Ferroelectric Devices (Materials Engineering, 16)

321 Pages·2000·34.175 MB·English

by  Kenji Uchino

1. Cn eramEic n gineeringP :r opertiesP ,r ocessinga ,n d Use iDn esign.
d Edition, Revised and Expanded, DavidW . rich er so^
2. ~ntro~uctioton Engineering Materials: Behavior, Properties, and Selection, G.
olidifiedA lloys:P rocesses * ~truct~resA pplications, ed~edb y
0
inforced Ceramics for Structural Applications, ~avjd
5. Thermal Analysis of Ceramics, robe^ F. S~eyer
tion and Wear of Ceramices,d ~edby Said~ ahan~jr
hanical Properties of Metallic Composites, edjfed S by~ o~jOroch jaj
8. Chemical Processing of Ceramicse, d~edby B~~ra1n. Lde e and ~ ~ ~J. aA. r d
Pope
Handbook of Advanced Materials Testing, ed~edb y ~ic~o/aP,s C ~ere~j-
9.
sjnoa~n d Paul ~.C here~jsino~
IO. Ceramic Processing and Sintering,M . N. R a h ~ ~ a n
11. Composites Engineering Handbook,~ d ~bey Pd. K.
12. Porosity of Ceramics, RoyW . Rice
13. Intermetallic and Ceramic Coatings, ed~edb y ~afendraB . aho of re and 7: S.
on Techniques: Technological Applications, ed~edb y K. 6.
eering Materials: Impact, Reliabili~a, nd Control, ed~edb y
International Centefro r
Actuat~rs a n^ Trans~ucers~ I C ~ ~ ~
T ~Peen nsylvania State ~niversity
~niversityP ~ rP~en,n sy lvani~
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Ferroelectrics can be utilized in various devices such~ ags h-pe~~ivdiietleyc trics,
pyroelectrsie cn sorps i,e zoelectrdi ecv iceesl ,e ctrooptdi ecv icaen Psd T C
components.T hei ndustriesa rep roducingl argea mountso fs impled evices,e .g.
ceramic capacitors, piezoelectric igniters, buzzers and PTtCh e~storcso ntinuously.
But until now ferroelectric devices have failed to reach co~ercializationin more
functionalc ases.I nt hel ights ensor,f ore xample,s emiconductivem aterialsa re
superior to ferroelectrics in response speed and sensitivity. Magnetic devices are
much more popular in the memory field, and liquid crystals are typically used for
optical displays. Ferroelectric devices often fail to be developed in the cases where
competitive materials exist. This is mainly due to a lack of systematic acc~ulation
of hndamental knowledge of the materials and developmental experiences on the
devices.
Duringm y1 2-yeart eaching periodo n" FerroelectricD evices," I foundt hatn o
suitable textbook is available in this particular field, except some professional books
likem ulti-authorp aperc ollections.H ence, I decidedt ow ritea s ingle-authored
textbook based on my lecture notes, including my device development philos~phy.
Thits e xtbooki n troducets h et h eoreticabl ackgroundo ff e rroelectricd evices,
practical materials, device designs, drivelcontrol techniques and typical applications,
andl ooksf orwardt ot he hture progressi nt hisf ield.T hought hed iscoveryo f
ferroelectricity is relativelyo ld,s incet hed eviced evelopmenti sr eallyn ewa nd
interdisciplinary, it is probably impossible to cover all the recent studies in a limited-
page book. Therefore, I selected only important and basic ideas to understand how
tod esigna ndd evelopt hef erroelectricd evicesp, uttinga p articularf ocuso n
thidthick film devices.
Lemt e introducet h ec ontentsC. hapte1ri n troducest h eo veralbl ackground,
"General view of ferroelectrics," followed by the theoretical background in Chapter
2, "Mat~ematicalt reatmento ff erroelectrics."C hapter 3, "Deviced esigninga nd
fabricationp rocesses,"p rovidesp racticadl esigninga ndm anufacturingo ft h e
