BSTJ 40: 3. May 1961: An AC Bridge for Semiconductor Resistivity Measurements Using a Four-Point Probe. (Logan, M.A.)

14.2 MB·English

An AC Bridge for Semiconductor
Resistivity Measurements Using
a Four-Point Probe

iy MA. LOGAN

ing as Bridge eeu hae Deon dig avasire
‘0 he ni, unig fein (role ae
evant) eves Ve rungs a oe wth on monte He fe
Diss to Soi aki ett a ey rom wate dcaee
find a tain waiters, Tasty

ithe ad ameter sane th

atin! acrry, wt maslanicel prt spaning bing The vote,
Finstation oy the osenatacewracy 3 ths essere
horus we whens tn seu af toy

it ose bitor Ba 3 yr cont

ey aa ath re. Ts foe pet pee ae te perineal
aongrowedi emt

Ite cunentie ‘isa
ivetur eu tenis nore. Mo tls are wate arses
Ing etn ive ona oe ee emu rig
fhe bas

A Teoh ssenaneaesh pode ama aes a oem be le ne
sicily, hei ogra of Ue int sete ad eerie Dh
Scailly ot te meteral fe yanticnae apizatinn nd Ue nesosene
enress paar et= at seine cy en. Thia maniacal 3
Artes tse pens aly hay Tose cei einai
Pest meted fe aang ified aly a ait 4s
heharin neta nmeter cou, eng deter psc ee

fg ineznivntee Surh dicel-eurel aatiae have ety Paes Bat
res, several hic, hile kien so et ae ie 20 orl
880 i na sim ay HOH FORTE, NA aL

(Ax ae mewsting coil bas boom develop for cused of
ecivivty, reining Us print. probe, but lvioa ing ey manimia
ng Uo neg acest toe arr ile in th Zorn de sys
very comport of the new estas iene eyolve ard. grounded,
seeps che tess sjevinune and tae four-ant iche. 3S a ea
Urge, ether eras: vlog ia ewsun. Rather, any cee ao
reed fa av teenie rsieances tgndand webice wally ia weal
Teagired. The rrr om alae Br wd fot doy ut chen aang of te

adsense el
ie mew vctaoal ge esters fe wena’ e to D4 pee seat whe

‘awn Lea evslops etal live bese ea 2-age tae
jase Ie es In elie forse mys oe ie ay ae
Evdocs uot wort eros fv gent epaving whe fons pia pre, bat

fan poowids prselling ter saiy gin quing, 20 “the ret.
Tato igs reed © lly In fe sebtvlty i ris af a eminbnice
Ty. Ale, Leatane i is nig ovsem, she Tale von bn eerven
tanto ard petted crinkle a maul oe ed an? ANG
de gil

‘the prem st Hntzodweea yo Mewion cf a commer de
cywvem Fors: rvsivilyevaleati sCeninsaluro mareral,eee=eul
fivetinns are oak yang fee" needle pint ptt tre urn

ire specs. A ssnstniens seule is apace eqeally the four
Prine slong» straigh oe, Mewsur-ng suri, ia 1200 passed trough
Theta outer patuie care sheeneut pnb, the elgg eld
theselyy be smn they Fn ats called the sok pony

Jd | tl Par
= a eeh
+
se ear TAI FOREHEAD sr

Facts yint Sttio annkoons onteetinn aie fa he
init, the enim vale ot tai is deters iy the point pees
find Ue tsi of the spiel be sow, Te Fi
ion i enivolet forint meio of te reanchae ty
he aur nelle pint nections,

“Tae iknowntesteneesof eichef the post are wbowa at 2, yaa
« svapetivey. Tas magnitude oto end = ean oe compensa for by
flecusing the current suntulling newioe we nl Pig, Teor by wing
fonstanscurant geierarr iste, Ths yay of overt meane she
great tagongh ae poiats 2 ad 1 aan be sotto 4 speeded vale and
fheastid by tscase ths erent ance nga of the agit
stieant

vd

Trae soage devermnation mckse we of x balaning urrangeront a
timate ceo thou pois 2 mal 3 wh thew snsmowen sastaet
tesbraness and g, raSjosine the paenvienecer 2, at she brash
tion i Jona for te contin of to earens through galvanomrte>

ine vaogge nou! iy th sete Poa ih oppor un ety
equ the anne yale ge TAN raunes in high emngh edt

