Catalog: Linear Actuator, Precision Motor Actuator, Ceramic Actuator, Ultrasonic Acutatoar Piezo

67 Pages·2007·2.12 MB·English

Linear Actuators for

Precision Motion Control
Solutions featuring Novel Piezoelectric Motors and Classical Motors
www.pi.ws
Precision Linear Actuators Overview
Motion Control with Piezoelectric / Servo / Stepper Motors
PI is the leading manufacturer
of ultra-high-precision actua-
tors for nanopositioning and
micropositioning applications
in industries such as Semi-
conductors; Biotechnology and
Medicine; Lasers, Optics, Micros-
copy; Aerospace Engineering;
PrecisionMachining;Astronomy
and Microsystems Technology.
Section A Section A Section B
NEXACT® Compact Piezo NEXLINE® High-Force Piezo PILine® Ceramic Ultrasonic Piezo
Stepping Motor Actuators Stepping Motor Actuators Motor Actuators
(cid:2) PiezoWalk®Drive (cid:2) PiezoWalk®Drive (cid:2) High-Speed Piezomotors and
(cid:2) Compact Dimensions (cid:2) Non-Magnetic, Vacuum Drives
(cid:2) Forces to 10 N Compatible (cid:2) Velocity to 800 mm/s
(cid:2) <0.1 nm Resolution (cid:2) Forces to 600 N (cid:2) Compact Dimensions
(cid:2) Self-Locking at Rest (cid:2) <0.1 nm Resolution (cid:2) Travel to 150 mm (Basically
(cid:2) Travel to 25 mm (Basically (cid:2) Self-Locking at Rest Unlimited)
Unlimited) (cid:2) Basically Unlimited Travel (cid:2) Forces to 7 N
(cid:2) Velocity to 10 mm/s (cid:2) High Reliability, Long Life (cid:2) Self-Locking at Rest
(cid:2) Non-Magnetic, Vacuum (cid:2) High-Dynamics Mode (cid:2) Resolution to 20 nm
Compatible (cid:2)
Non-Magnetic, Vacuum
Compatible
Section C Section D Section E Section F
Flexure-Guided Piezo Piezo Stack Actuators Motorized Screw Type Actuators Motion Controllers (Examples)
Actuators (cid:2) PICMA®Multilayer and (cid:2) DC & Stepper Motors (cid:2) Controllers for Servo Motors
(cid:2) PICMA®Piezoceramic PICA™ Stack Actuators (cid:2) Forces to 400 N and Stepper Motors
Multilayer Actuators (cid:2) Forces to 100 kN (cid:2) Travel to 50 mm (cid:2) Controllers for Ultrasonic
(cid:2) Sub-Nanometer Resolution (cid:2) Sub-Nanometer Resolution (cid:2) Resolution to 50 nm Linear Motors
(cid:2) Fast Response (Millisecond- (cid:2) Fast Response (to (cid:2) Controllers for NEXACT®
Range) Microsecond-Range) Linear Motors
(cid:2) Excellent Guiding Precision (cid:2) High Reliability and Long (cid:2) Controllers for Piezo Actuators
(cid:2)
Travel to 1.8 mm Lifetime and Flexure Stages
(cid:2)
Travel to 200 µm
Visit www.pi.ws for our
full selection of motion
controllers & software solutions.
