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~IEEE TRAN SACTI 0 NS ON MICROWAVE THEORY AND TECHNIQUES A PUBLICATION OF THE IEEE MICROWAVE THEORY AND TECHNIQUES SOCIETY JANUARY 1996 VOLUME 44 NUMBER 1 IETMAB (ISSN 0018-9480) Editorial . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ............................................. R. J. Trew PAPERS Complete Sliced Model of Microwave FET' s and Comparison with Lumped Model and Experimental Results ........ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A. Abdipour and A. Pacaud 4 A New Reciprocity Theorem ................................................................................. J. C. Monzon 10 A Joint Vector and Scalar Potential Formulation for Driven High Frequency Problems Using Hybrid Edge and Nodal Finite Elements ........................................................................... R. Dyczij-Edlinger and 0. Biro 15 Statistical Computer-Aided Design for Microwave Circuits ...................................... J. Carroll and K. Chang 24 Propagation Characteristics of Superconducting Microstrip Lines .................. S.-G. Mao, J.-Y. Ke, and C. H. Chen 33 Minimization of Reflection Error Caused by Absorbing Boundary Condition in the FDTD Simulation of Planar Transmission Lines ......................................................................... K. Naishadham and X. P. Lin 41 FET Statistical Modeling Using Parameter Orthogonalization ..... J. Carroll, K. Whelan, S. Prichett, and D. R. Bridges 47 Coaxial Cavities with Corrugated Inner Conductor for Gyrotrons .............. C. T. Iatrou, S. Kern, and A. B. Pavelyev 56 Coupling Phenomena in Concentric Multi-Applicator Phased Array Hyperthermia Systems ............................. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ·. ............................................... K. S. Nikita and N. K. Uzunoglu 65 Analytically and Accurately Determined Quasi-Static Parameters of Coupled Microstrip Lines .................. C. Wan 75 A Compact Model for Predicting the Isolation of Ports in a Closed Rectangular Microchip Package ...... H. M. Olson 81 Recursive Mode Matching Method for Multiple Waveguide Junction Modeling ............ 0. P. Franza and W. C. Chew 87 Dual-Tone Calibration of Six-Port Junctio · and Its Application to the Six-Port Direct Digital Millimetric Receiver .... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . J. Li, R. G. Bosisio, and K. Wu 93 Microwave Inductors and Capacitors in Standard Multilevel Interconnect Silicon Technology .......................... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . J. N. Burghartz, M. Soyuer, and K. A. Jenkins 100 Automated E-Field Scanning System for Dosimetric Assessments .................. T. Schmid, 0. Egger, and N. Kuster 105 Small-Signal Characterization of Microwave and Millimeter-Wave HEMT's Based on a Physical Model ............. .. . . . . . . . . . : .................... ................................................. R. Singh and C. M. Snowden 114 (Continued on back cover) IEEE MICROWAVE THEORY AND TECHNIQUES SOCIETY The Microwave Theory and Techniques Sociely I!<. an orgam1.ation. within the framework of the IEEE. of members wi1h principal profession.ii intcrc:-.t\ in the field of microwave theory and techniques. All members of the IEEE arc eligible for membership in 1he Society and will receive this TRANSACTIONS upon payment of the annual Society membership fee of $8.00 plus an annual 'IUbscription fee of S 13.00. For information on joining. write to the IEEE at lhe addres"i below. Memher copier of Transactians/Jmmwls are for personal 11se on/\'. ADMINISTRATIVE COMMITTEE E. D. COHEN. Presidem M. A. MAURY. JR .. Vice President R. W. BIERIG. Secretarv D. G. SWANSON. Treasurer J. T. BARR M.GOLIO T. KEMERLEY M. SCHINDLER J. W WASSEL R. E. BRYAN D. HORNBUCKLE R. POLLARD R. SUDBURY D. WEBB S. J. FIEDZIUSZKO R.H. JANSEN E. A. REZEK G. THOREN E. YAMASHITA Honorary Life Members Distinguished Lecturers Past Presidents A. C. BECK T. S. SAAD W. CURTICE V. RIZZOLI E. J. CRESCENZI ( 1994) S. B. COHN K. TOMIYASU P. GOLDSMITH J. R. WHINNERY P. W. STAECKER (1993) T. ITOH L. YOUNG F. !VANEK R. S. KAGIWADA (1992) A. A. OLINER S-MTT Chapter Chairmen Albuquerque: D. T. MCGRATH Hungary: I. FRIGYES Santa Clara Valley/San Francisco: S. CRIPPS Atlanta: A. F. PETERSON Huntsville: H. L. BENNETT Schenectady: R. J. GUTMANN Baltimore: J. A. MOELLERS India: S. K. KOUL Seattle: W. CHARCZENKO Beijing: W. LIN Indonesia: s. NATANAGARA Singapore: M.