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Diffraction grating characterisation for cold-atom experiments J. P. McGilligan, P. F. Griffin, E. Riis and A. S. Arnold Dept. of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK We have studied the optical properties of gratings micro-fabricated into semiconductor wafers, which can be used for simplifying cold-atom experiments. The study entailed characterisation of diffractionefficiencyasafunctionofcoating,periodicity,dutycycleandgeometryusingover100dis- tinctgratings. Thecriticalparametersofexperimentaluse,suchasdiffractionangleandwavelength are also discussed, with an outlook to achieving optimal ultracold experimental conditions. 6 I. INTRODUCTION The diffraction grating is composed of a combination 1 of reflecting elements arranged in a periodic array, sep- 0 Coldatomtechnologieshavedominatedprecisionmea- arated by a distance comparable to the wavelength of 2 surements in recent years [1, 2, 3, 4]. The preference study, as seen in Fig. 1. The separation between the re- n for cold atoms arises from the increased interrogation flective elements are troughs etched into the substrate, a timethatisprovidedinanisolatedenvironment,allowing which is directly analogous to transmissive classical slits J higherprecisiontobetakenfromameasurement[7]. Al- [20]. 7 thoughmanymetrologicalexperimentsbenefitfromcold When studying a diffraction grating of period d with 2 atom measurements [8, 9], the standard apparatus re- incident light of wavelength λ at an angle α to the grat- ] quiredistypicallytoolargeforportabledevices. Despite ing normal, then a diffracted order will be produced h the fact that current miniaturised metrological devices at angle θ determined by the grating equation, mλ = p have proven highly successful [10], their precision is lim- d(sinα+sinθ), where m is an integer representing the - m ited by their use of thermal atoms. diffracted order concerned. For incident light perfectly Thesourceofcoldatomsinmostexperimentsisastan- perpendicular to the grating (α = 0), the grating equa- o t dard magneto-optical trap (MOT) [14, 15] which utilise tion simplifies to the Bragg condition, a 6independentbeams,eachwiththeirownalignmentand s. polarisation optics. We have previously demonstrated a mλ=dsinθ, (1) c device that collects cold atoms in an optically compact si geometry using a grating magneto-optical trap, GMOT where θ is now the angle of diffraction. y [11,12],whichisanextensionoftheequivalentMOTus- Fig. 1 shows how the total electric field can be repre- h ing a tetrahedral reflector [13]. The simple design of the sented as the sum of diffracted orders from the trough p [ GMOTreducesthestandard6-beamMOTexperimental and peak of the grating, which are weighted by their rel- set-uptooneincidentbeamuponasurface-etched,silicon ativesizespdand(1−p)d,respectivelyandphaseshifted 1 wafer diffraction grating. The grating uses the incident by the path difference between AB =d/2sinθ (=mλ/2 v light and first diffracted orders to produce balanced ra- from Eq. 1) and CDE =h(1+cosθ), i.e.: 1 3 diation pressure, allowing us to trap a large number of E ∝p+(1−p) exp[iπ(m−2h(1+cosθ)/λ)], (2) 4 atomsatsub-Dopplertemperatures[12,16]. Thisgreatly tot 7 reduces the scale and complexity of optics used in laser where h is the etch depth, and λ the wavelength of inci- 0 cooling apparatus to facilitate applications [17, 18, 19]. . dent light. 