1
Piezo • Nano • Positioning
Micropositioning,Nanopositioning,NanoAutomation
Cutting-Edge Solutions for Industry and Research
PI headquarters. PI employs the world's
most experienced R&D and production
teams for nanoPpIo shiteioandinqgu sayrstteemrss
Positioning Technology - Key Technologies Under One
Applications
30 Years Ahead of its Time Roof: A Plus for Our
PI has been a world market lea- Customers Today PI delivers Micro- &
NanoPositioning solutions
der in nanopositioning techno- PI has a strategy of vertical
for all important high-tech
logy and ultra-high-precision integration with all key techno-
markets:
motion-control systems for logies developed and maintai-
many years. The first nanopo- ned in one company. This per- (cid:3) Semiconductors
sitioning systems served re- mits direct control over every (cid:3) Data Storage
search centers working in step from conception to ship-
interferometry and laser tech- ment, optimizing quality and (cid:3) Photonics, Fiber Optics,
nology. Today, entire branches cost. As a customer, you, too, Telecom
of industry – such as the semi- can profit from our over 30 (cid:3) Life Sciences
conductor industry, biotechno- years experience in micro- and
logy and, increasingly, the nanopositioning. (cid:3) Lasers, Optics, Microscopy
machine-tool industry – are de- PI can react quickly to devel- (cid:3) Aerospace Engineering
pendent on progress in nano- opment and production needs
(cid:3) Precision Machining
positioning. of OEM customers – even for
highly complex custom pro- (cid:3) Astronomy
ducts and assemblies.
PI-USAheadquartersinMassachusetts
2
Piezo Stepping Motor Basics
PiezoWalk®Precision Drives – unlimited travel range and based on different versions ity. These properties are typi-
Millimeter Travel, Nanometer still provide the characteristic of the PiezoWalk® principle: cally better for piezo stepping
Resolution, High Forces features of a piezoelectric NEXLINE® and NEXACT®. Both actuators compared to inertia
actuator: an open-loop resolu- provide specific advantages drives or ultrasonic motors.
PiezoWalk® drives break away tion down to 30 picometers and depending on the application. The operation is possible in
from the limitations of conven- a very high stiffness for dynam- two different modes: a high-
tional Nanopositioning actua- ic operation and force genera- PiezoWalk® piezo stepping resolution, high dynamics ana-
tors. They offer a basically tion. PI offers two product lines drives usually consist of sever- log mode within a single step,
al individual piezo actuators and a step mode with virtually
and generate motion through unlimited travel range.
succession of coordinated
clamp / unclamp and shear-
motion cycles (steps). Each
cycle provides only a few
microns of movement, but run-
ning at hundreds of hertz, the
drive achieves continuous
motion in the mm/second
range.
The PiezoWalk®working princi-
Custom PiezoWalk®linear actuator
ple provides high force capabil-
NEXLINE®linear
actuator principle ities, resolution and repeatabil-
Features and Advantages of (cid:2) PiezoWalk®drives are availa-
PiezoWalk®Drives ble for non-magnetic appli-
cations such as super-con-
(cid:2)
Very high resolution, limited ductivity experiments. They
typically only by the sensor. do not create magnetic
In fine-adjustment, analog fields nor are they influen-
mode, resolution of 30 pico- ced by them.
50 picometer steps with a NEXLINE®
(cid:2)
meters has been demonstra- The active parts in drive, measured with external ultra-
ted. PiezoWalk®drives are made high-resolution capacitive sensor.
Thisperformance provides a big safety
(cid:2)
High force generation and of vacuum-compatible cera- margin for next generation nano-
stiffness. NEXLINE®drives mics. The drives also work technology applications
can hold and generate for- in UV-light environments.
(cid:2)
ces to 600 N, NEXACT®to NEXLINE®drives can survive
15N. shock loads of several g
(cid:2)
PiezoWalk®drives hold a during transportation.
(cid:2)
stable position to nanome- PiezoWalk®drives are
ter level in power-off mode. available in three levels
Due to the actuator design, of integration to provide
the maximum clamping flexibility for OEMs: OEM
force is applied at rest. drives, packaged actuators
(cid:2)
Because a position can be and integrated into
held with zero operating vol- complex positioning
tage, leakage currents can- systems such as multi-axis
not affect the integrity of the translation stages or 6-DOF 6-axis parallel-kinematic nanopositioning system (Hexapod) with N-215
based NEXLINE®high-load actuators for use in strong magnetic fields
piezo drive. Hexapods.