-S. LEONG W. X. ZHANG Israel: A. MADJAR South Africa: D. B. DAVIDSON Benelux: K. V AN"T KLOOSTER Kitchener-Waterloo: Y. L. CHOW South Australia: B. D. BATES Buffalo: M. R. GILLETTE A. NATHAN South Brazil: A. 0. M. ANDRADE Central Iowa/Cedar Rapids: J. COZZIE Korea: J. S. MYUNG Southeastern Michigan: J. W. BURNS Central & South Italy: 0. M. BUCCI Los Angeles: T. C. SHISHIDO Spain: M. SALAZAR-PALMA Central New England/Boston: P. H. CARR Milwaukee: J. RICHIE Springfield: K. M. LAU Central Virgina: S. H. JONES Montreal: G. L. YIP St. Louis: R. W. KIEFEL Chicago: E. G. BOGUS New Hampshire: R. 0. GEOFFROY Sweden: J. F. JOHANSSON Cleveland: K. B. BHASIN New Jersey Coast: E. COLLETT Switzerland: W. BACHTOLD College Station: R. 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JOCANOVIC IEEE TRANSACTIONS® ON MICROWAVE THEORY AND TECHNIQUES Editor Associate Editors R. J. TREW EJKJCHI YAMASHITA FAZAL ALI LINDA KATElll Case Wastern Reserve Univ. (Electromagnetics/Guided Waves) (Applications, Tutorial, and Review) (Special Issues and Invited Papers) EEAP Department The University of Electro-Communications Westinghouse Electric Corporation University of Michigan 516 Glennan Bldg. Department of Electronic Engineering Advanced Technology Labs. EECS Department Cleveland, OH 44106-7221 1-5-1 Chofugaoka MS-3Kll, P.O. Box 1521 3240 EECS Bldg. Phone: (216) 368-4089/4088 Chofu-shi Baltimore, MD 21203 1301 Beal Avenue Fax: (216) 368-2668 Tokyo 182 JAPAN Phone: (410) 765-4540 Ann Arbor, Ml 48109-2122 email: [email protected] Phone: +81-424-83-2161, ext. 3321 Fax: (410) 765-7370 Phone: (313) 747-1796 Fax: +81-424-41-2588 email: [email protected] Fax: (313) 747-2106 email: [email protected] email: [email protected] THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, INC. 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Manuscripts dealing with applications may be submitted to Fazal Ali, Westinghouse Electric Corp., Advanced Technology Labs, MLS-3Kl 1, P.O. Box 1521, Baltimore, MD.; tel: 410-765-4540; fax: 410-765-7370; e-mail: [email protected]. Manuscripts dealing with special issues and invited papers may be submitted to Dr. Linda Katehi, University of Michigan, EECS Department, 3240 EECS Bldg., 1301 Beal Ave., Ann Arbor, MI 48109-2122; tel: 313-747-1796; fax: 313-747-2106; e-mail: [email protected]. Authors must adhere to the following procedure guidelines; failure to do so will result in delays in processing the manuscript. For stylistic information please consult the publication, Information for IEEE Transactions and Journal Authors, available upon request from IEEE Publishing Services, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08854 USA. 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The preferred word processors include TeX, LaTeX, and Troff programs, but Word, WordPerfect, and other programs are acceptable, although the equations will be re-keyed into a TeX format at IEEE. Figures, photos, etc., must be submitted in a camera-ready form not in an electronic form. Photos should be black-and-white glossies. Page Charges Papers will be reviewed for their technical merit, and decisions to publish will be made independently of an author's ability to pay page charges. Page charges of $110 (U.S.) per printed page will be rested of papers of five printed pages or less. Overlength page charges of $200 per page are mandatory for each page in excess of five pages. If the author's organization agrees to honor the total page charge, which included the page charges on the first five pages plus the mandatory overlength charge, the author will receive 100 reprints. If the supporting organization honors only the mandatory charge, no free reprints will be sent. The editor can waive the mandatory page charges for reasons of hardship if a rest for waiver of these charges has been made in writing before the final version is submitted and if the paper has been reduced in length as suggested by the editor. Page charges for this TRANSACTIONS are not obligatory, nor is their payment a prerequisite for publication. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 44, NO. I, JANUARY 1996 Editorial I T'S AMAZING how fast time flies! It's been almost a During the past year, I have been monitoring the submis year now that I've been Editor of the IEEE TRANSACTIONS sions to determine the most effective way to make use of ON MICROWAVE THEORY AND TECHNIQUES. First, I want the Associate Editors. In reviewing the topic area of new to sincerely thank the previous editor, Dan Masse, for his submissions I have observed that more than half of all sub outstanding work on the journal. He left the journal in excellent missions are in the electromagnetics/guided wave/numerical shape and running smoothly. The quality and amount of work simulations areas. Therefore, a new Associate Editor for Elec he performed is truly amazing. The journal has been receiving tromagnetics/Guided Waves is being appointed to help manage about two new manuscripts per day and since each manuscript these manuscripts. I am pleased to announce that Prof. Eikichi goes to three reviewers, the volume of work quickly multiplies. Yamashita of the University of Electro-Communications in Second, I want to thank the members of ADCOM for their Tokyo, Japan, who is a well-known authority in this area, has confidence in me. I am pledged to maintain the high standards accepted the position. Authors may submit their manuscripts of the IEEE TRANSACTIONS ON MICROWAVE THEORY AND directly to Prof. Yamashita. TECHNIQUES and will work diligently to keep it the premier A new Associate Editor is also being appointed to manage journal for presentation of work in the microwave area. Last, applications papers. I am pleased to announce that Fazal Ali but certainly not least, I want to thank members of the from Westinghouse, Electronic Systems Group, Baltimore, Editorial Board for their efforts and cooperation. Reviewing is MD, has accepted the position of Associate Editor for Ap a time-consuming and sometimes unpleasant task. However, plications, Tutorial, and Review. Fazal's duties will involve the quality of the TRANSACTIONS is critically dependent upon identifying applications-oriented papers that address subjects the peer-review process, and it is only through the selfless of timeliness and importance. He will solicit Invited Papers, efforts of Editorial Board members that the high standards as well as accept contributed papers. If you have an idea for of the TRANSACTIONS can be maintained. Editorial Board a good paper in this area, please contact Mr. Ali and discuss members who actively reviewed during the previous year are it with him. listed on the back cover. Please take the time to thank them A third Associate Editor is being appointed to handle when you have the opportunity. Special Issues and Invited Papers. I am pleased to announce The main task at hand is to increase the effectiveness of the that Prof. Linda Katehi of the University of Michigan in TRANSACTIONS and to make it as useful as possible to the MTT Ann Arbor has accepted this position. We currently publish Society membership. The survey completed last year by the four Special Issues per year. The December issue is always Publicity and Public Relations Committee of ADCOM under dedicated to the annual IMS, but many of the other Special the Chairmanship of Glenn Thoren indicated that the MTT Issues are published in response to proposals received from the publications are the most important feature of membership membership. Dr. Katehi will plan and manage this activity. in the society. However, almost 22% of the respondents She will both solicit and accept ideas for Special Issues on expressed a need for some improvement. In particular, there timely subjects. She will also plan Invited Papers on important is strong sentiment that the TRANSACTIONS should publish topics. If you have ideas for Special Issues, or topics of general more applications-oriented papers. This is the guidance given interest that would