Diamond Films and Coatings PDF
Preview Diamond Films and Coatings
DIAMOND FILMS AND COATINGS Development, Properties, and Applications detidE yb Robert F. Davis htroN aniloraC etatS ytisrevinU tnemtrapeD fo slairetaM ecneicS dna gnireenignE ,hgielaR htroN aniloraC NOYES PUBLICATIONS Park Ridge, New Jersey, U.S.A. thgirypoC Q 1993 yb seyoN snoitacilbuP oN trap fo siht koob yam eb decudorper ro dezilitu ni yna mrof ro yb yna ,snaem cinortcele ro ,lacinahcem gnidulcni ,gniypocotohp gnidrocer ro yb yna -amrofni noit egarots dna laveirter ,metsys tuohtiw noissimrep ni gnitirw morf eht .rehsilbuP yrarbiL fo ssergnoC golataC draC :rebmuN 92-35011 :NBSI O-8155-1323-2 detnirP ni eht detinU setatS dehsilbuP ni eht detinU setatS fo aciremA yb seyoN snoitacilbuP lliM ,daoR Park ,egdiR weN yesreJ 07656 1098765432 yrarbiL fo ssergnoC noitacilbuP-ni-gnigolataC Data dnomaiD smlif dna sgnitaoc : ,tnempoleved ,seitreporp dna snoitacilppa I detide yb treboR .F .sivaD .p .mc sedulcnI lacihpargoilbib secnerefer dna .xedni NBSI O-8155-1323-2 1. ,sdnomaiD .laicifitrA 2. dnomaiD niht .smlif .I ,sivaD treboR .F treboR( ,)retsoF 1942- . TP8735D5D52 1992 )ucd--88.’666 92-35011 PIC Editors natnioR .F ,hahsnuB ytisrevinU of ,ainrofilaC soL selegnA (Series Editor) Gaty E. ,eriuGcM scinortceleorciM retneC of htroN aniloraC (Series Editor) nehpetS .M ,leganssoR MBI samohT .J nostaW hcraeseR retneC (Consulting Editor) cinortcelE Materials and Process Technology NOITISOPED TECHNOLOGIES FOR SMLIF DNA COATINGS: yb Rointan F. hahsnuB te al LACIMEHC ROPAV NOITISOPED FOR :SCINORTCELEORCIM yb Arthur Sherman ROTCUDNOCIMES SLAIRETAM DNA SSECORP TECHNOLOGY :KOOBDNAH edited yb yraG .E McGuire DIRBYH TIUCRICORCIM TECHNOLOGY :KOOBDNAH yb James J. Licari dna dranoeL R. Enlow HANDBOOK OF THIN MLIF NOITISOPED SESSECORP DNA :SEUQINHCET edited yb Klaus .K fargeuhcS RETSULC-DEZINOI MAEB NOITISOPED DNA :YXATIPE yb Toshinori Takagi NOISUFFID ANEMONEHP NI THIN SMLIF DNA CINORTCELEORCIM :SLAIRETAM edited yb ardneveD Gupta dna luaP .S oH HANDBOOK OF NOITANIMATNOC CONTROL NI :SCINORTCELEORCIM edited yb Donald L Tolliver HANDBOOK OF NOI MAEB GNISSECORP TECHNOLOGY: edited yb Jerome J. Cuomo, nehpetS .M Rossnagel, dna Harold R. namfuaK CHAFtACTERlZATlON OF ROTCUDNOCIMES emuloV-SLAIRETAM :1 edited yb yraG .E McGuire HANDBOOK OF AMSALP GNISSECORP TECHNOLOGY: edited yb nehpetS .M Rossnagel, Jerome J. Cuomo, dna Wrlliam D. Westwood HANDBOOK OF ROTCUDNOCIMES NOCILIS TECHNOLOGY: edited yb William C. ,araM’O treboR .B Herring, dna eeL .P tnuH HANDBOOK OF REMYLOP COATINGS FOR dnoceS-SCINORTCELE Edition: yb James J. Licari dna aruaL .A Hughes HANDBOOK OF SPUTTER NOITISOPED TECHNOLOGY: yb akatoyiK Wasa dna Shigeru awakayaH HANDBOOK OF ISLV :YHPARGOHTILORCIM edited yb William .B Glendinning dna John N. Helbert YRTSIMEHC OF SUPERCONDUCTOR :SLAIRETAM edited yb Terre11 .A harednaV LACIMEHC ROPAV NOITISOPED OF TUNGSTEN DNA