Bay yard-Alpe ert Hot Io n Gauge

80 Pages·2016·1.69 MB·English

Bayyard-Alpeert Hot Ion Gauge
BAGG302

Opeerating Manual

Incl. EU Declaration of Conformity

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Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.

Validity
This document applies to products with part numbers:
352-050 (DN 16 ISO-KF)
352-051 (DN 25 ISO-KF)
352-052 (DN 40 ISO-KF)
352-053 (DN 16 CF-R)
352-054 (DN 40 CF-R)
352-055 (3/4" tube)
352-056 (8 VCR female)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with vacuum connection
DN 25 ISO-KF. They apply to the other products by analogy.
We reserve the right to make technical changes without prior
notice.

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Important UUser Informaation
There are operrational characteriistic differences beetween solid
state equipmennt and electromecchanical equipmennt. Because of
these differencces, and because there are a varietyy of uses for
solid state equipment, all personns that apply this eequipment must
take every preccaution and satisffy themselves thatt the intended
application of this equipment is ssafe and used in aan acceptable
manner.
In no event willl INFICON be responsible or liable for indirect or
consequential damages that ressult from the use oor application of
this equipmentt.
Any examples or diagrams included in this manuaal are provided
solely for illustrrative purposes. BBecause of the maany variables
and requirements imposed on any particular instaallation,
INFICON cannnot assume responnsibility or liability for any actual
use based on tthe examples and diagrams.
No patent liability is assumed byy INFICON with reespect to use of
information circcuits, equipment, or software described in this
manual.
Throughout this manual we use notes, notices and apply inter-
nationally recognized symbols aand safety messagges to make
you aware of ssafety consideratioons.

Identifies informmation about pracctices or circumstaances that can
cause electricaal or physical hazaards which, if preccautions are not
taken, could reesult in death or seerious injury, property damage,
or economic looss.

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CAAUTION

Identifies informmation about pracctices or circumstaances that can
cause electricaal or physical hazaards which, if preccautions are not
taken, could reesult in minor or mmoderate injury, prooperty damage,
or economic looss.

NOOTICE

Identifies informmation that is criticcal for successful application and
understanding of the product.

SSHOCK HAAZARD

Labels may bee located on or inside the device to aalert people
that dangerouss voltages may bee present.

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General Safety Instructions
• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
• Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.

Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.)
on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. Pirani filament), are not covered by the
warranty.

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Contents
Product Identification 2
Validity 2
Important User Information 3
General Safety Instructions 5
Liability and Warranty 5
1 Introduction / General Information 8
1.1 Description 8
1.2 Specifications 9
1.3 Dimensions 11
1.4 Options & Accessories 12
2 Important Safety Information 13
2.1 Safety Precautions - General 13
2.2 Safety Precautions - Service and Operation 14
2.3 Electrical Conditions 16
2.3.1 Proper Equipment Grounding 17
2.3.2 Electrical Interface and Control 17
2.4 Overpressure and use with hazardous gases 18
2.5 Gases other than Nitrogen / air 19
3 Installation 20
3.1 Mechanical Installation 20
3.2 Electrical Installation 21
3.2.1 Grounding 21
3.2.2 Electrical Connections 21
4 Bakeout 27
5 Setup and Operation 28
5.1 Applying power 28
5.2 Emission Current 28
5.3 Overpressure shut down 29
5.4 Degas 30
5.5 Filament Material Selection / Venting the Chamber 30
5.6 User Interface Basics 32
5.7 Factory-Set Default Parameters 33
5.8 Programming 35
5.8.1 SETUP DISP 36
5.8.2 SETUP UNIT 38
5.8.3 SETUP IG 42
5.8.4 SETUP COMMS 45
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5.8.5 SERVICE MENU 46
5.9 Activating the Sensor 47
6 Using the gauge with different gases 49
7 Analog Output 51
8 RS485 serial communications 53
8.1 Device Specific Serial Communication Info 53
8.2 RS485 Command Protocol Summary 55
9 Service 60
9.1 Calibration 60
9.2 Troubleshooting 61
9.3 Troubleshooting - Error Messages 63
9.4 Troubleshooting - Filaments F1 or F2 Open 65
9.5 R & D (Research) Diagnostic Display 65
9.6 Maintenance 70
9.7 Contamination 70
9.8 Sensor Replacement 71
10 Spare Parts 73
11 Factory Service and Support 73
12 Returning the Product 74
13 Disposal 74
EU Declaration of Conformity 76

