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Springer Series in Advanced Microelectronics 40 Detlev Richter Flash Memories Economic Principles of Performance, Cost and Reliability Optimization Springer Series in Advanced Microelectronics Volume 40 Series Editors Dr. Kiyoo Itoh, Kokubunji-shi, Tokyo, Japan Prof. Thomas H. Lee, Stanford, CA, USA Prof. Takayasu Sakurai, Minato-ku, Tokyo, Japan Prof. Willy M. C. Sansen, Leuven, Belgium Prof. Doris Schmitt-Landsiedel, Munich, Germany For furthervolumes: http://www.springer.com/series/4076 The Springer Series in Advanced Microelectronics provides systematic information on all thetopicsrelevantforthedesign,processing,andmanufacturingofmicroelectronicdevices. Thebooks,eachpreparedbyleadingresearchersorengineersintheirfields,coverthebasic and advanced aspects of topics such as wafer processing, materials, device design, device technologies, circuit design, VLSI implementation, and subsystem technology. The series formsabridgebetweenphysicsandengineeringandthevolumeswillappealtopracticing engineers aswellas research scientists. Detlev Richter Flash Memories Economic Principles of Performance, Cost and Reliability Optimization 123 Detlev Richter Instituteof Technical Electronics Technical University ofMunich Munich Germany ISSN 1437-0387 ISBN 978-94-007-6081-3 ISBN 978-94-007-6082-0 (eBook) DOI 10.1007/978-94-007-6082-0 SpringerDordrechtHeidelbergNewYorkLondon LibraryofCongressControlNumber:2013942008 (cid:2)SpringerScience+BusinessMediaDordrecht2014 Thisworkissubjecttocopyright.AllrightsarereservedbythePublisher,whetherthewholeorpartof the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation,broadcasting,reproductiononmicrofilmsorinanyotherphysicalway,andtransmissionor informationstorageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilar methodology now known or hereafter developed. Exempted from this legal reservation are brief excerpts in connection with reviews or scholarly analysis or material supplied specifically for the purposeofbeingenteredandexecutedonacomputersystem,forexclusiveusebythepurchaserofthe work. Duplication of this publication or parts thereof is permitted only under the provisions of theCopyright Law of the Publisher’s location, in its current version, and permission for use must always be obtained from Springer. Permissions for use may be obtained through RightsLink at the CopyrightClearanceCenter.ViolationsareliabletoprosecutionundertherespectiveCopyrightLaw. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publicationdoesnotimply,evenintheabsenceofaspecificstatement,thatsuchnamesareexempt fromtherelevantprotectivelawsandregulationsandthereforefreeforgeneraluse. While the advice and information in this book are believed to be true and accurate at the date of publication,neithertheauthorsnortheeditorsnorthepublishercanacceptanylegalresponsibilityfor anyerrorsoromissionsthatmaybemade.Thepublishermakesnowarranty,expressorimplied,with respecttothematerialcontainedherein. Printedonacid-freepaper SpringerispartofSpringerScience+BusinessMedia(www.springer.com) To Svea and Annett Preface • System development and optimization is an iterative process of technical and commercial decisions between hardware and software solutions based on dif- ferentarchitecturesandconcepts.Decisionsarebasedontechnicalspecification of the current product generation while often they do not reflect the long-term product roadmap. The long-term development roadmap of a memory product familyhasasignificantinfluenceonsystemcostandsystemperformanceandon the commercial success of a new memory-centric system family. • Non–volatile solid-state memories changed the way how to interact with our world. NAND flash became the enabling technology for portable storage. The availability of solid-state non–volatile memories large enough and fast enough for a certain application space is enabling year by year new commercial prod- ucts in this application area. • The NAND flash product roadmap doubles year-by-year the memory density andoutperformsthe conservativepredictionsoftheITRS roadmap.Inthe past, the read access of a memory cell through a NAND string of 32 cells was commentedasachallengingandlessreliablememoryconcept.NANDflashwas becoming the driver of the whole semiconductor memory industry. This book willsystematicallyintroducecell,design,andalgorithmaspectsofNANDflash, compare them to alternative solutions and make conclusions valid for flash memories. • Acomplexityfigureisintroducedtoillustratethechallengesalonganonvolatile memorydevelopment.Performanceindicatorvaluesarecalculatedbasedonthe introduced memory array model to reduce this complexity and derive quanti- tative figures to guide performance, cost, and durability optimization of non- volatile memories and memory-centric systems. • A performance indicator methodology is developed and the main graphical representationisbasedonperformanceandapplicationtrendlines.Thestrength of this method is the quantitative