be suitable for an Invited Paper please me by ADCOM, and this is a concept I support. The goal discuss them with Dr. Katehi. is to increase the number of applications-oriented papers, The new Associate Editors all have wide experience in while maintaining the high quality and archival nature of the the microwave area. All have been active contributors to the TRANSACTIONS. society in a variety of ways for an extended period. I am The IEEE TRANSACTIONS ON MICROWAVE THEORY AND very pleased that they have agreed to join me on the IEEE TECHNIQUES is truly an international journal. We receive man TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES uscript submissions from virtually every country on the planet, Editorial Staff. We are all pledged to make the TRANSACTIONS and the volume of international contributions is increasing. as useful to the society membership and profession as possible. Our reviewers and membership are located worldwide. As the Please join with me in welcoming the new Associate Editors TRANSACTIONS has grown in stature the volume of work has to their tasks. significantly increased. In recognition of this, ADCOM has ROBERT J. TREW approved the appointment of several new Associate Editors. Editor 0018-9480/96$05.00 © 1996 IEEE 2 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 44, NO. I, JANUARY 1996 Eikichi Yamashita (M'66-SM'79-F'84) was born in Tokyo, Japan, on February 4, 1933. He received the B.S. degree from the University of Electro-Communications, Tokyo, Japan, and the M.S. and Ph.D. degrees from the University of Illinois, Urbana, IL, USA, all in electrical engineering, in 1956, 1963, and 1966, respectively. From 1956 to 1964, he was a Member of the Research Staff on millimeter-wave engineering at the Electrotechnical Laboratory, Tokyo, Japan. While on leave from 1961 to 1963 and from 1964 to 1966, he studied solid-state devices in the millimeter-wave region at the Electro-Physics Laboratory, University of Illinois. He became Associate Professor in 1967 and Professor in 1977 in the Department of Electronic Engineering, Dean of Graduate School from 1992 to 1994 of the University Electro-Communications, Tokyo, Japan. His research work since 1956 has been principally on applications of electro-magnetic waves such as various microstrip transmission lines, wave propagation in gaseous plasma, pyroelectric-effect detectors in the submillimeter wave region, tunnel-diode oscillators, wide-band laser modulators, various types of optical fibers, ultra-short electrical pulse propagation on transmission lines, and millimeter wave imaging. He edited the book Analysis Methods for Electromagnetic Wave Problems (vol. l and vol. 2), (Norwood, MA: Artech House). Dr. Yamashita was Chairperson of the Technical Group on Microwaves, IEICE, Japan, for the period 1985 to 1986, and Vice-Chairperson, Steering Committee, Electronics Group, IEICE, for the period 1989 to 1990. He is a Fellow of IEEE, and served as Associate Editor of the IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES during the period 1980 to 1984. He was elected Chairperson of the MTT-S Tokyo Chapter for the period 1985 to 1986. He has been a member of the MTT-S ADCOM since January 1992, and Chairperson of Chapter Operations Committee, IEEE Tokyo Section, since 1995. He served as Chairperson of International Steering Committee, 1990 and 1994 Asia-Pacific Microwave Conference, held in Tokyo and sponsored by the IEICE. Fazal Ali (SM'90), a disciple of the late Prof. Fred Rosenbaum, received the B.S. in physics and applied mathematics, the B.S.E.E. and M.S.E.E. degrees from Washington University in St. Louis, MO. He is currently engaged in Ph.D. research work. He has been involved in the design and development of GaAs MMIC's for the last 13 years. He joined the Advanced Technology Division of Westinghouse in 1992. In his present position as an Advisory Engineer, he has been involved in the design and development of HBT power MMIC's and MESFET based circuits and providing technical leadership in the commercial applications of MMIC's. Before joining Westinghouse, he worked at Pacific Monolithics for seven years as Manager of MMIC