39, No. 3, p. 25, 1996.
Processing Equipment, V. 39, No. 6, p. 40, 1996. (Ab-
(Abstract—see Fardi, B.)
stract—see Kinney, P.D.)
Ww
S Wallace, R., Environmental Stress Screening for a Mas-
sively Parallel Vision Computer, V. 39, No. 2, p. 38, 1996.
Schneider, T.W., Development and Evaluation of On-Line
Detection Techniques for Polar Organics in Ultrapure (Abstract—see Kostic, A.D.)
Water, V. 39, No. 5, p. 30, 1996. (Abstract—see Frye, Walton, J.T., Energy Savings from Demand-Controlled
G.C.) Filtration, V. 39, No. 6, p. 21, 1996. (Abstract—see
Shields, T., Cleanroom Mats: An Investigation of Particle Faulkner, D.)
Removal, V. 39, No.4, p. 19, 1996. (Abstract—see Whyte, Wang, H.-C., Measurements of Impurities in Liquids with a
W.) Nonvolatile Residue Monitor, V. 39, No. 1, p. 21, 1996.
Smith, L.G., Statistical Energy Modeling Techniques for (Abstract—see Xu, M.)
60 JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES
Whyte, W., Cleanroom Mats: An Investigation of Particle
Removal, V. 39, No. 4, p. 19, 1996. The variables that Guidelines for Authors
influence the particle removal efficiency of cleanroom
mats was investigated. The removal efficiency was gener- The editors of the Journal of the Institute of Environmental Sciences
ally found to be greater if the mat was of a softer type, the solicit your technical paper for publication. We are interested in previ-
particles, smaller, the particle size distribution more ously unpublished works in the following categories:
homogeneous, the distance between the particles greater, ¢ Original Research/Experimentation.
and the adhesive strength of the mat surface greater. One ¢ Technical Philosophy in Current Testing Trends.
application of a mat surface was sufficient to remove alow
¢ Summaries or Condensations of Significant Published Government
concentration of similarly sized particles from a surface Reports.
but it could require up to four mat surfaces to remove a
Unique Facilities.
high concentration of heterogeneously sized particles. It
Applications of Instrumentaticn and New Technology to Environ-
was found that, with heterogeneously sized particles, the
mental Testing.
larger particles were removed first, thus allowing access
Title: Must be descriptive but concise.
to the smaller particles that could then be removed. If the
mat was soft, it allowed larger particles to sink into it and Keywords: Assign up to six keywords that identify the major technical,
administrative, or philosophical thrusts of the paper.
smaller particles than normal to be picked up. (CC:
Cleanroom Design/Materials, Cleanroom Operations/Pro- Abstract: The highlights of the paper, including basic purpose of
problem and nature of approach, content, and key findings, should
cedures)
be summarized in one paragraph.
Wilkes, D., Measurement of Inorganic Contaminant Extrac-
Length and Format: Papers must be 10 to 25 pages double-spaced. We
tion from Fluid Handling Components by Dynamic Ex-
prefer that paper be submitted on a computer disk along with a hard
traction, V. 39, No. 2, p. 29, 1996. (Abstract—see Grant, copy. (Please specify which software you are using.)
D.C.)
Content: Although the specific content of the paper will be determined
Woodworth, J., A Maturity Metric for Accelerated Testing by the particular subject matter, as a minimum, the following must
of Complex Subsystems and Assemblies, V. 39, No. 1, p. be included.
41, 1996. (Abstract—see Ellner, P.M.) Sufficient background material to describe circumstances surround-
ing the issue discussed or the need for the work performed.
x Explanation of and rationale behind all assumptions made.
Xie, M., Optimizing Environmental Stress Screening Using Sufficient technical detail, including data, references, test equip-
ment, and procedures to demonstrate the validity of the work
Mathematical Programming, V. 39, No. 3, p. 37, 1996.
performed or conclusions drawn.
(Abstract—see Y.L. Mok)
Clearly identified conclusions with supporting rationale and associ-
Xu, M., Measurements of Impurities in Liquids with a ated recommendations where appropriate.
Nonvolatile Residue Monitor, V. 39, No. 1, p. 21, 1996.
9 A brief summary to establish or reinforce reader perspective.
This paper discusses how a nonvolatile residue monitor
(Particle Measuring Systems, Boulder, Colorado) was Acronyms/Special Terms: All acronyms, abbreviations, special terms,
used to measure residues in isopropyl alcohol, tap water, and phrases must be defined and explained.
and solutions prepared by dissolving different salts in Equations: All equations and formulae must be numbered consecu-
deionized (DI) water. The instrument was operated in the tively. All variables and terms must be clearly identified.
batch and on-line modes mostly with the heater on. The Units: “Soft metric” dimensions and other units of measurement should
be used. The metric value must be followed by its English equivalent
manufacturer’s calibration was confirmed with KCl solu-
in parentheses.
tions of different concentrations. The results show that the
References: All references must be numbered consecutively, listed at
instrument responded linearly to the concentration change
the end of the paper, and referenced in appropriate locations in the
of solutes in DI water and had excellent repeatability. text.
However, the instrument’s response depends strongly on
Illustrations: All illustrations must be accompanied by a figure number
the solutes. (CC: Identification, Measurement, and Moni- and a complete caption. Extra detail in the captions is encouraged to
toring) highlight illustration features.
Photographs must be sharp black and white prints no smaller than 13
x 18cm(5 x7 in.). Blurred, poor contrast, or visually uninformative
Y
photographs will be rejected.
Yowell, L., Vibration Design Criteria for COTS-Based C41
Drawings, charts, and graphs should be clear black and white, camera-
Systems, V. 39, No. 6, p. 28, 1996. (Abstract—see
ready line art. Labels typed with conventional typeface are not
Normandy, R.P.) ® acceptable. Computer print-outs (unless used to demonstrate format
features) and conventional engineering blueprints are not accept-
able.
° Ca)ifornial Biography: Approximately 100 words describing the author’s educa-
tion, background, experience, and other pertinent qualifications.
Biography should be submitted with paper.
Institute ofE nvironmenSctieanlce s
43rd Annual Technical Meeting & Exposition
Send three copies of the manuscript to: Editor, Institute of Environmen-
May 4-8, 1971 tal Sciences, 940 East Northwest Highway, Mount Prospect, IL 60056;
Los Angeles Airport Hilton and Towers Phone: [phone]; Fax: [phone]
NOVEMBER/DECEMBER 1996