judgment of different cell and array archi- tectures. The methodology enables the opportunity to compensate insufficient vii viii Preface marginsinthedurabilityparameters onsystemlevelbyincreasingothervalues like memory density and program performance. The introduced model-based performance indicator analysis is a tool set supporting iterative decision pro- cesses for complex systems. Important Notice Regarding the Use of this Thesis Theinformationcontainedinthisworkmaydescribetechnicalinnovations,which aresubjectofpatentsheldbythirdparties.Anyinformationgiveninthisworkisin no form whatsoever an inducement to infringe any patent. April 2013 Detlev Richter Acknowledgments The idea to describe all the different aspects—optimizing a complex nonvolatile semiconductor-based systems—and to make an assessment of each method was born during my employment time at Qimonda Flash GmbH. During my time working as an independent technology consultant, I missed a systematic analysisofall effects influencing anonvolatile system. The systematic definition of each nonvolatile effect was the starting point to develop the non- volatile memory lectures given at Technical University Munich. My studies are focused to work out the dependencies between nonvolatile memory key parameters within complex systems and translating them into structured models. These performance models are part of nonvolatile memory lectures to demonstrate the importance of certain hidden parameters for a com- mercially successful product and system development roadmap. A model-based approach is introduced and used to analyze the evolutionary development of complex systems and to apply the key performance parameter methodology to predict disruptive innovations for nonvolatile memories as the most complex semiconductor devices with a regular structure and cutting-edge lithography requirements. I would like to thank Prof. Dr. rer. nat. Doris Schmitt-Landsiedel for sup- porting, accompanying, and accepting this work. Further thanks are due to: Dr.AndreasKuxforsupport,suggestions,anddiscussionsforalmost12years; Dr. Christoph Friederich for support, sharing new ideas especially on nonvol- atile memories; Dr.GertKoebernikforprogramming,testing,anddesigningflashalgorithmon highest level; AndreasTäuberforaproductivetimeworkingtogetheronembeddedDRAM’s, on charge trapping, and on floating gate flash memory designs. Dr. Thomas Kern, Dr. Josef Willer, Dror Avni, Shai Eisen, Asaf Shappir, and Boaz Eitan for an intensive and innovative working time improving charge trap- ping flash memories. Doris Keitel-Schulz, Dr. Markus Foerste, Dr. Jan Hayek, Dr. Michael Specht, Johann Heitzer, and Rino Micheloni for the great support duringmyproductinnovationtimes;Furtherthankstoallpeopleworkingonflash memories during my times at Infineon Flash GmbH and Qimonda Flash GmbH. ix Contents 1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.1 Scope of Work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 Overview About the Structure. . . . . . . . . . . . . . . . . . . . . . . . . 3 2 Fundamentals of Non-Volatile Memories . . . . . . . . . . . . . . . . . . . 5 2.1 Moore’s Law: The Impact of Exponential Growth. . . . . . . . . . . 5 2.1.1 History of Non-Volatile Floating-Gate Memories . . . . . . 5 2.1.2 Moore’s and Hwang’s Law . . . . . . . . . . . . . . . . . . . . . 7 2.1.3 History of Solid-State Storage: Cell and Application Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 2.1.4 Memory Cell Classification . . . . . . . . . . . . . . . . . . . . . 9 2.2 Non-Volatile Storage Element: Cell Operation Modes . . . . . . . . 10 2.2.1 EEPROM: The Classical Two Transistor Memory Cell . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.2.2 Single MOS Transistor: Electron Based Storage Principle. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 2.2.3 Operation Modes of Floating Gate MOSFET . . . . . . . . . 13 2.2.4 Flash Cell Operation Summary. . . . . . . . . . . . . . . . . . . 18 2.3 Non-Volatile Cell: Electron and Non-Electron Based. . . . . . . . . 19 2.3.1 Flash Cell: Floating Gate Technology . . . . . . . . . . . . . . 20 2.3.2 Flash Cell: Charge Trapping Technology. . . . . . . . . . . . 22 2.3.3 Two Bit per Cell Nitride ROM: Charge Trapping Technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 2.3.4 Non-Electron Based Cells: PCRAM, MRAM, FeRAM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 2.3.5 Summary: Non-Volatile Cell . . . . . . . . . . . . . . . . . . . . 30 2.4 Flash Memory Array . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 2.4.1 Array of Cells: Threshold Voltage Distributions. . . . . . . 32 2.4.2 NOR Array: Direct Cell Access . . . . . . . . . . . . . . . . . . 34 2.4.3 Virtual Ground NOR Array . . . . . . . . . . . . . . . . . . . . . 46 2.4.4 NAND Array: Indirect Cell Access. . . . . . . . . . . . . . . . 54 2.4.5 Summary: Flash Array Architecture . . . . . . . . . . . . . . . 62 xi

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