A-1
Piezo • Nano • Positioning
Piezo Stepping Motor Basics
NEXLINE®High-Force Drives
for Nanopositioning
NEXLINE® systems are based
on very rugged, high-efficiency
shear and clamping actuators
and incorporate a preloading
mechanism to provide pushing
and holding forces up to 600 N
with high lifetime. The rigid
design with resonant frequen-
cies of hundreds of hertz allows
the construction of very stiff
structures and helps to sup-
press vibration. The analog
operating mode can be used
for dithering and active vibra-
tion cancellation.
N-215 high-load NEXLINE®linear drive
provides holding forces to 600 N and 20 mm travel
Compact NEXACT®Drives for
Moderate Forces
NEXACT® drives use bending
actuators which combine the
feed forward and the clamping
cycles. They provide push/pull
forces to 15 N with maximum
velocities of more than
10 mm/s at low operating volt-
ages of 40 V. The compact and
cost-effective NEXACT® drives
are available with various drive
electronics, ranging from cost-
effective OEM drives for open-
loop operation in stepping
mode to the sophisticated
E-861 servo-controller for high-
resolution, closed-loop linear
NEXLINE®linear actuator principle
translation stages.
A-2
Piezo • Nano • Positioning
N-310 NEXACT® OEM Miniature Linear Motor/Actuator
Compact, High-Speed PiezoWalk® Drive
(cid:2) Self-lockingwhenpowered OrderingInformation
down;noholdingcurrent
N-310.11
(cid:2) Zerobacklash,nowearor NEXACT®OEMlineardrive,
maintenance,nomechani- 20mm,10N
calcomponentslikegears N-310.111
NEXACT®OEMlineardrive,
orleadscrews.
20mm,10N,ShiftedCableExit
(cid:2) Non-MagneticandVacuum
Askaboutcustomdesigns
CompatibleOperatingPrin-
ciple
WorkingPrinciplefor
ApplicationFlexibility
NEXACT®PiezoWalk®technolo- limitations such as backlash
gy overcomes the limitations and wear are eliminated and
of conventional nanoposition- thedriveismaintenance-free.
N-310ActuatorwithE-861Servo-Controller(integrateddriveelectronics) ing drives and combines virtu-
ally unlimited travel ranges Self-LockingPiezoWalk®Piezo
with high stiffness in a very SteppingDrive
(cid:2) 20mmStandardTravelRange,FlexibleChoiceofthe small package. Furthermore, NEXLINE®andNEXACT®exhib-
RunnerLength NEXACT® actuators provide it high stiffness and are self-
(cid:2) CompactandCost-EffectiveDesign piezo-class resolution (far locking even when powered
(cid:2) 0.03nmResolution** below one nanometer) and down due to the clamping
wrelease. (cid:2)(cid:2) TLoow10ONpePruastihn/gPuVlollFtoagrcee mTrehdileulisceesscpotenhcdeiaolrpeedsrparitovinnegsivvdeoenlsteaisggsne. atnhcaetnioonmmoeefctehtrhaepnoipcsiseit.ziooTnahcsitstuaabetiolnitrtysaiialnst
yne (cid:2) SelfLockingatRest,NoHeadDissipation, to45Vandbelow. rest, with no heat dissipation
an NanometerStability orservo-dither.
y8
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outws. With their high resolution, itatestheintegrationintomicro- and drive electronics and are NEXACT® controllers are a-
withw.pi. NEXACT® drives, are ideal for ornanopositioningapplications. scalable. To move the runner vailable in different open-and
geww high-precisionpositioningover overlongerdistancesthestep- closed-loop versions. For
hanat longtravelranges. AdvantagesofPiezoWalk® pingmodeisused,whereasfor example, the E-861 includes a
ubjecttocdownload ApplicationExamples PNiEeXzoLISNtEe®papnindgNDErXivAeCsT®drives dstiespta,ntcheeslinsemaral(laenraltohga)nmoondee ctdroroimvlleeprrlsetwaenitNdhEaXlopAwoC-wTn®eorisfseuerl,vDo2S-4cP-o.bniIt-t
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Gmas (cid:2) SurfaceMeasurement (cid:2) Highdriveforcesfromten In contrast to ordinary DC or lution lower-priced drive elec-
PI)dat Technique newtons(NEXACT®)upto stepper motor drives, the tronics, ranging all the way to
mente(asefor (cid:2) Profilometry severalhundrednewtons PmieoztoioWnaldk®iredcrtivlye,swefiftehcotultintehaer OEMboards,canbeordered.