‘oltmeter fy aval he Inlays selhnd som bensvided. Tht” meane
UF the nrsre UNE unchishert Tar allow Her aoe tosses
fr 3 yh he. Sch ollnere-an ysl need one eine
eval we teri br hypes parse power ie evans curses
fhvoy fom she device big mens, One eae grea a be ccraeted
To the seu such as am she auvacivneter sie. Lis is done then
ses

the eurreat supply tamales yn with this zeit sinew pois
Srna 4 would ther fe sed gd ieee ition i the ee
fondctor wuld no long he kyo. Henoe, hating hatte mast be
sued ith perine apetatel siti.

SMathonata savenwte he rela ips involved in a rsivity
etorminis on sig # fv pin Dobe hare bees gen by Valo
Sd Sin ta? ar Fee sea tebe nd ens one epacings,
the expression mtaing Ils mvt’, oment, fy vokagh, Fy aid
point pring, 8 i

+ (as

Conher expresions we dete far wet thas uniter apacng au
procaniy certs of moar boundi tion, all ot which ly acer the
"Bas) fcc, La every wear, The min” FT agpeara eet. Ths
Geleeminaion of she valtege Eller Ilan Uae Ler ewe pita
fred Lp 9 current flow thusizh Fhe iw as pet ean lines
ppratch “ora nh vty hesrniathen, Neither Vor 14 aly
Mantel, but rahe Poe vatis Asin! “aseiie a of Te ean ee
Fe lesbos ofthe ne eu

“The nex brig enn mal she nse of ae zather cha. ae aac

keg Tas hase cheuit sigvlwreand nt interenly aroate
Annee i sive with m ee Filing eee einai
fuamreat through the Gen ena yoiale, the sel specie, aad &

Joie) dees nesses The wl gw 0 good nf Ie 0 voltage
Donte sd pus Theses eisor ae escrito shwce ghrp
Finest, nonpase-revorsng supine argo valle, Ut
twat reverse in pase a cle te tie lor. Ta lea pe
Uiosster ie thon neyo sil the iar. A ptember, hand
i ltr, sl sm metre po dee zation: oe thi

Tino. he servation of she equ ty of (773 et epee Pe
Geel feito aml potentiometer sfing ivr inthe ute

AX sncany of 22 aden i fll

TAL components except tie Four point tube ave epesimen ar
rouned|

2h he vinci in ebly a6 operated.

3, Voliner lena ae m0 “epen gid
1 Those ate meters onl Stequasy eeetive nll deteton
Ae weer Tae TorRABLNE Mo se

= os sex realm

i [uae ce

NOE IE SERSLSS ORS SEE reeves ane

5, Single diteet roading of (V2) from parison dade messi a
polarimeter is postbes
T. The cnreer rover uadork vin nel Soter for deta pbs

ine morn ad ses etl deo
8. Serco false 0 Beye car be applied “or aatomtie measurement
ap vitsui ie indepenient of Srieney
ho meted en stor te olleting atonal fat
10. Teetving point contacts, barrce oventils and eral poten
tink do not fle the fundmeatel ze velaggeeutont ran, ile
ete quiero inthe mean een,
11, Buperinooed He ean He sed for inetemeneal resistin
rents, a to forwand-bie resivingeruteent probe Doi

{Yor an ae aystem the emtenr sappy Eacner av stab, hh
will ernest reese cae ae ge he oun tt
hls 2 wel 3 of Pig, both of whieh ane off ground Tai sgt he
the of «ferent voltmeter, The voltages Fy ane of Figs 8 are
SHO rae amet sary OIE YoU, MY 2o0L

fe volteges 4 geoand, nl ir difresee is she cesirad qwaotity
owevers tn yutage Vs to atvand many Saw aneator hav the
Aliteronee: Ierween 1 we Pes weauee ot ined tha same éfference
nists besten points 3 aad isthe added voltage drep in til
resent peint-oofuet reietanes #0 iy. > Thich volage i fy 100
Ir ina tines greter than (Ws — ¥],ple the op iu the seca
resistor eho ws of part othe voltage Joop eres fg shih wll be
Foun nade eg es (_7sh ay adjstnent, the Reale ei
ininates ever oulings Tee tse volgen ae Furs ip a auler
Fev al wize they tar qu to ann a sere by che prea,
Topas flor nnd wul-etector they el diectly the desins sul