Product Development and Senior Member of the Technical Staff. His MMIC design and product background using MESFET, PHEMT, and HBT technologies include gain blocks, power amplifiers, LNA's, phase shifters, switches, attenuators, passive components, mixers, frequency converters (up/down, image-reject, I-Q), oscillators, multifunction MMIC transceivers, and MMIC-based subsystems. He has also served as Program Manager and Principal Investigator on several customer funded R&D projects. Prior to Pacific Monolithics, he worked at Avantek on the design of MMIC distributed amplifiers. He introduced and taught the first graduate course in GaAs MMIC design as an Adjunct Professor at U.C. Berkeley and Santa Clara University from 1986 to 1991. He has authored/co-authored over 50 technical publications, five invited presentations and edited, co-edited, and co-authored three books on GaAs IC technology: HEMTs and HBTs: Devices, Fabrication and Circuits (Norwood, MA: Artech House, 1991); Advanced GaAs MMIC Technology (London: MEPL, 1989); and Microwave and Millimeter-Wave Heterostructure Transistors and Their Applications (Norwood, MA: Artech House, 1989). He holds five US patents and 15 additional disclosures in MMIC design techniques. Mr. Ali received the 1993 Westinghouse Corporate Award of Excellence (Highest Award) for contributions to HBT Power MMIC's, the 1994 Award of Excellence for contributions to control circuits, and several special performance awards. He is a member of Eta Kappa Nu, Tau Beta Pi, Omnicron Delta Kappa (leadership Honor Society), and a Senior Member of the IEEE. He serves on the editorial review board of the IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES and IEEE MICROWAVE AND GUIDED WAVE LETIERS. He is very active in the Microwave Society and serves on the Technical Program Committee of the IEEE International Microwave Symposium and GaAs IC Symposium. He is presently the Chairman of MTT-6 Technical Committee on Microwave and Millimeter-Wave Integrated Circuits of the MTT-S ADCOM. IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 44, NO. I, JANUARY 1996 Linda P. B. Katehi (S'81-M'84 SM'89-F'95) received the B.S.E.E. degree from the National Technical University of Athens, Greece, in 1977, and the M.S.E.E. and Ph.D. degrees from the University of California, Los Angeles, in 1981 and 1984, respectively. In 1984 she joined the faculty of the EECS Department of the University of Michigan, Ann Arbor. Since then she has been interested in the development and characterization (theoretical and experimental) of microwave, millimeter printed circuits, the computer-aided design of VLSI interconnects, the development and characterization of micromachined circuits for millimeter-wave and submillimeter-wave applications and the development of low-loss lines for Terahertz-frequency applications. She has also been studying theoretically and experimentally various types of uniplanar radiating structures for hybrid-monolithic and monolithic oscillator and mixer designs. She is the author and/or co-author of more than 220 papers published in referred journals and symposia proceedings. Dr. Katehi was awarded with the IEEE AP-S W. P. King (Best Paper Award for a Young Engineer) in 1984; the IEEE AP-S S. A. Schelkunoff Award (Best Paper Award) in 1985; the NSF Presidential Young Investigator Award and an URSI Young Scientist Fellowship in 1987; and the Humboldt Research Award and The University of Michigan Faculty Recognition Award in 1994. She is a Fellow of IEEE, and a member of IEEE AP-S, MTT-S, Sigma XI, Hybrid Microelectronics, URSI Commission D and a member of AP-S ADCOM from 1992 to 1995. Also, she is an Associate Editor for the IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION. She has graduated 11 Ph.D. students and is presently supervising 15 Ph.D. graduate students. 