Fundamentals of Laser-Assisted Micro- and Nanotechnologies

327 Pages·2014·12.377 MB·English

by  Vadim P. Veiko, Vitaly I. Konov (eds.)

Springer Series in Materials Science 195
Vadim P. Veiko
Vitaly I. Konov Editors
Fundamentals
of Laser-Assisted
Micro- and
Nanotechnologies
Springer Series in Materials Science
Volume 195
Series editors
Robert Hull, Charlottesville, VA, USA
Chennupati Jagadish, Canberra, ACT, Australia
Richard M. Osgood, New York, USA
Jürgen Parisi, Oldenburg, Germany
Shin-ichi Uchida, Tokyo, Japan
Zhiming M. Wang, Chengdu, People’s Republic of China
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Vadim P. Veiko Vitaly I. Konov
•
Editors
Fundamentals of
Laser-Assisted Micro-
and Nanotechnologies
123
Editors
VadimP. Veiko Vitaly I.Konov
Department of Laser-basedTechnologies Natural Sciences Center
NRUITMO General PhysicsInstitute RAS
St.Petersburg Moscow
Russia Russia
ISSN 0933-033X ISSN 2196-2812 (electronic)
ISBN 978-3-319-05986-0 ISBN 978-3-319-05987-7 (eBook)
DOI 10.1007/978-3-319-05987-7
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Preface
Over the past decades, laser microfabrication has successfully spread in micro-
electronics, micromechanics, and some other areas. Nowadays, laser-induced
microprocessing and, in some cases, nanoprocessing of materials constitute new
and very promising application areas, such as MEMS, photonic, and fluidic
devices, etc., for information, biomedical, and other technologies. In these areas,
lasertechnologiesareinthestageoftransitionfromimpressivedemonstrationsto
practicallyfeasibleresultsforseveralreasons.First,shortlaserpulsesofnano-and
especially pico- and femtosecond duration, combined with modern focusing ele-
ments and beam scanning devices allow strong localization of laser pulse effects
onthesurfaceandinthebulkofmaterials.Second,theproductivityoflasermicro-
andnanotechnologiesisrapidlygrowingasaresultofthedevelopmentofreliable
industrial lasers that emit intense radiation pulses with ultra-high repetition rate
(uptotheMHzrange).Themeanbeampoweroftheselasersisnowapproaching
the level of 1 kW and becomes comparable with that of lasers used for macro-
processing of materials (welding, cutting, surface hardening, etc.).
Accordingly, various phenomena that can be induced by short intense pulses:
surface and bulk modification of materials, radiation-induced chemical reactions,
various types of ablation, plasma formation should be better understood for
development of efficient and novel technological procedures.
Naturally, one book cannot cover all topics of interest in the field of laser
micro- and nano-laser technologies. We have selected some of them—currently
hot topics in our opinion—based on presentations made by a number of the
world’s leading experts who participated in the International Symposium, ‘‘Fun-
damentals of Laser-Assisted Micro- and Nanotechnologies’’ (FLAMN) recently.
This is a serial and popular event that takes place every 3 years inSt. Petersburg,
Russia.
The book consists of 13 chapters divided into five parts:
I. Laser–Matter interaction phenomena;
II. Nanoparticles related technologies and problems;
III. Surface and thin films phenomena and applications;
IV. Bulk micro structuring of transparent materials;
V. Laser-Induced modification of polymers.
v
vi Preface
We expect that the reader will be able to learn important features of (i) defect
formationinlaser-heatedsurfacelayers,(ii)laserablationoforganicandinorganic
materials,(iii)metaloxidationbylaserpulses, and(iv)reversibleandirreversible
changesofthestructureandopticalpropertiesinthebulkofamaterial,inducedby
tightlyfocusedultrashortlaserpulses.Specialemphasisismadeontheapplication
of nanoparticles as a positive factor in materials processing. Several advanced
applications of laser microtechnologies are included such as laser printing and
laser fabrication of three-dimensional polymer devices.
