Integrated Optics, Microstructures, and Sensors

404 Pages·1995·4.193 MB·English

by  Massood Tabib-Azar (auth.)

INTEGRATED OPTICS,
MICROSTRUCTURES, AND SENSORS
THE KLUWER INTERNATIONAL SERIES
IN ENGINEERING AND COMPUTER SCIENCE
INTEGRATED OPTICS,
MICROSTRUCTURES, AND
SENSORS
by
Massood Tabib-Azar
Case Western Reserve University
Cleveland, Ohio
~.
"
SPRINGER SCIENCE+BUSINESS MEDIA, LLC
Library of Congress Cataloging-in-Publication Data
A C.I.P. Catalogue record for this book is available
from the Library of Congress.
ISBN 978-0-7923-9621-5 ISBN 978-1-4615-2273-7 (eBook)
DOI 10.1007/978-1-4615-2273-7
Copyright <Q 1995 Springer Science+Business Media New York
Originally published by Kluwer Academic Publishers in 1995
Softcover reprint ofthe hardcover lst edition 1995
Ali rights reserved. No part of this publication may be reproduced, stored in
a retrieval system or transmitted in any form or by any means, mechanical,
photo-copying, recording, or otherwise, without the prior written permission of
the publisher, Springer Science+Business Media, LLC.
Printed on acid-free paper.
CONTENTS
Preface xi
Introduction xv
Section I: Integrated Optics
Introduction 3
Chapter 1 Two and One Dimensional Dielectric Wave Guides
M. Tabib-Azar 5
1.1 Three Layer Slab Waveguide 8
1.2 Four layer Structures 20
1.3 Five-Layer Structures 25
1.4 Multilayer Structures 26
1.5 One-Dimensional Waveguides 29
1.6 Coupled Mode Theory 34
1.7 Waveguide Transitions and Local Mode Theory 36
1.8 Diffused Waveguides 40
1.9 Anti-Resonant Reflecting Optical Waveguides 40
1.10 Numerical Methods 42
1.11 References 43
Chapter 2 Optical Properties of Materials
M.J. Wu 45
2.1 Fundamental Optical Properties of Materials 46
2.2 Electro-Optic and Nonlinear Optical Materials 49
2.3 Magneto-Optic Effect 50
2.4 Mechanical Index Control 51
2.5 Optical Devices with Active Waveguides 52
2.5.1 Electro-Optic Devices 53
2.5.2 Elasto-Optic Devices 59
2.5.3 Acousto-Optic Devices 60
2.5.4 Magneto-Optic Devices 62
2.5.5 Thermo-Optic Devices 65
2.6 References 67
vi
Section I: Integrated Optics (Continued)
Chapter 3 Passive Optical Devices
M. Tabib-Azar 71
3.1 Beam Expanders 71
3.2 Optical Couplers and Beam Adders 72
3.3 Y-Junctions and Beam Splitters 74
3.4 Phase Modifiers 75
3.5 Guided TE and TM Wave Polarizer 77
3.6 Multiplexers, Filters, and Resonators 78
3.7 Two-Dimensional Lenses 88
3.8 Fiber Optic and Free-Space to Waveguide Couplers 92
3.9 References 95
Chapter 4 Active Optical Devices
M. Tabib-Azar 99
4.1 Detectors 99
4.2 Light sources 105
4.3 Light Amplifiers 107
4.4 Modulators, and Switches 108
4.5 References 114
Chapter 5 Complete Waveguide Structures
M.J. Wu 117
5.1 Transfer Matrices of Passive Waveguide Devices 119
5.2 Examples of Passive Waveguide Structures 126
5.3 Examples of Active Waveguide Structures 132
5.4 References 139
vii
Section II: Microstructures and Fabrication Methods
Introduction 145
Chapter 1 Fabrication of Microstructures
M. Tabib-Azar 147
1.1 Common Fabrication Steps 147
1.2 Bulk Micromachining 154
1.3 Surface Micromachining 158
1.4 References 160
Chapter 2 Fabrication of Integrated Optics
M. Tabib-Azar 165
2.1 Waveguide Formation 165
2.2 Anti-Resonant Reflecting Optical Waveguides 175
2.3 Fabrication of Passive Integrated Optic Devices 176
2.4 Fabrication of Optoelectronic Devices 181
2.5 Fabrication of Free-Space Micro Optical Devices 184
2.6 Fabrication of Micromachined AIGaAslGaAs Sensors 186
2.7 References 188
Chapter 3 Mechanics of Deformable Silicon Microstructures
M. Tabib-Azar 193
3.1 Elastic Constants of Micromachined Structures 193
3.2 Micro-Cantilever Beams 195
3.3 Microbridges 198
3.4 Diaphragms 200
3.5 Torsional Mirrors 202
3.6 Other Structures 204
3.7 References 204
viii
Section III: Optical Sensors
Introduction 209
Chapter 1 Sensing Means and Sensor Shells
A. Garcia-Valenzuela, and M. Tabib-Azar 211