4 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 44, NO. I, JANUARY 1996 Complete Sliced Model of Microwave FET' s and Comparison with Lumped Model and Experimental Results Abdolali Abdipour, Student Member, IEEE, and Andre Pacaud Abstract- This paper describes a rigorous and systematic procedure to derive a unified and complete semidistributed FET model that can be easily implemented in CAD routines of simula tors. We have used the three coupled-line theory, including active and passive electromagnetic coupling between the semiconductor electrodes. The analytical formulas are given in order to calculate the capacitances of the electrodes and sufficient agreement is obtained in comparison with numerical analysis. For the first time, the experimental data of the device are compared with full three coupled-line theory and three coupled-line sliced model. This full semidistributed approach to FET modeling is applied to the analysis of a submicrometer-gate GaAs FET at centimeter and millimeter-wave frequencies, and the results are compared with the lumped element approach. The maximum available power active layer gain (MAG) and the maximum stable power gain (MSG) of the semi-insulating subsrate device is calculated as a function of device width and frequency. Fig. I. Schematic showing the physical structure of MESFET with its Both the losses caused by the channel and those caused by the important dimensions. finite electrode conductivity are included. Good agreement is obtained between theory and experiment. circuit as shown in Fig. 3. The method of determining the I. INTRODUCTION values of the capacitance and inductance matrices is improved STATE-OF-THE-ART low-noise FET's (MESFET's and with sufficient accuracy. This modification is important be HEMT's) show transit frequencies of more than 100 cause the wave propagation parameter (propagation constants, GHz at submicron gate-length. FET modeling, on the other characteristic impedances, or admittances) depends on these hand, does not keep pace with this rapid development due to elements. The lines are then modeled within the active parts problems in device measurement techniques and lack of basic of the transistor [ 13]. For purposes of simulation time reduc theoretical work at the frequency range above 20 GHz. tion and thermal analysis of noise properties [22], [25], the For very-high frequency applications [21 ], [24], [27] the complete sliced model with three coupled-lines consideration dimension of the transistor, in particular the electrode width, [l, 2] (instead of two coupled-lines analysis [10], [12], [18], becomes comparable to the wavelength, >.. . In such cases, [ 19], [20]) is proposed. 9 wave propagation effects influence the electrical performance of the device. Heinrich and Hartnagel [4], [26] reported on their study II. THE MODEL AND ITS ELEMENTS of the problem using the full-wave analysis technique and concluded that the distributed nature of electrodes becomes A. Passive Electromagnetic Coupling significant when the frequency is above 20 GHz. In this A schematic representation of a distributed MESFET is paper, a similar study is presented using coupled-mode theory shown in Fig. 1. The device consists of three coupled elec [28] and a new semidistributed equivalent circuit based on trodes fabricated on a thin layer of GaAs, supported by a distributed theory and experimental results, which can be inte semi-insulating GaAs substrate. The analysis of passive elec grated into a circuit simulator, is proposed. The electrodes are tromagnetic coupling are studied by two procedures, numerical considered to be lossy transmission lines where their elements and analytical analysis. were calculated using numerical and analytical analysis. For Numerical Analysis: In numerical analysis the device elec the first time, each slice is represented by a 6-port equivalent trodes are considered as a multicoupled microstrip transmis Manuscript received April 12, 1994; revised October 2, 1995. sion line problem. For evaluating the self and inter-electrode The authors are with Laboratoire de Micro-ondes, Service Radioelectricite capacitance of the system, Silvester's method was applied. In et Electronique, Ecole Superieure d'Electricite (SUPELEC), Plateau de this method the whole problem of capacitance determination Moulon-91192, GIF-SUR-YVETTE, Cedex, France. Publisher Item Identifier S 0018-9480(96)00484-X. is divided into four steps [7], [14], [31]: 0018-9480/96$05.00 © 1996 IEEE ABDIPOUR AND PACAUD: COMPLETE SLICED MODEL OF MICROWAVE FET'S 1) Finding the required Green's function. 