We hope that the book will be of use for researchers and engineers, as well as
for young scientists and students already working or planning to work in the area
of laser applications. Finally, we wish to express our appreciation to all contrib-
utors for their friendly cooperation in preparing the book. Special thanks to
Dr. Koji Sugioka to whom the idea to publish this book belongs.
St. Petersburg Vadim P. Veiko
Moscow Vitaly I. Konov
Contents
Part I Laser–Matter Interaction Phenomena
1 Ultrafast Laser Induced Confined Microexplosion:
A New Route to Form Super-Dense Material Phases. . . . . . . . . . 3
Ludovic Rapp, Bianca Haberl, Jodie E. Bradby,
Eugene G. Gamaly, Jim S. Williams and Andrei V. Rode
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Energy Density in Confined Ultra-Short Laser Interaction
with Solids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.1 Absorbed Energy Density . . . . . . . . . . . . . . . . . . . . 5
1.2.2 Ionisation Processes . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2.3 Increase in the Absorbed Energy Density Due
to Modification of Optical Properties . . . . . . . . . . . . 10
1.2.4 Energy Transfer From Electrons to Ions:
Relaxation Processes After the Pulse . . . . . . . . . . . . 11
1.3 Shock Wave Propagation and Void Formation. . . . . . . . . . . . 13
1.3.1 Shock Wave Generation and Propagation . . . . . . . . . 13
1.3.2 Shock Wave Dissipation . . . . . . . . . . . . . . . . . . . . . 14
1.3.3 Rarefaction Wave: Formation of Void. . . . . . . . . . . . 15
1.4 Density and Temperature in the Shock-Wave
and Heat-Wave Affected Solid. . . . . . . . . . . . . . . . . . . . . . . 16
1.4.1 Two Characteristic Areas in Confined
Microexplosion . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
1.4.2 Upper Limit for the Pressure Achievable
in Confined Interaction . . . . . . . . . . . . . . . . . . . . . . 17
1.4.3 Ionisation Wave Propagation Towards
the Laser Beam . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
1.4.4 Modelling of Macroscopic Explosions
by Micro-Explosion . . . . . . . . . . . . . . . . . . . . . . . . 20
1.5 Formation of Void at Si/SiO Interface. . . . . . . . . . . . . . . . . 21
2
1.6 Summary. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
vii
viii Contents
2 Molecular Dynamics Simulations of Laser-Materials
Interactions: General and Material-Specific Mechanisms
of Material Removal and Generation of Crystal Defects . . . . . . . 27
Eaman T. Karim, Chengping Wu and Leonid V. Zhigilei
2.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
2.2 Physical Regimes of Laser-Material Interactions . . . . . . . . . . 30
2.3 Generation of Crystal Defects Below
the Spallation Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
2.4 Evolution of Voids in Photomechanical Spallation. . . . . . . . . 39
2.5 The Visual Picture of Phase Explosion . . . . . . . . . . . . . . . . . 41
2.6 Conclusions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3 Laser Nanocrystallization of Metals . . . . . . . . . . . . . . . . . . . . . . 51
Irina N. Zavestovskaya
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
3.1.1 Laser Matter Interaction . . . . . . . . . . . . . . . . . . . . . 52
3.1.2 Direct Surface Material Nanostructuring . . . . . . . . . . 53
3.2 Peculiarities of Laser Nano- and Microstructuring
of Metal Surfaces: Experimental Results. . . . . . . . . . . . . . . . 54
3.2.1 Properties of Nanocrystalline Materials. . . . . . . . . . . 54
3.2.2 Laser Glassing. . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
3.2.3 The Role of Laser Pulse Duration . . . . . . . . . . . . . . 56