devices.C apacitora pplicationsa red escribedi nC hapter 4, "Highp ermittivity
devices,"C hapters 5 and 6 treat thidthick filma pplications,i .e." Ferroelectric
memory devices" and "Pyroelectric devices," respectively. Chapter 7, "Piezoelectric
devices" deals with piezoelectric actuators and ultrasonic motors as well as acoustic
transducers and piezoelectric sensors. Optical devices such as light valves, displays,
wave guides and bulk photovoltaic devices are describeidn Chapter 8, "Electrooptic
devices." In Chapters 9 and 10, we learn basic concepts of "PTC materials" and
...
111
iv Preface
"Compositem aterials,"a ndt heird evicea pplications.F inallyi nC hapter1 1w e
discuss "Future of ferroelectric devices," in which the rnarket size is estimated, and
the author's strategy for developing bestseller devices is introduced.
This textbook was written for graduate students and industry engineers s ~ dor~ g
working in the fields of electronic materials, optical materials and co~~cations,
precision machinery and robotics. Though this text is designed for a course with
thirty 75-~ninutele ctures, the reader can learn the content by himselflherself aided by
the availability of examples and problems.
Critical review and content corrections on this book are highly appreciated. Send the
i ~ f o ~ t idoirnec ted to Kenji Uchino at 134 Materials Research Laboratory, The
Pennsylva~aS tateU niversity,U niversityP ark,P A1 6802-4800.F ax:8 14-865-
2326, E-mail: KenjiUchino~PSU.EDU
For the reader who needs detailed info~tionon smart piezoelectric actuators and
sensors, "Piezoelectric Actuators and Ultrasonic Motors("3 49 pages) authored byK .
Uchino, (Kluwer Adademic Publishers 1997) ries comended.
Event h oughIa mt h es olea uthoro ft h isb ooki, nt everthelessi n cludest h e
contributions ofm any others. I express my gratitude tom y ICAT center faculty who
have generously given me their advice and help during the writing, particularly to Dr.
Uma~~eleg~wdhuo, w orked out all the problems. Dr. Yulcio Ito (now in Rutgers
University) allowed me to use some paragraphs and figures from our coauthored
papers. Specific acknowledgement is given to Professor Jape Giniewicz, Indiana
Universi~o f Pennsylvania, who reviewed and criticized the entire manuscript and
provided linguistic corrections.
Kenj i Uchino
iii
vii
viii
ix
1
2
1.2 Origin of ~pontaneousP olarization 4
1.3 Origin of Field ~nducedS train 9
1.4 Electrooptic EBect 13
1 .S Example of F1e8r roele ctrics
1.6 Applications of Fe~oelectrics 20
L
2.1 TenRse oprr esentation of PhysPirc oapl erties 23
~hen o2~.2e nolo~y of Ferroelectricity 38
Resigning3 .1 Material 57
3.2 Fa~ricationP rocesses of Ceramics 67
Resigning 3.3 Device 73
3.4 SiGzer ain Effect on Ferroelec~icity 84
3.5 FDeroromeal einct ric ~ontributions 89
105 Capacito4r.s1 Ceramic
Capacitors 4 .2 Chip 106
4.3 Hybrid Substrate 108
4.4 Relaxor Fe~oel~trics 108
119
126
V
Contents
131
.2 Temperat~e~n~Laigrhet~ S ensors 138
6.3 Infrared Image Sensors 139
145
158
iezoelectric Vib 161
174
176
180
197
22 1
222
230
239
243
248
250
255
10.2 Composite Effects 257
260
269
275
276
279
283
3~~
ion
emanent ~ol~zation
yroelectric coefficient
Lorentz factor
elative ~e~ittivitdyie,l ectric constant
tran§ition t~mPerature)
Strain
Spontaneous strain
Stress
Electro§tric~vec oefficients
mechanical co~plingfa ctor
tran§mi§§ion coefficient
ive index
lmary electrooptic coefficient
Secondary electrooptic coefficient
hase ret~dation