High power diode lasers : fundamentals, technology, applications PDF
Preview High power diode lasers : fundamentals, technology, applications
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Contributairoesn pse cially commiTshes Miaonnaegdi.n Egd itoarrseo pent oa nys uggestifoonrs topiccosm infgr omt hec ommunitoyfa pplipehdy sicinsotm sa ttewrh att hef eilda nde ncourage prospecetdiivteo troas p proatchhe mw itihd eas. Seea lshot:t p://www.springer.de/phys/books/TAP ManagiEndgi tors DrC.l aEu.sA scheron DrH.a nJsK. o lsch SpringVeerr-lHaegi 9.elberg SpringVeerr-lHaegi delberg TopiicnsA ppliPehdy sics TopiicsnA ppliPehdy sics Tiergarte1ns7t r. Tiergarte1ns7t r. 691H2e1i delberg 691H2e1i delberg Germany Germany Emaila:s [email protected] Emaiklo:e [email protected] AssisEtdaintto r DrW.e rnSekro laut SpringVeerr-lHaegi delberg TopiicsnA ppliPehdy sics Tiergarte1n7s tr. 691H2e1i delberg Germany Emails:k [email protected] RolanDdi eh(lE d.) High-PowDeiro dLea sers FundamentTaelcsh,no ogl,yA pplications WithC ontriibountbsy N umerouEsx perts Wit2h6 0F iguarneds20 T ables � Springer Dr.R olanDdi eh(lE d.) Fraunhofer-IfnisAitnrig teuwta ndFtees tkorperphysik Tullast7r2as se 7910F8r eiburg Germany Emaidli:e [email protected] Libraroyf C ongresCsa talog-iinng-PubliDcaattai on High-podwieord lea se:rfu sn damentatlesc,hn olaopgpyl,i catwiiotnchso ,n tribubtyi ons numeroeuxsp erItR sol anDdi eh(lE,d .). p.e m.--(Topiicnas p plipedh ysi;c v.s7 8) Includbeisb liograprheifcearle nacnedis n dex. ISBN3 540666(9a3l1pk a.p er) I.Se micondulcatsoer2r .sD .i odeSse,m iconducIt.Do ire.h Rl.,D .( ReneDe. )I I. Series. TA170.0H 5220 00 621.36'6--dc21 00-028510 PhysiacnsdA stronoCmlya ssifiSccahteimo(enP ACS4)2:. 554.2-.f6;0 .4-26v.2;. Cf ISSpN rint ed0i3t0i3o-n4:21 6 ISSN elecetdriotni1ioc43n 7:- 0859 ISBN3- 540-666S9p3r-i1n gVeerr-lBaegr lHieni delbNeerwYg o rk Thisw orki ss ubjetcotc opyrigAhltrl.i ghatrse r eserved, wthheewt hhoelroe r p arotf t hem ateriiascl o ncerned, specifitchaelr liyg hotfst ranslatrieopnr,i ntrienugs,oe f i llustrations, brreocaidtcaasttirioennpg,r, o ductoino n microfiolrmi na nyo thewra y,a nds toraigned atab anksD.u plicatoifot nh ipsu blicatoirop na rts thiesr eof permittoendlu yn detrh ep rovisiooftn hseG ermaCno pyrigLhatwo fS eptemb9e,1r9 65, icnu rirtesv netr siaonnd, permissfioorun s em usta lwaybseo btainferdo mS pringer-VVeiroltlaiago.n asr el iabfloepr r osecutuinodne trh e GermanC opyrigLhatw . SpringVeerr-lBage rlHieni delbNeerwgY ork am embero fB ertelsmannSpSrciinegnecBreu +s ineMsesd iaG mbH ©SpringVeerr-lBaegr lHieni del2b0e0r0g PrintiendG ermnay Theu seo fg eneral descnraimpetsri,ev gei stenraemde st,r ademarektsci,.n t hipsu blicadtoioenns oti mpleyv,e inn thea bsenocfea specisftiact emetnhtas,tu chn amesa ree xempftr omt her elevant proltaewacsnt dir veeg ulations andt herefforreefe o rg eneruasle . Datac onversbiyoD nA -T£X Blumenst-eSieni dGeblR ,L eipzig Covedre sigdne: si& pgrno ducGmtbiHo,H ne idelberg Printoenda cid-fpraepee r SPIN1:07 02280 57/3144/mf5 43210 Preface Indisputhtleaa bslieyasrk, e tye chnoilnho iggyhi lnydu streicaolniozmeide s. Inm aniyn dusatprpileisc,oa ftt hileoa nsi enmr a terpiraolcse hsasmsio ndg ifiefda bricpartoicoewnsi stsehps e eqdu,a lrietlyi,a abnidlfl ietxyi,bo ifl ity manufagch tauvriibnneges nu bstanitnicarlelNayes veedr.t hweiltrehes s, spetcoit t tse chnpioctaelna