2) Finding the Fredholm integral equation. 3) Applying the method of moments using Dirac delta functions as weighting functions (matrix approximation to integral equation). 4) Finding the matrix of Maxwell's potential coefficients and matrix of capacitances. By repeating the calculation with the substrate dielectric equal to the free-space value, the inductance matrix may be obtained Source within the TEM approximation Ls [L] = coµo[Co]-1 with [Co] being the matrix of capacitances for the case where Fig. 2. Small-signal equivalent circuit of a FET. er = 1. We compared our results with the literature [8], [9], (28], and good agreement was obtained. In the case of FET electrodes we have Analytical Analysis: In our analytical approach the passive ls = Im(zmcoth(rt)) electromagnetic coupling elements are obtained from geometry wl and material constants of the FET and we assume that the 5 = gate-source and gate-drain spacing are equal. The Quasi TEM ld Im(zmcoth(rt)) mode wave propagation of energy can be decomposed into an wld even and odd-mode excitation [12], (30], (31]. The even-mode lg= Im(zmcoth('Yhg)) wave transmission is analogous to excitation of a conductor wlgg backed coplanar waveguide (CBCPW) and the odd-mode wave hg = min{lg, lg} (3) transmission is analogous to excitation of a pair of conductor backed coplanar strips (CBCPS). With this description we can with ls = source length, ld = drain length, lg = gate length, evaluate the capacitance matrix and then the inductance matrix t = source, and drain conductor thickness, tg = gate conductor of the system. The capacitance matrix is evaluated by using thickness. formulas in reference [5], [ 11] containing elliptic integrals. For evaluating the capacitances Css and Cdd [see Fig. 3(c)] C. Determination of Lumped Model of the FET we have compared the numerical results with formulas that The broadband lumped model (Fig. 2) of the device was were used by Heinrich [3] but the values of the inductance did obtained using hot and cold modeling [15]-(17], (23]. In cold not show sufficient accuracy. For our problem the single nar modeling the extrinsic elements (Lg, Cpg, L., Ld, Cpd) were row microstrip formulas [31], [30] are suitable and using these extracted at (Vds = 0 V, Vgs = - 4 V) and (Vis = 0 V, analytical formulas the capacitance and inductance matrices Vgs > 0 V) these elements being independent of frequency determination is improved. and of the biasing conditions. In hot modeling the intrinsic elements (Cg., Cgd, Cd., Gm, Ri, Rds, T) were obtained by B. Influence of Imperfect Conductors the de-embedding procedure of extrinsic elements. The intrin For a conductor with finite thickness the surface impedance sic elements are independent of the frequency but they are can be approximated as [6] functions of bias conditions. Optimization was performed by Zs = ZmCOth(rt) (1) varying the values of the intrinsic FET elements in the vicinity of ±10% of their mean value until the error between measured where and modeled S-parameters were reduced to acceptable levels. + / = 81 ";j: 1. s t he propagati.o n constant D. Determination of the Distributed Model of the FET and In the distributed model (full sliced model), the FET l+j Zm =- is divided into many cells cascaded together, as shown CTmDm in Fig. 3(a)-(c). Each cell contains the coupled electrode J where Dm = 2 is the skin depth of metallic layers. This transmission lines, resistance and internal inductance of µoaTnw electrodes, and an intrinsic GaAs FET equivalent circuit. impedance can be separated into real and imaginary parts The values of coupled transmission line elements, resistance Zs = Rs + jwLs. and internal inductance of electrodes have been given in (3). To deduce the values of Cpgd and Cpdd at the input and output The real part represents the electrode resistance and the of the distributed FET model, the capacitances C and C imaginary part the inner inductance. The surface resistance Ri 11 22 are subtracted from the corresponding capacitances Cpg and and internal inductance Li per unit length can be