Gimbaled scanning micro-mirror apparatus

43 Pages·2014·2.93 MB·English

USOO8810879B2
(12) United States Patent (10) Patent N0.: US 8,810,879 B2
Lubianiker et a]. (45) Date of Patent: Aug. 19, 2014
(54) GIMBALED SCANNING MICRO-MIRROR 6,181,460 B1 1/2001 Tran etal.
APPARATUS 6,295,154 B1 9/2001 Laor et al.
6,480,320 B2 11/2002 Nasiri
. . . 6,595,055 B1* 7/2003 Schenk et a1. ........... .. 73/514.15
(75) Inventors: Yoram Lublanlker, Tel-AVlv (IL); 6,744,173 B2 6/2004 Behin et al‘
RavwErllch, RehOV01(1L);MataIl 6,760,144 B2 7/2004 Hill et a1.
Naftali, Yoqenam (IL); Adi Baram, 7,071,594 B1 7/2006 Yan et a1.
Yoqneam (1L) 2003/0019832 A1 1/2003 Conant et a1.
2004/0004749 A1 1/2004 Orcutt et a1.
(73) Assl- gnee: Maradl. n Technologi.e s Ltd.,Yoqneam 22000044//00113060064719 AA11 * 75//22000044 TKé lgin.o. .......................... .. 359/291
(1L) 2004/0207744 A1 10/2004 Bock
2004/0223195 A1* 11/2004 Nomura ...................... .. 358/509
( * ) Notice: Subject to any disclaimer, the term of this 2005/0078345 A1 4/2005 Turner et a1.
patent is extended or adjusted under 35 glismgt a1t~ l
U30 1540’) by 327 days' 2005/0243446 A1 11/2005 Wolomda ae a .
2008/0055815 A1* 3/2008 Rottenberg ................. .. 361/278
(21) Appl-NO-I 12/958,808 2008/0094682 A1* 4/2008 Greywalletal. ........... .. 359/245
(22) Filed: Dec. 2, 2010 (Continued)
(Under 37 CPR 1'47) FOREIGN PATENT DOCUMENTS
(65) Prior Publication Data WO 2006051544 A2 500%
US 2011/0228367 A1 Sep. 22, 2011 OTHER PUBLICATIONS
Related U_s_ Application Data Wolter et al., “Improved layout for a resonant 2D Micro Scanning
_ _ _ _ _ Mirror with low operation voltages”, Proceedings of SPIE, (2003),
(63) Cont1nuatlon-ln-part of appllcatlon NO- vol. 4985, PP 72-82
PCT/IL2008/000743, ?led on Jun. 2, 2008.
(Continued)
(51) Int. Cl.
G023 26/08 (200601) Primary Examiner * Stephone B Allen
(52) US, CL Assistant Examiner * Jyotsna Dabbi
USPC ................................... .. 359/1991; 359/2212 (74) Attorney, Agent, or Firm *Nath, Goldberg & Meyer;
(58) Field of Classi?cation Search Jerald L- Meyer
None
See application ?le for complete search history. (57) ABSTRACT
Provided is a Micro-Electro-Mechanical Systems (MEMS)
(56) References Cited device for actuating a gimbaled element, the device including
a symmetric electromagnetic actuator for actuating one
US PATENT DOCUMENTS degree of freedom (DOF) and a symmetric electrostatic
4,003,626 A 1/1977 Reinke et 31‘ actuator for actuating the second degree of freedom.
6,044,705 A 4/2000 Neukermans et a1.
6,140,979 A 10/2000 Gerhard et a1. 17 Claims, 28 Drawing Sheets
524 528 520
526
Wt)
523
GND
US 8,810,879 B2
Page 2
(56) References Cited Urey et al., “Optical performance requirements for MEMS-scanner
based microdisplays”, Conf. on MOEMS and Miniaturized Systems,
U.S. PATENT DOCUMENTS SPIE, (2000), vol. 4178, pp. 176-185.
Timoshenko et al., “Theory of Elasticity”, (1970), 3rd ed., London,
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2009/0058562 A1 * 3/2009 Joodaki ....................... .. 333/208 Madou, “Fundamentals of Micro fabrication”, (2000), 2nd ed., CRC,
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Sprague et al., “Bi-axial magnetic drive for Scanned Beam Display
HyperPhysics Concepts, siX (6) pages, http://hyperphysics.phy-astr.
mirrors”, Proceedings of SPIE, (2005), vol. 5721, pp. 1-13. gsu.edu/hbase/hph.html.
Ji et al., “Dual-Axis Electromagnetic Scanning Micromirror Using
Jenkins et al., “Fundamentals of Optics”, (1976), 4th ed., McGraW
Radial Magnetic Field”, MEMS 2006, Istanbul, Turkey, (2006), pp.
Hill Book Company, ?fteen (15) pages.
32-35.
Kwon et a1 ., “Vertical Combdrive Based 2-D Gimbaled Micromirrors Hecht, “Optics”, (1998), 3rd ed., Addison Wesley, ten (10) pages.
With Large Static Rotation by Backside Island Isolation”, IEEE Jour Ray, “Applied Photographic Optic s”, (1997), 2nd ed., Focal Press, siX
nal of Selected Topics in Quantum Electronics, (2004), vol. 10, No. 3, (6) pages.
pp. 498-504. “Applied Optics and Optical Engineering”, (1965), vol. III, edited by
Leus et al., “Fringing Field Effect in Electrostatic Actuators”, Tech Rudolf Kingslake, Academic Press, thirty-six (36) pages.
nical Report ETR-2004-2, TechnioniIsrael Institute of Technology,
Faculty of Mechanical Engineering, (2004), pp. 1-15. * cited by examiner
US. Patent Aug. 19, 2014 Sheet 1 0f 28 US 8,810,879 B2
PARRIOTR
F1IG.
US. Patent Aug. 19, 2014 Sheet 2 0f 28 US 8,810,879 B2
GND
Wt)
13Gb
PARRIOTR
F2IG.
110
130a
100
:V( t)
US. Patent Aug. 19, 2014 Sheet 3 0f 28 US 8,810,879 B2
PARRIOTR
F3IG
224
210a
200
US. Patent Aug. 19, 2014 Sheet 4 0f 28 US 8,810,879 B2
PARRIOTR
F4IG
US. Patent Au .19 2014 SheetS 0f28
F5IG.
US. Patent Aug. 19, 2014 Sheet 6 0f 28 US 8,810,879 B2
FIG. 6
530
US. Patent Aug. 19, 2014 Sheet 7 0f 28 US 8,810,879 B2
524 528 520
526
Wt) .
523
GM) FIG. 8a
524
FIG. 8b
US. Patent Aug. 19, 2014 Sheet 8 0f 28 US 8,810,879 B2
525.
1521
523
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