tnimdaa lr kdeitff usliaospner,ro ceissss tiinlgl faarw afyr osma turaAtmioonongt. h tehri ntghsii,dss u teo p rocteescsh nolo gineosst u fficientltyo l aasdeeamprpt leody amnetdno tt h fea tchta tto day's lasseyrs taermgese nerhaelalavyny vd o lumiwniotruhes l athiivgcehol syt s foorp eraatnimdoa ni ntenance. Thissi tuaitsgi oointn ogc hanpgreo fouanstd hldeyi oldaes iesor nt he movteo r evolutliaostneeircz hen oalsto hgteyr ,a nsdiiswdti oterhl ectrical engineDeiroildnaegs .he arvsle o nbge euns eadsl igehmti titnefi rbse r-optic telecommunaisbc aartcirooednaesd a,en rfdso ,ir m plemetnhwteri intge -read functoifoo pntsid ciaslNk osw.a dadyisol,da es deorn so mte redleyl ibvietrs buatl soop tipcoawleT rh.ea yr ien creafsoiuningndal pyp licsautciahos n s materpiraolcse s(wseilndgic nugt,t dirnigl,dl eirnugs,st uirnfgha,ac red en inge,t) ca .sw elalsi np rinatnidgnr ga phairctiasnld, i splaanydms e,d ical applications. Inf acsti,nt cheae d veonftt h hei gh-pdoiwoeldrae s lears,te erc hnology ise xperiae funncdianmge ntal cshtarnuagcsett ,hu isrsea mli conddeuctor vicheab se cotmheke e eyl emoefna tn ewb reoefdl asseyrs ttehmasat r e compewtiintggha lsa saenrdls a mp-pusmopleidd l-assteaHrtiseg. h -power dioldaes aerrceso ntinmuaokuisinlngyr oiandtison dusatprpilailc aast ions, theayr ceo mpaecatst,yoc ooyli,ea lp do weerffi ciebnecyyo 5n0d% , which isa boufitv tei mheisg htehraa nn yo thkeirn odfl ashearst oo ffearn,d theciors atrsbe e comiinncgr eaastitnrgalcTyot e ixvpelt.oh itetr emendous applicpaottieonontfh i iaglh -pdoiwoeldrae s erress,e aarncddh e velopment (R& D)p rograarmpese rfoirnmm eadni yn dusctoruinatlr ies. Sucphr ograarmoesp eratiinGo enramlaa nswy e lTlh.ie d etaow ritthei s booakr owshee Rn& Dt eafrmosm r eseianrscthi atnuidtn edsu csotmrbyi ned thefiorr tcoec so opeirnaan teet wtohroekb jecotfwi hviewcseh r teog eatc - VI Preface cestso h igh-powdeiro dlea sewrist ihn creaspionwge rb,r ightnaensdsl ifetime, tor eliamboluen tintge chnolofgoiref sa bricathiinggh -brighltanseesmrso d ulesa,n dt od emonstrantoev eall l-solidl-assteasrty es temAss. t heg eneral coordinaotfot rh inse twortkh ee ditoarc cepttehde r esponsibtiolm iottyi vatea teamo fa uthorwsh oa rea ctiverleys earchtihnefig e ldo fh igh-power diodlea serTsh.e icro mpetenkcneo,w ledegxep,e rienvcieep,wo intisd,e aasn d visiohnasv eb eenb roughtto gethteorb rinign teox istetnhcieus p datmeo no grapohn t hep rinciptleecsh,n oglyo,a ndi nnovataipvpel icatoifoh nisg hp-ower diodlea serssu,m marizitnhges tate-of-tihnea - garreta tdlyyn amifice ld at thet hreshotload n ewm illennium. Readerwsh ow anta fundamental intrtoodt uhceut nidoenr lypihnygs ical principdleessi,gc no nsideratainodnt sh,eb asiocfsd evictee chnolwoiglyfil n d thefi rscto ntribubtyi Poen teUrn gear c ompacstt and-almoonneo grapohn diodlea sefrosrh igh-power opeTrhaotsiewo hno.w antt op robfeu rthweirl l finda n extensitvhee oretitcraela tmeonftt hem icroscosppiact io-temporal dynamicosfl arge-activhei-gahr-epao wdeiro dlea searnsd t heiirm pacotn t he macroscolpaiscec rh aracteriisntt hiecc osn tribubtyiE odne ltrauGde hriagn d Ortwin HFreosms .a practipcoailn otf v iewt,h ea nalysainsdp redictoifto hne temporaanld s patidayln amicosfb road-alraesae arrse e xtremeilmyp ortant whend esignihnigg h-powdeiro de-lsasyesrt ems. Ideamla terisayls temtso f abrichaitgeh -powdeiro dlea searrse t heI II V