Advanced piezoelectric materials : science and technology

748 Pages·2010·36.645 MB·English

by  Kenji Uchino

Ultrasonic transducers
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© Woodhead Publishing Limited, 2012
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Advanced piezoelectric materials: science and technology
(ISBN 978-1-84569-534-7)
Piezoelectric materials produce electric charges on their surfaces as a consequence of
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ii
© Woodhead Publishing Limited, 2012
Woodhead Publishing Series in Electronic and Optical Materials:
Number 29
Ultrasonic transducers
Materials and design for sensors,
actuators and medical applications
Edited by
K. Nakamura
iii
© Woodhead Publishing Limited, 2012
Published by Woodhead Publishing Limited,
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First published 2012, Woodhead Publishing Limited
© Woodhead Publishing Limited, 2012; except Chapter 13 © Government of Canada, 2012
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ISSN 2050-151X Woodhead Publishing Series in Electronic and Optical Materials (online)
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© Woodhead Publishing Limited, 2012
Contents
Contributor contact details xiii
Woodhead Publishing Series in Electronic and Optical Materials xvii
Preface xxi
Part I Materials and design of ultrasonic transducers 1
1 Piezoelectricity and basic configurations for
piezoelectric ultrasonic transducers 3
S. COCHRAN, University of Dundee, UK
1.1 Introduction 3
1.2 The piezoelectric effect 4
1.3 Piezoelectric materials 13
1.4 Piezoelectric transducers 20
1.5 Summary, future trends and sources of further information 31
1.6 References 33
2 Electromagnetic acoustic transducers 36
G. HÜBSCHEN, Fraunhofer Institute for Non-Destructive
Testing (IZFP), Germany
2.1 Introduction 36
2.2 Physical principles 36
2.3 Lorentz-force-type transducers 41
2.4 Magnetostriction-type transducers 60
2.5 Conclusion 66
2.6 References 66
3 Piezoelectric ceramics for transducers 70
K. UCHINO, The Pennsylvania State University, USA and
Office of Naval Research – Global, Japan
3.1 The history of piezoelectrics 70
3.2 Piezoelectric materials: present status 88
3.3 References 114
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© Woodhead Publishing Limited, 2012
vi Contents
4 Thin-film PZT-based transducers 117
M. K. KUROSAWA, Tokyo Institute of Technology, Japan
4.1 Introduction 117
4.2 PZT deposition using the hydrothermal process 118
4.3 Applications using the bending and longitudinal vibration
of the d effect 127
31
4.4 Thickness-mode vibration, d 140
33
4.5 Epitaxial film 150
4.6 Conclusions 151
4.7 References 151
5 High-Curie-temperature piezoelectric single crystals
of the Pb(In Nb )O –Pb(Mg Nb )O –PbTiO
1/2 1/2 3 1/3 2/3 3 3
ternary system 154
Y. YAMASHITA, Toshiba Research Consulting Corporation, Japan
and Y. HOSONO, Toshiba Corporation, Japan
5.1 Introduction 154
5.2 PIMNT ceramics 157
5.3 PIMNT single crystals grown by the flux method 163
5.4 PIMNT single crystals grown by the Bridgman
method 165
5. 5 Recent research into PIMNT single crystals and their
applications 175
5.6 Future prospects and tasks 177
5.7 Conclusions 179
5.8 References 180
Part II Modelling and characterisation of ultrasonic
transducers 185
6 Modelling ultrasonic-transducer performance:
one-dimensional models 187
S. COCHRAN and C. E. M. DÉMORÉ, University of
Dundee, UK and C. R. P. COURTNEY, University of
Bristol, UK
6.1 Introduction 187
6.2 Transducer performance expressed through the
wave equation 188
6.3 Equivalent electrical circuit models 195
6.4 The linear systems model 202
6.5 Examples 205
6.6 Summary, future trends and sources of further
information 216
6.7 References 218
© Woodhead Publishing Limited, 2012
Contents vii
7 The boundary-element method applied to
micro-acoustic devices: zooming into the
near field 220
A. BAGHAI-WADJI, RMIT University, Australia
7.1 Introduction 220
7.2 The acoustic wave equation: shear horizontal vibrations 221
7.3 Construction of infinite-domain Green’s functions 224
7.4 Near-field analysis 239
7.5 Normalization of the field variables 249
7.6 Determining the asymptotic expansion terms for η → 0 250
7.7 Future trends 258
7.8 Key references for further reading 260
7.9 Acknowledgements 261
7.10 References 261
8 Electrical evaluation of piezoelectric transducers 264
K. NAKAMURA, Tokyo Institute of Technology, Japan
8.1 Introduction 264
8.2 Equivalent electrical circuit 265
8.3 Electrical measurements 267
8.4 Characterization of piezoelectric transducers under
high-power operation 271
8.5 Load test 274
8.6 Summary 275
8.7 References 276
9 Laser Doppler vibrometry for measuring vibration
in ultrasonic transducers 277
M. JOHANSMANN and G. WIRTH, Polytec GmbH, Germany
9.1 Introduction 277
9.2 Laser Doppler vibrometry for non-contact vibration
measurements 278
9.3 Characterization of ultrasonic transducers and