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A-3
Page references refer to PI's hardcover catalog
Piezo • Nano • Positioning
N-381 piezo stepper linear actuator for sample
positioning and manipulation provides long
travel, high speed and very high resolution
N-310.11,dimensionsinmm
TranslationstagewithN-310NEXACT®drive.
Thepositioneroffers20mmtravelrangewith
N-310.111,dimensionsinmm
anencoderresolutionof25nm
TechnicalData
Model N-310.11,N-310.111 Tolerance
Activeaxes X
Motionandpositioning
Travelrange 20mm
Stepsize(instepmode) 5nmto5µm
Travelrangeinanalogoperation 7µm max.
Open-loopresolution 0.03nm** typ.
Stepfrequency 1.5kHz* max.
Max.speed 10mm/s* max.
Mechanicalproperties
Push/Pullforce(active) 10N max.
Driveproperties
Drivetype NEXACT®lineardrive
Operatingvoltage -10Vto+45V
Miscellaneous
Operatingtemperaturerange 0to50°C
Bodymaterial Stainlesssteel,non-magnetic The N-661 miniature linear stage integrates a PiezoWalk®NEXACT®linear motor
combined with a high-resolution linear encoder. It provides 20 mm travel and
Mass 50g ±5%
resolution down to the nanometer range.
Cablelength 1.5m ±10mm
Connector HDSub-Dconnector
15pin,singlechannel
Recommendedcontroller/driver E-860-series(seep.1-20)
*Dependingonthecontrolelectronics.
**Dependingonthedriveelectronics.1nmwithE-861.
Page references refer to PI's hardcover catalog
Piezo • Nano • Positioning
N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper
High-Resolution PiezoWalk® Linear Actuator with Optional Position Sensor
not important or is controlled
OrderingInformation
N-381piezostepperlinearactuatorforsample by an external loop (video,
positioningandmanipulationprovideslongtravel, laser,quadcell,etc.). N-381.3A
highspeedandveryhighresolution; NEXACTUATOR®LinearActuator,
shownwithE-861NEXACT®Controller 30mm,20nmEncoderResolution
PiezoSteppingDrive—the
Multi-FunctionalPiezoLinear N-381.00
NEXACTUATOR®LinearActuator,
Motor
30mm,Open-Loop
A great advantage characteris-
Availableonrequest
tic of the NEXACT® piezo step-
ping drive is its dual-mode Askaboutcustomdesigns!
operating principle combining
thebestfeaturesofotherpiezo closed-loop motors. Since
motor designs, such as high motionisnotbasedondynam-
resolution,highforceandhigh ic friction as with piezo inertial
speed into one compact unit. drives (stick-slip-motors) but
At the target position the drive solely caused by the nano-
requires no current and gener- meter precise motion of
ates no heat while providing clamped piezo actuators, there
(cid:2) long-term, nanometer stability. is no wear to limit the lifetime.
TravelRange30mm
This autolocking feature also When operated in closed-loop,
(cid:2)
Zero-WearPiezoSteppingDrive,IdealforMicro-and
completely eliminates servo- excellent velocity control is
Nano-Manipulation jitter as it occurs with other achieved.
