BSTJ 50: 5. May-June 1971: B.S.T.J. Briefs: A Low-Noise Metal-Semiconductor-Metal (MSM) Microwave Oscillator. (Coleman, D.J. Jr.; Sze, S.M.)

2 MB·English

BS.TJ. BRIBF

A Tow-Nnise Metel-Semiconiductor-
Metal (MBM) Microwave Oscillator

By D. J. COLEMAN, Ji, and 8. M.S7E
(oes eid amuary 2,191)

Lon-nwieo sniomase CN geillarions have Soe obleined from
saetabounieondetoe-tstel (MSA) atrvetures mde Eom 2 1O-p
thin shee af sean sandwiched betmesn two. PES Sehoithy”barrer
eninge BEerowere CW pee op to A 1-W has been obteined
(lls with siciney np te 14 potent, The FM aoise measure | Ms
font the corse 3 228 lB) whieh x wnsiderahly wer shan that of &
soon awalanebeosslk:to, The cehaniene voile fr The mero
‘wave collation are () se exponential inert of the Lees] eexrne
popeltion sn hr iajerion ef tinority’ eariae a the forward-bnsest
fontee! ans fi she trate tie delay o8 Snjeted ecmries teversing
fe depletion regen, By optimising meterc] and device pe rameters it
Ie believe Une higher slfeeuey al high pone meron ose
fea be obi foun ne ISAT nl ie relat stares
evinieene Jostnoie ehasneltis,

cyst r-tyes leon wafers with Taso entity

2, (111) orien, an witha cisloestion density Jess
than 109/esr were Sytorpol-din! on Tn ss to nal thickness
fo IM = 2 yam, Patina 2 SUPA is we puerto onto bat
itr of che mafer and wae sintered te form apotoxinately 1000 A
PSS on both sige, Cunzaia oF 3) A ws cponitd 1m one sid;
Wie wea floxed by #9000 A keyor of Aw eviponatin. The swe
Crownline rte then wade on che othcr sida. A sapdard photo
Iithograpiic mietied a sed to eine cioulan perme of gold
wits avtas uf A MP ene, The ceviees wave sopreseed by tebing
hin] sere wonnlid onea Vege mieromanve oaekases
1696 vu mms sxs0un aucunnesL SOCREAL, WATATESF 1871

ernie dgram of am MSM structure ie skown ing, 18. The
bod ingria at thermal ecb i shown in Pig. 1h for an n-type
semiconductor where gu afd gan ate the bere height for che x0
‘metal semiccncnctr contacte reapectivaly. For che PIS.-Si-PW eras
‘re mentioned previously, far = ay = O85 eV. Figure te shows the
ergy ba isgrm wien « einge smpve, We nv elelron eu
Tent from the Teveme-hinwed capits: tm hale earrent from the
focwatchinwal comiaet

"The meursned TY surasueritioe ah SOO"R an 77°K of a zope
sentative revion e ahown it Pig. 2."The vp iverease jn termi
turerent wills nppled vatage (above 0 vols) x eased by theron

care pee

D
Z
nor

=

co)

ote inyeetum inco tas semitoeivtor ae she desletion layer et the

reverses) contaet reaches Ubtug® the enti dese thieknes
"Thos envieal volts is appmosimately pison by QV Eee, where 8
fhovoping ceneen eZ the suivane tote Taiesnnas aad oy he
Sinlertie permilivily." The eutvent anerete fs no: due fo avadarche
Tnufpheation. as i ayprent fru The muopnizuce of the ertival

vase serine. AL TIP. ee rapid

age al ae native topes
inerense 3 termite) aba surine of shout 0 emp. "This ature
turns is expected fst th thermo enission theory of hoe injec
Tiogs ‘tom the forwaesineed ontae wile a Pole basen belt

(aa) of bone O48
1608 em amu. every mavinat, FORMAT, SY FI

CV microwave perturmunee oF Ue MSM doves we mouse Sn
4s consial Impact aizeit descebed iy D. E. Iglesias® Microneve
Dower was cbuainabe ovee the estve (hat of 4-8 GH. The mex
mn power observed ee SO WV at 49 GH, The maximum efiierey
pprouchod 8 percent. Figure 3 shons some of the rrasurel iieroe
‘Wave power veut euivest nih Emayieney uf wperalin in eee en
ach tunve for thive typica” dhviee! fisted, ‘The voltage infiaced
in parenthesis labeling rach curve the average his vollagy al the
Aiode while eecillating, Beeaure ul the ryrmeny uf the eevee, ib
ould be oprestad rth wither salary af has vallage, ent similar
rests wor ine:

‘The Highest-pomer weil wae tmed for FAL riae hen tuned to 6
Soquaney of LAK GH. The FM sngleslehovd noise moamine | MUL
Som the fetter ftequuey wa Zou te he BN dB at 7 mad bias

H
i
Pig COW soon pl edo! aces this S MSSE devicen ie
anol setenoWANE esen.L 9a 1609

rument, This muist ameasure 42 considerably lower then that of
Miligon irpstt civle ante comparwle iv thar of « GaAs transfer
own osslstor

"The BGR # oe was used so Laid a stable nogaive coueanee
Asset" asplies 2 geteInevbvil case of 200 MH was obtained
for 19AR goin at 8 108 Wiss. Tae sta sigral vole micussce wa
1108,

ihe meshanieme response for the rvieowave oselllacone ere
beliovd ln ef) the rapid inevease of cartier inition proorssexused
Ing the deeresing potential byerer of the forwand-biased neal
sinsonduetor eostact sad 1h mh paren: dy’? rapes angie of the
jocted ougiere iv) sraverss the sericanductor depleun tegion,
Pere Cie hoe, Un tases de tle "his zeus in Vihor
Fiequeney (sino troqusney bs interely propeetinna’ to Lal lower
Site! voltage (hich |» propertioa to 7°). Sine the rain nels
ouree for thermionic easton umssee 4s the shut nie, one woul
‘pect ow irs ancasure, Thief indeed observ) experimentally

Tia lage bares height eo hw abtained for x pay semieondaete,
fon ec sake » eomplenaentivy MSM structure the sane way =
Ataeribed here, Hwy the reverse-iaged mc-zenicomlortor contset

Sess retnle ws 4 Rocking east wall the scechetuvngh wolsge
iS obratned tis nsrivtse ths eraet ean be repli by pen
Turton such av -urmetal stiuelare. By op-un'ing The merit
ppraneterstsoth oe doping peti har heights, pal seieonduetor

Fskness| ane devise geoictry an topalegy.” it as believe thst
Higher efiicney nnd higher power meermave cellitions ean be ob-
talved (rom the MSM and sts eve? sszacturee wih (Im inherent
iors haar teiatie

We erateily acknowledge the exe, aarstanee of A. Taya sho
sabrieated the deives, We wish ko to taanke ATC Trl. for
platinum depict J, Faleren for FAL noise matsurementsy J. M.
Noone fur lear amplier coke wesearemer's, ane IM, Res for
twang heal cues

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