written as Cpd of the lumped FET model as follows R _ Re(zmcoth(rt)) L _ Im(zmcoth(rt)) ( ) 2 ,- 1 , - lw . Cpgd = (Cpg - Cu)N/2 Cpdd = (Cpd - C22)N/2 (4) 6 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 44, NO. I, JANUARY 1996 Source elec. (short) Gate eiec. (open) Draineiec. (open) (a) S:EES' :~::::l:l::os G A G'_ LiJ .. d~ D D' .... d (b) s' Intrinsic FET drain small-signal equivalent circuit sHs' g Al g' d' (c) Fig. 3. Complete detailed circuit diagram for our FET distributed model: (a) Full sliced model representation of a pi-gate FET, (b) representation of a quarter of the FET by cascaded six-port cells, and (c) an elementary cell of distributed FET configuration. where TABLE I C 11 _- C gg + Css +C sCgsCds +s c sg LINEAR SCATLOIN DGI SRTURLIBEUS TFERDO MM OLDUEMLP ED MODEL Lumped model Distributed model CsdCss C 22 = C dd + -Cs-s +- C-sd- +- C-s-g (5) Cgs Cgs/N Cgd (Cgd-C2 I )IN N is slice number. The value of lg and ld in the distributed Cds Cds/N Rds Rds*N FET model in Fig. 3(a) are chosen as Ri Ri*N Gm Gm/N lg::::::: 2Lg, ld::::::: 2Ld Tau Tau Rg 3*Rg/N Rd Rd*N-Rdd where Lg and Ld are the extrinsic inductances in the lumped Rs Rs*N-Rss FET model (Fig. 2). Scaling rules were applied to the other elements of the lumped model, as shown in Table I, in order to obtain the element values of the intrinsic FET small-signal From several computations of the distributed FET models for equivalent circuit cell in Fig. 3(c). The value of C in Table 21 W = 4 x 70 = 280 micrometers a value of N = ~t"te ~i~t~ = I is given by ' ice 1 t 4 has been chosen and used in all the simulations. For N > CsgCsd C 21 = C dg + -Cs-s -+- C"sd- +- C-s g i4d, enretiscuallt.s of S-parameter simulations remain approximately ABDIPOUR AND PACAUD: COMPLETE SLICED MODEL OF MICROWAVE FET'S 7 +Measured x Sliced mod. + Measured ol.J.Jmped mod. x Sliced mod. 0 l.J.Jmpedmod. ' ' " ' _,' ,' mag=3 11=1.000 12=26.000 0,33 =r 11=1 .000 12=26.000 (a) + Distributed Theory x Sliced + Distributed Theory x Sliced 0 \---- 11=1.000 11=1.000 12=60.000 0,33 =r 12=60.000 (b) Fig. 4 (a) Comparison between measured and modeled S-parameters in the range 1-26 GHz. Device NE710 Ids = 10 mA; Vds = 3 V. (b) Comparison between distributed theory and sliced model S-parameters in the range I-60 GHz. TABLE II TABLE III NUMERICAL VALVES OF LUMPED MODEL NUMERICAL VALVES OF DISTRIBUTED MODEL ELEMENTS Vds = 3 V, Ids = 10 mA ELEMENTS Vds = 3 V, Ids = 10 mA Lumped model elem. Numerical Value Distributed model elem. Numerical Value Cgs 0.216 pl' Int. FET small-signal See tables I and II Cgd 0.033 pl' equivalent circuit Cds 0.005 pF Rss =Rdd 0.9 ohm/mm Rds 231 ohm Rgg 34.3 olun/mm Ri 7.3 ohm lss=ldd 0.06 nH/mm Gm 41 mS lgg 0.12 nH/mm tau 1.98 pS Lss=Ldd 0.72 nH/mm Rg 3.29 ohm Lgg 1.49 nH/mm Rd 1.77 ohm Msg=Mgd 0.36 nH/mm Rs 1.74 ohm Msd 0.24 nH/mm Lg 0.383 nH Css=Cdd 0.087 pF/mm Ld 0.434 nH Cgg 0.0006 pF/mm Ls 0.094 nH Csg=Cgd 0.029 pF/mm Cpg 0.078 pF Csd 0.061 pF/mm Cpd 0.092 pl' III. RESULTS II and IIL In Fig. 4(a) the S-parameters of the sliced model, measured data, and lumped model data have been compared This procedure was used for complete small-signal char = = acterisation of a submicrometer-gate GaAs NE710 transistor. in 1-26 GHz band at Vds 3 V, Ids 10 mA bias point Comparing these curves, one can see that the sliced model is The NE710 is a transistor for low-noise applications. The device has a 0.3 µm x 280 µm gate with a "pi-gate" better when compared with measured data in this frequency shape. Both the input and output nodes were connected to band. To validate the sliced model with the distributed theory the centre of the gate and drain electrodes. The transistor model, Fig. 4(b) is presented and one can see that these was biased at Vds = 3 V, Ids = 10 mA and the S results are comparable in this frequency band, except for parameters were measured in 1-26 GHz band using the HP 812. 8510 C Network analyzer. The values of lumped model Using the device fabrication data sheet and its geome elements and distributed model elements are shown in Tables try consideration (Fig. 1) , the values for the various device

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