compound semicondTuhcrtoourgssh.o lisdo lutiaomnosn gv arioIuIsI V- materiaal lsa,r gsep ectruomfl asewra velenghtahssb ecomea ccessiIbtl e. rangefsr omt heb luet ot hem id-infrabreeidn,eg x tendteodt he far-infrared througthh eu nipolqaura ntumc ascadlea sePro.w erp erformanicsse o f ar restricttoew da velengrtahnsg infgr om6 30n m to1 60n0m .O neo ft hek ey stepisn t hef abricatoifho ing h-powdeiro dlea seirsst hee pitaxpiraolc ess. Sophisticsattaecdok fsI II-eVp ilayceormsp risuipntg o 1 00s ingllaey ehrasv e tob ed epositweidt hh ighc rystalqluianlei. tM yarkusW eyerasn dc oauthors descriibnde e tatihle t echnoloagnidep se culiaroifte ipeist afxoyrh igh-power diode-llaasyeersr t ructures. Despitteh et remendopurso greIsIsI -Ve pitaxhya sm adei nt hel ast decaden,o thinwgo uldh aveb eena chieviefdl ow-dislocations-udbensity stratwea ferwse ren ott oh and.A s galliuamr seni(dGea As)i sb y fart he mosti mportasnutb strate maftoerhr iigahl- powdeiro dlea sertsh,ec ontri butiobny GeorMgu lleerta lh.a sb eens olealnyd c omprehensidveevloyt ed tot heg rowtohf G aAs-substcrraytset aolfhs i ghp erfecteimopnh,a siztihneg importanocfae soundm ateriablass ef orl ong-lifedteivmiec es. Epiwafeorfsh ighc rystalpleirnfee ctairoepn a tternteodl asesrt ructures by applyisnegm iconducptroorc etsesc hnolorgaitehse sri miltaorp rocesses appliiendm icroelectrHoingihc-sp.o wdeiro dlea seurssu alcloym ei nt hef orm ofb ars(a pproximatleOlmym x 0.m6m)c omprisianbgo ut2 5m onolithic grouposf u p to2 0p arallseiln gle-lsatsreirp eGso.t zE rberatn dc oauthors presendte taildeeds igcno nsiderattieocnhsn,o loagnided se vicceh aracteris- Preface VII tiocfss inglel-adsiaeonrddbse a rwsi tlha rogpet iccaavli stuipepso bryt ed sectoinot nhssei mulaoftt ihoenr bmeahla vainodor nr eliacboinlsiitdye ra tions. A majdorra wboafhc ikg h-pborwoeard -dairoledaaes iestr hse uinrs atis fcatobreya qmu al.T ihtiaysl loonwlsly i miftoecdu osfti hntego tbaela amsi t itsh aed diotfim oann y singHleen cbpeeo,aw dmeesrn. s aittt hywe o rkpiece ilsi miatswe edll le,a vhiinggh -pdoiwoledares weirtsrh e straipcptleidc ation opportuBnuittth iiiesscs h.a ngaistn hge ayr geo itnogp icukpb rightness toa pprodaicffhr actiopne-rlfiomribmtyaie nndct er odsupceicdniegas li gns sucahse ,. gt.ht,ea perreesdo n/aamtpolriTfiwoec ro.n tribaudtdirtoehnsisss imporstuabnjteK lcatus.- JocBhoelnl eerta lr.e poornpt r opeorfth iiegsh brighdtinoedses-s lyassteerm st hewpiiortt he nftofirra elq uceonncvye rsion, wherMeiacsha eMli kulalad dretshsdeee ss iagnndp erforomfat nacpee red dioldaes eexrihsb itbionthghi gpho waenrhd i gbhr ightness. Outppuotw peerbr a iras p proatchh1ei0 0nW g l evwehli,sc uhb stantially redutcheceso spte wra totfd elivoeprteipdco awleC rr.u cfioarrle liability anldi feotfbi amreis sp ropheeras ti nkAilntgh.o puogwhee ffirc ieinsec xy tremelyo nhheia glohfft, h aeb sorpbuemdpp o wehrat so b er emovaesd washteea Mto.u nthiinggh -pdoiwoedre -blaarossnec ro oleilnegm ernets quihriegsph r eciasnidtoh nce o mplmeatset eorfti hneegl ecttrhiecramla,l , anmde chanjiucnaclt ionP eptreLroo coseedsne ss.c rpirbaecsta iscpaeolcf t s heasti nkaipnpgl yaicntgci ovoel ers. Bys tacmkainnsygu cmho untbeadro sp,t iocuatlpp uotw eirnts h kei lo watrta ncgaebn e a chieTvheiidsts. h feu ndamceonntcafelop drti rect-diode applicatioanrsr.a iynSstt eagcrksaeotdpi hnigs tmiiccartoe-dob petaimc al shapwiinplgul s pho wdeern sittoti h1ee05s W jc m2r eawlimtt hhp er ospects toa chieevveetn h eM Wj c m2l ev-eslu fficifeontrth wee ldoifns gh eet steFeoltr.h ipsu rpaol saer nguem boefri ndivoisdcuiallhl aavtteoob r es couptloea sd i npgolwee rbfeualmF .o lloHwainsnO gpo weri'sn troduction, PeteLro osedne awlist h cuarprpelnmiteeltdyh oodfis n cohbeeraecmno tm biniwnhge rUewaesB ra ucht recaothse rbeenactmo mbinbionttghoa, c hieve direct-dsiyosdtee-mlsap soewwrlei ertv hoe fsl osm kei lowatts. Anothaeprp robaecshi cdoehse rbeenatcm o mbintioan cgh iheivgeh brighitsnt ehusess oe f h igh-pdoiwoeldrae s teorp su mspo lidl-assteartse -onoe ft heea rlaipepslti coaftt ihoesnsesem iconddeuvcitaconerdss t ill their preodno-emt ihsneoa lnitd g-asitmnae tdei aucmt iansag b rightness transdDuicoedre.- PSumopleidd -LSatsae(DtrPeSs SsL)a reex tentdhienigr preseanttc heee x peonfst eh eliarm p-pucmopuendt erdpuaetr obt est ter beaqmu alrietdyu,mc aeidn tenaannadcn ie m,p rocvoisntg- of-oswintership uatiColna.sD sPSicSs Lw inlolbt e a ddreisnts heibdso obku rta thneorv el concetphtabste cafmeea soinblltyeh roduighop duem piSnugc.ah n ovel concietsph tfie b elra sTehrit.sy poefl asperro miisnenso vaaptpilviec ations, asi itps a rticautltarraltcyoct oiuvptelh leea soeurt ptuoat no ptificbaeslro thattho ep tipcoawle r baevcaoimleaasttb hlfeer eenead n cda bne d irected VIII Preface wheretvheflere xifibbleeir sp lacTehdic.so nfaeg rrse daetao lffl exibility ont haep plicoaflt aispoeonrw perre viuonuasvlayi tlota rbaldei ltaiosnearls . 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FreibJuurn2ge0,0 0 RolanDdi ehl Contents Introductitoon P owerD iodeL asers PetUenrg er 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1F.u ndameAnstpaeolcf Dt iso Ldaes ers 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.E1m.i ssainodAn b sorpitnSi eomni conductors 1 . . . . . . . . . . . . . . . . . . . . . 1.B2a.s Eilce meonfSt esm iconDdiuocLdtaeos re rs 8 . . . . . . . . . . . . . . . . . . . 1.O3p.t iGcaaialn n dT hresChoonlddi tion 10 . . . . . . . . . . . . . . . . . . . . . . . . . . 1.E4d.g aen-dS urface-LEamsie.tr.ts.i .n.g. ........1.3. .............. 1.L5a.t eCroanlfi nement . 15 . . . . . . . . . . . . . . .... . . . . . . . . . . . . . . . . . . . . . . . . . 1.Q6u. antuemlS-ltW ructures . 18 . . . . . . . . . . . . . . . . . . . ..... . . . . . . . . . . . . . . 2.Fa bricTaetcihonno logy . 20 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ........ . . . . . . . . 3.O ptiWcavaelg uiadnedRs e sona.t.o.r.s. ...........2.4. ................ 3.E1ff.e ctRievfer aIcntdi.ev.xe. ...............2.4. ................... 3.N2o.r malPirzoepda gDaitaigorn.a .m.s. ..........2.6. .............. 3.O3.p tiNceaalar n-Fda r-FPiaetltde. r.n.s. .........2.8. ............ 3.F4a.b ry-RPeesroont.a .t.o.r. ..............3.1.. .................... 3.5D.i oLdaes Sepre ctrum . 33 . . . . . . . . . . . . . . . . . ..... . . . . . . . . . . . . . . . . . . . 3.6M.i rrCoora ti.n.g.s. ..................3.4. ........................ 4.R atEeq uatainodHn isg h-POopweerra tion 37 . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.R1a.t Eeq uatfiooErnl se ctCraornriaicne Pdrh so tons 37 . . . . . . . . . . . . . 4.E2.l ectarnidOc patli Cchaalr actoefrP oiwsetDrii cosLd aes ers4 1 . . . . 4.3D.e siCgonn sidefroaHrti igPohon-wseO rp eration 46 . . . . . . . . . . . . . . . . LiosftS ymbols .. 