1 In this paper we look to introduce a simple diffrac- Usingthiselectricfield,inthecaseof50/50dutycycle, 0 tion theory to assist the optical characterisation of these 6 micro-fabricated diffraction gratings, with a view to aid- p=1−p=0.5, and a 1D grating then the intensity effi- 1 ing future cold atom quantum technologies. This study ciency, η1, in the first diffracted orders can be calculated : via v will be aimed towards an understanding of how metal Xi coatings,periodicity,dutycyclesandgeometryaffectthe |1+exp[iπ(1−2h(1+cosθ)/λ)]|2 diffractionefficiency,acrucialparameterforcreatingbal- η =R , (3) r anced radiation pressure. Finally, we discuss additional 1 8 a parameters that have proven critical during our studies. whereRisthereflectivityofthecoatingmetalused,and the equation is valid for the symmetric diffraction orders m=±1. II. THEORY: DIFFRACTION GRATINGS Eq. (3) now provides a simple relation between the intensity of the light diffracted in the first order relative Previouseffortsmadetowardsproducingareliablethe- to the period of the grating. A simple model could thus ory of diffraction require a typically complex derivation assume that, for perfect diffraction and no second order, of Maxwell’s equations [5, 6]. However, here we look to the zeroth order can be described by, introduceasimplified,phasebasedtheoryfordetermina- tion of the first and zeroth order diffraction efficiencies. 2η +η =R, (4) 1 0 2 d/2 w i B w θ d θ C A h E D θ pd (1-p)d FIG. 1. Surface of a binary diffraction grating of etch depth h, diffraction angle θ, period d and duty cycle p and 1−p for trough and peak respectively. If the etch depth, h, is designed such that h = λ /4, no adhesion layer was required for an Al grating. These d where λ is the design wavelength and cosθ ≈ 1 then arethensputtercoatedwithavariablethicknesscoating d Eq. (3) simplifies further to, layer. The geometry of the etch can vary between one dimensional, 1D, and two dimensional, 2D, gratings as (cid:16)1+exp(iπλB)(cid:17)2 illustratedinthescanningelectronmicroscopeimagesin η =R 2λ (5) Fig. 2 (a) and (b), respectively. The 2D grating pro- 1 8 duces four first order diffracted terms compared to the two produced in a 1D geometry. To apply these first order diffraction efficiencies, η , to 1 2D gratings we simply multiply by 1/2, to account for To produce the ideal grating, a thorough investigation twice as many diffracted beams. of how fabrication parameters affect the diffraction effi- ciency is required. The most logical way to determine To determine how these diffracted efficiencies relate the optimum settings for future diffraction gratings was to creating a balanced radiation pressure we must ac- tocommissiontheconstructionofoveronehundred2mm count for the vertical intensity balance between the in- × 2 mm gratings, produced with a variety of periodicity, cident, I , and the diffracted orders, I , described as i d bIIdieam= wη1awiwsdit a=ndcoηws1θ,iswhtheeredwiffira(cFtiegd. 1b)eaims twheaisint.cidTehnet dinugtythciyccklneess,sg.eoTmheetbriecsatlmlaeytohuotd, ctooatminegasmureetatlhaenpdrocpoaert-- d ties of the large quantity of diffraction gratings was to radial balance is not considered as this is automatic if construct a dedicated testing station with incident col- the beam centre is positioned on the grating center. The limated, circularly polarised light of known wavelength net incident intensity on the grating I(1 − η ) is ide- i 0 and power, as can be seen in Fig. 2. ally balanced with the component of the diffracted in- tensity which is anti-parallel with the incident light, i.e. Oncethegratingwasmountedintheset-up,thezeroth NI cosθ where N accounts for the number of diffracted order was carefully aligned to ensure the incident light d firstorders,whichsimplifiestoNIη . Thus,thebalance was perpendicular to the grating. The inherent need for i 1 between incident and diffracted light, perpendicular to this alignment will be discussed later. The position of the grating and taking the zeroth order into account, the diffracted order was noted, and θ measured. This is described mathematically through the dimensionless allowed the periodicity to be inferred through the Bragg quantity, condition, Eq. (1). The diffracted order is measured for diffracted power, then passes through a λ/4 plate and η =Nη /(1−η ) (6) PBStomeasureanydegradationofpolarisationthatmay B 1 0 have occurred during diffraction. The results of this in- which is ideally one. vestigation can be seen in Figs. 3 and 4, and in greater detail in their associated Appendix Figs. 7 and 8 respec- tively. III. EXPERIMENT: GRATING Fig. 3 depicts how the relative diffracted power and CHARACTERISATION beam intensity balance vary with diffraction angle, θ for 1D and 2D gratings. The circles and squares represent The diffraction gratings used were manufactured with gratingswithspatialdimensionetched:unetcheddutycy- a dry etch into silicon wafers and patterned using elec- cles over one grating period of 40%:60% and 50%:50% tron beam lithography [21, 22] to an ideal etch depth of respectively. The blue and red fits are derived from Eq. h = λ /4 (λ =780 nm) and chosen periodicity. The (3)and(4)forthefirstandzerothdiffractedorder,where B B wafer on which the Au gratings were etched is composed R =0.75 to account for the 98% reflectivity of gold and of silicon topped with 10 nm Ti and 20 nm Pt, whereas a loss mechanism found in the gratings, discussed later. 3 (a) (b) 140 (a) 120 (b) 120 ) ) %100 )(%100 )(0 η0 -η 80 10 μm 10 μm 1/(-1 80 1η/(1 60 η 60 4 PBS ,3η1 40 2η1, 40 λ/4 ,η0 ,η0 20 20 (c) +η 1 0 30 40 50 60 70 0 30 40 50 60 70 η 0 Grating θ(deg) θ(deg) Chip θ λ/2 PBS λ/4 FIG.3. Diffractionanglevs.radiationbalanceanddiffraction -η efficiency. (a): 1D gratings with 80 nm Au coating. (b): 1 2D gratings with 80 nm Au coating. Blue and red represent thediffracted(η )andreflected(η )ordersrespectively,with 1 0 FIG. 2. (a) (b): Scanning electron microscope images of 1D blackillustratingtheradiationbalanceforgratingswithduty and 2D gratings respectively. (c): Set-up used for grating cycles of 40%:60% and 50%:50% (circles and squares). efficiencyandpolarisationpurityanalysis. Abbreviationsare λ/2andλ/4forthehalfandquarterwave-platesrespectively, PBS for polarising beam splitter, ηi represents the relative 100 100 power in the ith order of diffraction and θ is the angle of (a) (b) diffraction. 95 95 ) ) % % ( 90 ( 90 η η Bothdatasetsprovidedhaveacoatingof80nmAu,how- n n o 85 o 85 ever, further investigation was carried out into thicker ati ati coatings on Au as well as Al, with both 1D and 2D ge- aris 80 aris 80 ometries. TheresultsprovidedinFig. 3aretypicalofall ol ol P P datasetsrecorded,withanydiscrepancydiscussed,how- 75 75 ever associated Appendix Figs. 7 and 8 provide detailed diffractionefficiencyandpolarisationpurityinformation, 70 70 30 40 50 60 70 30 40 50 60 70 respectively, for 1D and 2D gratings with two different θ(deg) θ(deg) thicknesses of gold and aluminium coating. Moreover, Fig. 7 also shows that – for the 1D gratings – gold with FIG. 4. Diffraction angle vs. polarisation purity. (a): 1D a thin 20nm alumina coating has similar reflectivity to gratingswith80nmAuandAluminalayer. (b): 1Dgratings plain gold. The purpose of the alumina coating was to with80nmAu. AssociatedAppendixFig.8providesdetailed introduce a layer between the Au surface of the grat- polarisation efficiency information for 1D and 2D gratings ing and the Rb metal vapour inside the vacuum system, with two different thicknesses of gold and aluminium coat- which corrodes the Au. ing. Fig.8alsoshowstheeffectofthe20nmaluminacoating The first point of interest is the decrease of the forthreesetsof1Dgratingchips. Inallimagesdutycyclesof diffracted order relative to diffraction angle. As the first 40%:60% and 50%:50% are indicated