Avother important adyannage 8 tgs emo-cutrent oures ne
liner is news Ai tne unten esnges, st de Cho voltges, and he
brie remain bolted

"Tie sneres of she evil of Fig. depeade upon se high inp i
walince and tetive Tinea of the xolaye amolbare cesigsted as
Py Piamd 2 Us, Conver diltem fal valmoses ually do
Tos ewe eden cabanna-node voltage mappne=ion. Ise, pr
Gaon amplifiers and ¢ wotoge noe eet btve boon adap ising
the feeniace of anal cumple The amplifier royiremate an
Alesis ach eis them wi! Ie prescnted

Tn cern for ae poner sralion ead grouneéng of all components
cexsupt he “one pelt probe nel ter spésimaen, ony the two hte
Deewitin raqurtanes, in eosjunctine Wb the point-nmtar: consi
fom resstanons, 9, dof Fig. 2 eonribuce Ih nner eae

"The int epson of sah nf the putes inline one
notions and ope eid” ie wcll a sqitanes of the order of 1
Ind, Ho rapusanie between rl ie pot and road inured
aon denier qeadnacare ge. "eit ference ts laced ot
uringencl isstnemert by eo te gets aaa, There nemains
fly ind ene exene iz nn nmtiviy reang tell shir ples a
Time ‘on the wes fecuency-resrisiy prelate, a8 il be shot. Bee
fate shitter blow 10 shi asi 2 mesic Lh a

Tacepnin phe aly tes extent, U6 30D sha a ea
sigh sill i fens-pei ms, th tek requency tnt be Toe
fu 8S eye er} fas abe requsee se ues bevel adh

wave salyacr nr sleet, or ll dation Poe ouceval from 500
Fo 10,00 lo ron msisivity the tn pain: poe netbod, wich em
6 wea: Coase Face HONE ROR an

plain cunt eunmtson and 8 eles mans he wed, This Irae
ne laine peer i alton te capsetaner-earens flere, &
vonhonengeou ste, anid the eureanear erent ne Tonge
ran be defied

A desription has for given 3 ghneral temas of 9 semiconductor
brie neia'viiy sneaasing etn. Aeide fom th ostlaor. test
ecimen, en Zour patnt probe, It consists of components bavvng he
12 dren erie anal pole cater not wod

2. HEgh pat impecance preciiem vatage amp rs, th (a) mw
qlee put osstaee ofthe cider o! 5.000 szuhirs sn 5 aie
Tay foe paper iin,

1h A vole ade, sith soustment er xable sem Yalan of 036
soo pe 1

1. high gat ereeive nh detector, which sll fe) sees BM ee
se te fermi eject Iter as toting eae, 2
Pari the prem sad fer save nen sive QS mens

Paling mele otis per il nie cl ace pa
1 ool saree a esata teen iy Hear of he wes
rape lev" paocode eo nak ch part eee
ve. yr om sey, Liss a § por rent eee age be
trate

4 slg ons died enmpen-reitoraswune ete sho in
Figo 1A pray MOMbia KelviaVasiew decae sabmutimeer
ralya a a eatin Som 0 to Lisa porte th a press Sse restor
‘hel. noe the dest Ia eo set ae reiting PS the po
teatiomcter wi wet alr Hie we ng ese

Torte decade resis the nal rep i O01 ohana he ge
A100 finns Wile Ile hop sls steps ume with lowers tty
incor, Pr da olnwin! seniors ie not Sony aesansce, pearly
cause uf eisanee fhe wring Pmuneeting it to che eireait. This
‘rongis “wala Tenney nda celieaton cart cam be mae
veal et ey Thi se ie tie nas ie into 1000 parts 2
Ue doen powationsotee. Kqzal aourges thes obsains for any eee

ees ance decades ae onset npc wt he ay decade,
U2 rie as eva TReRSTOAT AORN, SEF IL