For cross-references within this document, the symbol (→  XY)
is used.

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1 Introduction / General Information

1.1 Description
A hot cathode ionization gauge (IG) measures vacuum pressure
by ionizing gas atoms and molecules inside the vacuum region
of the gauge transducer and measuring the quantity of ions pro-
duced. The measurement of the resulting ion current is directly
proportional to the density of gas inside the gauge transducer
therefore proportional to the pressure. As pressure inside the
vacuum system drops, there are fewer ions created and there-
fore ion current measured is lower translating to a lower pres-
sure reading.
The INFICON BAG302 Bayard-Alpert Hot Ion Gauge provides
the basic signal conditioning required to turn a hot cathode ioni-
zation vacuum gauge into a complete measuring instrument. The
module provides a log-linear analog output, RS485 serial com-
munications, and one setpoint relay. In addition, a built-in display
provides a convenient user interface for setup and operation of
the vacuum gauge. The measurement range for the BAG302 hot
cathode ionization gauge is 1×10-9 to 5×10-2 Torr.

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1.2 Specifications

Measurement range 1.3×10-9 … 6.7×10-2 mbar
1×10-9 … 5×10-2 Torr
1.3×10-7 Pa … 6.7 Pa
Accuracy - N (typical)
2
1.3×10-8 … 6.7×10-2 mbar ±15% of reading
1×10-8 … 5×10-2 Torr ±15% of reading
Repeatability - (typical) ±5% of reading

Sensitivity factory pre-set. Also user adjusta-
ble between 2 to 99 using the dis-
play
X-ray limit <6.7×10-10 mbar
<5×10-10 Torr
<6.7×10-8 Pa
Emission current 100 µA, 4 mA, or automatic
switching between 100 µA and
4 mA
Degas 3 W, electron bombardment
Overpressure protection gauge turns off at factory default
setting of 5×10-2 Torr

Display OLED graphical display, 3 digits
plus 2 digits exponent, user-
selectable Torr, mbar, or Pa

Materials exposed to vacuum
Dual filaments yttria coated iridium tungsten
Ion collector tungsten
Grid tantalum
Others 316/304 SS, glass, nickel
Housing (electronics) aluminum extrusion

Internal volume 16.4 cm3 (1.0 in3)
Weight 0.27 kg (0.6 lb)

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Permissible temperature
Operating 0 … +40 °C
Storage –40 … +70 °C
Bakeout temperature 200 °C (sensor only - electronics
removed)

Relative humidity 0 … 95%, non-condensing
Use
Operating altitude up to 8200 ft. (2500 m)
Storage altitude up to 41000 ft. (12500 m)
Mounting orientation any

Output signal (measurement signal)
Log-linear 0 … 9 V (dc), 1 V/decade

Serial communications RS485 - ASCII protocol
Command interval ≥50 ms

Setpoint relay one single-pole, double-throw
(SPDT), 1 A at 30 V (dc) resis-
tive, or V (ac) non-inductive

Status outputs degas & filament on/off status are
determined by display messages,
via open collector transistor or
RS485 communication

Input signal degas and filament on/off & emis-
sion current are set by continuity
to ground using digital inputs,
RS485 or manually using front
panel push buttons

Filament selection filament 1 or 2 selectable via front
panel push buttons or RS485
commands

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