by circles and squares, order decreases, the light in the zeroth order increases respectively. at the same rate, maintaining a close to constant to- tal power. This decay is weaker in the gratings with 40%:60% duty cycle, making this the preferable choice modelling will be provided in Ref. [23]. to 50%:50% duty cycle. Analysis of experimental data Fig. 3 also illustrates the balance of light force from proved that a thicker coating material causes no notable Eq. (6) for the respective geometry of the gratings in- change in the 1D gratings. However, the diffraction ef- tendeduse,asafunctionofdiffractionangle. Thedashed ficiency was seen to increase by ≈ 10% when twice the line at 100% represents axial balance between the inci- coating thickness was applied to 2D gratings. A gold dentdownwardbeamanddiffractedupwardorders. This coating produces a stronger diffracted order than that of balancingforceisnotablyhigherinthe1Dgratingscom- thealuminiumofsimilarcoatingdepthduetothehigher pared to the 2D gratings as the 1D gratings only diffract reflectivity of gold. The results from the duty cycle are into 2 beams rather than 4. However, with appropriate conclusive that 40%:60% duty cycle produces a lower re- filtering of the incident beam, this can be overcome to flected order and higher diffraction efficiency. The rea- produce well balanced radiation forces [16] required for soning for this is not completely understood, but further laser cooling [24, 25]. Using a 4 beam configuration with 4 a linear grating provides close to ideal balance already Ohmicheatingwasappliedthrougha1.5kΩresistorther- without need for further adaptations to the apparatus. mally attached to the back of the grating, separate from The results are typical of 1D and 2D gratings. Test- thethermistor. Thisresistorwasconnectedinseriestoa ing was also carried out on Au coated gratings with a voltage supply to deposit known amounts of power onto top layer of alumina. Although there was no difference the grating, whilst measuring the heating rate. This in diffraction efficiency between the gratings with and Ohmicheatingratewasthenmatchedtothatofthelaser without the alumina, the additional layer was observed heatingtodeterminetheamountoflaserpowerabsorbed todegradethepolarisationpurityofthediffractedorder, by the grating during the heating process. Fig. 4. Inordertoaccountforthermalgradientsintheareaof Thepolarisationpurityηreferstotheratioofcorrectly thegrating, themeasurementprocedurewasalsocarried handed circular light (for MOT operation) to total light out for a plane Au coated wafer. Since plain Au has a after the polarisation analyser PBS (Fig. 2c) in the first known3%absorptionat780nm[26]wecouldusethisto diffractedorder. Whenmeasuredagainstperiodicity,this account for thermal gradients in the measurement area, puritywastypicallyabove95%fora40%:60%dutycycle thatcouldthenbeappliedtothegratingdata. Applying (circles). Thelowerdutycycleof50%:50%(squares)con- this correction factor results in 12±2 % of incident light sistently produced a weaker purity, which was noted to being absorbed by the diffraction grating. worseninthecaseofanaluminacoating. Thissideeffect Afurtherstudyintothepossibilityofthemissinglight of using alumina coating could be mildly detrimental to being scattered was carried out to see if fabrication im- experiments requiring in-vacuo gratings as the trapping perfections were projecting light into unwanted diffrac- force is proportional to 2η−1. [11]. tion angles [27]. This was carried out by taking long exposure images around a 90◦ plane of diffraction and normalising the range of exposure times to determine the relative power in an minuscule peaks found. The IV. EXPERIMENT: LOST LIGHT datafromthisprovidedthat<1%oflostlightwasbeing