50 . . . . . . . . . . . . . . . . ...... . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . LiosftC onstants 51 . . . . . . . . . . .... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . AbbrevifaotIrin odnisc es. 51 . .. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . References 52 . . . . . . . . . . . ........ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . X Contents Dynamicso fH igh-PoweDri odeL asers EdeltGreahurdai ngdO rtwHiens s 55 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.M icrosScpoaptTiiecom -poPrraolp eorftD iieosLd aes ers 56 . . . . . . . . . . . . . 11..R oloefM icrosScpoaptTiiecam -poPrraolp erties inM acrosLcaospCeihrca racteristics 57 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12..O ptailc-FDiyenladm .i.c..s. ..................................5.9. 1.P3h.y soiftc hsAe c tiSveem iconMdeudcituomr 63 . . . . . . . . . . . . . . . . . . . 2.Sp atia-TDeymnpaomroiafHcl is g h-PDoiwoeLdrae s ers 67 . . . . . . . . . . . . . . 2.O1p.t iIcnajle c.tion 67 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.I2n.fl ueonfLc aes Geero meatnrFdya cReetfl ectivitie6s8 . . . . . . . . . . . . 23..D ynamoifOc pst iEcmails sCihoanr acteristics 71 . . . . . . . . . . . . . . . . . . . 2.S4p.a tainadSl p ecCtarrarlDi yenra mics 73 . . . . . . . . . . . . . . . . . . . . . . . . . . 2.S5p.a tainadSl p ecRterfarla ctiavnedG- aIinDndy enxa mics7 6 . . . . . . 3.C onclusion 78 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . LisotfS ymbols 79 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . References 80 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Epitaxyo fH igh-PoweDri ode-LaseSrt ructures MarkWuesy erAsr,n aBbh attacFrhaanrBkyu ag,ga en dA rnKen aue8r 3 . . . 1.G rowMteht hods 86 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1.M1o.l eculaErp-iBteaaanxmdIy t Vsa riants 87 . . . . . . . . . . . . . . . . . . . . . . . 12..Me talorVgaapnoirc- PEphiatsaex y 91 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13..C omparoifMs BoEna ndM OVPE 94 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.M aterfioaHrli sg h-PDoiwoeLdrae s ers 96 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21..G aAsa ndA lGaAs 96 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22..G ainaPn dA lGainP 98 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23..G ainAosnGP a As 101 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.I4n.P G,a inAsa(nPdA) lG ainA.s 102 . . . . . . . . . . . . . . . . . . . . . .......... 3.D oping 103 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3.N1-.yT pDeo ping 103 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32.P.- TypeD oping 103 . . . . . . . . . . . .... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.H eterostructures .1 06 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.S traiQnueadn tWuelml s . 107 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. .. .... . . . 5.1. PseudGormoowartnphdSh tircaR ienl axation 107 . . . . . . . . . . . . . . . . . 52..S traCionm pensation 109 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.D eviRcees ults 110 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . LiosftA cronyms 113 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . References 114 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
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