TUNGSTEN :SEDICUIS yb John E.J. Schmitz YRTSIMEHCORTCELE OF SROTCUDNOCIMES DNA :SCINORTCELE edited yb John ydraHcM dna knarF Ludwig (continued) V vi Series HANDBOOK OF LACIMEHC ROPAV :NOITISOPED yb hguH .0 Pierson DNOMAID SMLIF DNA COATINGS: edited yb treboR F. sivaD ELECTRODEPOSITION: yb Jack W. Dini Ceramic and Other Materials-Processing and Technology SOL-GEL TECHNOLOGY FOR THIN ,SMLIF ,SREBIF ,SMROFERP SCINORTCELE DNA YTLAICEPS :SEPAHS edited yb Lisa C. Klein REBIF DECROFNIER CIMAREC :SETISOPMOC yb .S.K Mazdiiasni DECNAVDA CIMAREC GNISSECORP DNA TECHNOLOGY-Volume :1 edited yb Jon .P.G Binner FRICTION DNA WEAR TRANSITIONS OF :SLAIRETAM yb reteP J. ualB KCOHS WAVES FOR LAIRTSUDNI :SNOITACUPPA edited yb Lawrence .E rruM LAICEPS GNITLEM DNA GNISSECORP TECHNOLOGIES: edited yb .K.G tahB CORROSION OF ,SSALG SCIMAREC DNA CIMAREC SUPERCONDUCTORS: edited yb divaD .E Clark dna Bruce .K Zoitos HANDBOOK OF LAIRTSUDNI SEIROTCARFER TECHNOLOGY: yb nehpetS C. Carniglia dna Gordon L anraB CIMAREC SMLIF DNA COATINGS: ediied yb John .B Wachtman dna Richard .A Haber Relsted Ties SEVISEHDA TECHNOLOGY :KOOBDNAH yb Arthur H. kcordnaL HANDBOOK OF THERMOSET :SCITSALP edited yb yendiS H. Goodman ECAFRUS NOITARAPERP SEUQINHCET FOR EVISEHDA :GNIDNOB yb dnomyaR F. Wegman GNITALUMROF SCITSALP DNA SREMOTSALE YB COMPUTER: yb Ralph D. Hermansen HANDBOOK OF EVISEHDA DEDNOB STRUCTURAL :RIAPER yb dnomyaR F. Wegman dna Thomas R. Tulles CARBON-CARBON SLAIRETAM DNA :SETISOPMOC edited yb John D. yelkcuB dna naD D. eidE Contributors James E. Butler Roland Haubner ecafruS/saG scimanyD noitceS ehcsinhceT tatisrevinU lavaN hcraeseR yrotarobaL etutitsnI ruf ehcsimehC ,notgnihsaW DC eigolonhceT rehcsinagrona Stoffe Frances G. Celii ,anneiV airtsuA saxeT ,stnemurtsnI .cnI ,sallaD XT Richard J. Koba amsalP ,mrehT .cnI Kalyan Kumar Das St. ,grubsreteP LF eboK leetS hcraeseR seirotarobaL Hua-Shuang Kong cinortcelE slairetaM retneC eerC ,hcraeseR .cnI hcraeseR elgnairT ,kraP NC ,mahruD NC Robert F. Davis Benno Lux htroN aniloraC etatS ytisrevinU ehcsinhceT tatisrevinU tnemtrapeD of slairetaM ecneicS etutitsnI ruf ehcsimehC dna gnireenignE eigolonhceT rehcsinagrona ,hgielaR NC Stoffe ,anneiV airtsuA Jeffrey T. Glass htroN aniloraC etatS ytisrevinU Kurt Nassau tnemtrapeD of slairetaM ecneicS A451 aeniuG wolloH daoR dna gnireenignE ,nonabeL NJ ,hgielaR NC ix x srotubirtnoC rheP E. nossrheP Max N. Yoder ecafruS/saG scimanyD noitceS scinortcelE margorP lavaN hcraeseR yrotarobaL Office of lavaN hcraeseR ,notgnihsaW DC ,notgnilrA VA leahciM oenniP Wei Zhu eboK leetS hcraeseR htroN aniloraC etatS ytisrevinU seirotarobaL tnemtrapeD of slairetaM ecneicS cinortcelE slairetaM retneC dna gnireenignE hcraeseR elgnairT ,kraP NC ,hgielaR NC Linda S. Plano eboK leetS hcraeseR seirotarobaL cinortcelE slairetaM retneC hcraeseR elgnairT ,kraP NC Notice oT eht tseb of eht s’rehsilbuP egdelwonk eht noitamrofni