scattered by the grating. As has been pointed out with the diffraction efficiency data, the total power measured in the diffracted orders fell short of the incident power by ≈18 %. The theoret- V. EXPERIMENT: CRITICAL PARAMETERS ical reasoning for this can be conceived as shadowing of thebeam/diffractionlosses inthepitsofthe gratingand isdiscussedinmoredetailin[23]–herewediscussexper- Whenimplementingthediffractiongratingintoanex- imentmeasurementofthelosses. Aninitialinvestigation perimentalset-up, itismountedperpendiculartothein- intotheelusivelightwascarriedoutthroughtheinvesti- cident beam, however, the extent to which this angle of gationoftheabsorptionprofileofagratingbymeasuring incidence can be varied is an important consideration. the transfer of light to heat. For this, a small thermistor We investigated the angle sensitivity using the same set- was well insulated to the back of a 4 mm × 4 mm Au up as in Fig. 2 (c), with variable tilt applied to the coated diffraction grating, to read out the heating rate grating mount. Whilst in this configuration, a known of the grating with a known incident laser power. This amount of light was incident upon the grating, held at absorption rate can be seen in Fig. 5. a variable tilt angle whilst the diffracted orders where To calibrate the grating heating to a known power, measured. This procedure was carried out for both 1D and 2D gratings, the results of which are seen in Fig. 6 (a) - (b). 8 The blue and red data sets represent the opposite first diffractedorders,withblackrepresentingthezeroth,with best fitting lines and parabola applied. Fig. 6 (a)- (b) 6 demonstrates that a small deviation from 90◦ will sym- metrically imbalance the first diffracted orders, and in- ) K4 ( crease the unwanted zeroth order. This asymmetry vs T Δ angle is markedly more for 2D gratings (b) in compari- 2 son to 1D gratings (a). Itwouldalsobeofimportancetoknowhowthediffrac- tion gratings’ diffracted efficiency varies with the wave- 0 length of incident light, as a wide bandwidth of wave- 0 20 40 60 80 100 lengths could unlock alkaline earth metals as possible Time(s) species to be used in the grating MOT configuration. Additionally,knowingthedependenceuponλwouldalso FIG.5. Absorptionrateof1DAucoatedgratingheatedwith provideunderstandingofetchdepth,whereh=λ/4. For laser light (red) and calibrated with Ohmic heating (dashed this investigation the same set-up was used as in Fig. 2, blue). with 5 different lasers, covering a range of wavelengths 5 (a) (b) 120(c) 40 20 %) ) ) (100 % % ) (030 (015 -η0 80 η η 1 b ,-η120 ,-η110 3η/(1 60 Na Li KR Cs ,+η110 ,+η1 5 ,η1 40 ,0 20 η 0 0 0 -4 -2 0 2 4 -4 -2 0 2 4 600 700 800 900 1000 Tiltθ(deg) Tiltθ(deg) Wavelength(nm) FIG. 6. Left: The grating angle tilt vs. the power in the relative diffracted orders with simple linear/parabolic fits for (a): Al 1D grating, d=1478 nm. (b): Au 2D grating, d=1056 nm. (c): Using the same grating as in (a), the wavelength of incident light is varied and recorded against the powers of first and zeroth diffracted orders and fit against theory from Eq. (5). Black data points represent the intensity balance from Eq. (6). The same set-up as in Fig. 2 was used, except the λ/4 wave-plates were replaced by Fresnel rhombs due to their achromatic retardance. seen in Fig. 6 (c). The red and blue data points de- purity has been noted. However, the efficiency of the pict the measurements of first and zeroth diffracted or- weaker polarisation, with the correct duty cycle, does ders, with the fits derived from Eq. (5). The black data not hinder the creation of a MOT. pointsagaindepicttheintensitybalancefromEq.