Laser growth and processing of photonic devices

485 Pages·2012·49.201 MB·English

by  Nikolaos A. Vainos

Laser growth and processing of
photonic devices
© Woodhead Publishing Limited, 2012
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© Woodhead Publishing Limited, 2012
Woodhead Publishing Series in Electronic and Optical Materials:
Number 27
Laser growth and
processing of
photonic devices
Edited by
Nikolaos A. Vainos
Oxford Cambridge Philadelphia New Delhi
© Woodhead Publishing Limited, 2012
Published by Woodhead Publishing Limited,
80 High Street, Sawston, Cambridge CB22 3HJ, UK
www.woodheadpublishing.com
www.woodheadpublishingonline.com
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Library of Congress Control Number: 2012939793
ISBN 978-1-84569-936-9 (print)
ISBN 978-0-85709-622-7 (online)
ISSN 2050-1501 Woodhead Publishing Series in Electronic and Optical Materials (print)
ISSN 2050-151X Woodhead Publishing Series in Electronic and Optical Materials (online)

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© Woodhead Publishing Limited, 2012
Contents
Contributor contact details xi
Woodhead Publishing Series in Electronic and
Optical Materials xvii
Preface xxi
1 Laser growth and processing of photonic
structures: an overview of fundamentals,
interaction phenomena and operations 1
N. A. VAINOS, University of Patras, Greece and National
Hellenic Research Foundation, Greece
1.1 Laser processing concepts and processes:
an introduction 1
1.2 Laser radiation, propagation and delivery 5
1.3 Summary of the interactions of laser radiation with
condensed matter 14
1.4 Radiation absorption and energy transfer 16
1.5 Materials processing phenomena: appraisal of energy
dependencies 20
1.6 Laser-based materials processing for photonics 23
1.7 Specifi c laser processing schemes for
photonics applications 33
1.8 A suite of emerging concepts driving future trends 47
1.9 Acknowledgements 49
1.10 References 50
Part I Laser-induced growth of materials and surface structures 53
2 Emerging pulsed laser deposition techniques 55
R. W. EASON, T. C. MAY-SMITH, K. SLOYAN, R. GAZIA,
M. DARBY and A. SPOSITO, University of Southampton, UK
v
© Woodhead Publishing Limited, 2012
vi Contents
2.1 Current state-of-the-art in pulsed laser deposition (PLD) 55
2.2 Problems for growth of thick fi lms and designer
refractive index profi les 58
2.3 Multi-beam PLD 63
2.4 Use of three different targets: combinatorial growth 78
2.5 Future work in complex PLD geometries 81
2.6 Conclusions 82
2.7 Acknowledgements 83
2.8 References 83
3 The formation of nanocones on the surface of
semiconductors by laser-induced self-assembly 85
A. MEDVID’, Riga Technical University, Latvia and Institute
of Semiconductor Physics of NAS Ukraine, Ukraine
3.1 Introduction 85
3.2 Experiments and discussion 88
3.3 Two-stage mechanism of nanocones formation
in semiconductors 100
3.4 Applications in nanoelectronics and optoelectronics 102
3.5 Conclusions 109
3.6 Acknowledgements 109
3.7 References 109
4 Fabrication of periodic photonic microstructures
by the interference of ultrashort pulse laser beams 113
Q-Z. ZHAO, Shanghai Institute of Optics and
Fine Mechanics, CAS, China
4.1 Review of periodic photonic devices induced by the
interference of ultrashort pulse laser beams 113
4.2 Theoretical aspects of the interference of ultrashort
pulse laser beams 114
4.3 Microstructures induced by the interference of two
femtosecond laser beams 120
4.4 Microstructures induced by the interference of multiple
femtosecond laser beams 123
4.5 Transfer of periodic microstructures by the
interference of femtosecond laser beams 129
4.6 Conclusions and future trends 132
4.7 Sources of further information and advice 133
4.8 References 134
© Woodhead Publishing Limited, 2012
Contents vii
Part II Laser-induced three-dimensional micro- and
nano-structuring 137
5 Multiphoton lithography, processing and
fabrication of photonic structures 139
J. FOURKAS, University of Maryland, USA
5.1 Introduction to multiphoton lithography 139
5.2 Principles of multiphoton absorption and lithography 140
5.3 Materials for multiphoton lithography 144
5.4 Applications of multiphoton lithography in photonics 151
5.5 Future prospects for multiphoton lithography in photonics 155