deniatnoc ni siht noitacilbup si ;etarucca ,revewoh eht rehsilbuP semussa on ytilibisnopser ron ytilibail for srorre ro yna secneuqesnoc gnisira from eht esu of eht noitamrofni deniatnoc .niereh laniF noitanimreted of eht ytilibatius of yna ,noitamrofni ,erudecorp ro tcudorp for esu detalpmetnoc yb yna ,resu dna eht rennam of taht ,esu si eht elos ytilibisnopser of eht .resu ehT koob si dednetni for lanoitamrofni sesoprup .ylno ehT redaer si denraw taht noituac tsum syawla eb desicrexe nehw gnilaed htiw ,slacimehc ,stcudorp ro serudecorp hcihw thgim eb deredisnoc .suodrazah trepxE ecivda dluohs eb deniatbo ta lla semit nehw noitatnemelpmi si gnieb .deredisnoc noitneM of edart seman ro laicremmoc stcudorp seod ton etutitsnoc tnemesrodne ro noitadnemmocer for esu yb eht .rehsilbuP Preface ehT citehtnys sdnomaid depoleved yb lairtsudni snoitazinagro ni eht s’0591 dna s’0691 gnisu a noitanibmoc of ,erusserp-hgih -hgih erutarepmet )THPH( seuqinhcet era desu yliramirp ni ,gnittuc gnidnirg dna gnihsilop .snoitacilppa ,revewoH a yteirav of laitnetop snoitacilppa for siht lairetam eriuqer niht smlif dna sgnitaoc hcihw tonnac eb decudorp yb eseht .sdohtem ehT stluser of hcum rellams ,stroffe suoenatlumis htiw eht HPHT ,seiduts ni eht detinU setatS dna aissuR dna denrecnoc htob htiw eht scitenik of eht sisyloryp of suoirav negordyh-nobracordyh serutxim dna htiw eht smsinahcem of noitaelcun dna htworg of dnomaid no dnomaid sdees ta wol serusserp erew deredisnoc ot eb ylno of ”cimedaca“ .tseretni ,revewoH eht noitacilbup of shpargorcim of ylhgih detecaf dna suounitnoc dnomaid ,smlif dna gnimrifnoc lacitylana ,atad ni eht naissuR ,dna ,yltneuqesbus ni eht esenapaJ cifitneics erutaretil ni eht etal s’0791 dna ylrae s’0891 dezylatac laitnatsbus ytivitca ni siht .dleif sihT detluser ni eht tnempoleved dna esu of a yteirav of noitisoped dna noitaziretcarahc seuqinhcet ot eveihca dna yduts dnomaid smlif dna .sgnitaoc ehT esoprup of siht koob si ot edivorp na htped-ni noitanimaxe of detceles scipot denrecnoc htiw citehtnys .dnomaid sihT euqinu lairetam sah neeb deredisnoc from eht sevitcepsrep of lacirotsih ,tnempoleved sti ,seitreporp eht tsetal ni cifitneics stluser gnidrager sti htworg dna noitaziretcarahc dna tneserp dna erutuf .snoitacilppa ehT thgie sretpahc of siht koob era derohtua yb strepxe ni rieht .sdleif ehT laitini retpahc yb redoY sedivorp na detaler-snoitacilppa enotsrenroc for eht .koob selbaT of lla eht major seitreporp of dnomaid era nevig ni noitcnujnoc htiw snoissucsid denrecnoc htiw eht ecnatropmi of eseht vii viii Preface seitreporp ot eht tneserp dna laitnetop tnemyolpme of siht .lairetam gnivaH denimreted eht deen for citehtnys ,dnomaid eht tneuqesbus retpahc yb uassaN sebircsed eht elbaredisnoc stroffe ot poleved siht lairetam htiw na sisahpme no eht ,erutarepmet-hgih erusserp-hgih .hcraeser ehT redniamer of eht koob si denrecnoc htiw dnomaid