(cid:2)
IntegratedLinearEncoderOptionforHighestAccuracywith
20nmResolution
ase. (cid:2) VeryHighAcceleration,e.g.forCellPenetration
e
rel (cid:2) TwoOperatingModes:ContinuousSteppingModeand
w
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n ContinuouslyVariable,High-DynamicsAnalogModefor
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a 30pmResolution**
y
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a
dat3.0 ThecompactN-381linearactu- and forces up to 10 N enable
notice.AllR110/06/2 amtoanrsipaurelaitdoersaled.rgiv.efsoranbdiomteiccrho- hfoigrh-dauyntoammaictsioanndttahsrkosu.ghTphuet
outws. nology and nanotechnology PiezoWalk® drive principle
ewithww.pi. atipopnlsi,cavtieoloncsi.tieRsapoidf 1a0ccemlemra/s- afallsotwosscliollnagtiotnrasvoefl7raμnmgeasmapnldi-
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n tude with frequencies up to
haat
cd several 100 Hz. This “analog
ecttownloa ApplicationExamples mode” can be used to provide
ubjdo (cid:2) Driveunitforscanning rapid acceleration, e.g. in cell
2008.Sablefor stage psmenoeottrhatimonotiaopnplfiocartidoynnsa,moicr
KGvail (cid:2) Cellmanipulation, laser tuning or even for active
Co.isa biohandling damping of oscillations. Two
bH&heets (cid:2) Micromanipulation models are available: The
ms N-381.3A model is equipped
PI)Gdata (cid:2) Lifescience with a high-resolution position
mente(asefor (cid:2) Photonics steernsreopr,eaaltlaobwiliintygisnubcl-omsiecdro-lmooep-
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©PThe where the absolute position is N-381dimensionsinmm
Piezo • Nano • Positioning
WorkingPrinciplefor andcanbechosenasrequired. lution, the E-862 (see p. 3-10)
ApplicationFlexibility Tomovetherunneroverlonger lower-priced drive electronics,
NEXACT®PiezoWalk®technolo- distancesthesteppingmodeis canbeordered.
gy overcomes the limitations used, whereas for distances
of conventional nanoposition- smallerthanonestep,theana- The products described in this
ing drives and combines virtu- logmodeenableshigh-dynam- documentareinpartprotected
ally unlimited travel ranges icspositioningwithresolutions bythefollowingpatents:
with high stiffness in a very farbelowonenanometer.
small package. Furthermore, GermanPatentNo.P4408618.0
NEXACT® actuators provide ControllersandDrivers
piezo-class resolution (far OptimizedfortheApplication
belowonenanometer)andmil- NEXACT® actuators require
lisecond responsiveness. The special drive electronics to
special drive design reduces control the complex stepping
the operating voltage to 45 V sequences. The E-861 (see p.1-
andbelow. 20) includes a complete NEX-
ACT®servo-controllerwithlow-
In operation, piezoceramic noise drivers and a powerful
bending elements act on the DSP. It also comes with ample
runner, which is connected to software for easy integration
themovingpartoftheapplica- and highly effective computer Index
tion. The length of the runner control. For applications which
determines the travel range donotrequirethehighestreso-
TechnicalData(Preliminary)
Model N-380Open-Loop N-381Closed-Loop
Activeaxes X X
Motionandpositioning
Travelrange 30mm 30mm
Stepsize(instepmode) 0.1to15μm –
Integratedsensor – Incrementallinearencoder
Sensorresolution – 20nm*
Travelrangeinanalogmode 7μm 7μm
Open-loopresolution 0.03nm** 0.03nm**
Closed-loopresolution – 20nm*
Stepfrequency 0to800Hz –
Max.velocity 10mm/s* 10mm/s*
Mechanicalproperties
Stiffnessinmotiondirection 2.4N/μm 2.4N/μm
Max.push/pullforce(active) 10N 10N
Max.holdingforce(passive) 15N 15N
Lateralforce 10N 10N
Driveproperties
Drivetype NEXACT®lineardrive NEXACT®lineardrive
Operatingvoltage -10Vto+45V -10Vto+45V
Miscellaneous
Operatingtemperaturerange 0to50°C 0to50°C
Material Stainlesssteel/CFRP Stainlesssteel/CFRP
Mass 250g 255g
Cablelength 1.5m 1.5m
Connector 15-pinHD-Sub-Dconnector, 15-pinHD-Sub-Dconnector,
onechannel onechannel
Recommendedcontroller/driver E-860series(seep.1-20) E-861.1A1(seep.1-20)
*WithE-861.Dependingondriveelectronics.