optimization of ultrasonic tools 286
9.4 Enhanced LDV designs for special measurements 303
9.5 Conclusion and summary 312
9.6 References 312
10 Optical visualization of acoustic fields: the schlieren
technique, the Fresnel method and the photoelastic
method applied to ultrasonic transducers 314
K. YAMAMOTO, Kansai University, Japan
10.1 Introduction 314
© Woodhead Publishing Limited, 2012
viii Contents
10.2 Schlieren visualization technique 314
10.3 Fresnel visualization method 320
10.4 Photoelastic visualization method 323
10.5 References 327
Part III Applications of ultrasonic transducers 329
11 Surface acoustic wave (SAW) devices 331
K. HASHIMOTO, Chiba University, Japan
11.1 Introduction 331
11.2 Interdigital transducers (IDTs) 332
11.3 Transversal SAW filter 351
11.4 SAW resonators 362
11.5 Conclusions 371
11.6 References 371
12 Airborne ultrasound transducers 374
D. A. HUTCHINS, University of Warwick, UK and A. NEILD,
Monash University, Australia
12.1 Introduction 374
12.2 Basic design principles 375
12.3 Transducer designs for use in air 381
12.4 Radiated fields in air 385
12.5 Applications 392
12.6 Future trends 402
12.7 Sources of further information and advice 403
12.8 Acknowledgements 403
12.9 References 404
13 Transducers for non-destructive evaluation at
high temperatures 408
M. KOBAYASHI and C.-K. JEN, Industrial Materials
Institute, Canada
13.1 Transducers for non-destructive evaluation at high
temperatures 408
13.2 Sol-gel composite ultrasonic transducers 411
13.3 Structural-health monitoring demonstration 422
13.4 Process-monitoring demonstration 433
13.5 Conclusions 440
13.6 Sources of further information 441
13.7 References 441
© Woodhead Publishing Limited, 2012
Contents ix
14 Analysis and synthesis of frequency-diverse
ultrasonic flaw-detection systems using order
statistics and neural network processors 444
J. SANIIE and E. ORUKLU, Illinois Institute of Technology, USA
14.1 Introduction 444
14.2 Ultrasonic flaw-detection techniques 445
14.3 Neural network detection processor 456
14.4 Flaw-detection performance evaluation 460
14.5 System-on-a-chip implementation – a case study 465
14.6 Future trends 472
14.7 Conclusions 473
14.8 Further information 474
14.9 References 474
15 Power ultrasonics: new technologies and applications
for fluid processing 476
J. A. GALLEGO-JUÁREZ, Spanish National Research Council
(CSIC), Spain
15.1 Introduction 476
15.2 New power ultrasonic technologies for fluids and
multiphase media 478
15.3 Application of the new power ultrasonic technology
to processing 490
15.4 Conclusions 513
15.5 Acknowledgements 514
15.6 References 514
16 Nonlinear acoustics and its application to
biomedical ultrasonics 517
P. A. LEWIN, Drexel University, USA and A. NOWICKI,
Polish Academy of Sciences, Poland
16.1 Introduction 517
16.2 Basic aspects of nonlinear acoustic wave propagation
and associated phenomena 518
16.3 Measurements of and advances in the determination of B/A 519
16.4 Advances in tissue harmonic imaging 523
16.5 Nonlinear acoustics in ultrasound metrology 531
16.6 Nonlinear wave propagation in hydrophone probe
calibration 534
16.7 Nonlinear acoustics in therapeutic applications 538
16.8 Conclusions 539
16.9 Acknowledgements 540
16.10 References 540
© Woodhead Publishing Limited, 2012
x Contents
17 Therapeutic ultrasound with an emphasis on
applications to the brain 545
P. D. MOURAD, University of Washington, USA
17.1 Introduction and summary 545
17.2 Fundamentals of propagation and absorption of ultrasound 547
17.3 Acoustic attenuation as absorption plus scattering 548
17.4 Physical and chemical processes engendered by
medical ultrasound 549
17.5 Bubble formation and growth 551
17.6 Inertial cavitation and associated material stresses 554
17.7 Mechanical index 554
17.8 Diagnostic ultrasound 555
17.9 Therapeutic ultrasound 560
17.10 Ultrasound-facilitated delivery of drugs and antibodies
into the brain 563
17.11 Neuromodulation by ultrasound 566
17.12 Conclusion 567
17.13 References 568
18 Microscale ultrasonic sensors and actuators 572
A. RAMKUMAR and A. LAL, Cornell University, USA
18.1 Introduction: ultrasonic horn actuators 572
18.2 Advantages of silicon-based technology 574
18.3 Silicon ultrasonic horns 580
18.4 Sensor integration and fabrication of silicon horns 584
18.5 Planar electrode characterization 586
18.6 Piezoresistive strain gauges 592
18.7 Applications: tissue penetration force reduction 597
18.8 Applications: cardiac electrophysiological measurement 602
18.9 Applications: microscale tissue metrology in testicular
sperm extraction (TESE) surgery 606
18.10 Conclusions 614
18.11 References 615
19 Piezoelectric and fibre-optic hydrophones 619
A. HURRELL, Precision Acoustics Ltd, UK and P. BEARD,
University College London, UK
19.1 Introduction 619
19.2 General hydrophone considerations 620
19.3 Piezoelectric hydrophones 626
19.4 Fibre-optic hydrophones 641
19.5 Summary 671
19.6 References 673
© Woodhead Publishing Limited, 2012