slairetam nworg yliramirp from eht ropav .esahp ,nossrheP iileC dna reltuB sserdda eht tnatropmi eussi of eht lacimehc smsinahcem gnirrucco nihtiw eht sag esahp hcihw yletamitlu wolla eht noitisoped of siht lairetam rednu -non muirbiliuqe snoitidnoc no suoirav .setartsbus ehT suoirav sdohtem dna latnemirepxe snoitidnoc nihtiw hcihw eno nac niatbo eht reporp esahp-sag yrtsimehc dna gnitluser dnomaid smlif si debircsed yb .aboK xuL dna renbuaH ebircsed eht tekram laitnetop dna tnerruc snoitacilppa of dnomaid ni smret of raew tnatsiser sgnitaoc for a yteirav of .stcudorp ehT ,lacimehc lacisyhp dna larutcurtsorcim noitaziretcarahc of eht wol erusserp dnomaid slairetam saw desu yllaitini ot ecnivnoc eht scitpeks of sti .ecnetsixe yltneuqesbuS ti saw desu ot enimreted eht erutan of eht detisoped lairetam dna ot edivorp noitamrofni for eht noitazimitpo of eht ralucitrap htworg .dohtem ehT retpahc yb ,uhZ gnoK dna ssalG sedivorp na -ni htped weiver of eht sdohtem dna stluser of siht tnacifingis effort. snoitacilppA of dnomaid smlif dna sgnitaoc era won gnieb .dezilaer nI eht lanif owt ,sretpahc ,onalP oenniP dna saD evah nekat eht noitamrofni tnetnoc ni eht koob lluf elcric htiw rieht noissucsid gnidrager htob eht noitacifitnedi of eht tnaveler seitreporp hcihw affect eht tnempoleved of cinortcelenon dna cinortcele snoitacilppa for dnomaid smlif dna eht erutuf hcraeser yrassecen for ytreporp .tnemecnahne evisnetxE stsil of ,sweiver hcraeser srepap dna seihpargoilbib ta eht dne of hcae retpahc osla edivorp ecruoser slairetam for erom deliated .yduts suoremuN slaudividni evah detubirtnoc dna detsissa ni eht noitaraperp of siht .koob I hsiw ot sserpxe ym noitaicerppa yltsrif ot eht srohtua dna rieht sreyolpme ohw detubirtnoc elbaredisnoc effort, emit dna seitilicaf for eht noitareneg of hcae .retpahc I am osla yllaicepse detbedni ot Jeff ssalG ohw dedivorp suoremun ,snoitseggus ecnatsissa dna rohtua .tcatnoc I osla etaicerppa eht ecneitap dna launitnoc tnemegaruocne of egroeG ,atiraN evitucexE rotidE of seyoN ,snoitacilbuP gnirud eht noitelpmoc of lla eht sksat devlovni ni eht gnitide of siht .koob tsaL tub ton ,tsael I hsiw ot dnetxe ym laiceps sknaht ot ym ,efiw ,naJ dna ,rethguad ,anoeL for rieht ecneitap dna for eht emit I dluoc ton dneps htiw meht gnirud siht .rovaedne ,hgielaR htroN aniloraC treboR .F sivaD ,rebmetpeS 2991 Contents 1. DIAMOND PROPERTIES AND APPLICATIONS ............. 1 Max N. Yoder 1.0 The Crystalline Structure of Diamond ............ 1 1.1 enillatsyrC nobraC ........................ 2 0.2 Mechanical and Elastic Properties of Diamond ..... 3 2.1 taeH ............................... 4... 2.2 citsalE sevaW ........................... 7 3.2 ssendraH .............................. 7 4.2 s’gnuoY suludoM ......................... 8 5.2 erutcarF ssenhguoT ....................... 8 6.2 tneiciffeoC of noitcirF ...................... 