**Dependingonthedriveelectronics.1nmwithE-861.
Piezo • Nano • Positioning
N-111 NEXLINE® OEM Linear Actuator
Nanopositioning Over Long Travel, PiezoWalk® Principle
OneWorkingPrinciple–
OrderingInformation
DifferentOperatingModes
NEXLINE® PiezoWalk® drives N-111.20
NEXLINE®OEMPiezoStepping
N-111compact overcome the limitations of
Actuator,10mm,50N
OEMnanopositioningactuator. conventional nanopositioning
Inprinciplethemovementby
piezostepsallowsaninfinite systems in their combination N-111.2A
NEXLINE®OEMPiezoStepping
travelrange of long travel ranges and high
Actuator,10mm,50N,
resolution and stiffness. The
LinearEncoder,5nmResolution
piezoceramic clamping and
Askaboutcustomdesigns!
shear elements act directly on
a moving runner that is cou-
pled to the moved object.
Whileinfullstepmodetherun- algorithms resulting in very
ner can be moved over larger smooth motion with highly
distances with maximum constant velocity. It can also
velocity, nanostepping mode provide higher speed with
allows uniform motion with maximumforce.
highlyconstantspeed.Inopen-
(cid:2) TravelRange10mm loop operation any position PatentedTechnology
(cid:2) Resolutionto0.025nmOpen-Loop,5nmClosed-Loop resolution may be achieved The products described in this
(cid:2) UpTo50NForceGenerationand70NHoldingForce which only depends on the documentareinpartprotected
(cid:2) SelfLockingatRest,NoHeatGeneration stability of the control signal. bythefollowingpatents:
Analog operation over a dis- GermanPatentNo.10148267
(cid:2) Non-MagneticandVacuum-CompatibleWorkingPrinciple
tance of less than one step USPatentNo.6,800,984
ase. (cid:2) CleanroomCompatible enables high-dynamics posi-
e
rel tioning with resolutions far
w
e belowonenanometer.
n
y
an The innovative N-111 NEX- cision. For closed-loop opera-
by LINE®OEMlinearactuatorsare tionwithoutanadditionalposi- ChoiceofControllers
ed forOptimization
d compactactuatorsfornanopo- tion sensor the N-111.2A is
e
ers sitioning with travel ranges to equippedwithalinearencoder NEXLINE®operationissupport-
p
su 10 mm, high resolution, and that provides 5 nm resolution ed by two motion controller
e
ar generated forces to 50 N. The over the full travel range. In modelsprovidingdifferentfea-
a
dat5.0 operatingprincipleisbasedon open-loop operation position tures. The E-755 controller
All1/1 coordinated motion of a num- resolution down to 25 pico- offers full functionality for
notice.R110/0 banerdosfhehaigrhplyiezporeeloleamdeedntlsinaecatr- mofetaershciagnh-bdeynacahmieicvsedabnyaulosge nTahneomEe-t7e1r2prescuispepplioessitiomnionrge.
outws. ing on a runner. NEXLINE® mode. sophisticated linearization
ewithww.pi. drivesthuscombinelongtrav- Z/tip/tiltplatformwithNEXLINE®drivesandpositionsensors;
gw el ranges with piezo-class pre- NEXLINE®WorkingPrinciple 300mm(12'')diameter,200Nloadcapacity,
n
haat forApplicationFlexibility 1.3mmtravelrange,10mradtiltrange
cd
ecttownloa ApplicationExamples NEXLINE® PiezoWalk® drives
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©PThe application. NEXLINE®linear actuator principle
A-5
Page references refer to PI's hardcover catalog