Boe at 7

A comproaton has en op made ee discrete Gone mor sett,
lo otovide tae desl pelle, master, Ror iow ney, i UNM ob
hi the eae eters ual eel 9 TTTT Pane OO
tie were wale Hg gon be dszonnevted

"The msieror desu scrng ex be ses os lous Woe poten ter
a

(a) sretanse diets

(Gay wos ity lively including the tual poits spacing; or
(6) net estviy erty nehing te ctl eat pacing
‘Hhedeterina ni Be oe Law thed ofepenntion ashore He 4

‘The requiereuts for the diflortil vollole> aev eermoed by
hp semicondietar agri se F"Te sve thin an eal el work
ofthe system consisting of the raseral wile ibe four wees poi in
vate 2 pee

Teri to Tig 2, ne rel ws kuow the onder of magnitude of con-
striction resistance, ad 2 Then gu mpc, Uy wll be
Somewhat alike, but we eunnol woe the asp teas they ae
se aioen oases sueaanis wane 0

sven known, ox coal. An mpoctant way i Walch Ihe aesstawrn =
futers ca be sen Hy the lowing

‘her is «voltage crop a> esch eurent probs caused by the ensten
consvivien, cho eoee appeening ce taaugh there ice Msi aera
Sud sa in Big. 2, Silly, there appear ssstaaces Pandy 3 oh
‘ollage hes even $f chore is current ing. The trea 2
ff fies canoe, chowgh evsnpensatea for ae pgard cutest. low hy
us exteme, ituit, renee voltae aeroe sonst he espeeoed by
ie diferente voltzceter, It ell exe be chen thot his y-age drop
o-asound it of thr onder of 0 to JN ice bigass nae the rated
Soltigecilferene hetioer the va neler pues 2a

Taine hes deveusad wu expresion for te couseetion restores
Senet mace eons, ene 0 them Mile phic, ae

vas, (2) ote

R

scot in ober a ghee ssa eter

= voreme:Zooefgn

LExpssimertally i ats en Sooner urdgoos ony sas
sotormation hefore tsezuring. Ly the 111 plane the Heche gent
nbene 9D Xe gras amen peeve eld serength cee for ona,
the probs point mavovic, hse boon decent they ee estimated
{ove ne stamens Hw ni ut 1910! gems
‘eh “ator igs hawt te le? le ray he ese eo

fol the oon avd gett Thy eck rae ea here 28 pane
then

ths rato wil ange inversely asthe square rt of the apped evataet
"This thease ss Va aerate, is ine

fue the iy Turi, a ecco il Salad

tffece rie ll aes t Sica sh feta tesaion a else Lo
tr muh see TRrAsaeAL JOUEMAL, MAY Im

inureinee “noe toe savant, as, we ee sha a pine
reatealens network wil Ses ys Fig. 5 Rot a wanted volte of
five mivel, Heere well Be sole Lo ground es roe ifece nt
‘lieve inp of fam O22 to Vent AM wrt spnssang ae val,

by obe par in = rion, san cause =p to 8 O1 per en enor in the
rnewuremenl. TW teiterisnt apes marlon tie realy a
che muster “bettie AOL 9F 10800 shes ou aa fous
poirt pie Ss employed, beauise abot cur ail il elways be

Seeded for Hy wanes egal, Lis wl nce late shan thermal
vo Tniagn any enideed

“Throng of a9 Eset equine ie cally eee. Te FR,
lupt Pig 2 ance nero eating co aoe. The Vand Vs inp

Teed ae eonnceUgtlarc 2 alts ae. Thes hus have eli
Plzagne wo gral ata se valle diforence, Pe Hist: ven,
Shere meshes th aon oe sary anya ine te a de
tector, This muppterion $e a up 29 a ens jess af ae adex

lew-rsidanes ptoucianeter called she reeiaaven erm balance. ‘hen
the ovation wal is dseteised antl ete vollegr 2x ne ontput
rsa sll a ot hs bal vie in pode
Convenor yang thie bedgo laren sed tating foe inet. Ixpue

1g. $— lee laf rary sa inp ia lle