9 7.2 ytisneD ............................... 01 0.3 Optical Properties of Diamond ................ 11 4.0 Electrical Properties of Diamond ............... 11 5.0 High Temperature and Tribological Applications of Diamond ............................... 14 5.1 Graphitization .......................... 14 5.2 Corrosion and Oxidation ................... 41 3.5 taeH sregnahcxE ........................ 51 4.5 ygolobirT dna ssendraH ................... 61 0.6 Optical Applications of Diamond .............. 19 6.1 Windows .............................. 91 6.2 Optical Matching ........................ 21 6.3 Fresnel sneL ........................... 22 4.6 yaR-X snoitacilppA ...................... 42 0.7 Electra-Optic and Related Applications ......... 25 7.1 Optically Triggered Switches ................ 25 xi xii Contents 7.2 sresaL ............................... 26 8.0 Biological Applications ...................... 26 8.1 Artificial Heart Valves ..................... 26 8.2 Scalpels .............................. 27 8.3 Marine Fouling .......................... 27 References.. ................................. 28 2. SYNTHESIS OF BULK DIAMOND: HISTORY AND PRESENT STATUS ................................ 31 Kurt Nassau 1.0 Introduction .............................. 31 2.0 The Early History of Diamond Synthesis ......... 32 2.1 HistoricalA spects ....................... 32 2.2 Early Diamond Claims .................... 33 2.3 The Diamond Problem .................... 34 2.4 P.W. Bridgman and High Pressure Research .... 36 3.0 The High Pressure Growth of Diamond .......... 40 3.1 The General Electric Diamond Project ......... 40 3.2 H.T. Hall, the First Person to Grow Diamond .... 46 3.3 The High Pressure Synthesis of Diamond Cut ... 49 3.4 High Pressure Single Crystal Growth of Diamond .............................. 53 3.5 Color in Synthetic Diamond ................. 55 4.0 Other Bulk Diamond Synthesis Processes ....... 57 4.1 High Pressure Carbonado .................. 57 4.2 The Shock Wave Process .................. 58 5.0 The Present Status of High Pressure Diamond Growth ............................ 61 References.. ................................. 64 3. CHEMICAL MECHANISMS OF DIAMOND CVD ............ 68 Pehr E. Pehrsson, Frances G. Celii, and James E. Butler 1. O Introduction .............................. 68 2.0 Nucleation ............................... 71 2.1 The Two-Step Nucleation Process ........... 76 2.2 Epitaxial Diamond Growth ................. 001 2.3 Nucleation: A Summary .................. 106 3.0 Growth ................................. 108 3.1 ehT dnomaiD htworG ecafruS .............. 901 3.2 noitaziretcarahC of eht suoesaG htworG tnemnorivnE .......................... 111 3.3 sledoM of eht suoesaG htworG tnemnorivnE ... 911 3.4 sledoM of dnomaiD htworG ................ 521 References .................................. 133
The list of books you might like