(6). As Finally, the critical parameters discussed demonstrate is illustrated, the grating would deliver reasonably bal- that, when implemented experimentally, the grating anced cooling within ±200nm of the design wavelength should be as close to perfectly perpendicular as possible of 780nm. to maintain balance between the diffracted orders, es- pecially for the 2D gratings. The study of wavelength demonstrates broadband diffractive efficiency, opening VI. CONCLUSIONS AND OUTLOOK the door to the cooling of elements on multiple atomic transitions. In summary, we have presented our findings on pro- VII. FUNDING ducingnextgenerationdiffractiongratingsforcoldatom experiments. Thisstudyhasillustratedthepreferredfab- EPSRC (EP/M013294/1); DSTL (DSTLX- ricationparametersforoptimisingthegratingdiffraction 100095636R); ESA (4000110231/13/NL/PA). efficiency and polarisation purity. We conclude that future gratings should be created with a higher duty cycle, as was seen from our study between 50%:50% and 40%:60% duty cycles. The study of coating thickness has also demonstrated that for the VIII. APPENDIX: CHARACTERISING GRATING DIFFRACTION AND POLARISATION 2D geometry the thicker coating metal is preferable for EFFECTS VS. COATING higher diffraction efficiency. If an additional coating of alumina is placed on top of the grating for use within a vacuum system then a degradation of the polarisation Please see Figs. 7 and 8 after the references. [1] M. Takamoto, F. L. Hong, R. Higashi, and H. Katori, 038501 (2011). “An optical lattice clock,” Nature 435, 321-324 (2005). [4] C. Gross, T. 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Opt. 33, 4273-4285 (1994). 7 1Ddata 200nmAl 100nmAl 180nmAu 80nmAu 140 140 140 140 )120 )120 )120 )120 % % % % )(0100 )(0100 )(0100 )(0100 η η η η 1- 80 1- 80 1- 80 1- 80 η/(1 60 η/(1 60 η/(1 60 η/(1 60 3 3 3 3 ,1 40 ,1 40 ,1 40 ,1 40 η η η η ,η0 20 ,η0 20 ,η0 20 ,η0 20 0 0 0 0 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 θ(deg) θ(deg) θ(deg) θ(deg) 1D80nmAuwithAluminadata 195nmdepth 200nmdepth 170nmdepth 140 140 140 ) ) ) %120 %120 %120 η)(0100 η)(0100 η)(0100 - - - 1/(1 80 1/(1 80 1/(1 80 3η 60 3η 60 3η 60 ,η1 40 ,η1 40 ,η1 40 ,η0 20 ,η0 20 ,η0 20 0 0 0 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 θ(deg) θ(deg) θ(deg) 2Ddata 200nmAl 100nmAl 180nmAu 80nmAu 120 120 120 120 ) ) ) ) % % % % )(0100 )(0100 )(0100 )(0100 η η η η - 80 - 80 - 80 - 80 1 1 1 1 /(1 60 /(1 60 /(1 60 /(1 60 η η η η 4 4 4 4 1, 40 1, 40 1, 40 1, 40 η η η η 2 2 2 2 ,0 20 ,0 20 ,0 20 ,0 20 η η η η 0 0 0 0 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 θ(deg) θ(deg) θ(deg) θ(deg) FIG. 7. Diffraction efficiency for 1D (upper row), 1D alumina coated (middle row) and 2D (lower row) gratings, color scheme as per Fig. 3. 8 1Ddata 200nmAl 100nmAl 180nmAu 80nmAu 100 100 100 100 95 95 95 95 ) ) ) ) % % % % ( 90 ( 90 ( 90 ( 90 η η η η n n n n o 85 o 85 o 85 o 85 ati ati ati ati s s s s ari 80 ari 80 ari 80 ari 80 ol ol ol ol P 75 P 75 P 75 P 75 70 70 70 70 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 θ(deg) θ(deg) θ(deg) θ(deg) 1D80nmAuwithAluminadata 195nmdepth 200nmdepth 170nmdepth 100 100 100 ) ) ) % 90 % 90 % 90 ( ( ( η η η n n n o 80 o 80 o 80 ati ati ati s s s ari ari ari ol 70 ol 70 ol 70 P P P 60 60 60 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 θ(deg) θ(deg) θ(deg) 2Ddata 200nmAl 100nmAl 180nmAu 80nmAu 100 100 100 100 95 95 95 95 ) ) ) ) % % % % ( 90 ( 90 ( 90 ( 90 η η η η n n n n o 85 o 85 o 85 o 85 ati ati ati ati s s s s ari 80 ari 80 ari 80 ari 80 ol ol ol ol P 75 P 75 P 75 P 75 70 70 70 70 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 30 40 50 60 70 θ(deg) θ(deg) θ(deg) θ(deg) FIG.8. Polarisationpurityfor1D(upperrow),1Daluminacoated(middlerow)and2D(lowerrow)gratings,colorschemeas per Fig. 4.

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