Introduction to Microelectromechanical Microwave Systems

235 Pages·2004·3.13 MB·English

by  Hector J. De Los Santos

Introduction to
Microelectromechanical
Microwave Systems
SecondEdition
ForalistingofrecenttitlesintheArtechHouseMicroelectromechanical
Systems(MEMS)Series,turntothebackofthisbook.
Introduction to
Microelectromechanical
Microwave Systems
SecondEdition
Héctor J. De Los Santos
Artech House
Boston (cid:127) London
www.artechhouse.com
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ISBN1-58053-871-1
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©2004ARTECHHOUSE,INC.
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Contents
Preface xi
Acknowledgments xxi
1 MicroelectromechanicalSystems 1
1.1 MEMSOrigins 1
1.2 MEMSImpetus/Motivation 3
1.3 MEMSFabricationTechnologies 3
1.3.1 ConventionalICFabricationProcess 4
1.3.2 BulkMicromachining 5
1.3.3 SurfaceMicromachining 6
1.3.4 FusionBonding 12
1.3.5 LIGAandSacrificialLIGA 14
1.3.6 HybridMicromachiningProcesses 14
1.4 Exercises 18
1.5 Summary 21
References 21
2 FundamentalMEMSDevicePhysics 25
2.1 Actuation 25
2.1.1 ElectrostaticActuation 26
2.1.2 PiezoelectricActuation 35
2.1.3 ThermalActuation 36
vii
viii IntroductiontoMicroelectromechanicalMicrowaveSystems
2.1.4 MagneticActuation 39
2.2 MechanicalVibrations 40
2.2.1 TheSingle-Degree-of-Freedom-System 41
2.2.2 TheMany-Degrees-of-FreedomSystem 42
2.2.3 Rayleigh’sMethod 43
2.3 Computer-AidedDesignofMEMS 46
2.3.1 MEMSMaterialsandFabricationProcess
Modeling 47
2.3.2 SolidModeling 47
2.3.3 NumericalSimulationofMEMS 47
2.4 Exercises 51
2.5 Summary 53
References 55
3 FundamentalMEMSDevices:TheMEMSwitch 59
3.1 Introduction 59
3.2 TheCantileverBeamMEMSwitch 59
3.3 MEMSwitchDesignConsiderations 61
3.3.1 SwitchSpecifications 61
3.3.2 MicrowaveConsiderations 66
3.3.3 MaterialConsiderations 70
3.3.4 MechanicalConsiderations 76
3.4 Summary 83
References 84
4 FundamentalMEMSDevices:TheMEMResonator 87
4.1 Introduction 87
4.2 TheCantileverBeamMEMResonator 87
4.3 MEMResonatorDesignConsiderations 89
4.3.1 ResonatorSpecifications 89
4.3.2 MicrowaveConsiderations 89
4.3.3 MicromechanicalResonatorLimitations 106
4.3.4 FilmBulkAcousticWaveResonators 110
4.4 Exercises 115
4.5 Summary 117
References 118
Contents ix
5 MicrowaveMEMSApplications 121
5.1 Introduction 121
5.2 MEMSwitches 122
5.2.1 CoplanarCantileverBeamMEMSwitch
PerformanceAnalysis 122
5.2.2 ElectrostaticSeriesCantileverBeam
MEMSwitch 123
5.2.3 ElectrostaticShuntCantileverBeam
MEMSwitch 127
5.2.4 Thermal-ElectrostaticMEMSwitch 132
5.2.5 MagneticMEMSwitch 135
5.3 Micromachining-EnhancedPlanarMicrowave
PassiveElements 138
5.3.1 MicromachinedTransmissionLines 140
5.3.2 Micromachining-EnhancedLumpedElements 152
5.4 Summary 168
References 168
6 MEMS-BasedMicrowaveCircuitsandSystems 173
6.1 Introduction 173
6.2 WirelessCommunicationsSystems 175
6.2.1 FundamentalsofWirelessCommunications 175
6.2.2 FundamentalsofSatelliteCommunications 180
6.3 MEMS-BasedRFandMicrowaveCircuits 183
6.3.1 PhaseShifters 183
6.3.2 Resonators 184
6.3.3 Filters 186
6.3.4 Oscillators 199
6.3.5 Packaging 202
6.4 Summary 204
References 205
Glossary 209
AbouttheAuthor 211
Index 213
.