5.6 References 156
6 Laser-based micro- and nano-fabrication of
photonic structures 162
V. SCHMIDT, Joanneum Research, Austria
6.1 Introduction and motivation 162
6.2 Fabrication of 2D and 3D photonic micro-structures 163
6.3 Laser lithography for the fabrication of photonic structures 172
6.4 Laser lithography based on one-, two- or multiple-
photon absorption 184
6.5 Material modifi cation aspects 198
6.6 Device design, fabrication and applications 203
6.7 Conclusions and future trends 221
6.8 References 223
7 Laser-induced soft matter organization and
microstructuring of photonic materials 238
L. ATHANASEKOS, University of Patras, Greece and National
Hellenic Research Foundation, Greece, S. PISPAS, National
Hellenic Research Foundation, Greece and N. A. VAINOS,
University of Patras, Greece and National Hellenic Research
Foundation, Greece
7.1 Introduction 238
7.2 The origin of radiation forces 239
7.3 Organization of entangled polymers and hybrids
by laser radiation 242
7.4 Organization and microfabrication by radiation
forces: an emerging technology 246
7.5 Conclusions and future prospects 264
© Woodhead Publishing Limited, 2012
viii Contents
7.6 Acknowledgments 264
7.7 References 265
7.8 Appendix 266
8 Laser-assisted polymer joining methods
for photonic devices 269
C. H. WANG, Heriot-Watt University, UK
8.1 Introduction 269
8.2 Properties of benzocyclobutene (BCB) polymers
for photonic applications 270
8.3 BCB as a planarization material for fabrication of
semiconductor photonic devices 271
8.4 Laser-assisted polymer bonding for assembly of
photonic and microelectromechanical systems
(MEMS) devices 272
8.5 Laser microwelding for assembly of periodic
photonic structures 280
8.6 Conclusions 283
8.7 References 283
Part III Laser fabrication and manipulation of photonic
structures and devices 285
9 Laser seeding and thermal processing of glass with
nanoscale resolution 287
J. CANNING, University of Sydney, Australia and
S. BANDYOPADHYAY, Central Glass and Ceramic
Research Institute (CGCRI), India
9.1 Introduction 287
9.2 The regeneration process 289
9.3 Estimating the retention of nanoscale information
in regenerated grating structures 296
9.4 Conclusions 301
9.5 Acknowledgements 303
9.6 References 303
10 Femtosecond-laser-induced refractive index
modifi cations for photonic device processing 305
M. AMS, D. J. LITTLE and M. J. WITHFORD, Macquarie
University, Australia
© Woodhead Publishing Limited, 2012
Contents ix
10.1 Introduction 305
10.2 Ultrafast laser interactions with dielectric materials 307
10.3 Refractive index modifi cation mechanisms 312
10.4 Photonic device processing 316
10.5 Photonic devices 322
10.6 Conclusions 328
10.7 References 329
11 Thermal writing of photonic devices in glass and
polymers by femtosecond lasers 333
S. M. EATON, Istituto di Fotonica e Nanotecnologie
(IFN)-CNR, Italy, G. CERULLO, Politecnico di Milano,
Italy and R. OSELLAME, Istituto di Fotonica e
Nanotecnologie (IFN)-CNR, Italy
11.1 Introduction 333
11.2 Femtosecond laser–material interaction in
waveguide writing 334
11.3 Femtosecond laser waveguide writing in glasses 343
11.4 Waveguide writing in polymers 362
11.5 Conclusions 365
11.6 Future trends 366
11.7 Sources of further information and advice 367
11.8 References 368
12 Laser processing of optical fi bers: new
photosensitivity fi ndings, refractive index
engineering and surface structuring 374
S. PISSADAKIS, Foundation for Research and Technology –
Hellas (FORTH), Institute of Electronic Structure and
Laser (IESL), Greece
12.1 Introduction and historical overview 374
12.2 Glass photosensitivity using laser beams 378
12.3 Correlation of underlying photosensitivity
mechanisms with refractive index changes 379
12.4 Types of photosensitivity in optical fi bers 383
12.5 Grating fabrication in standard, germanosilicate
optical fi bers 389
12.6 Grating fabrication in standard, all-silica
optical fi bers 403
12.7 Grating fabrication in phosphate and fl uoride
glass fi bers 406
© Woodhead Publishing Limited, 2012
x Contents
12.8 Microstructured optical fi ber (MOF) gratings 413
12.9 Laser machining of optical fi bers 424
12.10 Future trends and prospects 432
12.11 Conclusions 435
12.12 Acknowledgments 436
12.13 References 436
Index 453
© Woodhead Publishing Limited, 2012