3.2.4 Metal Surface Nanostructuring with Femtosecond
Laser Pulses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
3.2.5 Micro- and Nano-Structuring with Nanosecond
Laser Pulses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
3.3 Theoretical Modeling of Laser-Induced
Nanocrystallization Processes. . . . . . . . . . . . . . . . . . . . . . . . 62
3.3.1 Melting Processes. . . . . . . . . . . . . . . . . . . . . . . . . . 62
3.3.2 Laser Processing of Porous Metal Films . . . . . . . . . . 63
3.3.3 Nanocrystalization Kinetics . . . . . . . . . . . . . . . . . . . 65
3.3.4 Volume of the Phase Crystalline and Average
Number of Nuclei Particles . . . . . . . . . . . . . . . . . . . 69
3.3.5 Criterion for Laser Amorphisation . . . . . . . . . . . . . . 71
3.4 Conclusions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
4 Optical Breakdown in Ambient Gas and Its Role
in Material Processing by Short-Pulsed Lasers . . . . . . . . . . . . . . 77
Sergey M. Klimentov and Vitaly I. Konov
4.1 Introduction: Origin of Plasma Near Exposed Surface. . . . . . . 77
Contents ix
4.2 Effect of Charged Ablated Nanoparticles Long-Residing
in the Ambient Gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
4.2.1 Observation of Low-Threshold Air Breakdown . . . . . 78
4.2.2 Locations of Plasma and the Resulting
Crater Morphology. . . . . . . . . . . . . . . . . . . . . . . . . 80
4.2.3 Dimensions, Lifetime and Electrical Properties
of Nanoparticles. . . . . . . . . . . . . . . . . . . . . . . . . . . 81
4.2.4 Removal of Charged Particles by Application
of Electric Field. . . . . . . . . . . . . . . . . . . . . . . . . . . 83
4.2.5 Relaxation of Plasma in Atmospheric Air
and Its Role in High Repetition
Rate Micromachining . . . . . . . . . . . . . . . . . . . . . . . 85
4.3 Self-Scattering of Focused Ultrashort Pulses . . . . . . . . . . . . . 89
4.3.1 Threshold Conditions . . . . . . . . . . . . . . . . . . . . . . . 90
4.3.2 Contributing Mechanisms . . . . . . . . . . . . . . . . . . . . 91
4.3.3 Optimization of Exposure Conditions to Eliminate
the Scattering. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
4.4 Discussion and Conclusions. . . . . . . . . . . . . . . . . . . . . . . . . 97
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Part II Nanoparticles Related Technologies and Problems
5 Laser Generation and Printing of Nanoparticles . . . . . . . . . . . . . 103
A. Barchanski, A. B. Evlyukhin, A. Koroleva, C. Reinhardt,
C. L. Sajti, U. Zywietz and Boris N. Chichkov
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
5.2 Laser Printing of Nanoparticles and Nanoparticle Arrays. . . . . 104
5.2.1 Laser Printing of Nanoparticles . . . . . . . . . . . . . . . . 104
5.2.2 Laser Fabrication of Large-Scale
Nanoparticle Arrays . . . . . . . . . . . . . . . . . . . . . . . . 106
5.3 Resonant Electric and Magnetic Response
of Silicon Nanoparticles . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
5.4 Generation of Silicon Nanoparticles from Bulk Silicon. . . . . . 109
5.5 Microreplication of Laser-Transferred Gold
Nanoparticles/Nanomolding. . . . . . . . . . . . . . . . . . . . . . . . . 111
5.6 Laser-Based Synthesis of Nanoparticles and Surface
Modified Nanoconjugates . . . . . . . . . . . . . . . . . . . . . . . . . . 113
5.6.1 Ultrapure Nanoparticles by Pulsed Laser Ablation
in Liquids . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
5.6.2 Surface-Functionalized Nano(Bio)Conjugates. . . . . . . 117
5.7 Novel Laser-Based Conjugation Concepts. . . . . . . . . . . . . . . 119
5.8 Conclusion. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121