1.1 Sensor Structures 211
1.2 Sensing Means 214
1.3 Sensor Shells 233
1.4 References 233
Chapter 2 Integrated and Fiber Optics Sensors
M. Tuma 237
2.1 Intensity Modulation Schemes 238
2.2 Phase Modulation 242
2.3 Wavelength Modulation 248
2.4 Polarization Modulation Schemes 252
2.5 TimelFrequency Modulation Schemes 254
2.6 Summary 258
2.7 References 259
Chapter 3 Force, Displacement, and Acceleration Sensors
A. Garcia-Valenzuela, and M. Tabib-Azar 267
3.1 Force and Displacement Sensors 267
3.2 Accelerometers 276
3.3 References 282
Chapter 4 Optical Temperature Sensors
G. Beheim 285
4.1 Optically emissive, thermally powered sensors 287
4.2 Optically emissive, optically powered sensors 290
4.3 Non-emissive, intensity modulating sensors 295
4.4 Distributed sensors 307
4.5 Conclusion 309
4.6 References 310
ix
Section III: Optical Sensors (Continued)
Chapter 5 Optical Chemical Sensors
S. Amartur, A. Garcia-Valenzuela, and M. Tabib-Azar 315
5.1 Guided Optics Intrinsic Chemical Sensors 318
5.2 Extrinsic Chemical Sensors 325
5.3 Polymer Waveguide Chemical Sensors 328
5.4 Surface Plasmon Chemical Sensors 328
5.5 Indicator-Mediated Extrinsic Sensing 330
5.6 Optical Biosensors 335
5.7 Intelligent Sensors 336
5.8 Conclusion 341
5.9 Fteferences 341
Chapter 6 Sensor Design Examples and Additional Considerations
M. J. Wu, and M. Tabib-Azar 347
6.1 Comparison of Fiber and Integrated Optics 348
6.2 Pressure Sensors 350
6.3 Doppler Velocimeter 355
6.4 Temperature Sensor 357
6.5 Humidity Sensor 358
6.6 Chemical Sensors 359
6.7 Fteferences 361
Chapter 7
Comparison Between Electric, Magnetic, and Optical Sensors
A. Garcia-Valenzuela, and M. Tabib-Azar 365
7.1 Electrical Sensing Means 366
7.2 Magnetic Field Methods 377
7.3 Optical Methods 379
7.4 Fteferences 389
Index 393
PREFACE
Controlling the mechanical, electrical, magnetic, and optical
properties of materials by advanced fabrication methods (Le.;
Molecular Beam Epitaxy and Metal-Organic Chemical Vapor
Deposition) has become the new paradigm in our research era.
Sensors, being the most vital part of the electronic data processing
and decision making machines, stand to gain the most from engineering
of the properties of materials. Microfabrication technology has already
contributed significantly to the batch fabrication of micro-sensors with
higher over all qualities compared to their counterparts that are
fabricated using other methods. Batch fabrication of micro-sensors i)
results in more uniform properties of co-fabricated devices, ii) nearly
eliminates the need for characterization of individual sensors, and iii)
eliminates a need for laborious alignment procedures. A less obvious
benefit of using microfabrication methods is the possibility of precise
control over the dimensions of the sensor. This control enables
engineering of some of the properties of the material which affect the
sensor's operation. There are many examples of this in the literature.
Optical sensors are known to have superior properties over their
counterparts that use other (i.e.; electrostatic and magnetic) means of
detection. To name a few, these advantages are: i) immunity to
electromagnetic interferences, ii) higher sensitivities compared to the
other types of sensors, iii) simplicity of operation principles, and iv)
simplicity of overall construction. However, optical sensors suffer from
few drawbacks namely: i) sensitivity to undesirable environmental
parameters, and ii) they need elaborate alignment and calibrations that
increase their cost. These drawbacks can be minimized if optical
sensors are manufactured using micro fabrication technologies where
different components of the sensor are fabricated using silicon or other
suitable materials (GaAs, InP, etc.). This eliminates the elaborate
alignments and, because of the possibility of batch fabricating sensors,
it reduces the sensor cost.